inductive component
By setting perforations in the magnetic core and using electrically insulating materials to isolate the windings, the shortcomings of thin-film inductor components in terms of electrical characteristics are solved, the inductance density and coupling coefficient are improved, the coupling capacitance is reduced, and better electrical and magnetic characteristics are achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- WURTH ELEKTRONIK EISOS
- Filing Date
- 2024-12-02
- Publication Date
- 2026-07-10
AI Technical Summary
There is room for improvement in the electrical characteristics of inductors manufactured using existing thin-film technology, particularly in terms of coupling coefficient and coupling capacitance.
By setting perforations in the magnetic core, the winding extends through the perforations of the core, enabling vertical current flow. Electrically insulating material is used in the perforation area to isolate the winding and the core, preventing leakage current.
It improves inductance density, magnetic flux density and saturation value, reduces coupling capacitance, improves coupling coefficient, and avoids leakage current, thus achieving better electrical and magnetic characteristics.
Smart Images

Figure CN122374852A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to an inductor component manufactured using thin-film technology, the inductor component having a substrate, a magnetic core and a winding, wherein at least one first segment of the winding is disposed on the upper side of the core and at least one second segment of the winding is disposed on the lower side of the core. Background Technology
[0002] Inductive components are known to be manufactured using thin-film technology. Thin-film technology refers to the preparation and processing of thin layers of different materials. The thickness of such layers typically ranges from a few micrometers to a few nanometers. Layer deposition is mostly performed on a substrate using physical vapor deposition (PVD) and chemical vapor deposition (CVD) methods. After deposition, further processing can be performed on the layers, particularly structuring them. For example, layer structuring can be performed by photolithography or directly by laser or electron beam processing. An inductive component manufactured using thin-film technology is known from European Patent Document EP 3 192 090 B1. Summary of the Invention
[0003] The present invention should be used to improve the electrical characteristics of inductor components manufactured using thin-film technology.
[0004] According to the invention, an inductor having the features of claim 1 is provided. Advantageous improvements of the invention are set forth in the dependent claims.
[0005] An inductor component manufactured using thin-film technology has a substrate, a magnetic core, and a winding, wherein at least one first segment of the winding is disposed on an upper side of the core, and at least one second segment of the winding is disposed on a lower side of the core. The core has at least one through-hole, and the winding extends through the through-hole.
[0006] A vertical current flow through the core can be generated by having at least one through-hole or so-called perforation in the core, through which the winding extends. In this way, the magnetic flux can be fully or at least significantly retained in the core. This results in improved inductance density, improved magnetic flux density in the core, better saturation value, lower coupling capacitance, and better coupling coefficient. In particular, the coupling coefficient can be improved using the invention without having to tolerate disadvantages in coupling capacitance or breakdown strength. Therefore, the core of the invention is to generate a vertical current flow through the magnetic core. For this purpose, the core has at least one through-hole, through which the winding extends. The cross-sectional shape of the one or more through-holes is arbitrary. The spacing between the winding and the core, and between the winding and the core on the upper or lower side, can be set to appropriate values in the region of the through-hole. According to the invention, the winding can be drawn back from the side of the core, but it can also be drawn through another through-hole. The inductor according to the invention can be constructed, for example, as a coil, transformer, or sensor, particularly a magnetic field sensor. A perforation can be constructed as a through contact, also known as a through hole.
[0007] In an improved embodiment of the invention, the winding is guided through the perforation in a manner that is electrically insulated from the core.
[0008] This method prevents leakage current from flowing through the magnetic core, which is usually also magnetically permeable.
[0009] In an improved embodiment of the invention, an electrically insulating material, particularly an electrically insulating plastic layer, is arranged between the winding and the core in the area of the perforation.
[0010] Arranging an electrically insulating material, particularly an electrically insulating plastic layer, on the inner periphery of the perforation enables the winding and core to be safely insulated in the area of the perforation.
[0011] In an improved embodiment of the invention, the winding is guided from the upper side of the core to the lower side of the core and vice versa, solely through perforations in the core.
[0012] It has been shown that, in this manner, particularly significant advantages are achieved in terms of the electrical and magnetic characteristics of the inductor according to the invention. In particular, the winding at the edge of the core is eliminated. Thus, the inductor according to the invention is constructed substantially differently from conventional inductors manufactured using thin-film technology.
