Detection System and Method Based on Holographic Template for Electron Beam Complex Amplitude Modulation

By using a holographic template system to perform complex amplitude modulation on the electron beam, the problem of amplitude and phase control in the existing technology has been solved, and precise control of the electron wave function has been achieved. This expands the dimensions and precision of electron beam manipulation and provides reliable data for electron microscopy imaging and processing.

CN122567032APending Publication Date: 2026-08-14TSINGHUA UNIVERSITY
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Patent Information

Application Number
CN202610666848.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-05-14
Publication Date
2026-08-14

AI Technical Summary

Technical Problem

Existing technologies cannot simultaneously achieve precise control of the amplitude and phase of the electronic wave function, and template design requires changes to the optical path of the transmission electron microscope, making it difficult to freely pattern and modulate.

Method used

An electron beam complex amplitude modulation system based on a holographic template is adopted, including a magnetic lens system, an electron holographic template, and an electron camera module. The electron beam is shaped by the magnetic lens system, and complex amplitude modulation is performed by the electron holographic template. The electron camera module performs imaging and detection. The fabrication size of the micro-nano structure is optimized by combining diffraction theory and the Schrödinger equation, so as to achieve precise control of amplitude and phase.

Benefits of technology

Complex amplitude modulation of the electron wave function was achieved, which can precisely control the amplitude and phase distribution of the electron wave without changing the original structure, thereby improving the dimensionality and precision of electron beam manipulation and providing reliable data feedback for electron microscopy imaging and processing.

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Abstract

This invention provides a detection system and method for complex amplitude modulation of an electron beam based on a holographic template. The system includes: a magnetic lens system module for shaping the electron beam generated by an electron gun to obtain an incident electron beam; an electron holographic template module for performing complex amplitude modulation on the incident electron beam; the electron holographic template module includes an electron phase template, which is a phase plate that performs overall phase encoding based on the target distribution of the expected electron wave function; and an electron camera module for imaging and detecting the modulated electron beam. This invention can perform overall encoding based on the target distribution of the expected electron wave function to achieve complex amplitude modulation of the electron wave function, enabling the system to not only control the vibration phase of the electron wave at various points in space, but also to precisely control its amplitude distribution.
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