Organic photoresist component online electrochemical degradation and alkalinity maintaining device

By integrating pretreatment, online electrochemical degradation, and dynamic alkalinity maintenance, the problems of low degradation efficiency and unstable alkalinity in the treatment of organic photoresist wastewater have been solved, achieving stable electrode operation and continuous wastewater treatment, and reducing operating costs.

CN122380609APending Publication Date: 2026-07-14SHANGHAI YIDING ELECTRONIC SYST INTEGRATION CO LTD
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Patent Information

Application Number
CN202610864838.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-16
Publication Date
2026-07-14

AI Technical Summary

Technical Problem

Existing organic photoresist wastewater treatment devices suffer from problems such as low degradation efficiency, unstable alkalinity, easy electrode wear, and inability to perform continuous treatment. In addition, the equipment occupies a large area, is cumbersome to operate, and has high operating costs.

Method used

Design a device that integrates pretreatment, online electrochemical degradation, dynamic alkalinity maintenance, and product separation. The device includes a pretreatment unit, an online electrochemical degradation unit, a dynamic alkalinity maintenance unit, and a product separation unit. It achieves automated linkage through a PLC control system, uses corrosion-resistant pipes to connect the units, and uses titanium-based ruthenium-iridium coated electrodes and graphite cathodes in conjunction with aeration and stirring. The pH is adjusted by using a sodium hydroxide-sodium carbonate compound alkaline solution.

Benefits of technology

It improves the degradation efficiency of organic photoresist components, stabilizes alkalinity, extends electrode life, realizes continuous online treatment of wastewater, and reduces operating costs and equipment footprint.

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Abstract

The invention relates to the technical field of organic photoresist wastewater treatment, in particular to an organic photoresist component online electrochemical degradation and alkalinity maintaining device which comprises a pretreatment unit, an online electrochemical degradation unit, a dynamic alkalinity maintaining unit, a product separation unit and a PLC (programmable logic controller) control system which are sequentially connected through corrosion-resistant pipelines. The pretreatment unit is used for removing solid particles, suspended impurities, macromolecular organic matters and part of additives in the wastewater; the online electrochemical degradation unit adopts a bipolar electrolytic cell structure, is internally provided with a titanium-based ruthenium iridium coating anode and a graphite cathode, and is used for performing electrochemical oxidative degradation on organic photoresist components; the dynamic alkalinity maintaining unit is used for stably maintaining the pH value of the wastewater at 8.5-10.5 by adopting sodium hydroxide-sodium carbonate compound alkali liquor and combining pH online monitoring and PLC linkage adjustment; and the product separation unit is used for separating degradation products, precipitates and trace impurities.
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