Device and method for realizing the unification of ebsd and laue method xrd test coordinates

Abstract

The application relates to a device and method for realizing the unification of EBSD and Laue method XRD test coordinates, wherein a sample bearing slope is arranged on an inclination conversion table, a conversion table positioning column is arranged on the lower side of the inclination conversion table, a first positioning column hole matched with the conversion table positioning column is arranged on an EBSD base, and a second positioning column hole matched with the conversion table positioning column is arranged on an XRD base; a first threaded hole for inserting a locking top pin is arranged on the EBSD base, a second threaded hole for inserting the locking top pin is arranged on the XRD base; a locking flat matched with the locking top pin is arranged on one side of the conversion table positioning column; a base support slope is arranged on the XRD base, and the inclination angle of the base support slope is equal to the inclination angle of the sample bearing slope and is 20 DEG; and a sample test surface is formed on the upper side of the sample along the inclination direction. The application can realize the unification of the sample coordinates of EBSD and Laue method XRD test, and further realize the high-precision and high-repetitive unification with crystallographic orientation.

Description

Technical Field

[0001] This invention relates to the field of material microstructure analysis and testing technology, specifically to a device and method for unifying EBSD and Laue XRD test coordinates. Background Technology

[0002] In the field of microscopic characterization of materials, electron backscatter diffraction (EBSD) and X-ray diffraction (XRD) systems are common analytical testing systems. One commonly used X-ray diffraction system is the single-crystal orientation determination based on backscatter Laue diffraction (hereinafter referred to as Laue XRD).

[0003] Currently, combining the micro-area orientation analysis capabilities of EBSD with the macroscopic phase statistical capabilities of XRD to perform correlation analysis on the same micro-area is an important means of in-depth research on the relationship between material structure and properties. Among them:

[0004] EBSD requires the sample surface to be tilted at a 70° angle relative to the incident electron beam, which is determined by the following physical mechanism:

[0005] 1. Signal strength requirements. The emission path of backscattered electrons shortens as the tilt angle increases, resulting in enhanced diffraction signals. 70° is the optimal balance point between signal strength and spatial resolution.

[0006] Second: Sensitivity to angular deviation. A deviation of 70° in the tilt angle of the backscattered electron exit path will lead to a decrease in the signal-to-noise ratio and calibration rate of the Kikuchi pattern. In precision strain analysis, a deviation of 0.3° can introduce significant geometric distortion; therefore, EBSD testing typically requires the tilt angle error to be controlled within ±0.5°.

[0007] Laue XRD, on the other hand, requires the sample surface to be horizontal to ensure that the sample surface normal is perpendicular. Because the Laue XRD system is based on the back-reflection Laue diffraction principle for single-crystal orientation determination:

[0008] 1. According to the geometric reference of back reflection, the Laue method requires that the X-ray incident direction, the normal of the sample test surface, and the central axis of the detector be coplanar, and that the normal of the sample test surface perpendicularly bisects the line connecting the X-ray emitter and the center of the detector. Therefore, the tilt of the normal of the sample test surface will cause the center of symmetry of the Laue spot to shift and the geometric distribution of the diffraction pattern to be distorted.

[0009] Second: According to the accuracy requirements of orientation calibration, the Laue method determines the crystal orientation by calculating the inclination angle between the crystal plane corresponding to the diffraction spot and the normal of the sample surface. If the normal of the sample test surface is tilted, it will cause the reference axis of the reference coordinate system to rotate. The measured orientation deviation will be superimposed with the geometric error introduced by the installation, which will result in the accuracy failing to meet the test requirements.

[0010] In addition to the significant differences in sample surface angles mentioned above, the instrument environments for EBSD and Laue XRD also differ. EBSD is conducted in a high-vacuum chamber of a scanning electron microscope, while Laue diffraction is conducted in an atmospheric environment. The sample stage interface, fixing method, and coordinate system of the two are not consistent. Furthermore, the coordinate references of EBSD and Laue XRD are not transferable. This is because the coordinates of the region of interest (ROI) and angular references recorded in EBSD are permanently lost after the sample is disassembled and reassembled. In the field of orientation testing, sample disassembly and reassembly are the key links that introduce errors, and this level of error is unacceptable. This would render the sample meaningless for orientation testing and would also cause the test data of EBSD and Laue XRD to be unable to correlate in space and angular direction.

