High purity target cleaning machine

Abstract

The present application relates to the technical field of target material cleaning, and specifically relates to a high-purity target material cleaning machine, which comprises a profile box body, a water supply assembly, a sewage treatment assembly, a box door assembly, a cleaning treatment assembly and a gas supply module, the water supply assembly, the sewage treatment assembly, the box door assembly, the cleaning treatment assembly and the gas supply module are arranged on the profile box body, the cleaning treatment assembly comprises a conical box shell, and a water outlet is arranged at one end of the conical box shell; the present application provides an innovative gas-liquid composite cleaning structure, a cleaning assembly comprising a U-shaped water spray pipe and a U-shaped air spray pipe is arranged, and is connected with the water supply assembly and the gas supply module respectively, and is matched with a fan-shaped spray head, so that the high-pressure liquid and the high-pressure gas can be sprayed cooperatively, the gas-liquid-gas composite spraying mode can form the superposition effect of impact, stripping and blowing on the surface of the target material, the removal efficiency and the cleanliness of various pollutants on the surface of the high-purity target material are effectively improved, and the film coating quality defects caused by incomplete cleaning are avoided.

Description

Technical Field

[0001] This invention relates to the field of target cleaning technology, and more specifically to a high-purity target cleaning machine. Background Technology

[0002] Sputtering targets are core consumables in physical vapor deposition (PVD) processes such as sputtering, and are typically made of high-purity metals or compounds. During sputtering, the target surface can become contaminated with residual processing oil, oxides, particulate impurities, or reaction products from previous uses. If used directly without cleaning, these contaminants will mix into the film, leading to decreased film purity, weakened adhesion, and defects such as pinholes or component segregation. Therefore, the target surface must be rigorously cleaned before use or when reused to ensure coating quality and yield.

[0003] Currently, some preliminary devices have emerged in this field, such as an automatic target cleaning device with application number CN202420891418.5 and authorization announcement date of 20250325. This automatic target cleaning device includes a target placement rack, a cleaning tank, a circulating water pump, a filtration unit, and a spraying unit. The target placement rack supports the targets to be cleaned; the cleaning tank is located below the target placement rack, and the cleaning solution falls into the cleaning tank after cleaning the targets; the inlet of the circulating water pump is connected to the outlet of the cleaning tank; the inlet of the filtration unit is connected to the outlet of the circulating water pump and is used to filter the cleaning solution in the cleaning tank; the inlet of the spraying unit is connected to the outlet of the filtration unit, and the spraying unit is located above the target placement rack to spray the cleaning solution onto the targets placed on the rack. This automatic target cleaning device can filter and recycle the cleaning solution, reducing the cost of target cleaning. Furthermore, it has a simple structure and low equipment cost.

[0004] For example, a planar target cleaning vehicle with application number CN202311173959.0 and authorization announcement date of 20260227 relates to the field of cleaning vehicle technology. It includes a cleaning tank with a cleaning mechanism. The cleaning mechanism includes multiple rotatable cleaning rollers arranged in parallel, in even numbers. These rollers are divided into two equal groups from the middle. Within each group, the rollers rotate in the same direction, while outside the group, they rotate in opposite directions. In use, a planar target is placed centrally on the two groups of cleaning rollers in the cleaning mechanism. The target is then rinsed, and water flows down the target onto the cleaning rollers. Since the two groups of cleaning rollers rotate in opposite directions, the position of the target remains stable. During the rotation of the cleaning rollers, a frictional force is generated on the bottom of the target, thus cleaning the bottom of the target along with the water flow. This achieves the goal of thoroughly cleaning the target without flipping it over.

[0005] However, existing technologies and commonly used cleaning devices have limited cleaning methods, relying solely on liquid spraying or water rinsing. They cannot combine gas and liquid to form a gas-liquid composite cleaning process, and thus have limited ability to remove stubborn oil stains, oxides, and particulate impurities from the target surface. Therefore, there is an urgent need to design a high-purity target cleaning machine to solve the above problems. Summary of the Invention

[0006] The purpose of this invention is to provide a high-purity target cleaning machine to overcome the above-mentioned shortcomings in the prior art.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] A high-purity target cleaning machine includes a profile box, a water supply component, a sewage treatment component, a box door component, a cleaning component, and an air supply module, wherein the water supply component, sewage treatment component, box door component, cleaning component, and air supply module are mounted on the profile box.

[0009] The cleaning treatment component includes a conical shell, with a water outlet at one end, an observation port on one outer wall of the conical shell, a fixture assembly inside the conical shell, and a cleaning assembly on one side of the inner wall of the conical shell.

[0010] The fixture assembly includes four support rods and four pads. The bottom ends of the four support rods are fixed to the inside of the conical box shell by bolts. Support plates are bolted to the top of the four support rods, and an installation opening is provided at the center of one side of the top of the support plate. The top of the support plate has four sets of mounting holes arranged in a circular array around the mounting opening, with three mounting holes in each set. The four pads are respectively bolted to the four mounting holes in the four sets of mounting holes. Mounting blocks are bolted to the top of each of the four pads, and supporting conical blocks are bolted between the four mounting blocks.