[0013] In an improved embodiment of the invention, the winding is not guided solely through perforations in the core from the upper side of the core to the lower side of the core and vice versa.
[0014] Within the scope of this invention, the winding may be guided, for example, past the side edge of the core. In this way, it can be responsive to space conditions and / or electrical design requirements.
[0015] In an improved embodiment of the invention, the winding extends in a helical shape, particularly a circular helical shape, or in a polygonal, oval, elliptical, or spiral shape. In this way, compact inductor components can be constructed using thin-film technology, and these components can be flexibly adapted to spatial conditions and / or electrical engineering requirements.
[0016] In an improved embodiment of the invention, the winding extends in a helical manner and has multiple segments, particularly four segments, wherein each segment extends over a portion of 360 degrees of the helix, particularly 90 degrees, and wherein winding segments adjacent to each other in the circumferential direction are arranged on different sides of the core.
[0017] The winding has printed conductors applied to the substrate using thin-film technology, and has through-contact portions, or so-called vias, through the core in the perforated areas of the core. Thus, the inductor component can be manufactured entirely using thin-film technology.
[0018] In an improved embodiment of the invention, the winding is formed at least in sections by means of at least two printed conductors arranged parallel to each other.
[0019] In this way, a transformer can be realized. Attached Figure Description
[0020] Further features and advantages of the invention will become apparent from the following description of preferred embodiments of the invention, taken in conjunction with the accompanying drawings. In the drawings: Figure 1 A schematic segmental cross-sectional view of the inductor component according to the present invention is shown. Figure 2 This is a top view of the inductor component according to the invention, wherein the substrate and the insulating layer between the substrate, printed wires and core have been removed for clarity. Figure 3 Show Figure 2 First side view of the inductor component. Figure 4 Show Figure 2 Second side view of the inductor component. Figure 5 Showing from diagonally upwards Figure 2 A view of the inductor component. Figure 6 Showing from diagonally downwards Figure 2 A view of the inductor component. Figure 7 Showing the view from below, Figure 2 A view of the inductor component. Figure 8 This diagram shows an inductor component according to another embodiment of the invention, viewed from an obliquely upward angle. Figure 9 Show Figure 8 The inductor component is viewed from another perspective in a segmented view. Figure 10 Showing from above Figure 8 A view of the inductor component. Figure 11 Showing from below towards Figure 8 A view of the inductor component. Figure 12 A schematic diagram of an inductor component according to another embodiment of the present invention, viewed from above, is shown. Figure 13 Showing from below towards Figure 12 A view of the inductor component. Figure 14 Show Figure 12 A schematic cross-sectional view of the inductor component. Figure 15 A schematic diagram of an inductor component according to another embodiment of the present invention, viewed from above, is shown. Figure 16 Showing from the side, Figure 15 A segmented schematic diagram of the components. Detailed Implementation
[0021] Figure 1 A schematic cross-sectional view of an inductor 10 according to the present invention is shown. The inductor 10 has a substrate 12 on which printed conductors, an insulating layer, and a magnetic core 14 are formed in multiple thin layers on the upper side. On the upper side of the substrate 12, a first layer 18 in the form of printed conductors is formed of a winding 16. On the upper side of the inductor 10, a second layer 20 having additional printed conductors of the winding 16 is formed. The printed conductors of the first layer 18 and the second layer 20 are electrically connected to each other through vertical segments 22, 24, 26 extending between the first layer 18 and the second layer 20 of the winding 16. Figure 1 The diagram is merely illustrative. Therefore, the lower layer 18 and the upper layer 20 are interconnected by vertical segments 22, 24, and 26, resulting in a continuous winding with a shape suitable for generating a magnetic field. In other words, in Figure 1 For clarity, the electrical connections and possible electrical disconnections of layers 18 and 20, as well as vertical sections 22, 24, and 26, are not shown in the schematic diagram.
[0022] A key feature of this invention is that the layer forming the magnetic core 14 has a plurality of through-holes 28, 30, and 32, through which vertical sections 22, 24, and 26 of the winding 16 extend. In this way, the current flowing in the winding 16 can be guided vertically relative to and through the layer forming the core 14. Due to this current flow perpendicular to the core 14, significant advantages are achieved in the electrical and magnetic properties of the inductor 10 according to the invention compared to conventional inductors in thin-film technology.
