A micro-hole array laser processing machine for electromagnetic shielding plate

By combining the negative pressure mechanism and the air blowing component, the problems of heat accumulation and debris in the laser processing of micro-hole arrays of electromagnetic shielding plates are solved, achieving efficient heat dissipation and debris removal, improving processing stability and aperture accuracy, and ensuring the consistency of shielding performance.

CN122625847APending Publication Date: 2026-08-25JIASHAN FUGUANG ELECTRONIC TECH CO LTD
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Patent Information

Application Number
CN202610933182.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-26
Publication Date
2026-08-25

AI Technical Summary

Technical Problem

In the process of creating micro-hole arrays for electromagnetic shielding plates using existing laser processing technology, the heat accumulation effect leads to heat-affected zones, recast layers, and microcracks in the material, affecting the consistency of hole diameter accuracy and shielding performance. Furthermore, there is a lack of effective heat dissipation and waste disposal methods.

Method used

The system employs a negative pressure mechanism and an air blowing assembly working together to extract hot gas through negative pressure and blow auxiliary gas for heat dissipation. At the same time, it utilizes a porous breathable layer to collect waste debris, achieving efficient local heat dissipation and waste debris removal.

Benefits of technology

This technology enables efficient heat dissipation and debris removal in the micro-hole array of electromagnetic shielding plates, improving processing stability and aperture accuracy, and ensuring consistent shielding performance.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present application relates to laser processing machine technical field, specifically propose a kind of electromagnetic shielding plate's micro-hole array laser processing machine, including laser machine;Surface is equipped with the processing platform of multiple rectangular array's ventilation small hole;Negative pressure mechanism, setting in the lower of the processing platform, the negative pressure mechanism is connected external vacuum source;Multiple-hole air-permeable layer, setting in the upper surface of the processing platform;The present application is by setting negative pressure mechanism, positioning mechanism and blowing assembly, blowing assembly transports auxiliary gas to processing area and carries out forced convection heat dissipation, simultaneously by negative pressure mechanism, hot gas is quickly extracted, both synergistic effect realizes the rapid efficient heat dissipation of processing area, blowing assembly sends auxiliary gas to processing area, and vaporization waste and molten splashes produced by laser processing are pressed downward to the surface of multiple-hole air-permeable layer and are intercepted collection, effectively prevent waste in the secondary pollution and attachment of around processing area and electromagnetic shielding plate surface.
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Description

Technical Field

[0001] This invention relates to the field of laser processing machine technology, and specifically proposes a micro-hole array laser processing machine for electromagnetic shielding plates. Background Technology

[0002] As electronic devices develop towards higher frequencies, smaller sizes, and higher integration, electromagnetic compatibility issues are becoming increasingly prominent. Electromagnetic shielding plates, as key components for suppressing electromagnetic interference (EMI), are widely used in the field of communication equipment electronics. To improve shielding effectiveness while also considering heat dissipation requirements, processing micro-hole arrays on electromagnetic shielding plates has become one of the mainstream technologies in the industry. In particular, polyimide (PI) based electromagnetic shielding films have been widely used in flexible circuit boards, antenna modules, and wearable devices due to their excellent heat resistance, mechanical flexibility, and electromagnetic shielding performance.

[0003] Currently, laser processing technology, including ultraviolet lasers, picosecond lasers, and femtosecond lasers, is mainly used for the micro-hole array processing of electromagnetic shielding plates. Laser processing has advantages such as non-contact operation, no tool wear, high processing precision, and the ability to process micro-diameter holes, making it particularly suitable for the array processing of micron-sized holes. However, during laser drilling, the high-energy-density laser beam acting on the material surface generates a large amount of heat, causing the material to melt, vaporize, or even carbonize. For heat-sensitive materials such as PI films, the heat accumulation effect is particularly prominent, easily forming a heat-affected zone (HAZ), recast layer, and microcracks around the hole wall, seriously affecting the dimensional accuracy, roundness, and shielding performance consistency of the microholes.