[0011] The cleaning assembly includes a support plate, a push cylinder, four clamps, a U-shaped water spray pipe, and a U-shaped air spray pipe. The support plate is bolted to the inner wall of the conical housing opposite the observation port. The push cylinder is bolted to the outer wall of the conical housing. Two guide rails are bolted to the outer wall of the support plate, and a sliding seat is slidably installed between the two guide rails. The U-shaped air spray pipe is bolted to the outer wall of the sliding seat via two clamps. The U-shaped water spray pipe is bolted to the outer wall of the sliding seat near the U-shaped air spray pipe via the other two clamps. Connecting pipes are inserted into the outer walls of both the U-shaped air spray pipe and the U-shaped water spray pipe. An air supply pipe is bolted to one end of the connecting pipe at the U-shaped air spray pipe, and a water supply pipe is bolted to one end of the connecting pipe at the U-shaped water spray pipe. The water supply pipe and the air supply pipe slide through the conical housing. Several fan-shaped nozzles are threaded onto both sides of the inner wall of the U-shaped air spray pipe and the U-shaped water spray pipe. The air supply module is connected to the air supply pipe via a pipeline.

[0012] Furthermore, the water supply assembly includes a water storage tank, which is bolted inside the profile housing, and three liquid level sensors are embedded in one outer wall of the water storage tank.

[0013] Furthermore, a cover plate is bolted to the top of the water storage tank, and two water injection holes are opened on one side of the top of the cover plate.

[0014] Furthermore, the water supply assembly also includes a water supply pump, which is bolted inside the profile housing near the water storage tank. The water supply pump is connected to the water storage tank and the water delivery pipe via pipes.

[0015] Furthermore, the wastewater treatment component includes a wastewater tank and a second water supply pump. The wastewater tank is bolted inside the profile housing, and the second water supply pump is bolted inside the profile housing near the wastewater tank. The second water supply pump is connected to the wastewater tank and a U-shaped spray pipe through pipes. The wastewater tank is located directly below the outlet at the conical end of the conical housing. An installation groove is provided on one side of the outer wall of the wastewater tank.

[0016] Furthermore, a sliding cover is slidably inserted into the mounting groove, and a number of filter ports arranged in a linear array are opened on the outer wall of one side of the top of the sliding cover. Filter screens are bolted inside the filter ports, and a handle is bolted to the outer wall of one side of the sliding cover.

[0017] Furthermore, the door assembly includes two slide rails and two support seats. The two slide rails are bolted to one side of the outer wall of the profile box, and the two support seats are respectively bolted to the top of the profile box on both sides. The top bolts of the two support seats are equipped with translation cylinders.

[0018] Furthermore, a door panel is slidably installed between the two slide rails. The door panel can cover the observation port on one side of the conical box shell. A connecting rod is bolted to the outer wall of one side of the door panel. The connecting rod is installed together with the output end of the translation cylinder by bolts.

[0019] Furthermore, an elongated hole is provided on one side of the top of the profile box, and the connecting rod passes through the elongated hole and is slidably disposed inside the elongated hole.

[0020] Furthermore, a laser displacement sensor is bolted to one side of the outer wall of the box door panel, and the laser displacement sensor is positioned directly opposite the fixture assembly.

[0021] The high-purity target cleaning machine provided by the present invention, as described above, has the following advantages:

[0022] (1) This invention provides an innovative gas-liquid composite cleaning structure. By setting up a cleaning component including a U-shaped water spray pipe and a U-shaped air spray pipe, and connecting them to the water supply component and the air supply module respectively, and with the fan-shaped nozzle, it can realize the coordinated spraying of high-pressure liquid and high-pressure gas. This gas-liquid-gas composite spraying method can form a superposition effect of impact, peeling and purging on the surface of the target material, effectively improving the removal efficiency and cleanliness of various pollutants on the surface of high-purity target materials, and avoiding coating quality defects caused by incomplete cleaning.

[0023] (2) The U-shaped water spray pipe and U-shaped air spray pipe of the present invention are both designed with a U-shaped structure and can be driven by a push cylinder to slide on the guide rail. During the sliding process, the U-shaped water spray pipe and U-shaped air spray pipe can perform mobile spray cleaning from the upper and lower sides of the target material. This mobile cleaning method can eliminate cleaning dead angles and ensure the uniformity of coverage of the target material's conical surface, end face and complex curved surface cleaning, greatly improving the consistency and comprehensiveness of cleaning.

[0024] (3) The outlet at the bottom of the conical shell of the present invention is directly opposite the sewage tank. During cleaning, the sliding cover with filter screen can quickly collect and perform primary filtration of the wastewater after cleaning. The filtered water can be pumped back into the U-shaped spray pipe for circulating cleaning by the second water supply pump. This method effectively saves water resources and reduces the cleaning cost of high-purity target materials. At the same time, the sliding structure also facilitates the cleaning and replacement of the filter screen, improving the maintenance convenience of the equipment.

[0025] (4) By setting up an automated door assembly, combined with a translation cylinder, slide rail and laser displacement sensor, the present invention realizes the automatic opening and closing of the cleaning chamber and the accurate detection of the target material position. Moreover, the laser displacement sensor can monitor in real time whether there is a target material on the fixture assembly and its placement status, ensuring that the cleaning action is performed in a safe and accurate position, avoiding dry spraying or misoperation, and further improving the intelligence level and operational safety of the equipment.

