Label-free optical sensing scanning measurement device and measurement method based on near-infrared band
By using a labelless optical sensing scanning measurement device based on the near-infrared band, near-infrared light is used to penetrate the light-blocking layer on the standard mirror, enabling large-range in-situ absolute distance measurement with nanometer-level precision. This solves the problems of process complexity and design conflicts caused by the marking structure in the existing technology.
CN122408640APending Publication Date: 2026-07-17INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI
- Filing Date
- 2026-05-20
- Publication Date
- 2026-07-17
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Figure CN122408640A_ABST
Abstract
本公开提供了一种基于近红外波段的无标记光学传感扫描测量装置，包括：照明光源，用于产生近红外光；光路组件，用于将近红外光入射至一测量目标，并将由测量目标产生的干涉光引导至传感处理模块；传感处理模块，用于根据干涉光，计算干涉光包含的距离信息，距离信息表示标准镜和目标基片之间的距离；测量目标包括一标准镜和一目标基片；近红外光入射至标准镜后，一部分被标准镜的表面反射形成第一反射光，另一部分穿透标准镜并被目标基片表面反射，形成第二反射光；第二反射光返回并穿透标准镜后，与第一反射光发生干涉，形成干涉光。本公开还提供了一种测量方法。
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