[0004] Therefore, there is an urgent need for a laser processing machine for electromagnetic shielding plates with micro-hole arrays that can achieve efficient local heat dissipation and chip removal, ensure processing stability, and facilitate maintenance. Summary of the Invention

[0005] To address the aforementioned problems, this invention provides a micro-hole array laser processing machine for electromagnetic shielding plates, which solves the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention employs the following technical solution: a micro-hole array laser processing machine for electromagnetic shielding plates, comprising a laser machine; a processing platform with a plurality of rectangular arrayed ventilation holes on its surface; a negative pressure mechanism disposed below the processing platform, the negative pressure mechanism being connected to an external vacuum source; a porous permeable layer disposed on the upper surface of the processing platform, the porous permeable layer being a replaceable flexible thin sheet material used to receive and collect vaporized waste generated during laser processing; and a clamping mechanism disposed on the surface of the processing platform for primary fixation of the electromagnetic shielding plate material and the porous permeable layer. A positioning mechanism, located above the processing platform, includes a pressure frame and an elastic sealing strip on the lower surface of the pressure frame. The pressure frame can move up and down relative to the processing platform to press the electromagnetic shielding plate to be processed onto the upper surface of the porous breathable layer and form a local sealing area within the area enclosed by the pressure frame. An air blowing assembly is located within the area enclosed by the pressure frame and is used to deliver auxiliary gas into the enclosed area. The negative pressure mechanism, positioning mechanism, and air blowing assembly are follower-type structures that can synchronously follow the laser processing head as it moves in the horizontal plane, and the negative pressure mechanism only generates negative pressure suction within the area enclosed by the pressure frame.

[0007] Preferably, the negative pressure mechanism includes a negative pressure shell that is larger at the top and smaller at the bottom, and a rectangular sealing ring is fixedly installed on the top of the negative pressure shell, the sealing ring abutting against the surface of the processing platform.

[0008] Preferably, two transverse guide rails are fixedly installed on the surface of the processing platform. An electric slider is installed inside the transverse guide rails. A longitudinal guide rail is installed between the two electric sliders. An electric slider is installed on the surface of the longitudinal guide rails. The negative pressure frame is installed on the surface of the electric slider through a lifting connecting block.

[0009] Preferably, two longitudinal guide rails are fixedly installed on the surface of the processing platform, electric sliders are installed inside the two longitudinal guide rails, a transverse guide rail is installed between the two electric sliders, an electric slider is installed on the surface of the transverse guide rails, and the positioning mechanism is installed on the surface of the electric slider.

[0010] Preferably, an electric push rod is mounted on the surface of the electric slider four, and a stepped connecting plate is fixedly mounted on the end of the electric push rod, with the pressure frame fixedly mounted on the surface of the connecting plate.

[0011] Preferably, the interior of the pressure frame is hollow, the air blowing assembly includes a vent hole opened inside the pressure frame, the vent hole is connected to the interior of the pressure frame, and an air extractor is installed on the surface of the connecting plate, the air extractor is connected to the interior of the pressure frame through a connecting pipe.

[0012] Preferably, the clamping mechanism includes a pressure plate spanning the surface of the processing platform. Two sets of pressure plates are provided, located at both ends of the processing platform respectively. The pressure plates press against the upper surfaces of the porous breathable layer and the electromagnetic shielding plate.

[0013] Preferably, an adjusting bolt is installed between the two pressure plates in the same group, the adjusting bolt having a thread that passes through the ends of the two opposing pressure plates.

[0014] Preferably, two positioning plates are fixedly installed on one surface of each set of pressure plates, and the two positioning plates are in contact with both sides of the processing platform.

[0015] Preferably, the pressure frame and the top area of ​​the negative pressure shell are the same size.

[0016] The above technical solution has the following advantages or beneficial effects: This invention provides a micro-hole array laser processing machine for electromagnetic shielding plates. By setting up a negative pressure mechanism, a positioning mechanism, and an air blowing component, the air blowing component delivers auxiliary gas to the processing area for forced convection heat dissipation. At the same time, the negative pressure mechanism rapidly extracts hot gas. The two work together to achieve rapid and efficient heat dissipation in the processing area. Meanwhile, the air blowing component blows auxiliary gas into the processing area, pushing the vaporized waste chips and molten spatter generated by laser processing downwards to the surface of the porous breathable layer and where they are intercepted and collected. Simultaneously, the negative pressure mechanism extracts suspended micro-waste particles, effectively preventing secondary pollution and adhesion of waste chips around the processing area and on the surface of the electromagnetic shielding plate. This achieves simultaneous and efficient heat dissipation and chip removal. Attached Figure Description

[0017] The invention, its features, shape, and advantages will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings. Like reference numerals denote like parts throughout the drawings, which are not intentionally drawn to scale; the focus is on illustrating the gist of the invention.