[0026] (5) The pad of the present invention can be fixed by selecting different mounting holes according to actual needs, thereby flexibly adjusting the radial position of the four mounting blocks, so that the same cleaning machine can stably support high-purity target materials of different diameters, different tapers or different sizes, and can achieve rapid switching without changing the fixture, which greatly improves the versatility and compatibility of the equipment and reduces the tooling cost of cleaning multi-specification target materials. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0028] Figure 1 This is a three-dimensional structural schematic diagram of an embodiment of the high-purity target cleaning machine of the present invention.

[0029] Figure 2 This is a schematic diagram of the profile box, water supply component, sewage treatment component, and door component provided in an embodiment of the high-purity target cleaning machine of the present invention.

[0030] Figure 3 This is a schematic diagram of the water supply component structure provided in an embodiment of the high-purity target cleaning machine of the present invention.

[0031] Figure 4 This is a schematic diagram of the wastewater treatment component structure provided in an embodiment of the high-purity target cleaning machine of the present invention.

[0032] Figure 5 This is a schematic diagram of the door assembly structure provided in an embodiment of the high-purity target cleaning machine of the present invention.

[0033] Figure 6 This is a schematic diagram of the cleaning and processing component structure provided in an embodiment of the high-purity target cleaning machine of the present invention.

[0034] Figure 7 This is a side view of the cleaning component provided in an embodiment of the high-purity target cleaning machine of the present invention.

[0035] Figure 8 This is a schematic diagram of the fixture assembly structure provided in an embodiment of the high-purity target cleaning machine of the present invention.

[0036] Figure 9 This is a schematic diagram of the cleaning component structure provided in an embodiment of the high-purity target cleaning machine of the present invention.

[0037] Explanation of reference numerals in the attached figures:

[0038] 1. Profile housing; 2. Long slot; 3. Water supply assembly; 4. Sewage treatment assembly; 5. Door assembly; 6. Cleaning assembly; 7. Air supply module; 8. Water storage tank; 9. Cover plate; 10. Water injection hole; 11. Water supply pump one; 12. Three liquid level sensors; 13. Sewage tank; 14. Water supply pump two; 15. Mounting slide; 16. Sliding cover; 17. Filter port; 18. Filter screen; 19. Handle; 20. Slide rail; 21. Door panel; 22. Laser displacement sensor; 23. Support base; 24. Translation air... 25. Cylinder; 26. Connecting rod; 27. Conical housing; 28. Observation port; 29. ​​Fixture assembly; 30. Cleaning assembly; 31. Water outlet; 32. Support rod; 33. Support plate; 34. Mounting port; 35. Support cone block; 36. Mounting hole; 37. Pad; 38. Mounting block; 39. Support plate; 40. Guide rail; 41. Sliding seat; 42. Push cylinder; 43. Hoop ring; 44. U-shaped jet pipe; 45. U-shaped water spray pipe; 46. Fan-shaped nozzle; 47. Connecting pipe; 48. Water supply pipe; 49. Air supply pipe. Detailed Implementation

[0039] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0040] like Figure 1-8 As shown, the high-purity target cleaning machine provided in this embodiment of the invention includes a profile box 1, a water supply component 3, a sewage treatment component 4, a box door component 5, a cleaning treatment component 6, and an air supply module 7. The water supply component 3, the sewage treatment component 4, the box door component 5, the cleaning treatment component 6, and the air supply module 7 are disposed on the profile box 1.

[0041] The cleaning treatment component 6 includes a conical shell 26, with a water outlet 30 at one end of the conical shell 26, an observation port 27 on one outer wall of the conical shell 26, a fixture component 28 inside the conical shell 26, and a cleaning component 29 on one side of the inner wall of the conical shell 26.

[0042] The fixture assembly 28 includes four support rods 31 and four pads 36. The bottom ends of the four support rods 31 are fixed inside the conical housing 26 by bolts. Support plates 32 are bolted to the top of the four support rods 31. An installation port 33 is opened at the center of one side of the top of the support plate 32. Four sets of mounting holes 35 are arranged in a ring array around the mounting port 33 on the top of the support plate 32. Each set of mounting holes 35 has three holes. The four pads 36 are respectively bolted into the four mounting holes 35 in the four sets of mounting holes 35. Mounting blocks 37 are bolted to the top of each of the four pads 36. Support conical blocks 34 are bolted between the four mounting blocks 37.

[0043] The cleaning assembly 29 includes a support plate 38, a push cylinder 41, four clamps 42, a U-shaped water spray pipe 44, and a U-shaped air jet pipe 43. The support plate 38 is bolted to the inner wall of the conical housing 26 opposite to the observation port 27. The push cylinder 41 is bolted to the outer wall of the conical housing 26. Two guide rails 39 are bolted to the outer wall of the support plate 38, and a sliding seat 40 is slidably installed between the two guide rails 39. The U-shaped air jet pipe 43 is bolted to the outer wall of the sliding seat 40 via two of the clamps 42. The U-shaped water spray pipe 44 is installed via the other two clamps 42. Near the U-shaped jet pipe 43 on one side of the outer wall of the sliding seat 40, a connecting pipe 46 is inserted into one side of the outer wall of both the U-shaped jet pipe 43 and the U-shaped water spray pipe 44. An air supply pipe 48 is bolted to one end of the connecting pipe 46 at the U-shaped jet pipe 43, and a water supply pipe 47 is bolted to one end of the connecting pipe 46 at the U-shaped water spray pipe 44. The water supply pipe 47 and the air supply pipe 48 slide through the conical box shell 26. Several fan-shaped nozzles 45 are threaded on both sides of the U-shaped inner wall of the U-shaped jet pipe 43 and the U-shaped water spray pipe 44. The air supply module 7 is connected to the air supply pipe 48 through a pipe.

