Semiconductor processing control method and system based on map inheritance

Abstract

This invention provides a semiconductor processing control method and system based on mapping graph inheritance. The method includes: configuring step inheritance attributes for each process step and configuring machine drawing attributes for each machine; when a batch to be processed arrives at the current machine, it is associated with the current process step; determining the required mapping graph data source information based on the step inheritance attributes, machine type, and machine drawing attributes; verifying the correctness of the required mapping graph data source; if the verification passes, acquiring the associated mapping graph data and executing processing; if the verification fails, intercepting the exception; the system includes: a manufacturing execution system module, configuring step inheritance attributes and machine drawing attributes, and determining the mapping graph data source information; an equipment automation system module, initiating a pre-verification request, and controlling whether the current machine processes based on the verification result; and an appearance inspection image management system module, storing and managing the mapping graph data, and verifying the mapping graph data source information.

Description

Technical Field

[0001] This invention relates to the technical field of computer-integrated manufacturing systems for semiconductor manufacturing, and more specifically, to a semiconductor processing control method and system based on mapping graph inheritance. Background Technology

[0002] In the semiconductor manufacturing process, map data is crucial for precise wafer fabrication and defect control. With the widespread adoption of Manufacturing Execution Systems (MES) and Equipment Automation Systems (EAP), the automated flow of map data has become standard practice.

[0003] Chinese patent CN117522432B discloses a Strip Map traceability system and method based on an EAP (Expert Assistance Program) system. Before operation, the equipment requests substrate information from the EAP system. The EAP system retrieves the Map from its database. The equipment skips unnecessary operations based on the Map and reports a new Map after the operation. Simultaneously, the MES (Manufacturing Execution System) records batch information to prevent material mixing and track production records. However, existing technologies exhibit significant limitations in control logic when dealing with highly complex and continuous semiconductor manufacturing lines. In actual semiconductor mass production environments, due to hardware limitations, process characteristics, or abnormal configurations, some machines may fail to generate a new Map for the current batch after processing.

[0004] Therefore, there is a need for a method that can automatically establish cross-site Map data transfer and closed-loop verification links under the objective process constraint that some machines in the production line do not produce drawings, so as to ensure the continuity of automated production. Summary of the Invention

[0005] This invention provides a semiconductor processing control method and system based on map inheritance, aiming to solve the problem that some machines cannot generate a new map for the current batch after completing processing, thereby improving the continuity of automated production.

[0006] To achieve the above objectives, the present invention provides a semiconductor processing control method based on mapping graph inheritance, applied to a semiconductor manufacturing production line including a manufacturing execution system, an equipment automation system, and an appearance inspection image management system, wherein the equipment automation system establishes communication connections with the manufacturing execution system and the appearance inspection image management system, respectively, and the method includes: S1. In the manufacturing execution system, configure step inheritance attributes for each process step included in the semiconductor manufacturing pipeline, and configure machine drawing attributes for each machine. S2. When the batch to be processed arrives at the current machine, the equipment automation system initiates a job information acquisition request to the manufacturing execution system. The batch to be processed is associated with the current process step. S3. The manufacturing execution system obtains the machine type of the current machine and determines the source information of the mapping map data required for the current machine processing based on the step inheritance attribute of the current process step, the machine type, and the machine drawing output attribute, and sends it to the equipment automation system; wherein, in the inheritance state, when it is determined that the required mapping map data cannot be provided by the upstream adjacent machine, the manufacturing execution system traces the source based on the valid drawing output records of historical processing nodes to determine the source information of the mapping map data; S4. The equipment automation system initiates a mapping data pre-verification request to the appearance inspection image management system based on the mapping data source information to verify the correctness of the required mapping data source. S5. If the verification passes, the equipment automation system controls the current machine to obtain the associated mapping data and perform processing; if the verification fails, the equipment automation system triggers a pause processing command to intercept the anomaly.

