Multi-probe centering test method

Abstract

This invention relates to the field of optical detection technology, and more particularly to a multi-probe centering detection method. The method involves driving a standard spherical lens to rotate, and synchronously acquiring optical data using multiple independent detection optical paths. Data acquired from each channel is fitted to obtain the rotation trajectory of the spherical center for each channel. Based on the spherical center trajectory, the spherical center difference relative to the rotation reference axis for each channel is calculated. This process is repeated multiple times to obtain the measurement standard deviation for each channel. The method is then repeated with the lens under test to obtain the spherical center trajectory and spherical center difference. Combining the measurement standard deviation of each channel, the consistency error of the measured spherical center difference, and the residual of the trajectory circle fitting, the fusion weight of each optical path channel is calculated. Based on the obtained weights, the effective spherical center difference data is fused using the weighted least squares method to output the comprehensive spherical center difference of the lens under test. This invention employs a multi-optical-path synchronous detection and data weighted fusion scheme, effectively suppressing single-channel random errors and systematic errors, and improving the overall measurement accuracy of the lens spherical center deviation.

Description

Technical Field

[0001] This invention belongs to the field of optical detection technology, and in particular relates to a multi-probe centering detection method. Background Technology

[0002] As a precision optical lens assembly and testing device, the centering instrument can accurately measure the center deviation of the optical surface, providing reliable data and correction benchmarks for the centering assembly of optical components. By detecting the deviation of the optical axis of a single lens or cemented lens relative to a reference axis, it assists in lens assembly, monitors the eccentricity in real time, and guides workers or robots to fine-tune the lens position until it is aligned.

[0003] Currently, centering instruments used for measuring spherical center deviation generally employ a single measuring head. As the accuracy of the centering instrument improves to a certain level, errors in the measuring head's optical system, environmental vibrations, and temperature inevitably lead to a decrease in accuracy. Although the German company TRIOPTICS now offers centering instruments for measuring the upper and lower optical paths, these products are only designed for measuring the eccentricity of different surfaces of a single lens or for measuring the upper and lower optical path portions of long optical systems. Their primary purpose is to improve measurement efficiency and the maximum measurement size, but they still suffer from limitations in measurement accuracy and weak anti-interference capabilities. Summary of the Invention

[0004] In view of this, the present invention aims to provide a multi-probe centering detection method, which constructs multiple completely independent physical optical paths, obtains independent circular trajectories of the sphere's center image for each path, calculates the sphere's center deviation for multiple channels, and finally obtains the comprehensive deviation through data processing. The method provided by the present invention can significantly reduce the random and systematic errors introduced by single-path measurement, and greatly improve the measurement accuracy of the sphere's center deviation and the consistency of multiple measurement results.

[0005] To achieve the above objectives, the technical solution created by this invention is implemented as follows: A multi-probe centering detection method includes: S1: Controls the rotation of the standard spherical lens and uses multiple independent channel probe optical paths to synchronously acquire data from the standard spherical lens; S2: Fit the multiple sets of data collected in step S1 to obtain the standard spherical center trajectory formed by the center of the standard spherical lens obtained by each channel probe optical path when the standard spherical lens is rotated; S3: Based on the standard sphere center trajectory obtained in step S2, determine the standard sphere center difference of the standard spherical lens obtained by the probe optical path of each channel relative to the rotation reference axis; repeat steps S1~S3 multiple times to obtain multiple sets of standard sphere center difference measurement standard deviations; S4: Replace the lens under test with a standard spherical lens and repeat steps S1~S3 to obtain the trajectory of the center of the sphere formed by the center of the sphere under test and the difference between the centers of the sphere under test; judge the difference between the centers of the sphere under test according to the channel detection optical path. If the difference between the centers of the sphere under test is determined to be abnormal, repeat step S4 until a non-abnormal difference between the centers of the sphere under test is obtained. S5: Calculate the consistency error of the measurement results of the non-abnormal measured sphere center difference obtained in step S4, and calculate the circular fitting residual of the measured sphere center trajectory in step S4; determine the channel fusion weight of the corresponding channel probe optical path based on the circular fitting residual, the measurement result consistency error, and the measurement standard deviation obtained in step S3. S6: Based on the channel fusion weights obtained in step S5, the weighted least squares method is used to perform fusion calculation on the non-abnormal sphere center difference obtained in step S4 to obtain the comprehensive sphere center difference of the lens under test when rotating.