[0018] Figure 1 This is a three-dimensional structural schematic diagram of a micro-hole array laser processing machine for electromagnetic shielding plates provided by the present invention.

[0019] Figure 2 This is a schematic diagram of the three-dimensional installation structure above the processing platform.

[0020] Figure 3 This is a three-dimensional structural diagram showing the installation status of the positioning mechanism and the air blowing assembly.

[0021] Figure 4 This is a schematic diagram of the three-dimensional installation structure below the processing platform.

[0022] Figure 5 This is a schematic diagram of the sliding installation structure of the air blowing assembly.

[0023] Figure 6 This is a schematic diagram of the clamping mechanism in its installed state.

[0024] Figure 7 This is a schematic diagram of the sliding installation structure of the negative pressure mechanism.

[0025] In the diagram: 1. Laser machine; 2. Ventilation hole; 3. Processing platform; 4. Negative pressure mechanism; 41. Negative pressure shell; 42. Sealing ring; 5. Porous breathable layer; 6. Clamping mechanism; 61. Pressure plate; 62. Adjusting bolt; 63. Positioning plate; 7. Positioning mechanism; 71. Pressure frame; 72. Elastic sealing strip; 8. Air blowing assembly; 81. Ventilation hole; 82. Air extractor; 83. Connecting pipe; 9. Horizontal guide rail one; 10. Electric slider one; 11. Longitudinal guide rail one; 12. Electric slider two; 13. Longitudinal guide rail two; 14. Electric slider three; 15. Horizontal guide rail two; 16. Electric slider four; 17. Connecting plate; 18. Electric push rod. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] like Figure 1 As shown, this invention provides a micro-hole array laser processing machine for electromagnetic shielding plates, comprising a laser machine 1 and a processing platform 3 disposed below the laser machine 1. The laser machine 1 uses an ultraviolet laser or a picosecond laser, and the laser beam emitted by it is projected vertically downward onto the upper surface of the processing platform 3. The processing platform 3 has an overall rectangular flat plate structure and is placed horizontally on the machine frame (not shown in the figure), serving as the basic load-bearing component for the entire processing.

[0029] like Figure 2As shown, the surface of the processing platform 3 has multiple small ventilation holes 2 arranged in a rectangular array. These ventilation holes 2 penetrate the upper and lower surfaces of the processing platform 3 vertically, allowing airflow to pass through to achieve the negative pressure adsorption function. In this embodiment, the diameter of the ventilation holes 2 is 1mm-3mm. The rectangular array of ventilation holes 2 covers the entire upper surface area of ​​the processing platform 3, ensuring that no matter where the negative pressure mechanism 4 moves under the processing platform 3, there are enough ventilation holes 2 to provide a channel for effective negative pressure airflow transmission.

[0030] The length direction of the processing platform 3 is defined as the X direction, the width direction as the Y direction, and the vertical direction as the Z direction. For ease of description, the term "lateral" in the following text refers to extending along the X direction, "longitudinal" refers to extending along the Y direction, and "vertical" refers to extending along the Z direction.

[0031] like Figure 2 and Figure 5 As shown, before laser processing begins, the operator first lays the porous air-permeable layer 5 flat on the upper surface of the processing platform 3. The porous air-permeable layer 5 is a rectangular sheet structure, with both its length and width exceeding the coverage area of ​​the electromagnetic shielding plate material to be processed, ensuring that the processing area is within the range of the porous air-permeable layer 5. The porous air-permeable layer 5 is made of a glass fiber-filled polytetrafluoroethylene composite sheet with a thickness of 0.5mm-1.5mm. This material has a uniformly distributed and interconnected microporous structure with a pore size of 10μm-50μm and a porosity of 30%-50%. The microporous structure of the porous air-permeable layer 5 allows airflow to pass freely while effectively intercepting and collecting vaporized waste and molten spatter generated during laser processing that are blown onto its surface by the auxiliary gas.

[0032] In this embodiment, the porous breathable layer 5 is preferably made of glass fiber filled PTFE sheet with a thickness of 1.0 mm, and its micropore diameter is about 30 μm and porosity is about 40%.

