Storage system for storing a plurality of substrate holders

Abstract

The present disclosure relates to a storage system (100) adapted to store a plurality of substrate holders (130), wherein the storage system comprises a pin (308) extending along a rotation axis, at least two shelves (110) positioned along a direction substantially parallel to the rotation axis, each shelf being adapted to support at least one detachable housing (120). The shelves are pivotally connected to the pin about the rotation axis and are configured to rotate about said rotation axis independently from each other. Each detachable housing is adapted to support at least one substrate holder adapted to support a substrate (616) for deposition of a semiconductor film, said detachable housing being configured to be releasably coupled to the shelf and to be extracted from the shelf. The present disclosure also relates to a substrate processing platform (602) comprising said storage system (100) and to a reactor assembly (600) comprising said substrate processing platform (602).

Description

Technical Field

[0001] The present invention relates to a storage system for a substrate processing platform for a reactor assembly, and a substrate processing platform and a reactor assembly including the storage system. Background Technology

[0002] Substrates designed to undergo semiconductor material deposition processes in reactors are typically stored and transported in casks, where the substrates are stacked and spaced apart from each other.

[0003] These boxes typically include an open side and an opposite, fully or at least partially closed rear side, the open side being accessible from the outside for loading and unloading substrates from the box.

[0004] Before being processed in the reactor's reaction chamber, the substrate is attached to a substrate holder, which prevents direct contact with the substrate as it is handled and moved within the reactor assembly. Therefore, the substrate holder prevents contamination and scratching of the substrate.

[0005] The substrate holder can be handled manually or with specially designed automated devices (such as robotic arms) adapted to grasp and move substrate holders with or without substrates within the reactor assembly.

[0006] Typically, the substrate holder is in a substantially circular shape, which is suitable for holding the substrate without undesirable displacement, and optionally orients the substrate according to a predetermined reference.

[0007] The substrate holder may have a closed, open, or partially open bottom surface, which may be flat or concave. Preferably, the substrate is placed above the substrate holder, but the contact points between the substrate and the substrate holder should be limited to a few peripheral points, segments, or small areas.

[0008] The substrate holder can be further equipped with a ring (removable or fixed) on top to protect the edges of the substrate during deposition.

[0009] Typically, the substrate holder and substrate, usually contained in one or more boxes, are placed on a substrate processing platform including a centering unit.

[0010] In the centering unit, the substrate is placed (and optionally centered and / or oriented in a predetermined manner) on the substrate holder before being further displaced for processing.

[0011] Substrate holders are typically arranged on a rack, stacked on top of each other and spaced apart to allow for easy handling and to prevent particle formation.

[0012] After a certain number of uses within the reaction chamber, the substrate holder may need to be replaced for cleaning and disposal.

[0013] For example, in a SiC epitaxial reactor, individual substrate holders may need to be replaced very frequently due to parasitic deposits (if any) on the portions exposed to the process gases. These exposed portions typically include a top protective ring on the substrate holder (if present).

[0014] Using a rack as used in the art, all substrate holders contained in the rack are uploaded and unloaded together from the substrate processing platform.

[0015] However, this “batch” loading and unloading of substrate holders does not allow for the replacement of substrate holders individually or in smaller batches of up to 1 to 6 (preferably 1 to 4) substrate holders based on the actual need for their processing or replacement.

[0016] Additionally, racks used in this art typically have a front side accessible from the outside for loading and unloading substrate holders, and a relatively enclosed rear side. The relative positions and orientations of the front and rear sides are fixed and are the same for all substrate holders, regardless of the type of operation being performed (load / unload operations related to substrate handling and operator replacement and handling of substrate holders).

[0017] Therefore, there is a need for a storage system for substrate holders that can optimize the replacement of substrate holders in the substrate processing platform of a reactor assembly.

[0018] A storage system is also needed to simplify the loading and unloading of one or more substrate holders.

[0019] A storage system that simplifies the transport of substrate holders is also needed.

[0020] A storage system is also needed to minimize the risk of the substrate holder being contaminated or damaged before or after use during the deposition process.

[0021] It also requires a substrate processing platform equipped with a storage system that provides multiple access points to the substrate holder.