[0011] Currently, some improvement ideas for addressing the above problems mainly focus on the testing equipment itself, that is, using the functions of the testing equipment itself to avoid sample disassembly as much as possible. However, this also means that the testing equipment usually needs to rely on the advanced functions or specific structures of specific models of instruments, resulting in poor universality. At the same time, it is difficult to achieve high-precision, repeatable angular positioning and transfer at the physical level. Summary of the Invention

[0012] The purpose of this invention is to provide a device and method for unifying the test coordinates of EBSD and Laue XRD. This device and method can unify the sample coordinates of EBSD and Laue XRD tests, thereby achieving high precision and high repeatability of crystallographic orientation. This provides a practical hardware solution for cross-scale, multi-instrument correlated microstructure analysis.

[0013] The objective of this invention is achieved through the following technical solution:

[0014] A device for unifying EBSD and Laue XRD test coordinates includes an angle conversion stage, an EBSD base, an XRD base, and a locking screw. The angle conversion stage has a sample-bearing inclined surface on its upper side, and the sample is placed on the sample-bearing inclined surface. A conversion stage positioning post is located on the lower side of the angle conversion stage. The EBSD base has a first positioning post hole that mates with the conversion stage positioning post, and the XRD base has a second positioning post hole that mates with the conversion stage positioning post. The EBSD base has a first threaded hole communicating with the first positioning post hole and allowing the locking screw to be inserted. The XRD base has a second threaded hole communicating with the second positioning post hole and allowing the locking screw to be inserted. A locking plane that contacts and mates with the locking screw is located on one side of the conversion stage positioning post. The XRD base has a base support inclined surface on its upper side, and the inclination angle of the base support inclined surface is equal to the inclination angle of the sample-bearing inclined surface, both being 20°. The sample forms a sample test surface along the upper side of the inclined direction.

[0015] The sample has a cubic structure, and the lower side of the sample forms a sample adhesive surface that is bonded to the sample bearing inclined surface.

[0016] The upper end of the XRD base is provided with a set screw mating surface, and the locking set screw is inserted into the second threaded hole through the set screw mating surface.

[0017] The positioning column of the conversion platform is cylindrical in shape with one side forming the locking plane.

[0018] In addition to the positioning post, the lower side of the tilt conversion platform is also provided with an adjusting guide post. The EBSD base is provided with a guide post hole for the adjusting guide post to be inserted. The lower side of the EBSD base is provided with a fine-tuning threaded hole and a height fine-tuning nut. The height fine-tuning nut includes a threaded section on the lower side and a support section on the upper side. The threaded section is installed in the fine-tuning threaded hole. The upper surface of the support section contacts and supports both the lower end face of the positioning post and the lower end face of the adjusting guide post. The lower side of the threaded section is provided with a screwing hole.

[0019] The diameter of the threaded section is larger than the diameter of the support section.

[0020] The XRD base has multiple second positioning pin holes on its base support slope. When the tilt conversion table is placed on the XRD base, the conversion table positioning pin and the adjusting guide pin are respectively inserted into the corresponding second positioning pin holes, and the second threaded hole passes through each second positioning pin hole.

[0021] A method for unifying EBSD and Laue XRD test coordinates according to the aforementioned apparatus includes the following steps:

[0022] Step 1: Apply conductive adhesive to the upper part of the sample support slope of the tilt conversion stage, and then align the sample adhesive surface on the lower side of the sample with the position where the conductive adhesive is applied on the sample support slope.

[0023] Step 2: Place the EBSD base in the EBSD system, then place the tilt conversion stage carrying the sample on the EBSD base, and insert the conversion stage positioning post into the first positioning post hole;

[0024] Step 3: Insert the locking set screw into the first threaded hole until the front end face of the locking set screw is in contact with the locking plane and locked.