[0006] Furthermore, in step S1: multiple channel detection optical paths are placed on one side of the lens under test, and the optical axis directions of each channel detection optical path are offset from each other by a certain distance; each channel detection optical path includes a light source, a first beam splitter, a relay mirror group, and a CCD detector, wherein the light source emits outgoing light to the first beam splitter, the first beam splitter splits the outgoing light, and after being constrained by the relay mirror group, it illuminates the lens under test; the reflected light generated by the lens under test returns along the original path and enters the first beam splitter after passing through the relay mirror group, the first beam splitter splits the reflected light and enters the CCD detector, completing the imaging of the lens under test and obtaining discrete data.

[0007] Furthermore, the output light from the light sources of the multiple detection optical paths has different wavelengths, and filters matching the wavelength of the output light are set at the light output port of each light source and the light receiving port of the corresponding CCD detector.

[0008] Furthermore, the process of obtaining the standard sphere center difference corresponding to each standard sphere center trajectory in step S3 includes: converting the radius of the standard sphere center trajectory to the surface tilt angle between the probe surface and the light transmission direction in the channel probe optical path using the following formula: ; in, β represents the tilt angle of the surface, D represents the diameter of the standard spherical center trajectory, R represents the radius of the standard spherical lens, and β represents the transverse magnification of the probe surface in the channel probe optical path; The face tilt angle is converted to the standard sphere center difference using the following formula: ; Where ε represents the standard sphere center difference.

[0009] Furthermore, the consistency error of the measurement results in step S5 is the deviation between the center difference of each measured ball and the mean of the center differences of all measured balls.

[0010] Furthermore, the process of determining the center difference of the ball being measured in step S4 includes: when the deviation between the center difference of the ball being measured corresponding to a certain channel detection optical path and the average value of the center differences of the other ball being measured exceeds a preset threshold, it is determined that the channel detection optical path has a measurement abnormality; if the number of abnormal channel detection optical paths reaches two or more, all the current center differences of the ball being measured are discarded, and step S4 is repeated.

[0011] Furthermore, the process of obtaining the circular fitting residual in step S5 includes: performing least-squares circular fitting on the algebraic circle equation of the trajectory of the center of the tested sphere within one rotation cycle of the lens under test, obtaining the center and radius of the circle; calculating the distance between the sampling point of each channel probe optical path on the lens under test and the center of the corresponding trajectory of the center of the tested sphere, and the deviation between the distance and the radius of the trajectory of the center of the sphere, to obtain the circular fitting residual of the corresponding channel probe optical path.

[0012] Furthermore, in step S5, the process of obtaining the channel fusion weights includes: combining the measurement standard deviation, the circular fitting residual, and the measurement result consistency error and taking the reciprocal to obtain the channel fusion weights.

[0013] Furthermore, the combined sphere center difference obtained in step S6 is: ; Where A represents the overall difference in the center of the ball, ω i This represents the channel fusion weight corresponding to the i-th channel probe optical path. This represents the sphere center difference corresponding to the probe optical path of the i-th channel.

[0014] Compared with the prior art, the present invention can achieve the following beneficial effects: This invention presents a multi-probe centering detection method that employs a physical architecture with multiple completely independent optical paths. Strict physical isolation is achieved between these paths, ensuring independent measurement results. In this invention, multiple probes simultaneously measure the same sphere. Weighted averaging of multiple results effectively reduces data fluctuations caused by single-probe system errors and vibration errors, significantly reducing the difference between multiple measurement results. This improves measurement repeatability and ensures consistency across multiple measurements. Furthermore, the method and accuracy provided by this invention are significantly superior to single-probe structures, making it suitable for ultra-high precision centering detection scenarios. During the calibration phase, the standard deviation of each channel's probe optical path is obtained through repeated measurements on standard components to characterize the inherent measurement noise of each channel. In the actual measurement process, a measurement quality evaluation model is further constructed by combining the residual of the sphere center trajectory fitting and the consistency between multi-channel measurement results. The fusion weight of each channel is adaptively determined based on the measurement quality evaluation results. This invention comprehensively considers channel noise levels, trajectory fitting quality, and the consistency of multi-channel results, reducing the impact of abnormal measurement results on the final measurement result and improving the accuracy and stability of sphere center difference measurement. Attached Figure Description

[0015] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments and descriptions of the invention are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings: Figure 1 A schematic flowchart of the multi-probe centering detection method described in the embodiments of the present invention; Figure 2 A flowchart illustrating the multi-probe centering detection method described in the embodiments of the present invention; Figure 3 A schematic diagram of the optical path implementation of the multi-probe centering detection method described in the embodiments of the present invention; Figure 4 This is a schematic diagram of the surface tilt angle described in an embodiment of the present invention.