[0022] A reactor assembly with the substrate processing platform is also required. Summary of the Invention

[0023] This synopsis is provided to introduce some concepts in a simplified form. These concepts are further described in detail in the following detailed description of exemplary embodiments of this disclosure. This synopsis is not intended to identify key or essential features of the claimed subject matter, nor is it intended to limit the scope of the claimed subject matter.

[0024] The purpose of this invention is to overcome the shortcomings of the prior art.

[0025] Specifically, the objective of this invention is to provide a storage system for replacing substrate holders in a substrate processing platform that can improve reactor components.

[0026] Another object of the present invention is to provide a storage system that simplifies the loading, unloading and transportation of one or more substrate holders.

[0027] Another object of the present invention is to provide a storage system that minimizes the risk of contamination or damage to the substrate holder before or after use during the deposition process.

[0028] Another object of the present invention is to provide a substrate processing platform equipped with a storage system that can provide multiple access points to a substrate holder.

[0029] Another object of the present invention is to provide a reactor assembly including a substrate processing platform.

[0030] Note that the use of reference numerals in the claims does not limit their scope. The sole purpose of the reference numerals is to make the claims easier to understand. Attached Figure Description

[0031] The illustrations presented herein are not intended to be actual views of any particular material, structure, or device, but are merely idealized representations used to describe embodiments of this disclosure.

[0032] Figure 1 A schematic diagram of a storage system 100 according to an embodiment of the present invention is provided.

[0033] Figure 2 A schematic diagram of a storage system 100 according to an embodiment of the present invention is provided.

[0034] Figure 3 A schematic cross-sectional view of a storage system 100 according to an embodiment of the present invention is provided.

[0035] Figure 4 A schematic diagram of a portion of a storage system 100 according to an embodiment of the present invention is provided.

[0036] Figure 5 A schematic cross-sectional view of a storage system 100 according to an embodiment of the present invention is provided.

[0037] Figure 6 A schematic diagram of a reactor assembly 600 according to an embodiment of the present invention is provided. Detailed Implementation

[0038] Although certain embodiments and examples are disclosed below, those skilled in the art will understand that the invention extends beyond the specific disclosed embodiments and / or uses of the invention, as well as their obvious modifications and equivalents. Therefore, it is intended that the scope of the disclosed invention should not be limited to the specific disclosed embodiments described below.

[0039] Reference will now be made to the accompanying drawings, wherein like reference numerals identify similar structural features or aspects of this disclosure. Note that the use of reference numerals in the description does not limit the description to the embodiments shown.

[0040] In particular, it should be understood that the elements in the accompanying drawings are shown for simplicity and clarity. Some elements may have been omitted or may not be drawn to scale. For example, the dimensions of some elements in the figures may be exaggerated relative to other elements to aid in understanding the embodiments shown in this disclosure.

[0041] Other technical features will be obvious to those skilled in the art based on the following figures, description and claims.

[0042] In one aspect, the present invention relates to a storage system 100 adapted to store and optionally move a plurality of substrate holders 130.

[0043] The storage system includes a pin 308 extending along the axis of rotation (z) and at least two shelves 110 stacked in a direction parallel or substantially parallel to the axis of rotation (z).

[0044] "Stacking in a direction parallel to the axis of rotation (z)" means that shelves are stacked on top of each other along the z-direction (but not necessarily in direct contact), and each shelf extends in a parallel plane that is substantially perpendicular to z, such as... Figures 1 to 5 As shown.

[0045] "Substantially parallel" or "substantially perpendicular" means that the direction or plane is parallel or perpendicular to the other with a tolerance of + / -5%, respectively.

[0046] The shelves are pivotally connected to pins about a rotation axis and are configured to rotate independently of each other about the rotation axis.

[0047] Each shelf is adapted to support at least one removable housing 120.

[0048] Each removable housing is adapted to support at least one substrate holder 130, which is adapted to support a substrate 616 for depositing a semiconductor film.

[0049] Each removable housing is configured to be releasably attached to the shelf and pulled out of the shelf, for example via a mechanical (automatic) device and / or manually.

[0050] "Releasable connection" means that when the removable housing is placed on the shelf, the removable housing can:

[0051] (a) Moves with the shelf when the shelf moves (the shelf can move manually or by means of a drive motor connected to each shelf to rotate around a pin); and

[0052] (b) Released from the shelf by an operator or automated device (e.g., a robotic arm optionally equipped with an end effector).

