Uniform polishing process and equipment for large-size optical flat plate

By pre-correcting the polishing pad, controlling the zoned pressure, and polishing with a composite motion trajectory, the problem of poor surface uniformity of large-diameter optical flats was solved, achieving high-precision, uniform, and consistent optical flat processing and improving the yield rate.

CN122353369APending Publication Date: 2026-07-10ZHONGSHAN GUANGDA OPTICAL INSTR CO LTD
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Patent Information

Application Number
CN202610748014.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-05-28
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

In existing large-aperture optical flat plate polishing processes, uneven wear of the polishing pad and uneven distribution of the polishing fluid lead to inconsistent material removal rates on the optical flat plate surface and poor surface shape consistency, which cannot meet the high performance requirements of military, scientific research, and high-end imaging equipment.

Method used

By pre-correcting the polishing pad, controlling the pressure in the center and edge areas, supplying polishing fluid with a multi-point uniform spray method, and moving the polishing disk with a composite motion trajectory, the polishing parameters are dynamically adjusted in conjunction with real-time surface shape error to achieve uniform polishing of the optical flat plate.

Benefits of technology

It improves the surface accuracy and uniformity of large-size optical flat panels, reduces edge collapse depth, and significantly improves the consistency and yield of mass production, meeting the needs of high-precision industrial and military equipment.

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Abstract

The invention discloses a uniform polishing process and equipment for a large-size optical flat plate. The uniform polishing process for the large-size optical flat plate comprises the following steps: pre-correcting a polishing pad; dividing the surface of the optical flat plate into a central area and an edge area, and performing zoning pressure control on the central area and the edge area; a polishing solution is supplied to the surface of the optical flat plate in a multi-point uniform spraying mode; the polishing disc moves along the compound motion trail to polish the optical flat plate; and the real-time surface shape error of the optical flat plate is obtained, and the polishing pressure, the polishing disc rotating speed and the spraying flow are dynamically adjusted according to the real-time surface shape error. The surface shape precision of the large-size optical flat plate processed by the method can be stably controlled within lambda / 10, the surface uniformity deviation is less than or equal to lambda / 20, the edge collapse depth is less than or equal to 0.002 mm, the surface shape consistency of batch production is improved by more than 50%, the yield is improved to more than 95% from 75% of a traditional process, and the production cost is reduced. And the batch application requirements of large-caliber industrial, military and scientific research equipment on the high-precision optical flat plate are met.
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