[0033] The electromagnetic shielding plate to be processed is laid flat on the upper surface of the porous breathable layer 5. In this embodiment, the electromagnetic shielding plate is a polyimide (PI) based electromagnetic shielding film with a thickness of 25μm-125μm. The porous breathable layer 5 and the electromagnetic shielding plate are stacked sequentially on the surface of the processing platform 3, and the two need to be initially fixed by the clamping mechanism 6.

[0034] like Figure 2 and Figure 6As shown, the clamping mechanism 6 includes a pressure plate 61 spanning the upper surface of the processing platform 3. The pressure plate 61 is a long strip of material extending along the width direction (i.e., the Y direction) of the processing platform 3. There are four pressure plates 61 in total, divided into two groups of two, located at both ends of the processing platform 3 along its length. The long surface of each pressure plate 61 presses against the upper edge of the porous breathable layer 5 and the electromagnetic shielding plate, and both ends extend to the outer side of the processing platform 3 in the width direction, for the operator to perform handheld operation or connect and fix components.

[0035] An adjusting bolt 62 is installed between the two pressure plates 61 in the same group. Each end of the bolt has a threaded section with opposite directions of rotation. The threaded sections at both ends pass through the ends of the two pressure plates 61 in the same group. When the operator rotates the adjusting bolt 62, the two pressure plates 61 in the same group move synchronously towards each other or away from each other under the drive of the opposite threads, thereby achieving the pre-fixation of the electromagnetic shielding plate. A knob or hexagonal operating part is provided in the middle of the adjusting bolt 62, which is convenient for the operator to manually rotate and adjust.

[0036] Two positioning plates 63 are fixedly mounted on the surface of one of the pressure plates 61 in each set. The two positioning plates 63 are located at both ends of the pressure plate 61 along the width direction of the processing platform 3, and the inner sides of the two positioning plates 63 contact the two side edges of the processing platform 3, respectively. The positioning plates 63 are used to ensure that the pressure plate 61 maintains the correct position with the processing platform 3 during installation, and to prevent the pressure plate 61 from shifting during the clamping process, which would lead to clamping failure.

[0037] like Figures 2-5 and Figure 7 As shown, a negative pressure mechanism 4 and a corresponding moving guide structure are installed in the space below the processing platform 3.

[0038] Specifically, two transverse guide rails 9 are fixedly installed on the lower surface of the processing platform 3. The transverse guide rails 9 are linear guide rails that extend along the length direction (i.e., the X direction) of the processing platform 3. The two transverse guide rails 9 are arranged parallel to each other at intervals along the width direction (i.e., the Y direction) of the processing platform 3, and are located at the two side edges of the width direction of the processing platform 3, respectively. Each transverse guide rail 9 has an electric slider 10 installed inside it. The electric slider 10 forms a sliding engagement with the transverse guide rail 9. The electric slider 10 has a built-in drive motor (not shown in the figure) and can slide freely in the X direction within the transverse guide rail 9. Its sliding position is precisely controlled by an external motion controller.

[0039] A longitudinal guide rail 11 is fixedly installed between the two electric sliders 10. The longitudinal guide rail 11 is also a linear guide rail, extending along the width direction (i.e., the Y direction) of the processing platform 3. The two ends of the longitudinal guide rail 11 are fixedly connected to the surfaces of the two electric sliders 10 respectively. An electric slider 2 12 is installed on the surface of the longitudinal guide rail 11, and the electric slider 2 12 forms a sliding engagement with the longitudinal guide rail 11. The electric slider 2 12 has a built-in drive motor and can slide freely along the Y direction on the longitudinal guide rail 11. Its sliding position is also precisely controlled by an external motion controller.

[0040] The surface of the electric slider 12 is fixedly mounted with a negative pressure mechanism 4 via a connecting block (not shown in the figure). Through the combination of the aforementioned transverse guide rail 9, electric slider 10, longitudinal guide rail 11, and electric slider 12, the negative pressure mechanism 4 can achieve bidirectional independent movement in the X and Y directions in the horizontal plane, thereby enabling it to move to any desired position below the processing platform 3. Since both the transverse guide rail 9 and the longitudinal guide rail 11 are located on the lower surface of the processing platform 3, the overall movement of the negative pressure mechanism 4 will not interfere with the porous breathable layer 5 and the electromagnetic shielding plate on the upper surface of the processing platform 3.

