Cross-scale planar piezoelectric inchworm motor and method of assembly thereof

Abstract

This invention discloses a multi-scale planar piezoelectric inchworm motor and its assembly method in the field of precision drive technology. The motor base includes, from top to bottom, an upper cover plate, a stage, an integrated clamping drive mechanism, piezoelectric ceramics, and crossed roller guides. The integrated clamping drive mechanism includes a displacement amplification configuration and a piezoelectric ceramic direct-push configuration, with the piezoelectric ceramics placed on both sides of the clamping and drive mechanism input ends. The integrated clamping drive mechanism is fixed to the motor base, positioned between two sets of crossed roller guides, and drives their movement, forming an outward-pushing configuration for the piezoelectric inchworm motor. The inner rails of the two sets of crossed roller guides are fixed to the stage, with the upper cover plate embedded in the middle of the stage. The outer rails of the two sets of crossed roller guides are fixed to the motor base. This invention can meet the high-speed, high-precision, and high-load precision drive and positioning requirements of robot manufacturing and assembly fields.

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