[0007] In one embodiment, the machine type includes at least a serialized machine and a regular machine; The manufacturing execution system determines the source information of the mapping data required for the current machine tool processing, specifically including: If the machine type is a regular machine: when the current process step is configured with a step inheritance attribute, the configured step inheritance attribute shall prevail; when the current process step is not configured with a step inheritance attribute, and the regular machine is configured with a machine drawing attribute, the machine drawing attribute shall be obtained and inverted, and the inverted result shall be used as the mapping graph inheritance relationship; when neither the current process step nor the regular machine is configured with the corresponding attribute, the mapping graph inheritance relationship shall be in the inheritance state by default. If the machine type is the serial machine: directly obtain the machine output attribute of the corresponding sub-machine configuration within the serial machine, and invert it, using the inverted result as the mapping inheritance relationship of the sub-machine. In the inheritance state, when it is determined that the machine drawing output attribute configured for the upstream adjacent machine of the current machine is not to generate mapping map data, the manufacturing execution system automatically traces back to the predecessor machine of the adjacent machine and uses the upstream drawing machine that is closest to the current machine and has generated valid mapping map data as the source information of the mapping map data.

[0008] In one embodiment, the data structure of the mapping data source information obtained by the equipment automation system includes at least the following fields: current process step number, current process step name, inheritance identifier, source process step number, and source process step name.

[0009] In one embodiment, if the verification passes, the equipment automation system controls the current machine to acquire the associated mapping data and perform processing, specifically including: After the pre-verification is passed, the equipment automation system sends an entry confirmation request to the manufacturing execution system and sends a backend data acquisition request to the appearance inspection image management system based on the source information of the mapping map data in order to obtain the associated mapping map data. The current machine performs processing based on the acquired mapping data. During processing, the equipment automation system continuously reports processing event records to the manufacturing execution system.

[0010] In one embodiment, after the current machine tool completes processing, the equipment automation system determines the machine tool output drawing attributes of the current machine tool: If configured to generate mapping data, the mapping data generated by the current machine is uploaded to the appearance inspection image management system; if configured not to generate mapping data, the upload operation is not performed and normal station passage is allowed. If the current machine is configured to generate mapping data, but the current machine does not generate mapping data, a system abnormality is triggered and the pause processing command is issued. Once the system determines that the equipment is allowed to pass through the station normally, the equipment automation system sends an outgoing command to the manufacturing execution system to complete the processing operation flow of the current machine for the batch to be processed.

[0011] In one embodiment, the method further includes conflict handling and backtracking rules based on edge scenarios: If the current process step is identified as the first step in the current manufacturing process, then the step inheritance attribute is reset to a non-inherited state. When the mapping data of any upstream drawing machine between the current machine and the earliest valid drawing machine is determined to be damaged or lost, the manufacturing execution system automatically backtracks to the earlier valid drawing machine to retrieve the mapping data.

[0012] A semiconductor processing control system based on graph inheritance includes: The Manufacturing Execution System (MES) module configures step inheritance attributes for the process steps included in the semiconductor processing flow, configures machine drawing attributes for the machine, and, in response to a job information acquisition request, obtains the machine type of the current machine. Based on the step inheritance attributes of the current process step corresponding to the batch to be processed, the machine type, and the machine drawing attributes, it determines the source information of the mapping map data required for the current machine processing. When it is determined that the required mapping map data cannot be provided by an upstream adjacent machine, the MES traces the source based on valid drawing records of historical processing nodes to determine the source information of the mapping map data. The equipment automation system module is communicatively connected to the manufacturing execution system module and the appearance inspection image management system module. It obtains the mapping data source information from the manufacturing execution system module, initiates a pre-verification request to the appearance inspection image management system module based on the mapping data source information, and controls the processing operation of the current machine or triggers a pause processing command according to the verification result. The appearance inspection image management system module stores and manages mapping data in the semiconductor manufacturing process, and verifies the source information of the mapping data of the equipment automation system module.

[0013] In one embodiment, the manufacturing execution system module further includes: The step configuration unit configures the specific parameters of the process step and binds the corresponding step inheritance attributes; The machine configuration unit configures the specific parameters of the machine and binds the corresponding machine drawing attributes; The decision-making unit, when identifying the machine type as a regular machine, sequentially evaluates the step inheritance attribute of the current process step and the machine drawing attribute of the regular machine. If the current process step is configured with a step inheritance attribute, the configured step inheritance attribute prevails. If the current process step is not configured with a step inheritance attribute, but the regular machine is configured with a machine drawing attribute, the machine drawing attribute is obtained and inverted, and the inverted result is used as the mapping inheritance relationship. If neither the current process step nor the regular machine is configured with the corresponding attribute, the mapping inheritance relationship is assumed to be in an inherited state. When the machine type is identified as a serial line machine, the machine drawing attribute of the serial line machine's sub-machine is inverted and used as the decision basis, thereby outputting the mapping data source information. In the inheritance state, when it is determined that the machine drawing output attribute configured for the upstream adjacent machine of the current machine is not to generate mapping map data, the manufacturing execution system automatically traces back to the predecessor machine of the adjacent machine and uses the upstream drawing machine that is closest to the current machine and has generated valid mapping map data as the source information of the mapping map data.