[0025] Step 4: Establish the sample coordinate system with any position on the tilt conversion stage as the reference, and then perform EBSD testing;

[0026] Step 5: After the EBSD test is completed, place the XRD base in the Laue XRD system, then unscrew the locking screw on the EBSD base, and remove the tilt conversion stage and sample assembly from the EBSD system. Then transfer the tilt conversion stage and sample assembly to the XRD base and insert the conversion stage positioning post into the second positioning post hole.

[0027] Step 6: Insert the locking set screw into the second threaded hole until the front end face of the locking set screw is in contact with the locking plane and locked.

[0028] Step 7: Establish a sample coordinate system using the same position on the tilt conversion stage as in Step 4 as the reference datum, and then perform XRD tests on the same area on the sample as in Step 4.

[0029] The advantages and positive effects of this invention are as follows:

[0030] 1. This invention utilizes an angle conversion stage to support the sample, and simultaneously uses the angle conversion stage and sample assembly to transfer the sample between the EBSD system and the Laue XRD system. During the transfer, the angle conversion stage and the sample do not separate, and the sample-bearing inclined surface on the upper side of the angle conversion stage and the base-supporting inclined surface on the upper side of the XRD base can achieve precise complementary cooperation. On the one hand, this ensures that the sample test surface is at 70° to the horizontal direction during EBSD testing, thus meeting the EBSD testing requirements. On the other hand, it ensures that the sample test surface is vertical during Laue XRD testing, that is, that the normal of the sample test surface is horizontal, thus meeting the Laue XRD testing requirements. At the same time, the above tests can all use the angle conversion stage as a reference to establish the sample coordinate system, thereby achieving the unification of sample coordinates for EBSD and Laue XRD testing, and thus achieving high precision and high repeatability consistency with crystallographic orientation.

[0031] 2. This invention utilizes locking set screws to lock the position of the tilt conversion stage on the EBSD base and XRD base. At the same time, the front end face of the locking set screw is tightly fitted with the locking plane on the positioning post of the tilt conversion stage on the lower side of the stage. This not only locks the position of the tilt conversion stage but also prevents the tilt conversion stage from rotating, thus ensuring the reliability of the test.

[0032] 3. This invention does not require modification of existing EBSD or Laue XRD systems. It only requires a tilt conversion stage to meet the requirement of unified sample coordinates for EBSD and Laue XRD tests, and the cost is low.

[0033] 4. The present invention allows the tilt conversion stage to be placed directly on the EBSD base or XRD base as needed, or a fine-tuning structure to be added to the EBSD base and XRD base as needed to better meet the testing requirements. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the usage state of one embodiment of the present invention. Figure 1 ,

[0035] Figure 2 for Figure 1 Usage status illustration of the Chinese embodiment Figure 2 ,

[0036] Figure 3 for Figure 1 A schematic diagram of the combination of the tilt stage and the sample.

[0037] Figure 4 for Figure 3 Bottom view of the tilt conversion platform.

[0038] Figure 5 This is a schematic diagram of the usage state of another embodiment of the present invention. Figure 1 ,

[0039] Figure 6 for Figure 5 A schematic diagram of the structure of the medium-height fine-tuning nut.

[0040] Figure 7 for Figure 5 Usage status illustration of the Chinese embodiment Figure 2 .

[0041] Wherein, 1 is the EBSD base, 101 is the first positioning pin hole, 102 is the first threaded hole, 103 is the fine-tuning threaded hole, 104 is the guide pin hole, 2 is the tilt conversion stage, 201 is the sample bearing inclined surface, 202 is the conversion stage positioning pin, 2021 is the locking plane, 203 is the adjusting guide pin, 3 is the sample, 301 is the sample adhesive surface, 4 is the sample testing surface, 5 is the locking set screw, 6 is the EBSD system, 7 is the XRD base, 701 is the second positioning pin hole, 702 is the second threaded hole, 703 is the base support inclined surface, 704 is the set screw mating surface, 8 is the Laue XRD system, 9 is the height fine-tuning nut, 901 is the threaded section, 902 is the support section, and 903 is the screwing hole. Detailed Implementation

[0042] The invention will now be described in further detail with reference to the accompanying drawings.

