Pressure self-balancing type split blade mounting rack of mup split blade machine

By combining gas and liquid buffer components, the impact buffering problem of the MUP dicing machine when cutting brittle and hard materials is solved, achieving stability of cutting pressure and continuous stability of the equipment, and improving the quality of dicing processing.

CN122401658APending Publication Date: 2026-07-17SUZHOU WCD SMART EQUIP CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SUZHOU WCD SMART EQUIP CO LTD
Filing Date
2026-06-18
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

The existing MUP splitting machine's blade mounting frame cannot effectively buffer instantaneous impact forces when cutting brittle and hard materials, resulting in vibration transmission and affecting cutting stability and the yield of splitting pieces.

Method used

By employing the coordinated operation of gas buffer components, isolation pistons, liquid buffer components, metal bellows, and floating support components, multi-stage buffering absorbs impact forces and reduces vibration transmission through the elastic compression and viscous energy dissipation of gas and liquid.

Benefits of technology

It improves the uniformity and stability of cutting pressure, reduces the probability of material chipping and breakage, and increases the pass rate of splitting processing and the long-term stability of the equipment.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN122401658A_ABST
    Figure CN122401658A_ABST
Patent Text Reader

Abstract

本发明涉及晶圆裂片设备技术领域,具体为一种mup裂片机的压力自均衡式裂刀安装架,包括切割台、刀具安装架、切割裂刀以及驱动电机,还包括气体缓冲组件、隔离活塞、液体缓冲组件、金属波纹管以及浮动支撑组件,所述气体缓冲组件安装在驱动电机的下方,且其位于切割裂刀的上方;本发明通过气体缓冲组件、隔离活塞、液体缓冲组件、金属波纹管以及浮动支撑组件协同配合的方式,解决了现有裂刀安装架对接触瞬间冲击力缓冲能力不足的问题,具有良好的冲击缓冲吸收效果,保证切割压力的均匀稳定,降低切割过程中材料崩边、碎裂的概率,提升裂片加工的合格率。
Need to check novelty before this filing date? Find Prior Art