[0053] Steps (a) and (b) can be repeated multiple times without damaging the shelving and / or removable housing.

[0054] Preferably, particle generation during steps (a) and (b) should be minimized by an advantageous, simple engagement mechanism that requires little or no friction and / or oscillation of the parts involved (i.e., the removable housing and shelving).

[0055] For example, step (a) can rely on the gravity of the substrate holder to ensure its movement as a whole with the shelf. Alternatively, simple interlocking devices, such as matching protrusions and notches on the contact surfaces of the removable housing and the shelf, can ensure that the substrate holder does not shift from its nominal position during shelf rotation. These matching protrusions and notches can also be used to guide the removable housing in its nominal placement on the shelf. A stop mechanism can also be used.

[0056] Advantageously, the storage system according to the invention allows for the retrieval and transfer of a subset of substrate holders, such as only those contained in a removable housing releasably coupled to a shelf, to improve the efficiency and continuity of the deposition process.

[0057] In fact, unlike known storage systems in the art that require a single cleaning and / or replacement of all substrate holders, the storage system according to the invention allows for the replacement and handling of a portion of the substrate holders to more efficiently follow the actual deposition process, using fewer substrate holders and reducing / avoiding downtime.

[0058] exist Figures 1 to 5 An exemplary embodiment of a storage system 100 or a selected portion thereof according to the present invention is illustrated schematically.

[0059] Preferably, each removable housing is adapted to support 1-6 substrate holders, or even more preferably 1-4.

[0060] Preferably, the substrate 616 is suitable for epitaxial or CVD deposition of semiconductor films.

[0061] Preferably, each shelf is adapted to support 1-3 removable housings, and even more preferably, each shelf supports one removable housing. This limits the number of removable housings that can be pulled out / inserted in the storage system, as each shelf rotates around a pin to access its contents. The removable housings can be adapted to be stacked one on top of another.

[0062] Preferably, the number of shelves is 2-20; even more preferably 3-10.

[0063] Advantageously, the storage system according to the invention improves the replacement of substrate holders in the substrate handling platform of the reactor assembly.

[0064] It can be advantageous to minimize contact and friction between adjacent shelves. This can be achieved by avoiding direct friction between shelves (or parts thereof, such as hub 140) during rotation. This can be done in many ways.

[0065] For example, frictionless or low-friction dividers can be inserted between adjacent shelves. Non-limiting examples of suitable dividers include rolling bearings (e.g., ball and / or roller bearing systems) and / or retaining rings inserted into or attached to pins. In the latter case, the pin may have a suitable notch to partially support each retaining ring located between two adjacent shelves.

[0066] Preferably, each shelf provides a support surface parallel to a plane (xy) that is substantially perpendicular to the axis of rotation.

[0067] Preferably, the pin is made of stainless steel.

[0068] Preferably, the shelf is made of aluminum or stainless steel.

[0069] Preferably, the removable housing is made of aluminum or plastic, such as general-purpose plastics like PVC, polypropylene, polyethylene, POM-C, nylon, and / or Teflon.

[0070] The axis of rotation (z) can be oriented vertically, and the plane (xy) is a horizontal plane perpendicular to (z).

[0071] In an embodiment, each removable housing 120 of the storage system 100 has a front side 123, and the front side faces outward of the storage system.

[0072] In principle, both the substrate holder and the removable housing can be removed from the front via manual or automatic means (e.g., a robotic arm optionally equipped with an end effector).

[0073] Preferably, the front side is adapted to engage with a robotic arm optionally equipped with an end effector, or with any automated device configured to pick up a substrate holder and move it to, for example, a substrate centering unit 610 of a reactor assembly 600.

[0074] Advantageously, this allows the risk of contaminating the substrate holder to be minimized before it is coupled to the substrate to be processed.

[0075] Preferably, the front side may also be adapted to engage with an operator for manually removing one or more removable housings from the storage system 100 (particularly from its shelves) or inserting one or more removable housings into the storage system 100. The operator can then move the removable housings and continue to retrieve and transfer the substrate holders contained therein for cleaning or replacement.

[0076] Advantageously, this allows the risk of contaminating the substrate holder to be minimized by having the operator handle the removable housing instead of the substrate holder.

[0077] A further advantage is that the operator can therefore easily retrieve and transfer a subset of the substrate holders contained in the removable housing, rather than all the substrate holders in the storage system, thereby improving the efficiency and continuity of the deposition process.