[0043] like Figures 1-7As shown, the device of the present invention includes a tilt conversion stage 2, an EBSD base 1, an XRD base 7, and a locking screw 5. The tilt conversion stage 2 has a sample-bearing inclined surface 201 on its upper side, and a sample 3 is placed on the sample-bearing inclined surface 201. The tilt conversion stage 2 has a conversion stage positioning post 202 on its lower side. The EBSD base 1 has a first positioning post hole 101 that mates with the conversion stage positioning post 202, and the XRD base 7 has a second positioning post hole 701 that mates with the conversion stage positioning post 202. Figure 1 and Figure 2 As shown, the EBSD base 1 has a first threaded hole 102 communicating with the first positioning post hole 101 and for inserting the locking set screw 5, and the XRD base 7 has a second threaded hole 702 communicating with the second positioning post hole 701 and for inserting the locking set screw 5; Figure 4 As shown, one side of the positioning post 202 of the conversion platform is provided with a locking plane 2021 that contacts and engages with the locking screw 5; as Figure 2 As shown, the XRD base 7 has a base support slope 703 on its upper side, and the tilt angle (angle between the base support slope 703 and the horizontal direction) of the base support slope 703 is equal to the tilt angle of the sample bearing slope 201 and both are 20°.

[0044] like Figure 1 As shown, the sample 3 has a cubic structure, and the lower surface of the sample 3 forms a sample adhesive surface 301 that is adhesively connected to the sample bearing inclined surface 201. The sample 3 forms a sample test surface 4 along the upper side of the inclined direction. Figure 1 As shown, during EBSD testing, the EBSD base 1 is placed in the high-vacuum chamber of the scanning electron microscope (SEM) of the EBSD system 6 and on the SEM sample stage. At this time, the sample test surface 4 faces the SEM side, and the sample test surface 4 forms a 70° angle α with the horizontal direction, which meets the testing requirements. Figure 2 As shown, during Laue XRD testing, the XRD base 7 is placed on the sample stage in the Laue XRD system 8 under atmospheric conditions, with the sample test surface 4 facing the Laue camera side. Simultaneously, the normal to the sample test surface 4 remains horizontal (i.e., the sample test surface 4 remains vertical), meeting the testing requirements. Since the sample 3 is not removed from the tilt conversion stage 2, the tilt conversion stage 2 can be used as a reference to establish the sample coordinate system, thus achieving coordinate unification between EBSD and Laue XRD testing. Both the EBSD system 6 and the Laue XRD system 8 are well-known technologies in the art and are commercially available products.

[0045] like Figure 2As shown, the upper end of the XRD base 7 is provided with a set screw mating surface 704, and the locking set screw 5 is inserted into the second threaded hole 702 through the set screw mating surface 704.

[0046] like Figures 3-4 As shown, the positioning post 202 of the conversion platform is cylindrical in shape with one side forming the locking plane 2021.

[0047] The present invention allows the tilt conversion stage 2 to be placed directly on the EBSD base 1 or XRD base 7 according to the testing requirements, or to add a fine-tuning structure to the EBSD base 1 and XRD base 7 to better meet the testing requirements.

[0048] Example 1:

[0049] like Figures 1-2 As shown, in this embodiment, the tilt conversion stage 2 is placed directly on the EBSD base 1 or XRD base 7. Then, the operator screws in the locking screw 5 and rotates the tilt conversion stage 2 until the front end plane of the locking screw 5 is tightly fitted with the locking plane 2021. This can lock the position of the tilt conversion stage 2 and prevent the tilt conversion stage 2 from rotating.

[0050] The working principle of this embodiment is as follows:

[0051] The following steps are included when using this embodiment:

[0052] Step 1: Apply conductive adhesive to the upper end of the sample bearing inclined surface 201 of the tilt conversion stage 2, and then attach the sample adhesive surface 301 on the lower side of the sample 3 to the position where the conductive adhesive is applied on the sample bearing inclined surface 201.

[0053] In this step, before adhesive bonding, it is necessary to ensure that the overall shape of sample 3 (metal sample) is a cubic structure. In addition, the sample test surface 4 needs to be finely electropolished to eliminate the stress layer, thereby meeting the test requirements of EBSD and Laue diffraction.