[0044] Specifically, in this embodiment, it includes a profile box 1, a water supply component 3, a sewage treatment component 4, a box door component 5, a cleaning treatment component 6, and an air supply module 7. The water supply component 3, the sewage treatment component 4, the box door component 5, the cleaning treatment component 6, and the air supply module 7 are disposed on the profile box 1.

[0045] in:

[0046] The profile box 1 serves as the frame-type main structure of the whole machine, used to install and support all sub-components such as water supply component 3, sewage treatment component 4, box door component 5, cleaning treatment component 6 and air supply module 7, ensuring the overall rigidity of the equipment and the internal cleaning space.

[0047] The water supply component 3 is a subsystem that provides the high-pressure cleaning fluid required for the cleaning process. It includes functions such as liquid storage, liquid level monitoring and liquid supply pumping, and delivers the cleaning fluid to the U-shaped spray pipe 44 as needed through pipelines.

[0048] Wastewater treatment component 4 collects wastewater containing impurities that flows out of the conical tank shell 26 after cleaning, stores it after primary filtration, and can be re-transported to the U-shaped spray pipe 44 by water supply pump 2 14 to achieve circulating cleaning, save water and reduce emissions.

[0049] The door assembly 5 enables the automatic opening and closing of the observation port 27 in the cleaning chamber, providing a channel for the placement and removal of the target material. It also integrates a position detection function to ensure that cleaning can only be performed when the chamber is safely closed.

[0050] The cleaning unit 6, as the core cleaning unit of the entire equipment, provides a closed cavity for accommodating the target material and performing gas-liquid composite jet cleaning. It includes all components that directly perform the cleaning action, such as fixture support, nozzle movement, and drainage.

[0051] The gas supply module 7 is preferably a commonly used SMC air conditioning combination, which can provide a source of clean high-pressure gas. After pressure regulation and filtration, the gas is supplied to the gas delivery pipe 48 through the pipeline, driving the U-shaped jet pipe 43 to perform pneumatic purging and auxiliary drying.

[0052] The metal structures of the profile box 1, water supply component 3, sewage treatment component 4, box door component 5, cleaning treatment component 6, and air supply module 7 are mostly made of stainless steel.

[0053] The cleaning assembly 6 includes a conical housing 26, which forms a conical cavity that is wider at the top and narrower at the bottom. This allows splashed liquid during the cleaning process to quickly collect and drain at the bottom outlet 30. It also provides a mounting base for the fixture assembly 28 and the cleaning assembly 29. One end of the conical housing 26 has an outlet 30 located at the bottom, used to collect the wastewater after cleaning and guide it by gravity onto the sliding cover 16 of the wastewater tank 13, ensuring no liquid accumulation inside the cavity. An observation port 27 is provided on one outer wall of the conical housing 26. This observation port 27 serves as a target loading and unloading channel and can also be equipped with an observation window to monitor the cleaning process. The conical shell 26 is sealed by the door panel 21 to form a closed cavity. The conical shell 26 is equipped with a jig assembly 28, which is used to accurately position and support the target material to be cleaned inside the conical shell 26. Through adjustable point contact support, it can adapt to targets with different tapers and diameters and ensure that the target material is stable and does not shift under the impact of gas and liquid jet. A cleaning assembly 29 is provided on one side of the inner wall of the conical shell 26. The cleaning assembly 29 performs specific jet cleaning actions. The push cylinder 41 drives the U-shaped water spray pipe 44 and the U-shaped air jet pipe 43 to move back and forth on the guide rail 39 to achieve full coverage gas and liquid composite cleaning of the upper and lower surfaces of the target material.

[0054] The jig assembly 28 includes four support rods 31 and four pads 36. The support rods 31 act as four vertical columns, raising the support plate 32 and the entire jig assembly 28 to a suitable position, placing the target material at the center of the nozzle's movement range. The pads 36 serve as transition blocks connecting the support plate 32 and the mounting block 37. By being fixed in different sets of mounting holes 35, they can move radially to adjust the position of the supporting conical block 34, achieving flexible adaptation of the jig. The bottom ends of the four support rods 31 are fixed to the inside of the conical housing 26 by bolts, and the support plate 32 is bolted to the top of the four support rods 31. The support plate 32 serves as a top mounting platform connecting the four support rods 31, providing a mounting reference surface for the pads 36, mounting blocks 37, and supporting conical blocks 34. Furthermore, a mounting opening 33 is provided at the center of one side of the top of the support plate 32, and the mounting opening 33 is a through-hole structure. To reduce weight and provide space at the bottom of the target, as well as to prevent liquid accumulation, the support plate 32 has four sets of mounting holes 35 arranged in a ring around the mounting opening 33. The mounting holes 35 are multiple sets of threaded holes distributed on the top surface of the support plate 32, used to select different radial positions for mounting pads 36, thereby accommodating targets of different diameters. Each set of mounting holes 35 has three holes, and the four pads 36 are respectively installed in the four mounting holes 35 in the four sets of mounting holes 35 by bolts. The top of each of the four pads 36 is bolted with a mounting block 37, which is fixed on the pad 36 and provides a horizontal mounting interface for the support cone block 34. The support cone block 34 is bolted between the four mounting blocks 37. The support cone block 34 is a load-bearing component that directly contacts the target. The cone surface of the support cone block 34 can fit with the cone surface of the target to achieve center positioning and stable support, and avoid scratching the target.