[0014] An electronic device includes a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the computer program, it implements the steps of the semiconductor processing control method based on mapping inheritance.

[0015] A computer-readable storage medium storing a computer program, which, when executed by a processor, implements the steps of the semiconductor processing control method based on mapping graph inheritance.

[0016] The present invention has the following beneficial effects: 1. Adaptability: This application introduces a hierarchical judgment and inversion mechanism based on process step inheritance attributes and machine drawing attributes for ordinary equipment. In the event of missing configurations for some node devices, the system can automatically complete the inheritance decision based on the inversion processing logic or the underlying default state, effectively covering the complex and ever-changing machine attribute configuration scenarios in actual semiconductor mass production.

[0017] 2. Accuracy: For the special structure of the serial line machine containing multiple sub-machines, this application directly uses the inversion of the output attributes of the sub-machine itself as the decision basis, thereby covering the external unified step inheritance attributes, ensuring the independence and accuracy of the mapping diagram transmission relationship inside the serial line machine, while reducing the pressure of invalid external signaling requests between systems.

[0018] 3. Automation: When the current state is determined to be an inherited state, the manufacturing execution system automatically traces back to historical nodes, accurately locates and extracts the most recent valid upstream drawing machine data, and solves the problem of physical link breakpoints caused by some machines not producing drawings from a software logic perspective. Furthermore, in conjunction with the data pre-verification mechanism initiated by the equipment automation system before processing, release is only allowed after ensuring the completeness and accuracy of historical mapping data, increasing the level of automation in the semiconductor process. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the flow structure of a semiconductor processing control method based on mapping graph inheritance according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the module architecture of a semiconductor processing control system based on mapping graph inheritance according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the product processing flow of a semiconductor manufacturing production line according to an embodiment of the present invention.

[0020] Among them, 100 is the Manufacturing Execution System module; 200 is the Equipment Automation System module; and 300 is the Appearance Inspection Image Management System module. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention.

[0022] The Appearance Inspection Image Management System (E-MAP) is a dedicated image management platform for semiconductor wafer manufacturing. It is used to manage various MAP images such as wafers and substrates within the wafer fab. It supports interface with heterogeneous files from multiple channels, including machine tools and external sources, and completes standardized format conversion to provide standard image data support for production processing and quality traceability.

[0023] Figure 1 This is a schematic flowchart of a semiconductor processing control method based on mapping graph inheritance according to an embodiment of the present invention. It is applied to a semiconductor manufacturing production line including a manufacturing execution system, an equipment automation system, and an appearance inspection image management system. The equipment automation system establishes communication connections with both the manufacturing execution system and the appearance inspection image management system. The method includes: S1. In the manufacturing execution system, configure step inheritance attributes for each process step included in the semiconductor manufacturing pipeline, and configure machine drawing attributes for each machine. S2. When the batch to be processed arrives at the current machine, the equipment automation system initiates a job information acquisition request to the manufacturing execution system. The batch to be processed is associated with the current process step. S3. The manufacturing execution system obtains the machine type of the current machine and determines the source information of the mapping map data required for the current machine processing based on the step inheritance attribute of the current process step, the machine type, and the machine drawing output attribute, and sends it to the equipment automation system; wherein, in the inheritance state, when it is determined that the required mapping map data cannot be provided by the upstream adjacent machine, the manufacturing execution system traces the source based on the valid drawing output records of historical processing nodes to determine the source information of the mapping map data; S4. The equipment automation system initiates a mapping data pre-verification request to the appearance inspection image management system based on the mapping data source information to verify the correctness of the required mapping data source. S5. If the verification passes, the equipment automation system controls the current machine to obtain the associated mapping data and perform processing; if the verification fails, the equipment automation system triggers a pause processing command to intercept the anomaly.