[0016] Explanation of reference numerals in the attached figures: 1. Standard spherical lens; 2. Light source; 3. First beam splitter; 4. Collimating lens; 5. Front mirror; 6. CCD detector; 7. Filter; 8. Second beam splitter. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not constitute a limitation thereof.

[0018] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other.

[0019] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0020] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0021] like Figures 1 to 3 As shown, the multi-probe centering detection method described in the embodiments of the present invention includes: S1: Controls the rotation of the standard spherical lens and uses multiple independent channel probe optical paths to synchronously acquire data from the standard spherical lens.

[0022] In some embodiments, multiple channel probe optical paths are placed on one side of a standard spherical lens 1, and the optical axes of each channel probe optical path are offset from each other by a certain distance. The multiple channel probe optical paths simultaneously capture images of the rotating standard spherical lens 1, obtaining their respective discrete data. This invention, by offsetting the optical axes of each channel probe optical path by a certain distance, eliminates the need for complete high-precision alignment of a single channel probe optical path during subsequent alignment of the lens under test. Instead, it suffices to place the center of the lens under test within the focal distribution range of the multiple channel probe optical paths, achieving high-precision alignment of a single channel probe optical path. Then, during data processing, the fully aligned channel probe optical path is given higher weight.

[0023] In some embodiments, each channel detection optical path includes a light source 2, a first beam splitter 3, a relay mirror group, and a CCD detector 6. The light source 2 emits outgoing light to the first beam splitter 3, which then splits the outgoing light before passing it through the relay mirror group and illuminating the standard spherical lens 1. The reflected light generated by the standard spherical lens 1 returns along the same path, passes through the relay mirror group, and enters the first beam splitter 3. The first beam splitter 3 then splits the reflected light and enters the CCD detector 6, completing the imaging of the standard spherical lens 1 and obtaining discrete data.

[0024] In this embodiment of the invention, the relay lens group includes a collimating lens 4 and a front lens 5. During the process of emitting outgoing light in each channel's detection optical path, the optical path of the outgoing light in the relay lens group passes through the collimating lens 4 and the front lens 5 in sequence. During the process of receiving reflected light in each channel's detection optical path, the optical path of the reflected light in the relay lens group passes through the front lens 5 and the collimating lens 4 in sequence.

[0025] In some embodiments, the output light from the light sources 2 of the multiple channel detection optical paths has different wavelengths, and a filter 7 matching the wavelength of the output light is provided at the light output port of each light source 2 and the light receiving port of the corresponding CCD detector 6, thereby achieving physical isolation of the spectral bands, preventing interference and error propagation.

[0026] In this embodiment of the invention, the light emitted from the three channel detection optical paths passes through the corresponding relay mirror group and then through two second beam splitters 8 to illuminate the standard spherical lens 1. The reflected light generated by the standard spherical lens 1 returns along the corresponding channel detection optical paths and sequentially passes through the corresponding relay mirror group and the first beam splitter 3 before entering the corresponding CCD detector 6. Each channel detection optical path independently completes optical signal acquisition and outputs corresponding measurement data.

[0027] In this embodiment of the invention, the first beam splitter 3 and the second beam splitter 8 have different beam splitting principles. The first beam splitter 3 is located inside a single channel and is only used for separating the emitted light from the reflected light. The second beam splitter 8 is a wavelength-selective beam splitter located after the relay lens group. Different channel detection optical paths use light sources of different wavelengths. The detection light from each channel is irradiated by the standard spherical lens 1 after passing through the second beam splitter 8. The reflected light generated by the standard spherical lens 1 returns and is separated by the second beam splitter 8 according to wavelength, and then enters the corresponding channel detection optical path. Through the cooperation of different wavelength detection light and the wavelength-selective beam splitter, physical isolation between multiple channel detection optical paths is achieved, avoiding crosstalk between channels.

[0028] S2: Fit the multiple sets of data collected in step S1 to obtain the standard spherical center trajectory formed by the center of the standard spherical lens obtained by each channel probe optical path when the standard spherical lens is rotated.

