Improved method and system for measuring high precision surface reconstruction with discontinuous interfaces

By combining phase shift, radial basis function, and global least squares stitching method with residual-driven iterative optimization strategy, the error problem in the reconstruction of discontinuous interface surfaces is solved, and high-precision surface reconstruction effect is achieved.

CN122415702APending Publication Date: 2026-07-17SUZHOU RUIFEI PHOTOELECTRIC TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SUZHOU RUIFEI PHOTOELECTRIC TECH CO LTD
Filing Date
2026-04-07
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies suffer from large surface reconstruction errors or failures when dealing with discontinuous interfaces in semiconductor packaging, especially when using least squares solutions, which cannot achieve high-precision reconstruction.

Method used

The phase value of the wrapping of discontinuous interfaces is obtained by phase shifting, the continuous phase gradient is recovered by radial basis function, the mapping relationship between gradient and phase is constructed, the discontinuity between local sub-faces is minimized by global least squares stitching method, and the surface is reconstructed by residual-driven iterative optimization strategy.

Benefits of technology

It achieves high-precision reconstruction of discontinuous interface surfaces, effectively suppresses error propagation, and improves reconstruction accuracy, especially in the presence of noise and mesh distortion.

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Abstract

The application relates to the field of high-precision phase unwrapping technology and discloses a high-precision surface reconstruction method and system for improving measurement of a discontinuous interface, which comprises the following steps: obtaining wrapped phase values at the edge of a perforation with a discontinuous interface in a phase shift mode and obtaining continuous phase values; restoring the continuous phase values into continuous phase gradients by using a radial basis function, constructing a mapping relationship formula between the gradients and the phases, and solving the mapping relationship formula to obtain a preliminarily reconstructed surface; dividing a global domain of the perforation into a plurality of sub-apertures to obtain a preliminarily reconstructed local sub-surface; minimizing the discontinuity of an overlapping area between the preliminarily reconstructed local sub-surfaces by using a global least square stitching method to obtain a continuous global surface; and iteratively optimizing the phase distribution of the continuous global surface by using an iterative optimization strategy based on residual driving to obtain a finally reconstructed surface. The application can realize high-precision reconstruction of an optical surface with a discontinuous interface at the edge of a perforation.
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