[0024] In one embodiment, the machine type includes at least a serialized machine and a regular machine; The manufacturing execution system determines the source information of the mapping data required for the current machine tool processing, specifically including: If the machine type is a regular machine: when the current process step is configured with a step inheritance attribute, the configured step inheritance attribute shall prevail; when the current process step is not configured with a step inheritance attribute, and the regular machine is configured with a machine drawing attribute, the machine drawing attribute shall be obtained and inverted (for example, if the machine drawing attribute is yes, then the inverted mapping inheritance relationship shall be no), and the inverted result shall be used as the mapping inheritance relationship; when neither the current process step nor the regular machine is configured with the corresponding attribute, the mapping inheritance relationship shall be assumed to be in the inheritance (yes) state. If the machine type is the Line (serialized) machine: directly obtain the machine output attributes configured in the SubEqp (sub-machine) within the serialized machine, and invert them, using the inverted result as the mapping inheritance relationship of the sub-machine; In the inheritance state, when it is determined that the machine drawing output attribute configured for the upstream adjacent machine of the current machine is not to generate mapping map data, the manufacturing execution system automatically traces back to the predecessor machine of the adjacent machine and uses the upstream drawing machine that is closest to the current machine and has generated valid mapping map data as the source information of the mapping map data.

[0025] Specifically, in semiconductor manufacturing, there are differences in the production control model structure between ordinary machines and serial machines. Ordinary machines correspond to a single Manufacturing Execution System (MES) process step, with independent inbound and outbound nodes. For serial machines, a single MES process step includes internal flow processes between multiple sub-machines. If serial machines are forced to implement the mapping inheritance attribute at the MES process step level, each sub-machine will ignore its internal data transfer logic and uniformly point the mapping data source to the upstream output machine of that MES process step. Therefore, when a serial machine type is identified, a strategy of forcibly inverting the sub-machine output attributes is adopted to ensure accurate closed-loop data transfer within the serial machine.

[0026] Specifically, the underlying logic of obtaining and inverting the machine's output drawing attribute is as follows: If the output drawing attribute of the ordinary machine is configured to generate mapping data (i.e., the attribute value is yes), it means that the machine will produce a completely new mapping data after processing, without relying on historical data. In this case, the result of inversion is that the mapping data is not inherited (i.e., the inheritance relationship is no); if the output drawing attribute of the ordinary machine is configured to not generate mapping data (i.e., the attribute value is no), it means that the machine will not produce a new drawing after processing. To ensure the continuity of data flow, the result of inversion is that the mapping data is forcibly inherited (i.e., the inheritance relationship is yes).

[0027] Furthermore, when neither the current process step nor the ordinary machine tool is configured with corresponding attributes, the default inheritance relationship of the mapping diagram is in an inheritance state. In this inheritance state, the specific inheritance execution mechanism of the system is as follows: the manufacturing execution system automatically traces back to the predecessor machine tool of the current machine tool, identifies and locks the upstream output machine tool closest to the current machine tool that has generated valid mapping diagram data, and uses it as the current mapping diagram data source information; subsequently, the equipment automation system, based on the issued mapping diagram data source information, initiates a pre-verification to the appearance inspection image management system and downloads the associated mapping diagram data, thereby allowing the current machine tool to perform processing operations based on the historical mapping diagram data.

[0028] In one embodiment, the data structure of the mapping data source information obtained by the equipment automation system includes at least the following fields: current process step number, current process step name, inheritance identifier, source process step number, and source process step name.

[0029] In one embodiment, if the verification passes, the equipment automation system controls the current machine to acquire the associated mapping data and perform processing, specifically including: After the pre-verification is passed, the equipment automation system sends an entry confirmation request to the manufacturing execution system and sends a backend data acquisition request to the appearance inspection image management system based on the source information of the mapping map data in order to obtain the associated mapping map data. The current machine performs processing based on the acquired mapping data. During processing, the equipment automation system continuously reports processing event records to the manufacturing execution system.

[0030] In one embodiment, after the current machine tool completes processing, the equipment automation system determines the machine tool output drawing attributes of the current machine tool: If configured to generate mapping data, the mapping data generated by the current machine is uploaded to the appearance inspection image management system; if configured not to generate mapping data, the upload operation is not performed and normal station passage is allowed. If the current machine is configured to generate mapping data, but the current machine does not generate mapping data, a system abnormality is triggered and the pause processing command is issued. Once the system determines that the equipment is allowed to pass through the station normally, the equipment automation system sends an outgoing command to the manufacturing execution system to complete the processing operation flow of the current machine for the batch to be processed.