[0054] Step 2: Place the EBSD base 1 in the high vacuum chamber of the scanning electron microscope of the EBSD system 6 and place it on the scanning electron microscope sample stage. Then place the tilt conversion stage 2 carrying the sample 3 on the EBSD base 1 and insert the conversion stage positioning post 202 into the first positioning post hole 101.

[0055] Step 3: Insert the locking screw 5 into the first threaded hole 102, and rotate the tilt conversion table 2 until the front end face of the locking screw 5 is tightly fitted with the locking plane 2021 to achieve locking.

[0056] Step 4: Establish the sample coordinate system with the tilt conversion stage 2 as the reference (for example, with a certain point or plane on the tilt conversion stage 2 as the reference), and then perform EBSD testing.

[0057] In this embodiment, feature points of sample 3 were located and their coordinates were recorded under low magnification electron microscopy. Subsequently, EBSD multi-point analysis was performed on a selected area of ​​sample 3. The deviation of the average crystal orientation from the ideal orientation in the sample coordinate system was measured to be 2.1° using EBSD software. This deviation mainly originated from the minor errors in the initial cutting and mounting of sample 3, and this value was recorded as the initial orientation reference. The above testing process is a well-known technique in the art.

[0058] Step 5: After the EBSD test, place the XRD base 7 on the sample stage in the Laue XRD system 8 under atmospheric conditions. Then, unscrew the locking screw 5 outwards and steadily remove the entire assembly of the tilt conversion stage 2 and sample 3 from the EBSD system 6 vertically upwards. Transfer the assembly of the tilt conversion stage 2 and sample 3 onto the XRD base 7, and insert the conversion stage positioning post 202 into the second positioning post hole 701. During the transfer, ensure that the assembly of the tilt conversion stage 2 and sample 3 does not rotate or collide.

[0059] Step 6: Insert the locking set screw 5 into the second threaded hole 702, and rotate the tilt conversion table 2 until the front end face of the locking set screw 5 is tightly fitted with the locking plane 2021 to achieve locking.

[0060] Step 7: Establish a sample coordinate system with the same position on the tilt conversion stage 2 as in Step 4 as the reference (for example, with the same point or plane on the tilt conversion stage 2 as the EBSD test), and then perform XRD testing.

[0061] In this embodiment, the XRD test adopts a back-reflection symmetrical reflection geometry configuration, and its spatial relationship is as follows:

[0062] The center of the X-ray tube exit window and the geometric center of the detector plane are located in the same horizontal plane, and are arranged symmetrically with the test point on the sample test surface 4 as the center.

[0063] The normal of the sample test surface 4 at the test point lies in the horizontal plane, and the line connecting the center point of the X-ray tube and the center point of the detector intersects perpendicularly at the test point;

[0064] Under the above configuration, the incident X-ray path and the diffracted X-ray path are mirror-symmetric about the sample surface normal. Therefore, the sample test surface 4 must be in a strictly straight state to meet the above geometric conditions.

[0065] Since the sample bearing inclined surface 201 and the base support inclined surface 703 are both inclined at 20°, the present invention can achieve precise complementary cooperation, ensuring that the sample test surface 4 is vertical, thereby ensuring that the normal of the sample test surface 4 is horizontal and meets the test requirements. At the same time, the position of the tilt transformation stage 2 referenced when establishing the sample coordinate system is the same as that of the EBSD test, thus realizing the unification of EBSD and Laue XRD test coordinates.

[0066] In this embodiment, the Laue XRD system 8 uses a Laue camera to perform Laue backscatter diffraction tests on a selected area of ​​sample 3, identical to that used in EBSD testing. Then, it acquires the diffraction pattern and, by analyzing the Laue pattern, calculates that the crystal orientation of this region deviates from the ideal direction by 2.5°. The above testing process is a well-known technique in the art.

[0067] This invention achieves high precision and high repeatability in unifying the spatial coordinates and crystallographic orientation of EBSD and Laue XRD test samples through the above-described method, providing a practical hardware solution for cross-scale, multi-instrument correlated microstructure analysis. At the same time, the "double-sloping-surface complementary design" of the sample-bearing inclined surface 201 and the base-supporting inclined surface 703, as well as the "mechanical angular locking" design in which the front end face of the locking set screw 5 is closely fitted with the locking plane 2021, can ensure the reliability of the test.