[0055] The cleaning assembly 29 includes a support plate 38, a pusher cylinder 41, four clamps 42, a U-shaped water spray pipe 44, and a U-shaped air jet pipe 43. The support plate 38 is bolted to the inner wall of the conical housing 26 opposite to the observation port 27. The support plate 38 serves as a mounting base for fixing two guide rails 39, forming a linear motion platform for the sliding seat 40. The pusher cylinder 41 is bolted to the outer wall of one side of the conical housing 26. The pusher cylinder 41 is preferably a CQ2B25-100, providing horizontal reciprocating power to push the sliding seat 40 to move along the guide rails 39, causing the U-shaped water spray pipe 44 and the U-shaped air jet pipe 43 to scan and clean the target material. Two guide rails 39 are bolted to the outer wall of one side of the support plate 38. The guide rail 39 serves as a parallel linear track, guiding the sliding seat 40 to slide smoothly. A sliding seat 40 is slidably installed between the two guide rails 39. The sliding seat 40 is a reciprocating mounting base used to fix the U-shaped jet pipe 43 and the U-shaped water spray pipe 44. The U-shaped jet pipe 43 is bolted to one side of the outer wall of the sliding seat 40 via two clamps 42. The U-shaped water spray pipe 44 is installed on one side of the outer wall of the sliding seat 40 near the U-shaped jet pipe 43 via the other two clamps 42. The clamps 42 are clamping elements used to firmly fix the U-shaped water spray pipe 44 and the U-shaped jet pipe 43 to the sliding seat 40 respectively. The U-shaped water spray pipe 44 is a liquid injection pipe with a U-shaped structure, through which… The fan-shaped nozzle 45 sprays high-pressure cleaning fluid, which works in conjunction with gas to achieve gas-liquid composite cleaning. One side of the nozzle has a connecting pipe 46 and a pipe connected to the water supply pump 14. The U-shaped jet pipe 43 is a gas injection pipe with a U-shaped structure. High-pressure airflow is blown through the fan-shaped nozzle 45 for impact stripping and drying. Connecting pipes 46 are inserted into the outer wall of both the U-shaped jet pipe 43 and the U-shaped water spray pipe 44. These connecting pipes 46 serve as intermediate transition sections, connecting the U-shaped water spray pipe 44 to the external water supply pipe 47 and the U-shaped jet pipe 43 to the air supply pipe 48, and can move with the sliding seat 40. An air supply pipe 48 is bolted to one end of the connecting pipe 46 at the U-shaped jet pipe 43 for air supply. Pipe 48 is used to supply high-pressure gas from the air supply module 7 to the connecting pipe 46 and the U-shaped jet pipe 43; a water supply pipe 47 is bolted to one end of the connecting pipe 46 at the U-shaped water spray pipe 44, and the water supply pipe 47 is used to supply cleaning fluid from the water supply pump 11 to the connecting pipe 46 and the U-shaped water spray pipe 44; the water supply pipe 47 and the air supply pipe 48 slide through the conical box shell 26, and several fan-shaped nozzles 45 are threaded on both sides of the U-shaped inner wall of the U-shaped jet pipe 43 and the U-shaped water spray pipe 44. The fan-shaped nozzles 45 are stainless steel fan-shaped nozzles that form a flat fan-shaped jet of liquid or gas, expand the spray coverage area, and improve the cleaning uniformity; the air supply module 7 is connected to the air supply pipe 48 through a pipe.

[0056] The high-purity target cleaning machine provided by this invention offers an innovative gas-liquid composite cleaning structure. By setting up a cleaning component 29 including a U-shaped water spray pipe and a U-shaped air spray pipe, and connecting them to a water supply component 3 and an air supply module 7 respectively, and in conjunction with a fan-shaped nozzle 45, it can achieve the coordinated spraying of high-pressure liquid and high-pressure gas. This gas-liquid-gas composite spraying method can form a superimposed effect of impact, peeling and purging on the target surface, effectively improving the removal efficiency and cleanliness of various contaminants on the surface of high-purity target materials, and avoiding coating quality defects caused by incomplete cleaning.