[0031] In Example 1, the product processing flow configuration in the MES (Manufacturing Execution System) is as follows: Figure 3 As shown, the process steps include S01, S02, S03, and S04, and the machines are all ordinary machines. The machine names corresponding to each process step are EQP01, EQP02, EQP03, and EQP04, respectively. Table 1 shows the step inheritance attributes configured for each process step, and Table 2 shows the machine output attributes configured for each machine.

[0032] Table 1 shows the step inheritance attributes configured for each process step in Example 1.

[0033] Table 2 shows the machine drawing attributes configured for each process step in Example 1.

[0034] For step S01, the step inheritance attribute is configured as "No". At this time, the configuration on site S01 is "No Inheritance" ("No"). The drawing output attribute of the machine using EQP01 is configured as "Drawing Output" ("Yes"). The inheritance attribute configured on site S01 takes precedence, and the inheritance relationship of the site is "No Inheritance". For step S02, the step inheritance attribute is configured as "None". At this time, the inheritance attribute configured on site S02 is also empty (NULL). The drawing output attribute of the machine using EQP02 is configured as "No Drawing Output" ("No"). The inheritance relationship of site S02 is that no inheritance attribute is configured on the site, but the machine configures the inheritance attribute itself. Since the machine is configured not to output drawings, the inheritance relationship of this site is reversed and becomes "Inheritance". For step S03, the step inheritance attribute is configured as "None". At this time, no inheritance is configured on site S03 (NULL). The EQP03 used is configured as "Drawing Output" ("Yes"). The inheritance relationship of site S03 is "No Inheritance" (no inheritance on the site, machine configuration takes precedence). For step S04, the step inheritance attribute is configured as yes. At this time, the configuration on site S04 is inheritance (yes), and the machine output attribute of the EQP04 is configured as output (yes). The inheritance relationship of site S04 is based on the inheritance attribute configured on the site, and the inheritance relationship is inheritance.

[0035] In Example 2, the product processing flow configuration in the MES is also as follows. Figure 3 As shown, the process steps include S01, S02, S03, and S04, corresponding to machines EQP01, EQP02, EQP03, and EQP04, respectively. Machine EQP03 is a serial-line machine, while the others are ordinary machines. Table 3 shows the step inheritance attributes configured for each process step, and Table 4 shows the machine drawing output attributes configured for each machine.

[0036] Table 3 shows the step inheritance attributes configured for each process step in Example 2.

[0037] Table 4 shows the machine drawing attributes configured for each process step in Example 2.

[0038] For the machine with the name EQP03, the specific configuration is as follows: For sub-machine Chamber-A, the EQP03-Chamber-A configuration is "No drawing output" (no), and the inheritance relationship of sub-machine Chamber-A in process step S03 is inheritance; For sub-machine Chamber-B, the machine drawing output attribute of Chamber-B is configured to "Drawing output" (yes), then the inheritance relationship of sub-machine Chamber-B in process step S03 is not inheritance; For sub-machine Chamber-C, the machine drawing output attribute of Chamber-C is configured to "No drawing output" (no), then the inheritance relationship of sub-machine Chamber-C in process step S03 is inheritance; For sub-machine Chamber-D, the machine drawing output attribute of Chamber-D is configured to "Drawing output" (yes), then the inheritance relationship of sub-machine Chamber-D in process step S03 is not inheritance.

[0039] When the batch (Lot) arrives at the designated machine for processing, execute the following... Figure 2 The following process is shown: After the batch (Lot) to be processed is placed on the machine, the EAP (Equipment Automation Program) calls the GetJobInfo interface (Job Information Acquisition Request Interface) to initiate a request to obtain job information. The MES responds to this request, and the decision-making unit executes the traceability logic and sends the mapping data source information, which includes the current process step number, the current process step name, the inheritance identifier, the source process step number, and the source process step name, to the EAP.

[0040] Based on the received source information, EAP calls the MAPPreCheck interface (map pre-verification request interface) to initiate a map pre-verification request to the appearance inspection image management system, inquiring about the correctness and completeness of the required map information for the current site. If the verification fails, EAP directly triggers an exception interception (Hold Lot), issuing a pause processing instruction, requiring manual confirmation and modification of steps or output attribute configurations. If the verification passes, EAP calls the TrackIn interface (entry confirmation request interface) to initiate an entry confirmation request to MES for secondary confirmation, and calls the BackEndMapDataReq interface (backend data acquisition request interface) to initiate a backend data acquisition request to the appearance inspection image management system, downloading the source map data to its local machine.