[0078] Preferably, at least one side of the removable housing 120 parallel to the plane (xy) is open or substantially open (i.e., when placed in the removable housing, more than 80% of the top and / or bottom surfaces of the substrate holder are exposed). Even more preferably, at least its top (upper) side is open or substantially open in the (xy) plane. Advantageously, this facilitates access to the substrate holder.

[0079] In the preferred example described above, the removable housing may further include a cover adapted to close the top surface of the removable housing when it is displaced. The cover may advantageously be configured to be releasably engaged with the removable housing, for example, by a releasable locking mechanism, and may optionally include one or more handles for ease of transport.

[0080] Alternatively, the removable housing may be closed or substantially closed in the plane (xy) (i.e., at least 95%) to avoid particulate contamination of the substrate holder located below.

[0081] In one embodiment, the removable housing 120 includes at least one support element 122 for supporting at least one substrate holder 130.

[0082] Preferably, each support element includes one or more protrusions or recesses that define one or more contact areas or points capable of holding the substrate holder and potentially preventing undesirable displacement.

[0083] Preferably, each support element is configured to support a substrate holder of a circular or substantially circular shape. A substantially circular shape refers to a substrate having a circular projection on at least one plane, the local deviation of which from a constant radius in that plane is less than or equal to 10% of said radius.

[0084] Advantageously, the use of protrusions and notches to support the substrate holder facilitates its manual or automatic insertion and removal, and is inexpensive to manufacture.

[0085] Preferably, the removable housing 120 includes 1-6 support elements, preferably 1-4, each support element being adapted to support a substrate holder and consisting of multiple protrusions.

[0086] The support element can be fabricated in the inner surface of the removable housing, that is, the surface facing the substrate holder when the substrate holder is in the removable housing.

[0087] Preferably, the support element is adapted to contact a very small portion of the substrate holder, for example, less than 20% of its bottom surface, more preferably less than 10%, and even more preferably less than 5%. The inventors have observed that reduced overlap between the substrate holder and the support element allows for a reduction in dust or dirt generated by friction between the contact portions.

[0088] In an embodiment, each shelf 110 is adapted to rotate from at least a first predetermined position to at least a second predetermined position, and vice versa.

[0089] Advantageously, the storage system allows its shelves to rotate between at least two predetermined positions, providing different access points to the removable housing and / or substrate holder, and different ways of accessing the removable housing and / or substrate holder. These allow for the physical separation of the area where the machine or user handles the removable housing relative to the area where the same or different machines or users handle the substrate holder.

[0090] In an embodiment, each shelf 110 can be releasably locked to the first predetermined position and / or the second predetermined position.

[0091] For example, the stop mechanism can be used alone or in combination with a magnetic locking system. The storage system may include columns 508 made of ferromagnetic material, and the shelves may be equipped with magnets. The magnets and the ferromagnetic columns can magnetically attract and position the shelves near the columns to a releasably locked position.

[0092] Advantageously, from the perspectives of cost, use, and manufacturing, the magnetic lock mechanism is effective.

[0093] In an embodiment, each shelf 110 includes hubs 140, 140a, and 140b, which are configured to be pivotally connected to pins 308.

[0094] Advantageously, this design provides a particularly stable storage system by avoiding or minimizing fluctuations in the shelving during movement or under the weight of the removable housing, with or without a substrate holder. This is especially important if automated handling devices are used to grip and move the removable housing and / or substrate, as it ensures reliable and reproducible positioning of the shelving and its contents.

[0095] Preferably, each hub 140, 140a, 140b includes a bushing 302.

[0096] Advantageously, bushings can minimize friction between the hub and the pin.

[0097] In one embodiment, the storage system 100 further includes at least one divider 306 placed between two adjacent hubs 140a, 140b.

[0098] Optionally, each separator 306 includes a rolling bearing (e.g., a ball and / or roller bearing system) that contacts an adjacent hub.

[0099] Advantageously, the above embodiments minimize friction and thus minimize the risk of generating debris, which is a source of substrate contamination.

[0100] In one embodiment, the storage system 100 further includes a first sensor 502 configured to detect when all shelves 110 are in a first predetermined position and / or a second predetermined position.