[0023] In addition, it can be seen from Figure 1 It is understood that the first layer 18 and the second layer 20 are separated from each other by an electrical insulation layer 34 between the vertical sections 22, 24, and 26 of the winding 16. Here, the electrical insulation layer 34 also extends on the inner wall of the perforations in the core 14. Therefore, there is always an electrical insulating material of layer 34 between the vertically extending sections 22, 24, and 26 of the winding 16 and the core 14. Therefore, there is no need to worry about leakage current flowing from the winding 16 into the core 14.
[0024] Figure 1 Only a schematic structure of the inductor 10 is shown. For example, an additional insulating layer may be arranged on the upper side of the layer 20 of the winding 16 to protect the layer 20 from environmental influences and to electrically insulate the layer 20.
[0025] Figure 2 A top view of the inductor 10 according to the present invention is shown, wherein the substrate has been removed for clarity, on which the inductor 10 is constructed using thin-film technology. See also... Figure 1 Similarly, insulation layer 34 has been removed; see [link / reference]. Figure 1 Therefore, in Figure 2 Only core 14 and winding 16 are shown.
[0026] from Figure 2 As can be seen, the core 14 is constructed in a disk shape, and other constructions of the core are also possible within the scope of the invention, and it has numerous perforations through which segments of the winding 16 are respectively guided. Figure 2 A view of the upper side of the inductor component 10 is shown, and Figure 7 A view of the lower side of the inductor component 10 is shown. It can be seen that the winding 16 is constructed in a circular helical shape and consists of two printed conductors 40 and 42 guided parallel to each other. The helical winding 16 is divided into four segments, each approximately 90° apart. The segments, adjacent to each other in the circumferential direction, are alternately guided on the upper side of the core 14—this is... Figure 2 It can be seen from this that it may be guided on the underside of core 14—this is in Figure 7 This can be seen from the text. Figure 2 On the left side, you can see the beginning of the winding, 44. Figure 7The end of the winding can be seen approximately at the center of the core.
[0027] from Figure 1 It can already be seen that all vertical sections of the winding (see...) Figure 1 The winding 16 is guided through the perforations in the core 14. Therefore, the winding 16 is not guided around the edge of the core 14, but only through the perforations in the core 14. The printed conductors 40, 42 are located on the upper side of the core (see [link to core 14]). Figure 2 ) and the underside of the core (see Figure 7 The switching between the core 14 and the winding 16 is achieved. In this way, there are numerous vertical sections of the winding 16 in which current flows perpendicular to the core 14. As a result, the electrical and magnetic characteristics of the inductor 10 can be significantly improved.
[0028] Within the scope of this invention, the winding 16 may deviate from a helical shape in its construction. An important feature is that sections of the winding 16 are formed and guided through perforations in the core 14, thereby generating current flow in the winding perpendicular to the core 14.
[0029] Within the scope of this invention, the winding 16 may also be constructed in a manner that deviates from the form of two parallel-guided printed conductors 40, 42. For example, it can be easily achieved that the winding 16 is constructed using a single printed conductor, or in the form of more than two parallel-guided printed conductors.
[0030] Figure 3 Show Figure 2 A side view of the inductor component 10. Figure 3 The side view is generated in the following way: Figure 2 The view is flipped 90° to the left.
[0031] Figure 4 Show Figure 2 Another side view of the inductor component 10. Figure 4 The side view is generated in the following way: Figure 2 The view is flipped down 90°.
[0032] Figure 5 Showing the inductor component from an oblique angle. Figure 2 The view shown is from the top. As already stated, in Figures 2 to 7 The insulating layer 34 has also been removed from the illustration. (See the diagram for more details.) Figure 1 It extends through the perforation of core 14 and is arranged on the upper and lower sides of the core. Therefore, in Figures 2 to 7 In the diagram, there are small gaps between the printed conductors 40, 42 on the upper side of core 14 and the printed conductors 40, 42 on the lower side of core 14 and core 14 itself.