[0041] The negative pressure mechanism 4 includes a negative pressure shell 41, which has a frustum-shaped structure that is larger at the top and smaller at the bottom. The top opening area is larger than the bottom area. The negative pressure shell 41 is made of aluminum alloy or stainless steel and has sufficient structural rigidity to withstand the external atmospheric pressure under negative pressure without significant deformation. The top opening of the negative pressure shell 41 is rectangular, and its external dimensions are the same as those of the pressure frame 71. The specific dimensions are determined according to the size of the micropore array area to be processed. The bottom of the negative pressure shell 41 tapers into a circular or rectangular interface, which is connected to an external vacuum source (not shown in the figure) through a flexible pipeline (not shown in the figure). The vacuum source is an industrial-grade vacuum pump or a Venturi vacuum generator.

[0042] A sealing ring 42 is fixedly installed on the top of the negative pressure shell 41 along its opening edge. The sealing ring 42 is a rectangular ring structure made of silicone rubber or fluororubber. The upper end face of the sealing ring 42 protrudes from the upper edge of the top of the negative pressure shell 41. The upper end face of the sealing ring 42 abuts tightly against the lower surface of the processing platform 3, forming a continuous airtight seal along the circumference of the top opening of the negative pressure shell 41.

[0043] When the vacuum source is activated, the area enclosed by the internal space of the negative pressure shell 41, the lower surface of the processing platform 3, and the top opening of the negative pressure shell 41, along with the vent holes 2 on the processing platform 3 located directly above the top opening of the negative pressure shell 41, together form a complete negative pressure airflow channel. Due to the airtight sealing effect of the sealing ring 42, the negative pressure inside the negative pressure shell 41 is difficult to leak from the gap between the lower surface of the processing platform 3 and the top opening of the negative pressure shell 41. Simultaneously, since the vent holes 2 on the processing platform 3 only connect the internal space of the negative pressure shell 41 to the atmospheric environment on the upper surface of the processing platform 3 within the area of ​​the top opening of the negative pressure shell 41, the negative pressure suction only acts on the vent holes 2 on the upper surface of the processing platform 3 within the area directly above the top opening of the negative pressure shell 41, achieving localized and precise control of negative pressure adsorption.

[0044] After the electromagnetic shielding plate is initially fixed by the clamping mechanism 6, it still needs to be precisely clamped by the positioning mechanism 7 to ensure the stability and sealing of the material during laser processing. The space above the processing platform 3 is equipped with a moving guide structure for the positioning mechanism 7. This structure is functionally independent of the moving guide structure of the negative pressure mechanism 4, but moves synchronously.

[0045] Specifically, two longitudinal guide rails 13 are fixedly installed on the upper surface of the processing platform 3. The longitudinal guide rails 13 are linear guide rails extending along the width direction (Y direction) of the processing platform 3. The two longitudinal guide rails 13 are arranged parallel to each other at intervals along the length direction (X direction) of the processing platform 3, located at the two ends of the length direction of the processing platform 3. Each longitudinal guide rail 13 has an internally installed electric slider 14, which slides in conjunction with the longitudinal guide rail 13. The electric slider 14 has a built-in drive motor and can slide freely within the longitudinal guide rail 13 along the Y direction. Its sliding position is precisely controlled by an external motion controller.

[0046] A transverse guide rail 15 is fixedly installed between the two electric sliders 3 14, extending along the length direction (i.e., the X direction) of the processing platform 3. The two ends of the transverse guide rail 2 15 are respectively fixedly connected to the surfaces of the two electric sliders 3 14. An electric slider 4 16 is installed on the surface of the transverse guide rail 2 15, forming a sliding engagement with the transverse guide rail 2 15. The electric slider 4 16 has a built-in drive motor and can slide freely on the transverse guide rail 2 15 along the X direction. Its sliding position is also precisely controlled by an external motion controller.