[0057] In one embodiment provided by the present invention, such as Figure 3 As shown, the water supply assembly 3 includes a water storage tank 8, which is bolted inside the profile housing 1. The water storage tank 8 stores sufficient deionized water or special cleaning solution to provide a stable liquid source for the water supply pump 11, ensuring continuous cleaning. Three level sensors 12 are embedded in the outer wall of one side of the water storage tank 8. The level sensors 12 are preferably capacitive level gauges. The three level sensors 12 detect the high, medium, and low liquid levels of the water storage tank 8 respectively and output signals to the control system for preventing overflow, providing replenishment reminders, and protecting against pump stoppage due to low liquid levels. A cover plate 9 is bolted to the top of the water storage tank 8, sealing the top of the water storage tank 8 to prevent external dust from entering. The particles fall into the cleaning solution, keeping the liquid source clean; and two water injection holes 10 are opened on one side of the top of the cover plate 9. The water injection holes 10 are liquid filling ports, used to replenish the cleaning solution in the water storage tank 8; the water supply component 3 also includes a water supply pump 11. The water supply pump 11 is preferably a CDLF2-4 or SWP-10 series from Southern Pump Industry. The water supply pump 11 is bolted to the inside of the profile box 1 near the water storage tank 8. The water supply pump 11 is connected to the water storage tank 8 and the water supply pipe 47 through pipes respectively. The water supply pump 11 pressurizes the cleaning solution in the water storage tank 8 and then delivers it to the U-shaped spray pipe 44 through the water supply pipe 47, providing the pressure and flow required for liquid spraying.

[0058] In another embodiment provided by the present invention, such as Figure 4As shown, the wastewater treatment component 4 includes a wastewater tank 13 and a second water supply pump 14. The wastewater tank 13 is bolted inside the profile housing 1 and is used to contain all the cleaning wastewater flowing out of the outlet 30, serving as a wastewater storage and primary sedimentation container. Like the water storage tank 8, the wastewater tank 13 is also equipped with three leveling elements. The second water supply pump 14 is bolted inside the profile housing 1 near the wastewater tank 13. The second water supply pump 14 is preferably a CDLF2-4 or SWP-10 series pump from Southern Pump Industry. It is connected to the wastewater tank 13 and the U-shaped spray pipe 44 via pipes. The second water supply pump 14 repressurizes the circulating water that has undergone primary filtration in the wastewater tank 13 and sends it back to the U-shaped spray pipe 44 for reuse, thus achieving cleaning fluid circulation. The wastewater tank 13 is located directly below the outlet 30 at the conical end of the conical housing 26. An installation groove 15 is provided on one side of the outer wall of the wastewater tank 13. The installation groove 15 serves as... The guide groove is used for sliding insertion of the sliding cover 16, which facilitates the quick installation, disassembly, and maintenance of the filter screen 18 unit. The sliding cover 16 is slidably inserted into the installation groove 15. The sliding cover 16 is a pull-out cover plate that integrates multiple water inlets 17 and filter screens 18. It receives wastewater flowing down from the outlet 30 and intercepts and filters large particles of impurities. It can be pulled out for cleaning. Several water inlets 17 are arranged in a linear array on the outer wall of one side of the top of the sliding cover 16. The water inlets 17 guide the wastewater through the filter screens 18, so that the water flow is dispersed and the impact on the filter screens 18 is reduced. The filter screens 18 are bolted inside the water inlets 17. The filter screens 18 are embedded in the water inlets 17 to perform primary filtration of the cleaning waste liquid, intercept large particles, and prevent blockage of subsequent pipelines and pumps. A handle 19 is bolted to one side of the outer wall of the sliding cover 16. The handle 19 makes it convenient for operators to pull out the sliding cover 16 to clean or replace the filter screens 18.

[0059] In another embodiment provided by the present invention, such as Figure 1-2 and Figure 5As shown, the door assembly 5 includes two slide rails 20 and two support seats 23. The two slide rails 20 are bolted to the outer wall of one side of the profile housing 1. The slide rails 20 provide precise guidance for the up-and-down sliding of the door panel 21, ensuring smooth opening and closing and reliable sealing. The two support seats 23 are respectively bolted to the top of the profile housing 1 on both sides. The support seats 23 are used to install and support the translation cylinder 24. The translation cylinder 24 is bolted to the top of the two support seats 23. The translation cylinder 24 is preferably an SMC series cylinder. The translation cylinder 24 provides linear reciprocating power, driving the connecting rod 25 to vertically raise and lower the door panel 21 along the slide rails 20, realizing the opening and closing of the observation port 27. The door panel 21 is slidably installed between the two slide rails 20. The door panel 21 acts as a sealing door. When closed, it covers the observation port 27 of the conical housing 26, forming a sealed cleaning chamber. When opened, it provides a passage for taking out and putting in the target material. The door panel 21 can cover the observation port 27 on one side of the conical housing 26. A connecting rod 25 is bolted to one side of the outer wall of the door panel 21. The connecting rod 25 rigidly connects the output end of the translation cylinder 24 to the door panel 21, transmitting the thrust of the cylinder to the door panel 21. The connecting rod 25 is bolted to the output end of the translation cylinder 24. A long hole 2 is provided on one side of the top of the profile box 1. The long hole 2 serves as a movement clearance groove for the connecting rod 25, allowing the connecting rod 25 to pass through and slide back and forth along the hole, while also providing guidance and limiting. The connecting rod 25 passes through the long hole 2 and is slidably positioned inside the long hole 2. A laser displacement sensor 22 is bolted to one side of the outer wall of the door panel 21. The laser displacement sensor 22 is preferably an Omron ZX-LDA41, which is used for non-contact detection of whether there is a target material and its approximate position on the fixture assembly 28, ensuring that the door can be closed for cleaning only after correct loading, thus preventing misoperation and providing a safety interlock. The laser displacement sensor 22 is positioned directly opposite the fixture assembly 28.

