Package structure and manufacturing method thereof

By forming shielding pillars and shielding layers on the wafer, the problems of protective adhesive overflowing onto the solder ball surface and unstable RF chip signals are solved, improving the performance and reliability of the packaging structure and reducing costs.

CN122421779APending Publication Date: 2026-07-17SJ SEMICONDUCTOR (JIANGYIN) CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SJ SEMICONDUCTOR (JIANGYIN) CORP
Filing Date
2025-01-15
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In existing small-size packaging structures, the protective adhesive easily overflows onto the surface of the solder balls, affecting electrical connections and causing unstable RF chip signals, resulting in poor performance and reliability of the packaging structure.

Method used

During the packaging process, a first wiring layer is formed on the upper surface of the wafer, and shielding pillars and interconnect pillars are formed around the bonding area. After the second chip is bonded, a packaging layer and a shielding layer are formed. The shielding layer and the shielding pillars form a shielding cover, and finally conductive bumps are formed to avoid the use of transfer boards and wafer dicing.

Benefits of technology

It improves the yield and reliability of the packaging structure, shields electromagnetic interference, ensures signal stability, and reduces costs.

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Abstract

本发明提供一种封装结构及其制作方法,该封装结构的制作方法包括以下步骤:提供一包括第一芯片的晶圆,于晶圆上表面形成与第一芯片电连接且上表面设有键合区的第一布线层;于第一布线层上表面形成环绕键合区的屏蔽柱及与第一布线层电连接的互连柱;提供一第二芯片,将第二芯片键合至键合区,并形成封装层;形成位于第二芯片正上方并与屏蔽柱固定连接的屏蔽层;于封装层及屏蔽罩的上表面形成与互连柱电连接的第二布线层,并形成与第二布线层电连接导电凸块;切割封装后的晶圆以得到单个封装结构。本发明通过改进封装工艺,并于第二芯片的外围形成由屏蔽柱和屏蔽层,避免了封装胶影响导电凸块的性能,提升了封装结构的可靠性,屏蔽了电磁干扰。
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