Crystal boat clamping device

Abstract

The embodiment of the present application provides a crystal boat clamping device. The crystal boat clamping device is used for clamping a crystal boat comprising a bottom plate and a plurality of racks, and comprises: a bottom plate clamping assembly used for centering and clamping the bottom plate, the bottom plate clamping assembly having a centering axis extending in the vertical direction; a guide mechanism extending around the centering axis; a plurality of rack clamping assemblies movably matched with the guide mechanism and capable of being fixed at different circumferential positions of the guide mechanism; each rack clamping assembly has at least two clamping portions, the at least two clamping portions are arranged in a spaced manner along a direction parallel to the centering axis, and are used for jointly clamping a same rack of the crystal boat. The crystal boat clamping device can improve the assembly precision of the bottom plate and the racks of the crystal boat to a certain extent.

Description

Technical Field

[0001] This application relates to the field of mechanical clamping and positioning technology, specifically to a crystal boat clamping device. Background Technology

[0002] A crystal boat is a component used in semiconductor, photovoltaic, and other fields to support wafers or silicon wafers. It typically includes a base plate and multiple racks mounted on the base plate. During the manufacturing process of a crystal boat, a clamping device is needed to position the base plate and the racks to ensure the proper assembly position of the racks relative to the base plate.

[0003] However, existing crystal boat clamping devices typically use a horizontal clamping method. During the clamping process, the rack is prone to sag or deflection under the influence of gravity, causing deviations in the assembly angle between the rack and the base plate, making it difficult to guarantee the assembly accuracy of the rack relative to the base plate. Summary of the Invention

[0004] In view of this, several embodiments of this application aim to provide a crystal boat clamping device that can improve the assembly accuracy of the crystal boat base plate and the rack to a certain extent.

[0005] In a first aspect, one embodiment of this application provides a crystal boat clamping device for clamping a crystal boat including a base plate and multiple racks, comprising: a base plate clamping assembly for centering the base plate, the base plate clamping assembly having a centering axis extending in a vertical direction; a guiding mechanism extending around the centering axis; multiple rack clamping assemblies movably cooperating with the guiding mechanism and capable of being fixed at different circumferential positions of the guiding mechanism; each rack clamping assembly having at least two clamping portions, the at least two clamping portions being spaced apart in a direction parallel to the centering axis and used to jointly clamp the same rack of the crystal boat.

[0006] Optionally, a perpendicularity detection component is also included, comprising: a detection sliding part that moves in cooperation with the guide mechanism; and an optical detection element disposed on the detection sliding part for emitting detection light parallel to the centering axis; wherein the detection sliding part is used to move along the guide mechanism so that the optical detection element moves to a circumferential position corresponding to different racks.

[0007] Optionally, the optical detection component includes a laser; the detection sliding part includes a detection platform and rollers disposed on the detection platform, the rollers being in rolling cooperation with the guide mechanism.

[0008] Optionally, the guiding mechanism includes a first guiding portion and a second guiding portion, which are spaced apart along a direction parallel to the centering axis; each rack clamping assembly includes a first moving member and a second moving member, the first moving member being movably engaged with the first guiding portion and the second moving member being movably engaged with the second guiding portion; the at least two clamping portions include a first clamping portion and a second clamping portion, the first clamping portion moving with the first moving member and the second clamping portion moving with the second moving member.

[0009] Optionally, both the first moving member and the second moving member include a sliding platform and a pulley disposed on the sliding platform, and the first guide portion and the second guide portion respectively have a slide rail for the corresponding pulley to roll.

[0010] Optionally, it also includes a locking mechanism, which includes: a first locking unit for locking the pulley corresponding to the first moving member; a second locking unit for locking the pulley corresponding to the second moving member; and a linkage for connecting the first locking unit and the second locking unit to enable the first locking unit and the second locking unit to lock or unlock synchronously.

[0011] Optionally, each of the rack clamping assemblies further includes a height adjusting rod extending in a direction parallel to the centering axis; the at least two clamping portions are disposed on the height adjusting rod and are adjustable in position along the extension direction of the height adjusting rod.

[0012] Optionally, each of the clamping parts includes a clamping base and two elastic clamping members; the clamping base is provided with an adjustment slide, and the two elastic clamping members are movably disposed in the adjustment slide to adjust the distance between the clamping position defined by the two elastic clamping members and the centering axis.

[0013] Optionally, the clamping base is provided with a bidirectional adjusting screw, which has a first threaded section and a second threaded section with opposite directions of rotation; the two elastic clamping members are respectively connected to the first threaded section and the second threaded section to move towards each other or away from each other when the bidirectional adjusting screw rotates, thereby adjusting the clamping distance between the two elastic clamping members.

[0014] Optionally, each of the clamping parts further includes a mounting base disposed on the height adjusting rod, and the clamping base is detachably connected to the mounting base.