[0060] Working principle: When the device is started to clean the target material, sufficient cleaning fluid can be injected into the water storage tank 8 through the water injection hole 10 on the cover plate 9. During this process, three liquid level sensors 12 monitor and provide feedback on the liquid level status in real time. The liquid level status is divided into three levels: high, medium and low. At the same time, the air supply pressure of the air supply module 7 is checked to confirm that the sliding cover 16 on the side of the sewage tank 13 has been pushed into the installation groove 15 and that the filter screen 18 in the filter port 17 is clean and unblocked. Then, according to the specifications and dimensions of the target material to be cleaned, the fixture assembly 28 is adjusted. This process can be carried out by first selecting and fixing the four pads 36 into the appropriate mounting holes 35 on the support plate 32 according to the specifications of the target material, and then fastening the mounting block 37 on the pads 36. Then, a support cone block 34 of appropriate size is selected and installed on the four mounting blocks 37 to stably adapt to targets of different diameters.

[0061] After the initial preparation is completed, the high-purity target material can be placed on the support cone block 34 on the top of the fixture assembly 28, so that the target material is centered in the installation port 33 area. Then, the translation cylinder 24 is activated, and the translation cylinder 24 slides on the slide rail 20 with the connecting rod 25, so that the box door panel 21 blocks the observation port 27. Then, the laser displacement sensor 22 installed on the inside of the box door panel 21 faces the fixture assembly 28, and scans in real time to confirm that the target material has been accurately placed in place and has a normal posture.

[0062] After sealing, the cleaning component 6 begins operation. The push cylinder 41, mounted on the outer wall of one side of the conical housing 26, is activated. Its output pushes the sliding seat 40 to slide back and forth along the two guide rails 39 on the support plate 38. The U-shaped jet pipe 43 and U-shaped water spray pipe 44, fixed side-by-side on the sliding seat 40 by four hoop rings 42, move synchronously with the sliding seat 40, performing a scanning motion from one side of the target to the other. Simultaneously, during this process:

[0063] First, the gas supply module 7 is turned on. High-pressure gas enters the U-shaped jet pipe 43 through the pipeline, gas delivery pipe 48 and corresponding connecting pipe 46. Then, the high-pressure gas is ejected at high speed from the fan-shaped nozzle 45. Driven by the push cylinder 41, the U-shaped jet pipe 43 slides smoothly along the guide rail 39 to dynamically cover the upper and lower surfaces and the conical surface of the target material that is stationary on the support cone block 34.

[0064] After the gas purging is completed, the water supply pump 11 in the water supply assembly 3 is started to draw the cleaning fluid from the water storage tank 8 and pump it into the U-shaped spray pipe 44 through the pipeline, water supply pipe 47 and connecting pipe 46. Then, with the operation of the push cylinder 41, the cleaning fluid can be sprayed out in a fan shape upward and downward by several fan-shaped nozzles 45 installed on both sides of the U-shaped inner wall, thus cleaning the target material.

[0065] After the liquid cleaning is completed, the above gas purging is repeated to remove water from the target material, so that the water on the target material is blown off.

[0066] This process involves a gas-liquid-gas composite jet formed by high-pressure liquid and high-pressure gas. Hydraulic impact removes contaminants, while airflow shears and dries the surface. Combined with mobile spraying, this thoroughly eliminates blind spots in the cleaning process.

[0067] Wastewater treatment and recycling;

[0068] During the cleaning process, wastewater carrying impurities and oil naturally converges along the inner wall of the conical shell 26 and is discharged into the sewage tank 13 directly below through the outlet 30 at the bottom of the conical end. The wastewater first falls into the sliding cover 16 and undergoes primary filtration through the filter screen 18 in the multiple filter ports 17. Large particulate pollutants are trapped on the surface of the filter screen 18. The filtered water enters the sewage tank 13 for storage. When the circulating cleaning mode is activated, the water supply pump 14 of the sewage treatment component 4 is started, and the filtered water in the sewage tank 13 is pumped back into the U-shaped spray pipe 44 through the pipeline to participate in the circulating spray cleaning, which effectively saves water resources. When the filter screen 18 needs to be cleaned, the sliding cover 16 can be pulled out periodically by the handle 19 to clean or replace the filter screen 18 periodically.

[0069] After cleaning, the air supply module 7, water supply pump 11, and water supply pump 214 are shut down in sequence. The push cylinder 41 drives the sliding seat 40 to return to its initial position. The translation cylinder 24 drives the box door 21 to rise again and open the observation port 27. The laser displacement sensor 22 performs a second detection to confirm the status of the target material. Then, the clean target material can be taken out, and the target material to be cleaned can be put in and the above steps can be repeated for cleaning.