[0047] Through the combination of the longitudinal guide rail 2 13, the electric slider 3 14, the transverse guide rail 2 15, and the electric slider 4 16, the positioning mechanism 7 can achieve bidirectional independent movement in the X and Y directions within the horizontal plane, thereby enabling it to move to any desired position above the processing platform 3. Since both the longitudinal guide rail 2 13 and the transverse guide rail 2 15 are located on the upper surface of the processing platform 3, the overall movement of the positioning mechanism 7 will not be interfered with by the clamping mechanism 6.

[0048] It should be noted that the transverse guide rail 9 of the negative pressure mechanism 4 extends along the X direction and the longitudinal guide rail 11 extends along the Y direction, while the longitudinal guide rail 13 of the positioning mechanism 7 extends along the Y direction and the transverse guide rail 15 extends along the X direction. Although structurally staggered, they are both controlled by the same motion controller, enabling synchronous linkage. Under the unified scheduling of the motion controller, the negative pressure mechanism 4 and the positioning mechanism 7 can move simultaneously to the corresponding positions directly below and above the same processing location on the processing platform 3, maintaining a vertically aligned follow-up state at all times.

[0049] An electric push rod 18 is fixedly mounted on the surface of the electric slider 16. The electric push rod 18 is a miniature linear actuator, and its extension direction is perpendicular to the surface of the processing platform 3. A connecting plate 17 is fixedly mounted on the extended end (i.e., the lower end) of the electric push rod 18. The connecting plate 17 has a stepped structure. Its upper part is a horizontal mounting plate, which is fixedly connected to the extended end of the electric push rod 18. Its lower part is a horizontal connecting surface, on which the pressure frame 71 of the positioning mechanism 7 is fixedly connected. The upper mounting plate and the lower connecting surface are connected by a vertical connecting wall, so that after installation, the pressure frame 71 is located directly below the extended end of the electric push rod 18 and parallel to the surface of the processing platform 3.

[0050] The lower surface of the pressure frame 71 has a groove along its circumference, and an elastic sealing strip 72 is fixedly installed in the groove. The elastic sealing strip 72 is continuously arranged along the edge of the lower surface of the pressure frame 71 to form a closed rectangular ring structure. When the pressure frame 71 is driven to descend by the electric push rod 18, the elastic sealing strip 72 first contacts the upper surface of the electromagnetic shielding plate and undergoes elastic compression deformation under the continuous thrust of the electric push rod 18.

[0051] When the electric push rod 18 is in the retracted state, the pressure frame 71 is raised to a certain height above the electromagnetic shielding plate, and the elastic sealing strip 72 on its lower surface disengages from the upper surface of the electromagnetic shielding plate. At this time, the positioning mechanism 7 can move freely without scratching the surface of the electromagnetic shielding plate. When the electric push rod 18 retracts, the pressure frame 71 descends, and the elastic sealing strip 72 is pressed against the upper surface of the electromagnetic shielding plate, pressing the electromagnetic shielding plate against the upper surface of the porous breathable layer 5, and further pressing the porous breathable layer 5 against the upper surface of the processing platform 3. Because the elastic sealing strip 72 undergoes uniform elastic deformation under pressure, it can closely fit the microscopic unevenness of the electromagnetic shielding plate surface, forming a local sealing area within the rectangular area enclosed by the pressure frame 71. This area is isolated from the external atmospheric environment by the elastic sealing strip 72.

[0052] The interior of the pressure frame 71 is designed as a hollow structure, and the hollow cavity is continuously distributed along the circumference of the pressure frame 71. An air blowing assembly 8 is installed on the outside of the pressure frame 71 to work in conjunction with the negative pressure mechanism 4. The air blowing assembly 8 includes a plurality of vent holes 81 opened on the inner wall surface of the pressure frame 71. The vent holes 81 are circular through holes and are evenly distributed along the circumference of the inner wall of the pressure frame 71. The vent holes 81 penetrate the inner wall surface of the pressure frame 71 and the hollow interior of the pressure frame 71, that is, the vent holes 81 are connected to the hollow interior of the pressure frame 71.

[0053] An air inlet (not shown in the figure) is provided on the outer wall surface of the pressure frame 71. This air inlet is connected to the hollow interior of the pressure frame 71. An air pump 82 is fixedly installed on the surface of the connecting plate 17. The air pump 82 is a miniature air pump with a rated flow rate of 5L / min-30L / min. The air outlet of the air pump 82 is connected to the air inlet on the outer wall surface of the pressure frame 71 through a connecting pipe 83. The connecting pipe 83 is a flexible hose made of polyurethane or silicone rubber, which has a certain degree of bending flexibility and can adapt to the bending deformation of the connecting pipe 83 when the positioning mechanism 7 moves.