[0015] As can be seen from the above embodiments, in multiple embodiments of this application, the base plate is centered and clamped by the base plate clamping assembly, a positioning reference is established by the centering axis extending in the vertical direction, and multiple rack clamping assemblies are adjusted and fixed in different circumferential positions by the guide mechanism extending around the centering axis. At the same time, at least two clamping parts arranged at intervals in the direction parallel to the centering axis are used to clamp the same rack, so as to realize the centering, circumferential positioning and multi-point clamping of the base plate and multiple racks in the vertical state, thereby achieving the effect of reducing rack angle deflection and improving the assembly accuracy of the base plate and rack. Attached Figure Description

[0016] Figure 1 A schematic diagram of a crystal boat clamping device provided for one embodiment of this application.

[0017] Figure 2 A front view of a crystal boat clamping device provided for one embodiment of this application.

[0018] Figure 3 A schematic diagram of the structure of a base plate clamping assembly provided in one embodiment of this application.

[0019] Figure 4 A partial structural schematic diagram of a crystal boat clamping device provided for one embodiment of this application.

[0020] Figure 5 A partial structural schematic diagram of a crystal boat clamping device provided for one embodiment of this application.

[0021] Figure 6 for Figure 5 Top view.

[0022] Explanation of reference numerals in the attached figures: The device includes a crystal boat clamping device 100, a crystal boat 102, a base plate 104, a rack 106, a base plate clamping assembly 108, a base 110, a chuck 112, a slot 114, a claw 116, a step portion 118, a locking handle 120, a guide mechanism 122, a first guide portion 124, a second guide portion 126, a vertical bracket 128, a first moving part 130, a second moving part 132, a first clamping part 134, and a second clamping part 136. Sliding platform 138, pulley 140, slide rail 142, detection platform 144, roller 146, laser instrument 148, first locking unit 150, second locking unit 152, linkage component 154, locking block 156, unlocking lever 158, height adjustment lever 160, vertical slide rail 162, clamping base 164, clamping arm 165, elastic clamping component 166, adjusting slide rail 168, bidirectional adjusting screw 170, mounting base 172. Detailed Implementation

[0023] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0024] In the description of the embodiments of this application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0025] Crystal boats are commonly used in semiconductor and photovoltaic industries to support wafers or silicon wafers. A crystal boat may include a base plate and multiple racks mounted on the base plate. These racks typically need to be positioned on the base plate according to predetermined circumferential positions and mounting radii, maintaining a predetermined assembly angle relative to the base plate. This ensures that the positional relationship between the racks meets the structural design requirements of the crystal boat. Failure to achieve the predetermined assembly angle can easily damage the wafers or silicon wafers during installation. During crystal boat manufacturing, a clamping device is required to position the base plate and the racks, ensuring that the racks are mounted in their predetermined positions and minimizing assembly deviations caused by variations in the circumferential position, mounting radius, and perpendicularity of each rack relative to the base plate.

[0026] In related technologies, crystal boat clamping devices typically employ a horizontal clamping method. In this horizontal clamping state, the rack extends roughly horizontally, and the direction of its own weight intersects with its length. Therefore, the rack is prone to sag under its own weight. This is especially true for racks with large lengths or low rigidity, where lateral positional deviations can easily occur between different height positions, causing the rack to deflect angularly relative to the base plate. Thus, during horizontal clamping, the rack is prone to sag or angular deflection under gravity, resulting in deviations in the assembly angle between the rack and the base plate, thereby affecting the assembly accuracy of the rack relative to the base plate.

[0027] For this purpose, please refer to Figures 1 to 3Several embodiments of this application provide a crystal boat clamping device 100 for clamping a crystal boat 102 including a base plate 104 and multiple racks 106. The crystal boat clamping device 100 includes a base plate clamping assembly 108, a guide mechanism 122, and multiple rack clamping assemblies. The base plate clamping assembly 108 is used to center and clamp the base plate 104 and has a centering axis extending in a vertical direction; the guide mechanism 122 extends around the centering axis; the multiple rack clamping assemblies are movably engaged with the guide mechanism 122 and can be fixed at different circumferential positions of the guide mechanism 122; each rack clamping assembly has at least two clamping parts, which are spaced apart in a direction parallel to the centering axis and are used to jointly clamp the same rack 106 of the crystal boat 102.

[0028] In this embodiment, the crystal boat clamping device 100 is used to clamp the crystal boat 102. The crystal boat 102 may include a base plate 104 and multiple racks 106. The base plate 104 can support the multiple racks 106, and the multiple racks 106 can be spaced apart around the center of the base plate 104. During the processing or assembly of the crystal boat 102, the crystal boat clamping device 100 can clamp and position the base plate 104 and the multiple racks 106 respectively, so that each rack 106 is held in a corresponding mounting position relative to the base plate 104.