[0101] Optionally, the first sensor may be connected to a device for notifying the user when a condition is met or not met. For example, the first sensor may be connected to a processing unit and optionally to a user interface, acoustic devices, and / or indicator lights.

[0102] In one embodiment, the storage system 100 further includes a second sensor 504 configured to detect displacement of one or more substrate holders 130 from a predetermined position when all shelves are in a first predetermined position or a second predetermined position.

[0103] Preferably, the first sensor and / or the second sensor are optical sensors, such as laser sensors.

[0104] In a second aspect, the present invention relates to a substrate processing platform 602 for a reactor assembly 600.

[0105] The substrate processing platform includes:

[0106] - Support surface 506;

[0107] - At least one storage system 100 according to any of the embodiments described above;

[0108] - At least one substrate centering unit 610;

[0109] - At least one automated component 612 adapted to grip and shift the substrate holder 130.

[0110] The storage system, substrate centering unit, and automated component are positioned on a support surface and arranged relative to each other such that the storage system and substrate centering unit can be accessed by the automated component. For example, the automated component 612 may be arranged to grasp the substrate holder 130 and transfer it from the storage system 100 to the substrate centering unit 610, and / or vice versa.

[0111] The automated component can be a robot, such as an articulated arm, optionally equipped with an end effector.

[0112] A substrate centering unit is a device suitable for connecting a substrate to a substrate holder.

[0113] Optionally, the centering unit can be adapted to align or center the substrate on the substrate holder according to a predefined position and / or orientation.

[0114] The support surface is a substantially flat surface, such as a desktop, which is suitable for supporting storage systems, centering units, and automated components.

[0115] The support surface may optionally include a damping mechanism to absorb and dissipate vibrational energy over a wide frequency range.

[0116] For example, the substrate processing platform 602 can be used as follows. When the shelf 110 of the storage system 100 is in a first predetermined position and the substrate holder is inserted into a removable housing on the shelf, the automatic component 612 can grab the substrate holder 130 from the removable housing 120 to transfer it to the substrate centering unit 610 for coupling with the substrate 616.

[0117] When shelf 110 is in the second predetermined position, the operator can insert the removable housing 120 containing a new or clean substrate holder for further use. Alternatively, the operator can remove the removable housing containing the used substrate holder for cleaning or disposal.

[0118] Optionally, the removable housing 120 may be equipped with a cover or shield to protect the substrate holder when the operator handles and / or moves the removable housing 120.

[0119] When each removable housing has a front side 123 and the front side faces outward of the storage system, it is convenient to make the front side face the automatic component 612 when in a predetermined position such as a first predetermined position.

[0120] Advantageously, the substrate processing platform 602 provides a compact and automated solution for connecting (and optionally aligning) a substrate to a substrate holder.

[0121] In an embodiment, the substrate processing platform 602 further includes a substrate management station 614 for receiving and storing substrates 616. For example, the substrate management station 614 may be adapted to receive a cassette for storing multiple substrates.

[0122] The substrate management station 614 is positioned above the support surface 506 and is arranged such that it can be accessed by the automated component 612.

[0123] Preferably, the substrate management station 614 can be configured to interface with an automated loading and unloading system (such as an SMIF, AGV, or AMR system) or with an operator. The access point for the operator or the automated loading and unloading system can advantageously differ from the access point for the automated component 612. This can be achieved by equipping the substrate management station 614 with a rotating mechanism.

[0124] Advantageously, this embodiment provides a compact and fully automated solution for engaging (and optionally aligning) the substrate holder with the substrate from the substrate management station 614 prior to processing (and vice versa, separating them after the deposition process).

[0125] In a third aspect, the present invention relates to a reactor assembly 600, comprising:

[0126] - At least one substrate processing platform 602 as described above;

[0127] - A reactor for depositing a semiconductor film on a substrate 616, comprising at least one reaction chamber 608;

[0128] - At least one loading locking chamber 604 for adjusting the substrate; and

[0129] - At least one transfer chamber 606 is connected to the reaction chamber 608 and the loading lock chamber 604.

[0130] The loading locking chamber can be advantageously equipped with means for depressurizing and purging the chamber with argon gas in order to condition the substrate prior to processing.

[0131] The transfer chamber 606 includes an automatic component 612.

[0132] This automated component can be used to grab the substrate holder 130 that typically supports the substrate 616 and transfer it into and out of the reaction chamber.