[0054] When the vacuum pump 82 is started, outside air is drawn into the vacuum pump 82, pressurized, and then enters the hollow interior of the pressure frame 71 through the connecting pipe 83. The air is then evenly blown into the locally sealed area enclosed by the pressure frame 71 through the vent holes 81 on the inner wall surface of the pressure frame 71. Because the vent holes 81 are evenly distributed along the circumference of the inner wall of the pressure frame 71, the blown auxiliary gas forms a uniform, top-down directional airflow field within the locally sealed area, effectively reducing the impact of wind on the movement of the electromagnetic shielding plate.

[0055] It should be noted that the negative pressure and blowing force, as well as the pressing force of the pressure frame 71, were obtained by professionals in the field through multiple experiments to reduce the influence of wind force and deformation force on the roundness of the holes in the electromagnetic shielding plate.

[0056] The steps for laser drilling are as follows: Through the unified scheduling of the motion controller, electric slider 10, electric slider 2 12, electric slider 3 14 and electric slider 4 16 move in coordination to move the negative pressure mechanism 4 and the positioning mechanism 7 to the corresponding positions of the first micro-hole array area to be processed on the electromagnetic shielding plate. The motion controller sends an extension command to the electric push rod 18 and the connecting block. The extended end of the electric push rod 18 moves downward, driving the connecting plate 17 and the pressure frame 71 to descend together. The connecting block moves upward, driving the negative pressure shell 41 to rise. The elastic sealing strip (72) on the lower surface of the pressure frame (71) first contacts the upper surface of the electromagnetic shielding plate, and the sealing ring 42 of the negative pressure shell 41 contacts the lower surface of the processing platform 3, thus forming a local sealed space. After maintaining the compressed state, the motion controller sends a start command to the external vacuum source. The vacuum source starts and evacuates the internal space of the negative pressure shell 41 through the pipeline. Because the sealing ring 42 at the top of the negative pressure shell 41 forms an airtight seal with the lower surface of the processing platform 3, the negative pressure inside the negative pressure shell 41 can only be transmitted to the upper surface of the processing platform 3 through the small ventilation hole 2 located in the opening area at the top of the negative pressure shell 41. After passing through the small ventilation hole 2, this negative pressure further passes through the microporous structure of the porous breathable layer 5 located above the small ventilation hole 2; The motion controller sends a start command to the vacuum pump 82. The vacuum pump 82 starts, drawing in and pressurizing outside air. The pressurized air enters the hollow interior of the pressure frame 71 through the connecting pipe 83, and is then evenly blown into the locally sealed area through the vents 81 on the inner wall surface of the pressure frame 71. The blown air forms a downward directional airflow within the locally sealed area, the direction of which is consistent with the direction of the negative pressure suction. During this process, the auxiliary gas blown out from the vent holes 81 on the inner wall of the pressure frame 71 continuously delivers fresh, room-temperature air to the processing area, performing forced convection heat exchange and quickly removing the heat generated by laser processing. This effectively prevents heat from accumulating around the processing area and forming a heat-affected zone. The directional blowing of the auxiliary gas pushes the vaporized waste and fine molten spatter generated during processing downwards, causing them to pass through the micropores being processed or enter the surface of the porous air-permeable layer 5 along the surface of the electromagnetic shielding plate. Some of the fine waste is further blown into the microporous structure inside the porous air-permeable layer 5 by the airflow and is trapped, preventing it from spreading to the surface of the electromagnetic shielding plate around the processing area and causing secondary pollution.

[0057] It should be noted that although the present invention adds a negative pressure mechanism 4 and an air blowing component 8 compared to the prior art, these are all conventional and ordinary mechanical structures without any high-cost precision parts. After use, the quality of the product can be effectively improved, and the addition can be used continuously. Therefore, the cost of adding the above structures is negligible. The above technical solution of the present invention is based entirely on the above-mentioned prior art and is a specific improvement made to solve the technical problem.