[0029] The crystal boat clamping device 100 may include a base plate clamping assembly 108, a guide mechanism 122, and multiple rack and pinion clamping assemblies. The base plate clamping assembly 108 is used to center and clamp the base plate 104. Centering clamping refers to positioning the center of the base plate 104 to a predetermined center position during the clamping process, thereby establishing a center positioning reference for the base plate 104 while clamping it. Specifically, the base plate clamping assembly 108 may include multiple clamping structures capable of synchronous radial movement. By having multiple clamping structures synchronously approach the base plate 104, the base plate 104 automatically moves towards the predetermined center position during the clamping process. For example, as... Figure 3 As shown, the base plate clamping assembly 108 may include a chuck 112, which may be a three-jaw self-centering chuck. Multiple jaws 116 can move synchronously radially to clamp the base plate 104 from different circumferential positions and position the center of the base plate 104 to the center of the chuck 112. A guide mechanism 122 provides a movement path around the base plate 104 for multiple rack clamping assemblies, each of which clamps a corresponding rack 106. Thus, the center position of the base plate 104 can be determined first by the base plate clamping assembly 108, and then the positions of each rack clamping assembly can be adjusted based on this center position to clamp and position multiple racks 106 respectively.

[0030] Please continue reading. Figure 1 and Figure 2The base plate clamping assembly 108 can be disposed at the bottom of the crystal boat clamping device 100 in the vertical direction. The base plate clamping assembly 108 has a centering axis extending in the vertical direction. Here, the centering axis can be understood as the central positioning reference formed after the base plate clamping assembly 108 centers and clamps the base plate 104. It can be a geometric axis used to characterize the centering position of the base plate 104, without requiring a corresponding physical shaft component. After the base plate 104 is centered and clamped by the base plate clamping assembly 108, the center of the base plate 104 can be located on or near the centering axis, so that the subsequent multiple racks 106 can use the centering axis as a common positioning reference.

[0031] In this embodiment, the centering axis extends vertically, allowing the multiple racks 106 to extend approximately parallel to the centering axis after the base plate 104 is clamped by the base plate clamping assembly 108. Compared to clamping the racks 106 laterally, when the racks 106 are clamped vertically, the gravity acting on the racks 106 primarily acts along their length, thus reducing the likelihood of drooping or angular deflection caused by lateral gravity. Of course, the vertical direction described in this application primarily describes the spatial orientation of the crystal boat clamping device 100 under normal use conditions and does not require the device to maintain the same posture during manufacturing, handling, or when not in use.

[0032] In this embodiment, the guide mechanism 122 extends around the centering axis, that is, the guide mechanism 122 forms a guide path along the circumference of the centering axis for the rack clamping assembly to change its circumferential position. Figure 1 and Figure 2 As shown, the guide mechanism 122 can be arranged around the clamping area of ​​the crystal boat 102, so that multiple rack clamping assemblies can be distributed around the periphery of the base plate 104. Thus, after the center position of the base plate 104 is determined by the centering axis, the position of the rack clamping assembly along the guide mechanism 122 can correspond to the circumferential installation position of the rack 106 around the base plate 104.

[0033] In some embodiments, the guide mechanism 122 may form a continuous guide path around the centering axis. In other embodiments, the guide mechanism 122 may also be formed by a plurality of guide segments distributed around the centering axis, as long as it can provide a basis for the rack and pinion clamping assembly to change its circumferential position around the centering axis. Therefore, the guide mechanism 122 is not limited to a specific complete annular shape.

[0034] In this embodiment, multiple rack clamping assemblies are movably engaged with the guide mechanism 122, meaning that the rack clamping assemblies can be guided by the guide mechanism 122 and change their circumferential position relative to the centering axis along the guide mechanism 122. Each rack clamping assembly can correspond to one rack 106 in the crystal boat 102. When the crystal boat 102 to be clamped has different numbers of racks or different circumferential rack spacings, the corresponding rack clamping assemblies can be moved to reach a circumferential position adapted to the target installation position of the corresponding rack 106.

[0035] In this embodiment, the rack clamping assembly can also be fixed at different circumferential positions of the guide mechanism 122. Here, "fixed" means that after the rack clamping assembly moves along the guide mechanism 122 to the target circumferential position, it can restrict further circumferential movement relative to the guide mechanism 122 that could affect the positioning of the rack 106, without requiring a specific fixing structure. Thus, when clamping crystal boats 102 of different sizes, it is not necessary to permanently fix the rack clamping assembly to a single circumferential position beforehand; instead, it can be adjusted according to the actual required circumferential distribution of the multiple racks 106, and maintained in the corresponding positions after adjustment.

[0036] In some embodiments, multiple rack clamping assemblies may be distributed circumferentially along the guide mechanism 122. When the number of racks 106 in the crystal boat 102, the circumferential spacing between adjacent racks 106, or the circumferential mounting position of each rack 106 changes, the positions of the multiple rack clamping assemblies on the guide mechanism 122 can be changed accordingly. Thus, the same crystal boat clamping device 100 can be used to clamp crystal boats 102 with different rack circumferential distribution patterns.