[0133] Preferably, the automated component can be used to move the substrate holder from the reaction chamber 608 to the loading lock chamber 604 / from the loading lock chamber 604 to the reaction chamber 608.

[0134] This operation can be performed directly or indirectly by placing the substrate holder in a cooling station 618 and / or a heating station 620, which may be optionally included in the reactor assembly 600.

[0135] The reactor may also include any other suitable additional components to ensure its proper operation. For example, the reactor may include heating equipment configured to heat the reaction chamber; and gas panels for delivering process gases into the reaction chamber, one or more vacuum pumps, valves, gas panels, and circuitry for controlling pressure.

[0136] In a non-limiting example, the reactor is an epitaxial reactor for depositing silicon carbide. The reaction chamber may be a horizontal, optionally hot-walled, single-substrate reaction chamber. The heating device may be an induction system.

[0137] exist Figure 6 The diagram schematically illustrates an exemplary embodiment of the reactor assembly 600 and the substrate processing platform 602 included therein according to the present invention.

[0138] The subject matter of this disclosure includes all novel and non-obvious combinations and sub-combinations of various processes, systems and configurations, as well as other features, functions, actions and / or properties disclosed herein, and any and all their equivalents.

[0139] Attached Figure Description

[0140] Figure 1 A schematic diagram of a storage system 100 according to an embodiment of the present invention is provided. Not all components are numbered or visible. The storage system 100 includes six shelves 110. Five shelves each support a removable housing 120 and are positioned in a first predetermined position. An empty shelf 110 is rotated 90° relative to the other shelves and positioned in a second predetermined position. Each removable housing includes a plurality of support elements 122 adapted to support a substrate holder 130. Each shelf is rotatably connected to a pin (not shown) via hubs 140a, hubs 140b, etc. The top of the pin is an end washer 141, which pushes the hub downward by its weight and a fastening device 142 (in this case, a screw).

[0141] Figure 2 Provided Figure 1A schematic diagram of the storage system 100, wherein all six removable housings are positioned on six shelves. A removable housing 120a placed in a first predetermined position can be distinguished from a removable housing 120b placed in a second predetermined position in a plane perpendicular to the axis of rotation (z) (xy). Each removable housing has a front side 123 adapted for easy access to a substrate holder contained therein (if present).

[0142] Figure 3 Provided Figure 1 This is part of a storage system 100, in which all six shelves are in the same predetermined position and support a removable housing 120. The removable housing is characterized by support elements 122. The four bottom support elements (each including three protrusions) contain four substrate retainers 130. Each shelf 110 is adapted to rotate with a hub 140 about a pin 308 and along a rotation axis (z). Bushings (302) are positioned between each hub and pin to reduce friction. For similar reasons, adjacent hubs are separated by separators 306 provided with roller bearings (not shown).

[0143] The top of pin 308 is an end washer 141, which pushes the hub downward via fastening device 142. Spacer 304 ensures the correct height of shelf 110 relative to the support plane.

[0144] Figure 4 A view of the shelf 110, including the hub 140 and bushing 302, is provided.

[0145] The shelf 110 supports a removable housing 120 having a front side 123. The removable housing includes several protrusions forming a support element 122, which in this embodiment is adapted to support two substrate holders (not shown) at the same time.

[0146] Figure 5 A schematic diagram of a storage system 100 according to an embodiment of the present invention is provided. The storage system is placed on a support surface 506. It includes a first sensor 502 positioned to detect whether a shelf is in a predefined position—specifically, whether the shelf is rotated in a manner oriented along the "x" direction in the figure.

[0147] The storage system also includes a second sensor 504 configured to detect displacement of at least one substrate holder 130 from a predetermined position when all shelves (and removable housing) are oriented along the “y” direction in the figure.

[0148] The storage system also includes a post 508, which can be used, for example, by magnetic or electromagnetic force, to attract shelves near the post to a releasably locked position. This can be accomplished by selecting appropriate magnetic or electromagnetic materials for the post 508 and the shelf 110 (or by adding components made of said material to the post 508 and the shelf 110).

[0149] Figure 6 A schematic diagram of a reactor assembly 600 according to an embodiment of the present invention is provided. The reactor assembly includes a substrate processing platform 602, a loading and locking chamber 604, a transfer chamber 606, and a reaction chamber 608 that are in communication with each other.