[0029] Understandably, multiple channel probe optical paths synchronously acquire data from the rotating standard spherical lens 1. Each channel probe optical path acquires its own discrete data. Then, by fitting the data acquired by the multiple channel probe optical paths, the standard spherical center trajectory corresponding to each channel probe optical path is naturally obtained. In this embodiment of the invention, the number of channel probe optical paths is three, naturally resulting in three standard spherical center trajectories.

[0030] S3: Based on the standard sphere center trajectory obtained in step S2, determine the standard sphere center difference of the standard spherical lens obtained by each channel probe optical path relative to the rotation reference axis; repeat steps S1~S3 multiple times to obtain multiple sets of standard sphere center difference measurement standard deviations. This completes the independent calibration of each channel probe optical path.

[0031] In this embodiment of the invention, the independent calibration process for each channel detection optical path further includes: using a high-precision angular displacement stage to input a known precise angular change to each channel detection optical path, collecting the spot pixel offset collected by the CCD detector 6 in each channel detection optical path, calculating the transverse magnification of the detection surface of the CCD detector 6 in each channel detection optical path based on geometric optical relationships, and pre-storing this coefficient as a parameter for subsequent calculation of the spherical center deviation.

[0032] In some embodiments, the process of determining the standard sphere center difference corresponding to each standard sphere center trajectory includes: The radius of the standard sphere's center trajectory is converted to the plane tilt angle between the probe surface and the direction of light transmission in the channel probe optical path using the following formula: The plane tilt angle is as follows: Figure 4 As shown: ; in, β represents the tilt angle of the surface, D represents the diameter of the standard spherical center trajectory, R represents the radius of the standard spherical lens, and β represents the transverse magnification of the probe surface in the channel probe optical path; The face tilt angle is converted to the standard sphere center difference using the following formula: ; Where ε represents the standard sphere center difference.

[0033] The measurement standard deviation of each channel detection optical path in this embodiment of the invention is specifically as follows: ; in, Let N represent the measurement standard deviation of the i-th channel probe optical path, and let N represent the total number of repetitions of steps S1 to S3. This represents the standard spherical center difference corresponding to the probe optical path of the i-th channel after repeating steps S1~S3 for the k-th time. This represents the mean of the standard sphere center difference corresponding to the probe optical path of the i-th channel after N repetitions.

[0034] S4: Replace the lens under test with a standard spherical lens and repeat steps S1 to S3 to obtain the trajectory of the center of the sphere formed by the center of the sphere under test and the difference between the centers of the sphere under test; judge the difference between the centers of the sphere under test according to the channel detection optical path. If the difference between the centers of the sphere under test is determined to be abnormal, repeat step S4 until a non-abnormal difference between the centers of the sphere under test is obtained.

[0035] Understandably, step S4 requires replacing the standard spherical lens with the lens under test. Therefore, multiple probe optical paths are placed on one side of the lens under test, with the optical axes of each path offset by a certain distance. These multiple probe optical paths simultaneously measure and sample the rotating lens under test, obtaining their respective discrete data. Furthermore, in this embodiment, three probe optical paths are used to synchronously acquire data from the rotating lens under test. Each path acquires its own discrete data. The data acquired by the three probe optical paths are then fitted to obtain the trajectory of the center of the sphere corresponding to each probe optical path, resulting in a total of three trajectories of the center of the sphere.

[0036] In some embodiments, the process of determining the center difference of the ball being measured includes: when the deviation between the center difference of the ball being measured corresponding to a certain channel detection optical path and the average value of the center differences of the other ball being measured exceeds a preset threshold, it is determined that the channel detection optical path has a measurement abnormality; if the number of abnormal channel detection optical paths reaches two or more, all the current center differences of the ball being measured are discarded, and step S4 is repeated.

[0037] S5: Calculate the consistency error of the measurement results of the non-abnormal measured sphere center difference obtained in step S4, and calculate the circular fitting residual of the measured sphere center trajectory in step S4; based on the circular fitting residual and the measurement result consistency error, as well as the measurement standard deviation obtained in step S3, determine the channel fusion weight of the corresponding channel probe optical path.

[0038] In some embodiments, the process of obtaining the circular fitting residual includes: performing least-squares circular fitting on the algebraic circle equation of the trajectory of the center of the sphere under test within one rotation cycle of the lens under test, obtaining the center and radius of the circle; calculating the distance between the sampling point of each channel probe optical path on the lens under test and the center of the corresponding trajectory of the center of the sphere under test, and the deviation between the distance and the radius of the trajectory of the center of the sphere, to obtain the circular fitting residual of the corresponding channel probe optical path.