[0037] In this embodiment, each rack clamping assembly has at least two clamping portions. A clamping portion can be understood as a structure in the rack clamping assembly that directly or through corresponding contact structures clamps and constrains the rack 106. At least two clamping portions are spaced apart along a direction parallel to the centering axis and are used to jointly clamp the same rack 106 of the crystal boat 102. Since the centering axis extends vertically, the at least two clamping portions can be located at different positions along the length of the same rack 106. For example, one clamping portion may correspond to a relatively upper position of the rack 106, and the other clamping portion may correspond to a relatively lower position of the rack 106. Of course, in some embodiments, the same rack clamping assembly may also have three, four, or more clamping portions, and these multiple clamping portions may be spaced apart along a direction parallel to the centering axis.

[0038] Compared to clamping the rack 106 at only one position, by having at least two clamping parts spaced apart along a direction parallel to the centering axis clamp the same rack 106, clamping constraints can be formed at different positions along the length of the rack 106. When the rack 106 tends to move laterally or deflect at an angle, the clamping parts at different heights can jointly restrict the rack 106, allowing it to be held more stably in the target clamping state and reducing the possibility of the rack 106 tilting relative to the base plate 104.

[0039] In the specific clamping process, the base plate 104 can be placed on the base plate clamping assembly 108 first, and the base plate clamping assembly 108 can be used to center and clamp the base plate 104 to establish a centering axis extending in the vertical direction. Subsequently, according to the target circumferential position of the multiple racks 106 on the base plate 104, the corresponding rack clamping assemblies can be moved so that each rack clamping assembly reaches the corresponding circumferential position along the guide mechanism 122, and each rack clamping assembly is fixed in the corresponding position. Then, each rack 106 is set on the corresponding rack clamping assembly, and the corresponding rack 106 is clamped by at least two clamping parts arranged at intervals along the direction parallel to the centering axis in the same rack clamping assembly. Following the above method, the clamping of multiple racks 106 can be completed sequentially.

[0040] Thus, the base plate clamping assembly 108 first establishes a central positioning reference for the base plate 104 through centering clamping. The guide mechanism 122 extending around the centering axis enables multiple rack clamping assemblies to change and maintain their respective circumferential positions according to this central positioning reference. Each rack clamping assembly further utilizes at least two clamping parts spaced apart along a direction parallel to the centering axis to perform multi-position clamping on the same rack 106. Through the cooperation between the above structures, the base plate 104 and multiple racks 106 can complete centering, circumferential positioning, and multi-point clamping in a vertical state, reducing the sagging and angular deflection of the racks 106 due to gravity or their own length during clamping, thereby improving the assembly accuracy between the base plate 104 and the racks 106.

[0041] In some embodiments, please refer to Figure 1 and Figure 2 The crystal boat clamping device 100 also includes a perpendicularity detection assembly, which includes a detection sliding part and an optical detection element. The detection sliding part is movably engaged with the guide mechanism 122; the optical detection element is disposed on the detection sliding part and is used to emit detection light parallel to the centering axis; the detection sliding part is used to move along the guide mechanism 122 so that the optical detection element moves to a circumferential position corresponding to different racks 106.

[0042] The perpendicularity detection component can be used to detect the assembly perpendicularity of each rack 106 relative to the base plate 104. The detection sliding part can be understood as a structure used to support the optical detection component and drive the optical detection component to change its circumferential position along the guide mechanism 122. Since multiple racks 106 are arranged at different circumferential positions around the centering axis, after the detection sliding part moves and cooperates with the guide mechanism 122, the same optical detection component can be moved sequentially to the vicinity of different racks 106 using the circumferential movement path formed by the guide mechanism 122, without the need to set a fixed optical detection component for each rack 106.

[0043] The detection light emitted by the optical inspection element is parallel to the centering axis. Since the centering axis extends vertically, the detection light can form a vertical inspection reference corresponding to the vertical clamping direction of the crystal boat 102. In some embodiments, before performing perpendicularity testing, the optical inspection element can be calibrated using the positioning reference surface of the base plate 104 or the vertical reference of the crystal boat clamping device 100 to keep the detection light parallel to the centering axis, thereby improving the consistency between the inspection reference and the positioning reference of the base plate 104.

[0044] In specific testing, the detection sliding part can first be moved along the guide mechanism 122 to the circumferential position corresponding to one of the racks 106 to be tested, and the detection light can be projected along the length direction of the rack 106. By observing or detecting the positional relationship between the detection light and the predetermined detection reference of the rack 106, it can be determined whether the rack 106 is tilted relative to the base plate 104. For example, the predetermined detection reference can be the edge, center line, or preset detection surface of the rack 106 extending along its length direction. When the detection light and the corresponding detection reference maintain a predetermined positional relationship along the length direction of the rack 106, it can be determined that the rack 106 is in the corresponding assembly state; when there is a positional deviation between the two, it can be determined that the rack 106 has a perpendicularity deviation that needs further adjustment.