[0033] See Figure 1The inner periphery of the perforations in core 14 is also equipped with a layer 34 of insulating material, which makes it possible to... Figures 2 to 7 In the illustration, there is a gap between the printed conductors 40 and 42 in the region of the vertical segment guided through the perforation in the core 14 and within the inner periphery of the perforation in the core 14; however, the gap is due to... Figures 2 to 7 It cannot be seen on a small scale.
[0034] Figure 6 Showing the view from below, Figure 2 A view of the inductor component 10. According to... Figure 5 and 6 As shown in the diagram, winding 16 is divided into four sections: 50, 52, 54, and 56. Sections 50 and 54 are located on the upper side of core 14 (see diagram). Figure 5 ), and the two sections 52 and 56 are arranged on the underside of the core (see Figure 6 The printed conductors of segments 50, 52, 54, and 56 are interconnected in the perforated areas of the core via vertical segments of winding 16. Within the scope of this invention, the number of segments, the area of the core covered by the segments, and the distribution of the segments of winding 16 on the upper and lower sides of the core can be varied. In particular, within the scope of this invention, an asymmetrical arrangement between the upper and lower sides of the core is possible.
[0035] Figure 7 Show Figure 2 A view of the lower side of the inductor component 10. According to... Figure 2 and Figure 7 It can be seen again that segments 50 and 54 are arranged on the upper side of the core, and segments 52 and 56 are arranged on the lower side of the core.
[0036] Figure 8 An inductor component 60 according to another embodiment of the invention is shown. Component 60 is configured as a transformer and has a plate-shaped core 62, a first winding 64, and a second winding 66. As shown in... Figures 1 to 7 As in the case of inductor component 10, windings 64 and 66 are guided parallel to each other. The core has multiple through-holes 68, in which the two windings 64 and 66 are respectively guided through the core 62 in the regions of the through-holes. Through-holes 68 (see...) Figure 1 The two windings 64 and 66 are configured such that they are not only spaced from the other windings 64 and 66 respectively in the region of the perforation 68, but also spaced from the core 62. The perforation 68 and the windings 64 and 66 in the region of the perforation 68 are configured as through contacts, i.e., through holes, using thin film technology.
[0037] from Figure 8 It can be seen that a total of twelve perforations 68 are arranged in a uniform grid within the core 62. Figure 8Looking at the upper side of the inductor component 60, it can be compared to... Figure 10 The view from above shows that on the upper side of core 62, windings 64 and 66 are oriented parallel to each other, and in all sections visible from above, they extend from the narrow lower edge of core 62 toward the narrow upper edge of core 62.
[0038] Figure 11 This is a view of the inductor component 60 from below. It can be seen that the windings 64 and 66 are guided parallel to their orientation on the upper side of the core 62, only in the region of the central perforation 68. Figure 11 In the area of the upper row of perforations 68 and in Figure 11 In the region of the lower row of perforations 68, the windings 64 and 66 are vertically guided relative to the windings 64 and 66 in the middle region. Figure 11 The perforation 68 is arranged in the upper right corner and in Figure 11 The perforation 68, located in the lower left corner, is equipped with... Figure 11 The connecting contacts for contacting windings 64 and 66 are not shown in the diagram.
[0039] Figure 9 Show Figure 8 A segmented schematic diagram of the inductor component 60. Figure 9 This is a schematic diagram illustrating how windings 64 and 66 are guided parallel to each other through through-holes 68 in core 62. The printed conductors of windings 64 and 66 are also spaced apart from each other in the region of through-hole 68 and also spaced apart from the corresponding walls of through-hole 68. Figure 9 It can also be seen that the windings on both the lower and upper sides of the core are spaced apart from the upper or lower side of the core 62. Therefore, the printed conductors of windings 64 and 66 are also electrically insulated from the core 62 on the upper or lower side of the core. Not only on the upper and lower sides of the core 62, but also in the area of the through hole 68, the gaps between the printed conductors of windings 64 and 66 and the core 62 can be filled with an electrically insulating material, such as plastic.
[0040] Figures 8 to 11 The inductor component 60 is manufactured using thin-film technology.
[0041] Figure 12 A top view of an inductor component 70 according to another embodiment of the invention is shown. Component 70 is configured as a so-called microstrip coil and has a magnetic core 72 and a winding 74 that is guided through the core 72 in the region of four through-holes 78.
[0042] Figure 12 A view of the upper side of the inductor component 70 is shown, and Figure 13 A view of the lower side of the inductor 70 is shown.