[0150] The substrate processing platform 602 has a support surface 506, which supports:

[0151] - Storage system 100, which includes substrate holder 130, magnet 622 and pillar 508;

[0152] - Substrate centering unit 610;

[0153] - Substrate management station 614, with its storage substrate 616;

[0154] - First automatic component 612.

[0155] In this configuration, the first automated component 612 is an articulated arm adapted to grab substrates from the substrate management station 614, grab substrate holders 130 from the storage system 100, and move them to the substrate centering unit 610 to engage and center them.

[0156] The first automated component is also configured to grasp the substrate holder and move the substrate holder together with the substrate centered in the centering unit to / from the loading locking chamber 604.

[0157] The loading locking chamber 604 is adapted to adjust the substrate prior to processing and to configure the substrate processing platform 602 in communication with the transfer chamber 606.

[0158] The transfer chamber 606 includes a cooling station 618, a heating station 620, and a second automatic component 612, which is adapted to move a substrate holder with a substrate into / out of the loading locking chamber 604, the cooling station 618, the heating station 620, and the reaction chamber 608.

Claims

1. A memory system (100) suitable for storing a plurality of substrate holders (130), wherein, The storage system includes: - Pin (308), which extends along the axis of rotation (z); - At least two shelves (110) are positioned on top of each other in a direction substantially parallel to the axis of rotation (z), each shelf being adapted to support at least one removable housing (120). The shelf is pivotally connected to the pin about the axis of rotation and is configured to rotate independently of each other about the axis of rotation; and Each removable housing is adapted to support at least one substrate holder adapted to support a substrate (616) for depositing a semiconductor film, and the removable housing is configured to be releasably coupled to and withdrawable from the shelf.

2. The storage system (100) according to claim 1, wherein, Each removable housing (120) has a front side (123), wherein the front side faces outward of the storage system.

3. The storage system (100) according to claim 1 or 2, wherein, The removable housing (120) includes at least one support element (122) adapted to support at least one substrate holder (130), each support element including one or more protrusions or recesses, the support element preferably being configured to support a substrate holder of a substantially circular shape.

4. The storage system according to any one of claims 1 to 3, wherein, Each shelf (110) is adapted to rotate from a first predetermined position to a second predetermined position and vice versa.

5. The storage system according to claim 4, wherein, Each shelf (110) can be releasably locked to the first predetermined position and / or the second predetermined position.

6. The storage system (100) according to any one of claims 1 to 5, wherein, Each shelf (110) includes a hub (140, 140a, 140b) configured to be pivotally connected to the pin (308).

7. The storage system (100) according to claim 6 further includes at least one partition (306), wherein, Each separator is placed between two adjacent hubs (140, 140a, 140b).

8. The storage system (100) according to any one of claims 1 to 7 further includes a first sensor (502) configured to detect when all shelves (110) are in the first predetermined position and / or the second predetermined position.

9. The storage system (100) according to any one of claims 1 to 8 further includes a second sensor (504) configured to detect displacement of at least one substrate holder (130) from the predetermined position when all shelves are in the first predetermined position or the second predetermined position.

10. A substrate processing platform (602) for a reactor assembly (600), comprising: - Support surface (506); - At least one storage system (100) according to any one of the preceding claims; - At least one substrate-centered cell (610); and - At least one automatic component (612) adapted to grasp and transfer the substrate holder (130). The at least one storage system, the at least one substrate centering unit, and the at least one automatic component are located above the support surface and arranged relative to each other, such that the at least one storage system and the at least one substrate centering unit can be approached by the at least one automatic component.

11. The substrate processing platform (602) of claim 10 further includes a substrate management station (614) for receiving and storing a substrate (616), the substrate management station being positioned above the support surface (506) and arranged such that the substrate management station can be accessed by the at least one automated component (612).

12. A reactor assembly (600), comprising: - At least one substrate processing platform (602) according to claim 10 or 11. - A reactor for depositing a semiconductor film on a substrate (616), said reactor comprising at least one reaction chamber (608). - At least one loading locking chamber (604) for adjusting the substrate; - At least one transfer chamber (606) connected to the reaction chamber (608) and the loading locking chamber (604); and The transfer chamber (606) includes at least one automated component (612) for inserting and removing the substrate holder (130) from the reaction chamber.

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