[0045] After the inspection of one rack 106 is completed, the inspection sliding part can be pushed to move along the guide mechanism 122, so that the optical inspection component moves circumferentially along the centering axis to the position corresponding to the next rack 106, and is inspected in the same way. In this way, the optical inspection component can pass through the circumferential positions corresponding to multiple racks 106 in sequence, thereby completing the inspection of multiple racks 106 one by one using the same perpendicularity inspection component.

[0046] In some embodiments, when a deviation is detected between a rack 106 and the detection light, the clamping position of the rack 106 can be adjusted accordingly, and the optical detection element can be used for detection again after adjustment. Thus, the perpendicularity detection component can not only check the perpendicularity of multiple racks 106 after initial clamping, but also provide a detection basis for subsequent rack 106 position adjustment.

[0047] Thus, by moving and cooperating the detection sliding part with the existing guide mechanism 122, and by causing the optical detection element set in the detection sliding part to generate detection light parallel to the centering axis, the optical detection element can be moved sequentially to the circumferential position corresponding to different racks 106 using the same guide mechanism 122, thereby realizing the verticality detection of multiple racks 106 one by one, reducing the need to set detection structures for different racks 106, and facilitating the correction of the assembly state of the racks 106 based on the detection results.

[0048] In some embodiments, please refer to Figure 1 , Figure 2 and Figure 5 The optical inspection component includes a laser instrument 148; the inspection sliding part includes an inspection platform 144 and a roller 146 disposed on the inspection platform 144, the roller 146 being in rolling cooperation with the guide mechanism 122.

[0049] In this embodiment, the laser device 148 can be mounted on and supported by the detection platform 144. The laser device 148 is used to emit detection light parallel to the centering axis to form a detection reference for detecting the perpendicularity of the rack 106 assembly. By mounting the laser device 148 on the detection platform 144, which is movable along the guide mechanism 122, the circumferential position of the laser device 148 relative to the crystal boat 102 can be changed with the detection platform 144.

[0050] Roller 146 is mounted on the detection platform 144 and rolls in cooperation with the guide mechanism 122. This rolling cooperation can be understood as the roller 146 rolling relative to the guide mechanism 122 as the detection platform 144 moves along the guide mechanism 122, thereby driving the detection platform 144 and the laser device 148 mounted on the detection platform 144 to move along the guide mechanism 122. Figure 5 As shown, the detection platform 144 can be disposed on one side of the guide mechanism 122, and the roller 146 forms a rolling engagement with the guide mechanism 122, enabling the detection platform 144 to move along the circumferential path formed by the guide mechanism 122. Thus, the laser instrument 148 can move sequentially with the detection platform 144 to the circumferential positions corresponding to different racks 106.

[0051] For example, when inspecting one of the racks 106, the inspection platform 144 can be pushed, causing the roller 146 to roll along the guide mechanism 122 until the laser instrument 148 moves to the circumferential position corresponding to that rack 106. After inspecting that rack 106, the inspection platform 144 can be pushed again, causing the roller 146 to continue rolling along the guide mechanism 122, thereby moving the laser instrument 148 to the position corresponding to the next rack 106. In this way, the same laser instrument 148 can be moved sequentially to different inspection positions along the guide mechanism 122 through the rolling movement structure formed by the inspection platform 144 and the roller 146.

[0052] In some embodiments, the detection platform 144 and roller 146 may adopt the same or similar structural form as other moving structures in the crystal boat clamping device 100 used for moving along the guide mechanism 122, so as to reduce the types of components in the crystal boat clamping device 100. The laser 148 may be a line laser or a point laser, as long as it can form a detection beam parallel to the centering axis. In some embodiments, the laser 148 may also be provided with a height adjustment structure or an angle fine-tuning structure, so as to adjust the position of the laser 148 or the direction of the detection beam before detection, so that the detection beam forms a corresponding perpendicularity detection reference.

[0053] Thus, by using the detection platform 144 to carry the laser instrument 148, and by utilizing the rollers 146 set on the detection platform 144 to roll in cooperation with the guide mechanism 122, the laser instrument 148 can easily change its circumferential detection position along the guide mechanism 122, thereby sequentially performing perpendicularity detection on different racks 106.

[0054] In some embodiments, please refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 The guiding mechanism 122 includes a first guiding portion 124 and a second guiding portion 126, which are spaced apart along a direction parallel to the centering axis. Each rack clamping assembly includes a first moving member 130 and a second moving member 132, with the first moving member 130 movably engaged with the first guiding portion 124 and the second moving member 132 movably engaged with the second guiding portion 126. The at least two clamping portions include a first clamping portion 134 and a second clamping portion 136, with the first clamping portion 134 moving with the first moving member 130 and the second clamping portion 136 moving with the second moving member 132.