[0039] In this embodiment of the invention, the process of least-squares circle fitting of the algebraic circle equation of the sphere's center trajectory includes: Establish the algebraic circle equation for the trajectory of the center of the measured ball as follows: (xx c ) 2 +(yy c ) 2 =r 2 ; Among them, (x c ,y c (x,y) represents the center of the circle on the trajectory of the ball being measured, (x,y) represents the coordinates of a point on the trajectory of the ball being measured, and r represents the radius of the trajectory of the ball being measured. The polynomial equation for the trajectory of the measured ball's center can be expressed as: x 2 +y 2 +Ax+By+C=0; Where A, B, and C represent the coefficients to be determined in the equation; Solving the two equations simultaneously, we get: ; Substituting the above results into the equation of the algebraic circle, we get: x 2 +y 2 =-Ax-By-C; Rewriting the above equation as a matrix, we get: ; Among them, (x n ,y n (x) represents the coordinates of a point on the trajectory of the center of the measured sphere. Solving the above matrix equation yields coefficients A, B, and C, which in turn provide the radius r and the center (x, y) of the trajectory of the measured sphere. c ,y c ).

[0040] In this embodiment of the invention, the circular fitting residual is specifically as follows: ; in, Let d represent the circular fitting residual corresponding to the i-th channel probe optical path, n represent the total number of sampling points on the lens under test for each channel probe optical path within one rotation cycle of the lens under test, and d represent the total number of sampling points on the lens under test for each channel probe optical path. j r represents the distance between the j-th sampling point and the center of the circle of the measured sphere's trajectory. i This represents the radius of the trajectory of the center of the measured sphere corresponding to the probe optical path of the i-th channel. (Circle fitting residual) The residual is used to characterize the deviation between the fitted trajectory of the measured sphere center and the actual sampling point. The smaller the fitting residual, the more stable the measurement result of the channel and the higher its reliability.

[0041] The consistency error of measurement results in this embodiment of the invention is specifically as follows: ; in, This represents the consistency error of the measurement results corresponding to the i-th channel probe optical path. This represents the non-abnormal center difference of the measured sphere corresponding to the i-th channel probe optical path. This represents the mean of the center difference of the non-abnormal measured spheres. Measurement consistency error characterizes the degree of deviation between the channel measurement results and the overall measurement results.

[0042] In some embodiments, the process of obtaining the channel fusion weights includes: combining the measurement standard deviation, the circular fitting residual, and the measurement result consistency error and taking the reciprocal to obtain the channel fusion weights.

[0043] In this embodiment of the invention, the channel fusion weight corresponding to each channel probe optical path is obtained by the following formula: ; Where, ω i This represents the channel fusion weight corresponding to the i-th channel probe optical path.

[0044] In addition, the channel fusion weights are adjusted according to the determination result of step S4 in this embodiment of the invention. Specifically, if only one channel detection optical path has a measurement abnormality, the channel fusion weight corresponding to that channel detection optical path is reset to zero.

[0045] S6: Based on the channel fusion weights obtained in step S5, the weighted least squares method is used to perform fusion calculation on the non-abnormal sphere center difference obtained in step S4 to obtain the comprehensive sphere center difference of the lens under test when rotating.

[0046] In some embodiments, the overall ball center difference is: ; Where A represents the overall ball center difference.

[0047] In this embodiment of the invention, step S6 specifically includes: Calculate the sum of squared errors of all probe optical paths: ; Where E represents the total sum of squared errors; Differentiating the total sum of squared errors E with respect to the overall spherical center difference A and setting it equal to 0, we get: ; get: ; In this embodiment of the invention, three detection optical paths are set up, resulting in: .

[0048] It should be understood that the various forms of processes shown above can be used to reorder, add, or delete steps. For example, the steps described in this invention disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this invention can be achieved, and this is not limited herein.