[0070] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A high-purity target cleaning machine, comprising a profile housing (1), a water supply assembly (3), a wastewater treatment assembly (4), a door assembly (5), a cleaning assembly (6), and an air supply module (7), characterized in that: The water supply component (3), sewage treatment component (4), door component (5), cleaning component (6) and gas supply module (7) are installed on the profile box (1); The cleaning treatment component (6) includes a conical shell (26), with a water outlet (30) at one end of the conical shell (26), an observation port (27) on one side of the outer wall of the conical shell (26), a fixture component (28) inside the conical shell (26), and a cleaning component (29) on one side of the inner wall of the conical shell (26). The fixture assembly (28) includes four support rods (31) and four pads (36). The bottom ends of the four support rods (31) are fixed inside the conical shell (26) by bolts. Support plates (32) are bolted to the top of the four support rods (31), and an installation port (33) is opened at the center of one side of the top of the support plate (32). The top of the support plate (32) has four sets of installation holes (35) arranged in a ring array around the installation port (33). Each set of installation holes (35) has three holes. The four pads (36) are respectively bolted to the four installation holes (35) in the four sets of installation holes (35). Each of the four pads (36) has a mounting block (37) bolted to the top of each of the four pads (36), and a supporting conical block (34) is bolted between the four mounting blocks (37). The cleaning assembly (29) includes a support plate (38), a push cylinder (41), four clamps (42), a U-shaped water spray pipe (44), and a U-shaped air jet pipe (43). The support plate (38) is bolted to the inner wall of the conical housing (26) facing the observation port (27). The push cylinder (41) is bolted to the outer wall of the conical housing (26). Two guide rails (39) are bolted to the outer wall of the support plate (38). A sliding seat (40) is slidably installed between the two guide rails (39). The U-shaped air jet pipe (43) is bolted to the outer wall of the sliding seat (40) via two of the clamps (42). The U-shaped water spray pipe (44) is bolted to the outer wall of the sliding seat (40) via the other two clamps (42). Installed on the outer wall of the sliding seat (40) near the U-shaped jet pipe (43), the outer wall of the U-shaped jet pipe (43) and the U-shaped water spray pipe (44) are both connected to a connecting pipe (46). One end of the connecting pipe (46) at the U-shaped jet pipe (43) is bolted with an air supply pipe (48), and one end of the connecting pipe (46) at the U-shaped water spray pipe (44) is bolted with a water supply pipe (47). The water supply pipe (47) and the air supply pipe (48) slide through the conical box shell (26). Several fan-shaped nozzles (45) are threaded on both sides of the U-shaped inner wall of the U-shaped jet pipe (43) and the U-shaped water spray pipe (44). The air supply module (7) is connected to the air supply pipe (48) through a pipe.

2. The high-purity target cleaning machine according to claim 1, characterized in that, The water supply component (3) includes a water storage tank (8), which is bolted inside the profile box (1). Three liquid level sensors (12) are embedded in the outer wall of one side of the water storage tank (8).

3. The high-purity target cleaning machine according to claim 2, characterized in that, The top of the water storage tank (8) is bolted with a cover plate (9), and two water injection holes (10) are opened on one side of the top of the cover plate (9).

4. The high-purity target cleaning machine according to claim 3, characterized in that, The water supply assembly (3) also includes a water supply pump (11), which is bolted inside the profile box (1) near the water storage tank (8). The water supply pump (11) is connected to the water storage tank (8) and the water supply pipe (47) through pipes respectively.

5. The high-purity target cleaning machine according to claim 1, characterized in that, The sewage treatment component (4) includes a sewage tank (13) and a second water supply pump (14). The sewage tank (13) is bolted inside the profile box (1). The second water supply pump (14) is bolted inside the profile box (1) near the sewage tank (13). The second water supply pump (14) is connected to the sewage tank (13) and the U-shaped spray pipe (44) through pipes. The sewage tank (13) is located directly below the outlet (30) at the conical end of the conical box shell (26). An installation groove (15) is provided on one side of the outer wall of the sewage tank (13).

6. The high-purity target cleaning machine according to claim 5, characterized in that, The mounting groove (15) is slidably inserted with a sliding cover (16). The top side of the sliding cover (16) has several filter ports (17) arranged in a linear array. The filter ports (17) are bolted with filter screens (18). The sliding cover (16) has a handle (19) bolted on one side of the outer wall.

7. The high-purity target cleaning machine according to claim 1, characterized in that, The door assembly (5) includes two slide rails (20) and two support seats (23). The two slide rails (20) are bolted to the outer wall of one side of the profile box (1). The two support seats (23) are respectively bolted to the top of the profile box (1) on both sides. The top bolts of the two support seats (23) are bolted to the top of the profile box (1) and a translation cylinder (24) is installed.

8. The high-purity target cleaning machine according to claim 7, characterized in that, A door panel (21) is slidably installed between the two slide rails (20). The door panel (21) can cover the observation port (27) on one side of the conical shell (26). A connecting rod (25) is bolted to the outer wall of one side of the door panel (21). The connecting rod (25) is bolted to the output end of the translation cylinder (24).

9. The high-purity target cleaning machine according to claim 8, characterized in that, The profile box (1) has an elongated hole (2) on one side of its top. The connecting rod (25) passes through the elongated hole (2) and is slidably disposed inside the elongated hole (2).

10. The high-purity target cleaning machine according to claim 7, characterized in that, A laser displacement sensor (22) is bolted to one side of the outer wall of the box door panel (21), and the laser displacement sensor (22) is positioned opposite the fixture assembly (28).

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