[0055] In this embodiment, the first guide portion 124 and the second guide portion 126 can be located at different positions on the crystal boat 102 along the centering axis. For example... Figure 1 and Figure 2As shown, the first guide portion 124 can be disposed on the side near the base plate 104, and the second guide portion 126 can be disposed at intervals from the first guide portion 124 along a direction parallel to the centering axis, so that the first guide portion 124 and the second guide portion 126 respectively form movable guide bases at different height positions. In this way, when the crystal boat 102 is in a vertical clamping state, the circumferential position of the clamping structure corresponding to different positions along the length direction of the rack 106 can be adjusted respectively.

[0056] In some embodiments, such as Figure 1 and Figure 4 As shown, the crystal boat clamping device 100 may include a vertical support 128. A first guide portion 124 and a second guide portion 126 may be disposed at different heights on the vertical support 128 and extend around the centering axis, respectively. The vertical support 128 can support the first guide portion 124 and the second guide portion 126, so that they are spaced apart in a direction parallel to the centering axis. Here, the first guide portion 124 and the second guide portion 126 are mainly used to provide circumferential movement paths for the first moving member 130 and the second moving member 132, respectively, and are not limited to a specific guiding structure.

[0057] The first moving member 130 is movably engaged with the first guide portion 124, allowing the first moving member 130 to change its circumferential position relative to the centering axis along the first guide portion 124; the second moving member 132 is movably engaged with the second guide portion 126, allowing the second moving member 132 to change its circumferential position relative to the centering axis along the second guide portion 126. Thus, the same rack and pinion clamping assembly has corresponding moving structures at two positions spaced apart along a direction parallel to the centering axis.

[0058] The first clamping part 134 moves with the first moving member 130. This can be understood as the circumferential position of the first clamping part 134 changing along the first guide part 124. Correspondingly, the second clamping part 136 moves with the second moving member 132. This can be understood as the circumferential position of the second clamping part 136 changing along the second guide part 126. For example... Figure 2 , Figure 4 and Figure 5 As shown, the first clamping part 134 and the second clamping part 136 can be arranged at intervals along the length direction of the rack 106, so as to correspond to different height positions of the same rack 106 respectively.

[0059] For example, before clamping a rack 106, the first moving member 130 and the second moving member 132 can be moved according to the target circumferential mounting position of the rack 106 relative to the base plate 104. The first moving member 130 moves along the first guide portion 124 to the corresponding circumferential position, and the second moving member 132 moves along the second guide portion 126 to the circumferential position corresponding to the rack 106. As the positions of the first moving member 130 and the second moving member 132 change, the first clamping portion 134 and the second clamping portion 136 move to the corresponding clamping positions, so that the first clamping portion 134 and the second clamping portion 136 jointly clamp the rack 106 at two positions spaced apart along the length of the rack 106.

[0060] In some embodiments, the first guide portion 124 and the second guide portion 126 can be coaxially arranged, so that the first moving member 130 and the second moving member 132 can change their circumferential positions around the same central reference. In this way, the first clamping portion 134 and the second clamping portion 136, which are located at different heights, can obtain a basis for position adjustment around the same central reference, which facilitates that they correspond to the target circumferential installation position of the same rack 106.

[0061] By configuring the guide mechanism 122 as a first guide portion 124 and a second guide portion 126 spaced apart in a direction parallel to the centering axis, and by having the first moving member 130 and the second moving member 132 move and cooperate with the corresponding first guide portion 124 and the second guide portion 126 respectively, circumferential moving bases can be formed at different height positions. At the same time, the first clamping portion 134 and the second clamping portion 136 move with the corresponding first moving member 130 and the second moving member 132 respectively, so that the same rack 106 can be adjusted in the circumferential position at two clamping positions spaced apart along its length, thereby facilitating that the two clamping positions correspond to the target clamping position of the rack 106.

[0062] In some embodiments, please refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 The first moving member 130 and the second moving member 132 both include a sliding platform 138 and a pulley 140 disposed on the sliding platform 138. The first guide portion 124 and the second guide portion 126 each have a slide rail 142 for the corresponding pulley 140 to roll.

[0063] Please refer to the following: Figure 4 and Figure 5In one specific embodiment, both the first guide portion 124 and the second guide portion 126 can be circular tracks that extend continuously around the centering axis, and slide rails 142 are formed on the inner and outer sides of the circular tracks, respectively. The sliding platforms 138 of the first moving member 130 and the second moving member 132 are respectively straddling the corresponding circular tracks. A set of pulleys 140 is respectively provided on the sliding platform 138 at the positions corresponding to the inner and outer sides of the circular tracks. Each set of pulleys 140 is installed on the sliding platform 138 and moves together with the sliding platform 138. The set of pulleys 140 located on the inner side of the circular track rolls with the inner slide rail 142, and the set of pulleys 140 located on the outer side of the circular track rolls with the outer slide rail 142.