[0049] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A multi-probe centering detection method, characterized in that, include: S1: Controls the rotation of the standard spherical lens and uses multiple independent channel probe optical paths to synchronously acquire data from the standard spherical lens; S2: Fit the multiple sets of data collected in step S1 to obtain the standard spherical center trajectory formed by the center of the standard spherical lens obtained by each channel probe optical path when the standard spherical lens is rotated; S3: Based on the standard sphere center trajectory obtained in step S2, determine the standard sphere center difference of the standard spherical lens obtained by the probe optical path of each channel relative to the rotation reference axis; repeat steps S1~S3 multiple times to obtain multiple sets of standard sphere center difference measurement standard deviations; S4: Replace the standard spherical lens with the lens to be tested, and repeat steps S1~S3 to obtain the trajectory of the center of the sphere formed by the center of the sphere under test and the difference between the centers of the sphere under test. According to the channel detection optical path, the center difference of the measured ball is judged. If the center difference of the measured ball is judged to be abnormal, step S4 is repeated until a non-abnormal center difference of the measured ball is obtained. S5: Calculate the consistency error of the measurement results of the non-abnormal measured sphere center difference obtained in step S4, and calculate the circular fitting residual of the measured sphere center trajectory in step S4; determine the channel fusion weight of the corresponding channel probe optical path based on the circular fitting residual, the measurement result consistency error, and the measurement standard deviation obtained in step S3. S6: Based on the channel fusion weights obtained in step S5, the weighted least squares method is used to perform fusion calculation on the non-abnormal sphere center difference obtained in step S4 to obtain the comprehensive sphere center difference of the lens under test when rotating.

2. The multi-probe centering detection method according to claim 1, characterized in that, In step S1: Multiple probe optical paths are placed on one side of the lens under test, and the optical axis directions of each probe optical path are offset from each other by a certain distance; Each channel's detection optical path includes a light source, a first beam splitter, a relay mirror group, and a CCD detector. The light source emits outgoing light to the first beam splitter. After the first beam splitter splits the outgoing light, it is constrained by the relay mirror group and then illuminates the lens under test. The reflected light generated by the lens under test returns along the original path and enters the first beam splitter after passing through the relay mirror group. The first beam splitter splits the reflected light and then enters the CCD detector to complete the imaging of the lens under test and obtain discrete data.

3. The multi-probe centering detection method according to claim 2, characterized in that, The output light from the light sources of the multiple detection optical paths has different wavelengths, and filters matching the wavelength of the output light are set at the light output port of each light source and the light receiving port of the corresponding CCD detector.

4. The multi-probe centering detection method according to claim 1, characterized in that, The process of obtaining the standard sphere center difference corresponding to each standard sphere center trajectory in step S3 includes: The radius of the standard sphere's center trajectory can be converted to the plane tilt angle between the probe surface and the direction of light transmission in the channel probe optical path using the following formula: ； in, β represents the tilt angle of the surface, D represents the diameter of the standard spherical center trajectory, R represents the radius of the standard spherical lens, and β represents the transverse magnification of the probe surface in the channel probe optical path; The face tilt angle is converted to the standard sphere center difference using the following formula: ； Where ε represents the standard sphere center difference.

5. The multi-probe centering detection method according to claim 1, characterized in that, The consistency error of the measurement results in step S5 is the deviation between the center difference of each measured ball and the mean of the center differences of all measured balls.

6. The multi-probe centering detection method according to claim 1, characterized in that, The process of determining the center difference of the ball being tested in step S4 includes: When the deviation between the center difference of the measured sphere corresponding to a certain channel's detection optical path and the average value of the center differences of the other measured spheres exceeds a preset threshold, it is determined that the detection optical path of that channel has a measurement abnormality. If the number of abnormal channel detection optical paths reaches two or more, discard all the current measured sphere center differences and repeat step S4.

7. The multi-probe centering detection method according to claim 1, characterized in that, The process of obtaining the circle fitting residual in step S5 includes: During one rotation cycle of the lens under test, the algebraic circle equation of the trajectory of the center of the ball under test is fitted with least squares circle to obtain the center and radius of the circle. Calculate the distance between the sampling point on the lens under test and the center of the corresponding test sphere trajectory for each channel probe optical path, and the deviation between the distance and the radius of the sphere trajectory, to obtain the circular fitting residual of the corresponding channel probe optical path.

8. The multi-probe centering detection method according to claim 1, characterized in that, In step S5, the process of obtaining the channel fusion weights includes: The channel fusion weight is obtained by combining the measurement standard deviation, the circular fitting residual, and the measurement result consistency error and taking the reciprocal.

9. The multi-probe centering detection method according to claim 1, characterized in that, The overall sphere center difference obtained in step S6 is: ； Where A represents the overall difference in the center of the ball, ω i This represents the channel fusion weight corresponding to the i-th channel probe optical path. This represents the sphere center difference corresponding to the probe optical path of the i-th channel.

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