[0041] The machine performs processing operations based on the downloaded mapping data. During processing, EAP continuously reports the equipment's operating status and processing event records to MES by calling the ReportProcessEvent interface (processing event reporting interface).

[0042] After processing is complete, EAP determines the output map attribute of the current machine. If configured to generate a mapping map, EAP calls the BackEndMapDataUpload interface (backend data upload request interface) to send an upload request to the appearance inspection image management system to upload the new mapping map data generated in this processing. If the system detects that the configuration requires output but no output is actually generated, a Hold Lot interception exception is triggered. If configured not to generate a mapping map, the upload operation is not performed. After ensuring that the above data status is accurate and conforms to the configuration, EAP calls the TrackOut interface (outbound reporting command) to send an outbound command to MES, completing the processing operation flow of this batch on the current machine.

[0043] In one embodiment, the method further includes conflict handling and backtracking rules based on edge scenarios: If the current process step is identified as the first step in the current manufacturing process, then the step inheritance attribute is reset to a non-inherited state. When the mapping data of any upstream drawing machine between the current machine and the earliest valid drawing machine is determined to be damaged or lost, the manufacturing execution system automatically backtracks to the earlier valid drawing machine to retrieve the mapping data.

[0044] Figure 2 This is a schematic diagram of a semiconductor processing control system based on a mapping graph inheritance, including: The Manufacturing Execution System (MES) module 100 configures step inheritance attributes for the process steps included in the semiconductor processing flow, configures machine drawing attributes for the machine, and, in response to a job information acquisition request, obtains the machine type of the current machine. Based on the step inheritance attributes of the current process step corresponding to the batch to be processed, the machine type, and the machine drawing attributes, it determines the source information of the mapping map data required for the current machine processing. When it is determined that the required mapping map data cannot be provided by an upstream adjacent machine, the MES traces the source based on valid drawing records of historical processing nodes to determine the source information of the mapping map data. The equipment automation system module 200 is communicatively connected to the manufacturing execution system module 100 and the appearance inspection image management system module 300. It obtains the mapping data source information from the manufacturing execution system module 100, initiates a pre-verification request to the appearance inspection image management system module 300 based on the mapping data source information, and controls the processing operation of the current machine or triggers a pause processing command according to the verification result. The appearance inspection image management system module 300 stores and manages mapping data in the semiconductor manufacturing process, and verifies the source information of the mapping data of the equipment automation system module 200.

[0045] In one embodiment, the manufacturing execution system module 100 further includes: The step configuration unit configures the specific parameters of the process step and binds the corresponding step inheritance attributes; The machine configuration unit configures the specific parameters of the machine and binds the corresponding machine drawing attributes; The decision-making unit, when identifying the machine type as a regular machine, sequentially evaluates the step inheritance attribute of the current process step and the machine drawing attribute of the regular machine. If the current process step is configured with a step inheritance attribute, the configured step inheritance attribute prevails. If the current process step is not configured with a step inheritance attribute, but the regular machine is configured with a machine drawing attribute, the machine drawing attribute is obtained and inverted, and the inverted result is used as the mapping inheritance relationship. If neither the current process step nor the regular machine is configured with the corresponding attribute, the mapping inheritance relationship is assumed to be in an inherited state. When the machine type is identified as a serial line machine, the machine drawing attribute of the serial line machine's sub-machine is inverted and used as the decision basis, thereby outputting the mapping data source information. In the inheritance state, when it is determined that the machine drawing output attribute configured for the upstream adjacent machine of the current machine is not to generate mapping map data, the manufacturing execution system automatically traces back to the predecessor machine of the adjacent machine and uses the upstream drawing machine that is closest to the current machine and has generated valid mapping map data as the source information of the mapping map data.

[0046] Specifically, the MES (Manufacturing Execution System) is responsible for controlling the workshop process flow and production scheduling. The step configuration unit configures the Map Inherit attribute for each Step (process step) in the semiconductor processing flow. This attribute includes at least: not inheriting any mapping map, inheriting the mapping map from the most recent output machine, inheriting the mapping map of a specified process step, or not setting it (for holes). The machine configuration unit configures the Generate Map attribute for each machine. This attribute indicates whether the machine generates and uploads complete mapping map data after processing. When the decision-making unit receives a processing job request, it calculates and determines the source information of the mapping map data required for the current machine's processing based on the current machine type, the step inheritance attribute of the current process step, and the machine type, using built-in rules.