[0064] Specifically, the two sets of pulleys 140 in the first moving member 130 are respectively engaged with the inner and outer slide rails 142 of the first guide portion 124, enabling the sliding platform 138 of the first moving member 130 to move along the circumferential direction of the first guide portion 124; the two sets of pulleys 140 in the second moving member 132 are respectively engaged with the inner and outer slide rails 142 of the second guide portion 126, enabling the sliding platform 138 of the second moving member 132 to move along the circumferential direction of the second guide portion 126. The pulleys 140 can be V-shaped pulleys, and the slide rails 142 can have a shape adapted to the V-shaped pulleys, so that the pulleys 140 located on the inner and outer sides of the circular track jointly constrain the position of the sliding platform 138 relative to the corresponding circular track and guide the sliding platform 138 to move circumferentially along the circular track.

[0065] The first clamping part 134 can move with the sliding platform 138 of the first moving member 130, and the second clamping part 136 can move with the sliding platform 138 of the second moving member 132. Therefore, when it is necessary to change the circumferential clamping position of the same rack 106, the first moving member 130 and the second moving member 132 can be pushed respectively, so that the pulleys 140 of both can roll along the corresponding slide rails 142, thereby driving the first clamping part 134 and the second clamping part 136 to move to the circumferential position corresponding to the rack 106. The number of pulleys 140 and the specific arrangement of each group of pulleys 140 on the sliding platform 138 can be set according to the load and movement stability requirements of the sliding platform 138.

[0066] Thus, by providing a sliding platform 138 and a pulley 140 in the first moving member 130 and the second moving member 132 respectively, and making the corresponding pulley 140 roll along the slide rails 142 of the first guide portion 124 and the second guide portion 126 respectively, a clear moving path can be provided for the first moving member 130 and the second moving member 132, so that the first clamping portion 134 and the second clamping portion 136 located at different heights can be adjusted in a relatively stable manner along the corresponding circumferential path.

[0067] In some embodiments, please refer to Figure 4 , Figure 5 and Figure 6 The crystal boat clamping device 100 also includes a locking mechanism, which includes a first locking unit 150, a second locking unit 152, and a linkage 154. The first locking unit 150 is used to lock the pulley 140 corresponding to the first moving member 130, the second locking unit 152 is used to lock the pulley 140 corresponding to the second moving member 132, and the linkage 154 connects the first locking unit 150 and the second locking unit 152 to enable the first locking unit 150 and the second locking unit 152 to lock or unlock synchronously.

[0068] In this embodiment, the first locking unit 150 can be correspondingly disposed on the side where the first moving member 130 is located, and is used to lock the pulley 140 corresponding to the first moving member 130 after the first moving member 130 moves along the first guide portion 124 to the corresponding circumferential position. The second locking unit 152 can be correspondingly disposed on the side where the second moving member 132 is located, and is used to lock the pulley 140 corresponding to the second moving member 132 after the second moving member 132 moves along the second guide portion 126 to the corresponding circumferential position. The locking here can be understood as restricting the corresponding pulley 140 from continuing to move along the corresponding guide portion, thereby keeping the corresponding first moving member 130 or second moving member 132 in the adjusted circumferential position.

[0069] Please refer to the following: Figure 4 and Figure 5 The first locking unit 150 and the second locking unit 152 are respectively located at two positions spaced apart along a direction parallel to the centering axis. The linkage 154 extends between the first locking unit 150 and the second locking unit 152 and is connected to both. Thus, when the linkage 154 is activated, the locking state of the first locking unit 150 and the second locking unit 152 can be changed simultaneously without requiring independent operation of the two locking units.

[0070] In some embodiments, please refer to Figure 6 The first locking unit 150 and the second locking unit 152 may each include a locking block 156, which is movable between a locked position and an unlocked position. Taking the aforementioned circular track structure as an example, the outer slide rails 142 of the first guide portion 124 and the second guide portion 126 are each provided with a set of pulleys 140. This set of pulleys 140 may include two pulleys 140 arranged adjacent to each other along the extension direction of the slide rail 142. The locking block 156 may be disposed between two adjacent pulleys 140 and may move toward or away from the outer slide rail 142.

[0071] When the locking block 156 is in the locked position, it moves towards the corresponding outer slide rail 142 under elastic action and abuts against the outer slide rail 142. Since the inner and outer sets of pulleys 140 are all installed on the same sliding platform 138, after the locking block 156 abuts against the outer slide rail 142, it can restrict the sliding platform 138 from continuing to move along the corresponding circular track, thereby restricting the pulleys 140 located on both sides of the locking block 156 from continuing to roll along the outer slide rail 142, so that the first moving member 130 or the second moving member 132 is kept in the corresponding circumferential position.

[0072] In some embodiments, the locking mechanism may further include an unlocking lever 158. The unlocking lever 158 is connected to or driven by the corresponding locking block 156, and can cause the locking block 156 to overcome the elastic force and move away from the outer slide rail 142 under the drive of the linkage 154. When the locking block 156 moves to the unlocked position, the locking block 156 separates from the outer slide rail 142, no longer restricting the sliding platform 138 from moving along the corresponding circular track, and the adjacent pulley 140 can roll along the outer slide rail 142 again. After the unlocking action is released, the locking block 156 can move back towards the outer slide rail 142 under the elastic force and return to the locked position.