[0068] Example 2:

[0069] like Figures 5-7 As shown, in another embodiment of the present invention, a height fine-tuning nut 9 may be provided on the lower side of the EBSD base 1 as needed to fine-tune the height of the tilt conversion platform 2, and a plurality of second positioning pin holes 701 may be provided on the base support inclined surface 703 of the XRD base 7 to adjust the position of the tilt conversion platform 2 on the base support inclined surface 703.

[0070] Among them, such as Figure 5 As shown, in this embodiment, in addition to the positioning post 202, the lower side of the tilt conversion platform 2 is also provided with an adjusting guide post 203. The EBSD base 1 is provided with a guide post hole 104 for the adjusting guide post 203 to be inserted. The lower side of the EBSD base 1 is provided with a fine-tuning threaded hole 103, as shown. Figure 6 As shown, the height fine-tuning nut 9 includes a lower threaded section 901 and an upper support section 902. The diameter of the threaded section 901 is larger than the diameter of the support section 902, and the threaded section 901 is threaded into the fine-tuning threaded hole 103. The upper surface of the support section 902 can contact and support both the lower end face of the conversion platform positioning post 202 and the lower end face of the adjustment guide post 203. The lower side of the threaded section 901 is provided with a screwing hole 903 (such as a hexagonal hole) for screwing operation.

[0071] In this embodiment, the operator can use a hex screwdriver or other tools to insert into the screw hole 903 to drive the threaded section 901 to rotate and move within the fine-tuning threaded hole 103. This allows the support section 902 to support the conversion platform positioning column 202 and the adjusting guide column 203 to rise and fall synchronously for fine-tuning. The synchronous rise and fall of the conversion platform positioning column 202 and the adjusting guide column 203 ensures that the overall angle of the tilt conversion platform 2 does not change, thus not affecting the subsequent sample testing angle. In addition, this embodiment adds an auxiliary limiting adjustment of the adjusting guide column 203. After the locking screw 5 is screwed in, it can directly press against the locking plane 2021 to achieve locking, without the need to rotate the tilt conversion platform 2 for adjustment.

[0072] And such Figure 7 As shown, in this embodiment, when the tilt conversion stage 2 is placed on the XRD base 7, the conversion stage positioning post 202 and the adjusting guide post 203 can be respectively inserted into the corresponding second positioning post hole 701. In this way, the tilt conversion stage 2 can be adjusted along the base support inclined surface 703 without affecting the subsequent test angle. The second threaded hole 702 passes through each of the second positioning post holes 701 in sequence, which can ensure that the locking screw 5 can be screwed in and tightened under different conditions. In addition, in this embodiment, different lengths of locking screws 5 can be used to meet the locking requirements according to different positions of the tilt conversion stage 2. Similarly, due to the auxiliary limiting effect of the adjusting guide post 203, after the locking screw 5 is screwed in, it can directly press against the locking plane 2021 to achieve locking, without the need to rotate the tilt conversion stage 2 for adjustment.

Claims

1. A device for unifying EBSD and Laue XRD test coordinates, characterized in that: The system includes a tilt conversion stage (2), an EBSD base (1), an XRD base (7), and a locking screw (5). The tilt conversion stage (2) has a sample bearing inclined surface (201) on its upper side, and the sample (3) is placed on the sample bearing inclined surface (201). The tilt conversion stage (2) has a conversion stage positioning post (202) on its lower side. The EBSD base (1) has a first positioning post hole (101) that mates with the conversion stage positioning post (202), and the XRD base (7) has a second positioning post hole (701) that mates with the conversion stage positioning post (202). The EBSD base (1) has a second positioning post hole (701) that mates with the first positioning post hole (101). The XRD base (7) is provided with a first threaded hole (102) that is connected to and allows the locking set screw (5) to be inserted. The XRD base (7) is provided with a second threaded hole (702) that is connected to the second positioning post hole (701) and allows the locking set screw (5) to be inserted. The positioning post (202) of the conversion table is provided with a locking plane (2021) on one side that is in contact with the locking set screw (5). The XRD base (7) is provided with a base support slope (703) on the upper side. The slope angle of the base support slope (703) is equal to the slope angle of the sample bearing slope (201) and both are 20°. The sample (3) forms a sample test surface (4) on the upper side along the slope direction.