[0047] EAP establishes communication connections with MES and the appearance inspection image management system described below. EAP is responsible for requesting job information and issuing control commands to MES, as well as for retrieving, pre-verifying, and uploading mapping data.

[0048] E-Map (Appearance Inspection Image Management System) is used to centrally store and manage wafer mapping data in the semiconductor manufacturing process, and provides interfaces such as MAPPreCheck for EAP to call to verify the correctness of the mapping data.

[0049] An electronic device includes a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the computer program, it implements the steps of the semiconductor processing control method based on mapping inheritance.

[0050] A computer-readable storage medium storing a computer program, which, when executed by a processor, implements the steps of the semiconductor processing control method based on mapping graph inheritance.

[0051] In the description of this application, it should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. For ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0052] It should be noted that, in this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. It should also be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Furthermore, features described with reference to certain examples may be combined in other examples.

[0053] The embodiments described above are merely further illustrations of the present invention and are not intended to limit the present invention in any other way. The present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding modifications and changes based on the present invention, but all such modifications and changes should fall within the protection scope of the present invention.

Claims

1. A semiconductor processing control method based on mapping graph inheritance, applied to a semiconductor manufacturing production line including a manufacturing execution system, an equipment automation system, and an appearance inspection image management system, wherein, The equipment automation system establishes communication connections with the manufacturing execution system and the appearance inspection image management system, respectively, characterized in that the method includes: S1. In the manufacturing execution system, configure step inheritance attributes for each process step included in the semiconductor manufacturing pipeline, and configure machine drawing attributes for each machine. S2. When the batch to be processed arrives at the current machine, the equipment automation system initiates a job information acquisition request to the manufacturing execution system. The batch to be processed is associated with the current process step. S3. The manufacturing execution system obtains the machine type of the current machine and determines the source information of the mapping map data required for the current machine processing based on the step inheritance attribute of the current process step, the machine type, and the machine drawing output attribute, and sends it to the equipment automation system; wherein, when it is determined that the required mapping map data cannot be provided by the upstream adjacent machine, the manufacturing execution system traces the source based on the valid drawing output records of historical processing nodes to determine the source information of the mapping map data; S4. The equipment automation system initiates a mapping data pre-verification request to the appearance inspection image management system based on the mapping data source information to verify the correctness of the required mapping data source. S5. If the verification passes, the equipment automation system controls the current machine to obtain the associated mapping data and perform processing; if the verification fails, the equipment automation system triggers a pause processing command to intercept the anomaly.

2. The semiconductor processing control method based on mapping graph inheritance according to claim 1, characterized in that, The machine types include at least serialized machine and ordinary machine; The manufacturing execution system determines the source information of the mapping data required for the current machine tool processing, specifically including: If the machine type is a regular machine: when the current process step is configured with a step inheritance attribute, the configured step inheritance attribute shall prevail; when the current process step is not configured with a step inheritance attribute, and the regular machine is configured with a machine drawing attribute, the machine drawing attribute shall be obtained and inverted, and the inverted result shall be used as the mapping graph inheritance relationship; when neither the current process step nor the regular machine is configured with the corresponding attribute, the mapping graph inheritance relationship shall be in the inheritance state by default. If the machine type is the serial machine: directly obtain the machine output attribute of the corresponding sub-machine configuration within the serial machine, and invert it, using the inverted result as the mapping inheritance relationship of the sub-machine. In the inheritance state, when it is determined that the machine drawing output attribute configured for the upstream adjacent machine of the current machine is not to generate mapping map data, the manufacturing execution system automatically traces back to the predecessor machine of the adjacent machine and uses the upstream drawing machine that is closest to the current machine and has generated valid mapping map data as the source information of the mapping map data.

3. The semiconductor processing control method based on mapping graph inheritance according to claim 1, characterized in that, The data structure of the mapping data source information obtained by the equipment automation system includes at least the following fields: current process step number, current process step name, inheritance identifier, source process step number, and source process step name.

