Semiconductor device

By designing irregularly shaped contact plug structures in semiconductor devices, the problems of positional misalignment and poor connection during chip bonding are solved, thereby improving yield and reliability.

CN122373355APending Publication Date: 2026-07-10KIOXIA CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
KIOXIA CORP
Filing Date
2025-06-12
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

Existing semiconductor devices have low yield rates, especially during the bonding process of multiple chips, where issues such as misalignment and poor connection are prone to occur.

Method used

A semiconductor device was designed in which the upper surface of the first contact plug is longer in the first direction than in the second direction, and the upper surface of the second contact plug is longer in the second direction than in the first direction. This irregular structure improves the alignment accuracy during chip bonding and enhances connection reliability.

Benefits of technology

By improving the alignment accuracy during chip bonding, the yield of semiconductor devices is increased, the occurrence of positional misalignment and poor connection is reduced, and the reliability of the products is improved.

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Abstract

In one embodiment of the present invention, a semiconductor device capable of improving yield is provided. According to the embodiment, a semiconductor device includes a first chip and a second chip. The first chip includes a first wiring layer extending in a first direction, and a first electrode provided over the first wiring layer and including a first contact plug and a first pad. The second chip includes a second wiring layer extending in a second direction intersecting the first direction, and a second electrode provided over the second wiring layer and including a second contact plug and a second pad which is attached to the first pad. A first length of the first contact plug in the first direction is longer than a second length of the first contact plug in the second direction. A third length of the second contact plug in the second direction is longer than a fourth length of the second contact plug in the first direction.
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