2. The apparatus for unifying EBSD and Laue XRD test coordinates according to claim 1, characterized in that: The sample (3) has a cubic structure, and a sample adhesive surface (301) is formed on the lower side of the sample (3) and is adhesively connected to the sample bearing inclined surface (201).

3. The apparatus for unifying EBSD and Laue XRD test coordinates according to claim 1, characterized in that: The XRD base (7) has a set screw mating surface (704) at its upper end, and the locking set screw (5) is inserted into the second threaded hole (702) by the set screw mating surface (704).

4. The apparatus for unifying EBSD and Laue XRD test coordinates according to claim 1, characterized in that: The positioning post (202) of the conversion platform is cylindrical in shape with one side forming the locking plane (2021).

5. The apparatus for unifying EBSD and Laue XRD test coordinates according to claim 1, characterized in that: In addition to the positioning post (202) of the tilt conversion platform (2), an adjustment guide post (203) is also provided on the lower side of the platform. The EBSD base (1) is provided with a guide post hole (104) for the adjustment guide post (203) to be inserted. The lower side of the EBSD base (1) is provided with a fine-tuning threaded hole (103) and a height fine-tuning nut (9). The height fine-tuning nut (9) includes a threaded section (901) on the lower side and a support section (902) on the upper side. The threaded section (901) is installed in the fine-tuning threaded hole (103). The upper surface of the support section (902) is in contact with and supports the lower end face of the positioning post (202) of the platform and the lower end face of the adjustment guide post (203). The lower side of the threaded section (901) is provided with a screw hole (903).

6. The apparatus for unifying EBSD and Laue XRD test coordinates according to claim 5, characterized in that: The diameter of the threaded section (901) is larger than the diameter of the support section (902).

7. The apparatus for unifying EBSD and Laue XRD test coordinates according to claim 5, characterized in that: The XRD base (7) has a plurality of second positioning pin holes (701) on its base support slope (703). When the tilt conversion table (2) is placed on the XRD base (7), the conversion table positioning pin (202) and the adjustment guide pin (203) are respectively inserted into the corresponding second positioning pin holes (701), and the second threaded hole (702) passes through each second positioning pin hole (701).

8. A method for unifying EBSD and Laue XRD test coordinates according to claim 1, characterized in that: Includes the following steps: Step 1: Apply conductive adhesive to the upper end of the sample bearing slope (201) of the tilt conversion stage (2), and then attach the sample adhesive surface (301) on the lower side of the sample (3) to the position where the conductive adhesive is applied on the sample bearing slope (201). Step 2: Place the EBSD base (1) in the EBSD system (6), then place the tilt conversion stage (2) carrying the sample (3) on the EBSD base (1), and insert the conversion stage positioning post (202) into the first positioning post hole (101); Step 3: Insert the locking screw (5) into the first threaded hole (102) until the front end face of the locking screw (5) is in contact with the locking plane (2021) and locked. Step 4: Establish a sample coordinate system with any position on the tilt conversion stage (2) as the reference datum, and then perform EBSD testing; Step 5: After the EBSD test is completed, place the XRD base (7) in the Laue XRD system (8), then unscrew the locking screw (5) on the EBSD base (1) outward, and take out the combination of the tilt conversion stage (2) and the sample (3) from the EBSD system (6). Then transfer the combination of the tilt conversion stage (2) and the sample (3) to the XRD base (7), and insert the conversion stage positioning post (202) into the second positioning post hole (701). Step 6: Insert the locking screw (5) into the second threaded hole (702) until the front end face of the locking screw (5) is in contact with the locking plane (2021) and locked. Step 7: Establish a sample coordinate system with the same position on the tilt conversion stage (2) as in Step 4 as the reference, and then perform XRD tests on the same area on the sample (3) as in Step 4.

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