4. The semiconductor processing control method based on mapping graph inheritance according to claim 1, characterized in that, If the verification passes, the equipment automation system controls the current machine to acquire the associated mapping data and perform processing, specifically including: After the pre-verification is passed, the equipment automation system sends an entry confirmation request to the manufacturing execution system and sends a backend data acquisition request to the appearance inspection image management system based on the source information of the mapping map data in order to obtain the associated mapping map data. The current machine performs processing based on the acquired mapping data. During processing, the equipment automation system continuously reports processing event records to the manufacturing execution system.

5. The semiconductor processing control method based on mapping graph inheritance according to claim 4, characterized in that, After the current machine tool completes its processing, the equipment automation system determines the machine tool output drawing attributes of the current machine tool: If configured to generate mapping data, the mapping data generated by the current machine is uploaded to the appearance inspection image management system; if configured not to generate mapping data, the upload operation is not performed and normal station passage is allowed. If the current machine is configured to generate mapping data, but the current machine does not generate mapping data, a system abnormality is triggered and the pause processing command is issued. Once the system determines that the equipment is allowed to pass through the station normally, the equipment automation system sends an outgoing command to the manufacturing execution system to complete the processing operation flow of the current machine for the batch to be processed.

6. The semiconductor processing control method based on mapping graph inheritance according to claim 1, characterized in that, The method also includes conflict handling and backtracking rules based on edge scenarios: If the current process step is identified as the first step in the current manufacturing process, the step inheritance attribute is reset to a non-inherited state. When the mapping data of any upstream drawing machine between the current machine and the earliest valid drawing machine is determined to be damaged or lost, the manufacturing execution system automatically backtracks to the earlier valid drawing machine to retrieve the mapping data.

7. A semiconductor processing control system based on mapping graph inheritance, characterized in that, include: The Manufacturing Execution System (MES) module configures step inheritance attributes for the process steps included in the semiconductor processing flow, configures machine drawing attributes for the machine, and, in response to a job information acquisition request, obtains the machine type of the current machine. Based on the step inheritance attributes of the current process step corresponding to the batch to be processed, the machine type, and the machine drawing attributes, it determines the source information of the mapping map data required for the current machine processing. When it is determined that the required mapping map data cannot be provided by an upstream adjacent machine, the MES traces the source based on valid drawing records of historical processing nodes to determine the source information of the mapping map data. The equipment automation system module is communicatively connected to the manufacturing execution system module and the appearance inspection image management system module. It obtains the mapping data source information from the manufacturing execution system module, initiates a pre-verification request to the appearance inspection image management system module based on the mapping data source information, and controls the processing operation of the current machine or triggers a pause processing command according to the verification result. The appearance inspection image management system module stores and manages mapping data in the semiconductor manufacturing process, and verifies the source information of the mapping data of the equipment automation system module.

8. The semiconductor processing control system based on mapping graph inheritance according to claim 7, characterized in that, The manufacturing execution system module also includes: The step configuration unit configures the specific parameters of the process step and binds the corresponding step inheritance attributes; The machine configuration unit configures the specific parameters of the machine and binds the corresponding machine drawing attributes; When the decision-making unit identifies the machine type as a normal machine, it sequentially evaluates the step inheritance attribute of the current process step and the machine drawing attribute of the normal machine. If the current process step is configured with a step inheritance attribute, the configured step inheritance attribute shall prevail. If the current process step is not configured with a step inheritance attribute, but the normal machine is configured with a machine drawing attribute, the machine drawing attribute shall be obtained and inverted, and the inverted result shall be used as the mapping graph inheritance relationship. When neither the current process step nor the ordinary machine tool is configured with corresponding attributes, the default inheritance relationship of the mapping diagram is in the inheritance state; when the machine tool type is identified as a serial machine tool, the machine tool output attributes of the serial machine tool's sub-machine tool are inverted and used as the decision basis, thereby outputting the data source information of the mapping diagram. In the inheritance state, when it is determined that the machine drawing output attribute configured for the upstream adjacent machine of the current machine is not to generate mapping map data, the manufacturing execution system automatically traces back to the predecessor machine of the adjacent machine and uses the upstream drawing machine that is closest to the current machine and has generated valid mapping map data as the source information of the mapping map data.

9. An electronic device, characterized in that, It includes a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the computer program, it implements the steps of the semiconductor processing control method based on mapping graph inheritance as described in any one of claims 1 to 6.

10. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by the processor, it implements the steps of the semiconductor processing control method based on mapping graph inheritance as described in any one of claims 1 to 6.

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