[0058] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0059] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "connected," "installed," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0060] The preferred embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and the devices and structures not described in detail should be understood as being implemented in a manner common to the art; any possible variations and modifications made by those skilled in the art without departing from the technical solution of the present invention, or equivalent embodiments with equivalent changes, do not affect the essential content of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the protection scope of the technical solution of the present invention.

Claims

1. A laser processing machine for micro-hole arrays of electromagnetic shielding plates, characterized in that: include Laser machine; A processing platform with multiple rectangular arrays of ventilation holes on its surface; A negative pressure mechanism is located below the processing platform and is connected to an external vacuum source; A porous air-permeable layer is disposed on the upper surface of the processing platform. The porous air-permeable layer is a replaceable flexible sheet material used to receive and collect vaporized waste chips generated by laser processing. The clamping mechanism, located on the surface of the processing platform, is used for primary fixation of the electromagnetic shielding plate material and the porous breathable layer. The positioning mechanism is located above the processing platform and includes a pressure frame and an elastic sealing strip located on the lower surface of the pressure frame. The pressure frame can move up and down relative to the processing platform to press the electromagnetic shielding plate to be processed onto the upper surface of the porous breathable layer and form a local sealing area in the area enclosed by the pressure frame. An air blowing assembly is positioned within the area enclosed by the pressure frame and is used to deliver auxiliary gas into the enclosed area. The negative pressure mechanism, positioning mechanism, and air blowing assembly are all of a follow-up structure, which can synchronously follow the laser processing head as it moves in the horizontal plane, and the negative pressure mechanism only generates negative pressure suction within the area enclosed by the pressure frame.

2. The micro-hole array laser processing machine for electromagnetic shielding plates according to claim 1, characterized in that: The negative pressure mechanism includes a negative pressure shell that is larger at the top and smaller at the bottom. A rectangular sealing ring is fixedly installed on the top of the negative pressure shell, and the sealing ring abuts against the surface of the processing platform.

3. The micro-hole array laser processing machine for electromagnetic shielding plates according to claim 2, characterized in that: Two transverse guide rails are fixedly installed on the surface of the processing platform. An electric slider is installed inside the transverse guide rail. A longitudinal guide rail is installed between the two electric sliders. An electric slider is installed on the surface of the longitudinal guide rail. The negative pressure shell is installed on the surface of the electric slider through a lifting connecting block.

4. The micro-hole array laser processing machine for electromagnetic shielding plates according to claim 1, characterized in that: Two longitudinal guide rails are fixedly installed on the surface of the processing platform. Electric sliders are installed inside the two longitudinal guide rails. A transverse guide rail is installed between the two electric sliders. An electric slider is installed on the surface of the transverse guide rails. The positioning mechanism is installed on the surface of the electric slider.

5. A micro-hole array laser processing machine for electromagnetic shielding plates according to claim 4, characterized in that: An electric push rod is mounted on the surface of the electric slider four, and a stepped connecting plate is fixedly mounted on the end of the electric push rod. The pressure frame is fixedly mounted on the surface of the connecting plate.

6. The micro-hole array laser processing machine for electromagnetic shielding plates according to claim 5, characterized in that: The interior of the pressure frame is hollow, and the air blowing assembly includes a vent hole opened inside the pressure frame, which communicates with the interior of the pressure frame. An air extractor is installed on the surface of the connecting plate, and the air extractor is connected to the interior of the pressure frame through a connecting pipe.

7. The micro-hole array laser processing machine for electromagnetic shielding plates according to claim 1, characterized in that: The clamping mechanism includes a pressure plate spanning the surface of the processing platform. Two sets of pressure plates are provided, located at both ends of the processing platform. The pressure plates press against the upper surfaces of the porous breathable layer and the electromagnetic shielding plate.

8. A micro-hole array laser processing machine for electromagnetic shielding plates according to claim 7, characterized in that: An adjusting bolt is installed between the two pressure plates in the same group, and the adjusting bolt thread passes through the ends of the two opposing pressure plates.

9. A micro-hole array laser processing machine for electromagnetic shielding plates according to claim 8, characterized in that: Two positioning plates are fixedly installed on one surface of each set of pressure plates, and the two positioning plates are in contact with the two sides of the processing platform.

10. A micro-hole array laser processing machine for electromagnetic shielding plates according to claim 1, characterized in that: The pressure frame and the top area of ​​the negative pressure shell are the same size.