An AOI inspection device
By designing an adjustable-height second track and fixture mounting assembly in the AOI inspection equipment, the problem of the equipment being only applicable to a single substrate specification is solved, achieving applicability to multiple substrate specifications and improving the versatility and flexibility of the equipment.
CN122306806APending Publication Date: 2026-06-30NODING INTELLIGENCE
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- NODING INTELLIGENCE
- Filing Date
- 2026-04-03
- Publication Date
- 2026-06-30
AI Technical Summary
Technical Problem
The existing AOI inspection equipment has a fixed substrate conveying mechanism structure, which is only suitable for substrates of one specification, resulting in poor versatility.
Method used
A substrate conveying mechanism is designed, including an adjustable-height second track and an adjustable-height fixture mounting assembly. By adjusting the height of the second track and the fixture mounting assembly, the device can be adapted to convey substrates of various sizes.
Benefits of technology
This improves the versatility of AOI inspection equipment, enabling it to be applied to substrates of different specifications, thus enhancing the equipment's applicability and flexibility.
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Smart Images
Figure CN122306806A_ABST
Abstract
This invention relates to the field of semiconductor equipment and discloses an AOI (Automated Optical Inspection) device, including a loading mechanism, a substrate conveying mechanism, and an inspection mechanism. The loading mechanism is located beside the substrate conveying mechanism and is used to supply substrates to the substrate conveying mechanism. The substrate conveying mechanism includes a first track, a second track, and a fixture mounting assembly. The first track and the second track are arranged parallel to each other and spaced apart. The first track has a first transfer groove on the side facing the second track, and the second track has a second transfer groove on the side facing the first track. The first transfer groove and the second transfer groove are respectively used to support the opposite ends of the substrate. The height of the second track is adjustable. The fixture mounting assembly is located between the first track and the second track and is used to connect a support fixture. The height of the fixture mounting assembly is adjustable. The inspection mechanism is located above the substrate conveying mechanism and is used to inspect the substrates on the support fixture. Based on the above structure, the AOI inspection device of this application has good versatility.
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