[0043] exist Figure 13 In the area of the perforation 78 arranged at the top or bottom, there is a connection contact (not shown) for electrical contact with the winding 74.
[0044] As in Figures 8 to 11 As with the inductor 60, the winding 74 is electrically insulated from the core 72 not only in the area of the perforation 78 but also in the section guided parallel to the upper or lower side of the core 72.
[0045] Figure 14 Show Figure 12 and 13 A schematic segmental cross-sectional view of the inductor component 70. A plate-like core 72 can be seen, having two through-holes 78 in the form of so-called through-contacts or vias. A winding 74 is guided through the core 72 in the region of the through-holes 78. The winding 74 is arranged electrically insulated from the core 72 in the region of the through-holes 78, and is also spaced apart from and electrically insulated relative to the upper or lower side of the core 72 in the following sections: in which the winding 74 is guided parallel to the upper or lower side of the core 72. This can be achieved, for example, by means of a plastic layer disposed between the upper or lower side of the core 72 and the corresponding section of the winding 74, and also between the winding 74 and the corresponding wall of the through-holes 78 in the region of the through-holes 78.
[0046] Figure 15 A top view of another inductor component 80 according to the invention is shown. The inductor component 80 is configured as a so-called microstrip coil. In the case of the inductor component 80, the winding 84 is partially guided through a perforation 88 in the plate-shaped core 82, and... Figure 15 The upper edge of SMIC 82 and at Figure 15 At the lower edge of the core 82, outside the core 82, the winding is guided from the upper side of the core 82 to the lower side or from the lower side to the upper side. The guidance of the winding 84 in the region of the upper or lower edge of the core 82 is called so-called winding.
[0047] Figure 16 Show Figure 15 A segmented schematic side view of the inductor component 80. It can be seen how the winding 84 is guided through... Figure 16 The perforation 88, indicated by the dashed line, and the winding 84 surrounding the core 82 outside the core 82. Figure 15 and Figure 16 The lower edge of the center is guided.
[0048] The inductor component 80 is also manufactured using thin-film technology.
Claims
1. An inductor (10) manufactured using thin-film technology, having a substrate (12), a magnetic core (14), and a winding (16), wherein at least one first segment (50, 54) of the winding (16) is disposed on an upper side of the core (14), and at least one second segment (52, 56) of the winding (16) is disposed on a lower side of the core (14), characterized in that, The core (14) has at least one through hole (28, 30, 32), and the winding (16) extends through the through hole (28, 30, 32).
2. The inductor component (10) according to claim 1, characterized in that, The winding (16) is guided through the perforations (28, 30, 32) in a manner that is electrically insulated from the core.
3. The inductor component (10) according to claim 2, characterized in that, In the region of the perforations (28, 30, 32), an electrical insulating material is arranged between the winding (16) and the core (14).
4. The inductor according to at least one of the preceding claims, characterized in that, The winding (16) has printed conductors (40, 42) applied to the substrate (12) using thin film technology, and has through contacts through the core (14) in the region of the perforations (28, 30, 32) of the core.
5. The inductor (10) according to at least one of the preceding claims, characterized in that, The winding (16) is guided from the upper side of the core (14) to the lower side of the core (14) and vice versa, only through the perforations (28, 30, 32) in the core.
6. The inductor (10) according to at least one of claims 1 to 4, characterized in that, The winding (16) is guided from the upper side of the core (14) to the lower side of the core (14) and vice versa, not merely through the perforations (28, 30, 32) in the core.
7. The inductor (10) according to any one of the preceding claims, characterized in that, The winding (16) extends in a spiral shape, especially in a circular spiral shape, or in a polygonal, oval, elliptical, or spiral shape.
8. The inductor component (10) according to claim 5, characterized in that, The winding (16) has multiple segments (50, 52, 54, 56), particularly four segments, each of which extends over a portion of 360 degrees of the helix, particularly 90 degrees, and wherein segments (50, 52, 54, 56) that are adjacent to each other in the circumferential direction are arranged on different sides of the core (14).
9. The inductor (10) according to at least one of the preceding claims, characterized in that, The winding (16) is formed at least in sections by means of at least two printed conductors (40, 42) arranged parallel to each other, and the inductor is configured as a transformer.