[0073] For example, before adjusting the circumferential position of a rack and pinion clamping assembly, the linkage 154 can be pulled. The linkage 154 drives the unlocking levers 158 in the first locking unit 150 and the second locking unit 152 to move synchronously, causing the locking blocks 156 in the two locking units to overcome the elastic force and move away from the corresponding outer slide rails 142, moving from the locked position to the unlocked position. At this time, the pulleys 140 in the first moving member 130 and the second moving member 132 can roll along the corresponding slide rails 142, and the circumferential positions of the two moving members can be adjusted synchronously or separately. After the first moving member 130 and the second moving member 132 move to their respective target circumferential positions, the linkage 154 is released. The two locking blocks 156 move back towards the corresponding outer slide rails 142 under the elastic force and abut against the outer slide rails 142, thereby restoring the first locking unit 150 and the second locking unit 152 to the locked state synchronously, and keeping the first moving member 130 and the second moving member 132 in the adjusted circumferential position.

[0074] In some embodiments, the linkage 154 may be a mechanical linkage structure extending along a direction parallel to the centering axis, mechanically connecting the first locking unit 150 and the second locking unit 152 located at different heights. For example, the linkage 154 may be a linkage rod, a cable, or other structure capable of transmitting the operation of one locking unit to another, as long as it enables the first locking unit 150 and the second locking unit 152 to enter the locking state or the unlocking state simultaneously.

[0075] Thus, by locking the pulleys 140 corresponding to the first moving member 130 and the second moving member 132 respectively through the first locking unit 150 and the second locking unit 152, and by using the linkage 154 to lock or unlock the two locking units simultaneously, the two moving members at different height positions can be released simultaneously during the adjustment process, and their circumferential positions can be maintained simultaneously after the adjustment is completed. This reduces the inconsistency caused by operating the two locking positions separately, and helps to maintain the corresponding positions of the first moving member 130 and the second moving member 132 after adjustment.

[0076] In some embodiments, please refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 Each rack clamping assembly also includes a height adjusting rod 160, which extends in a direction parallel to the centering axis; the at least two clamping portions are disposed on the height adjusting rod 160 and are capable of adjusting their position along the extension direction of the height adjusting rod 160.

[0077] In this embodiment, the height adjustment rod 160 can be used to provide a vertically extending mounting base for multiple clamping portions in the same rack clamping assembly. For example... Figure 1 and Figure 2 As shown, the height adjustment rod 160 can be disposed on the outside of the rack 106 of the crystal boat 102 and extends approximately along the length direction of the rack 106. Since the centering axis extends vertically, after the height adjustment rod 160 is disposed in a direction parallel to the centering axis, multiple clamping parts disposed on the height adjustment rod 160 can form clamping at different height positions of the rack 106.

[0078] Please refer to the following: Figure 4 and Figure 5 In some embodiments, the at least two clamping portions may include a first clamping portion 134 and a second clamping portion 136, which are respectively disposed at different height positions on the height adjustment rod 160. Both the first clamping portion 134 and the second clamping portion 136 are adjustable in position along the extension direction of the height adjustment rod 160. This adjustment can be understood as the clamping portion being able to change its position relative to the height adjustment rod 160 in a direction parallel to the centering axis, so that the height gap between the first clamping portion 134 and the second clamping portion 136 and their respective clamping heights corresponding to the rack 106 can be adjusted according to actual clamping requirements.

[0079] For example, when the rack 106 to be clamped is long, the first clamping part 134 and the second clamping part 136 can be moved away from each other along the height adjustment rod 160, so that the two clamping positions correspond to positions that are far apart along the length of the rack 106; when the rack 106 to be clamped is short, the first clamping part 134 and the second clamping part 136 can be moved closer to each other along the height adjustment rod 160, so that the two clamping positions are adapted to the length of the shorter rack 106. Of course, the first clamping part 134 and the second clamping part 136 can also be adjusted to the corresponding height positions according to the machining area that needs to be avoided on the rack 106 or the predetermined assembly position.

[0080] In some embodiments, the height adjustment rod 160 may be provided with multiple positions along its extension direction for mounting or positioning the clamping part. After the first clamping part 134 and the second clamping part 136 are adjusted to the corresponding positions, they can be held at the corresponding height position by locking pins, locking screws, or other locking elements. In other embodiments, the height adjustment rod 160 may also adopt a telescopic structure capable of adjusting its effective height to further accommodate racks 106 of different lengths. The above structures are all used to realize the position adjustment of the clamping part along the extension direction of the height adjustment rod 160, and do not limit the height adjustment rod 160 to adopt a specific adjustment form.

[0081] During the clamping process, the positions of the first clamping part 134 and the second clamping part 136 can be adjusted along the height adjustment rod 160 according to the length of the rack 106 to be clamped and the position where clamping constraints need to be formed, and then they can be held at the corresponding heights respectively. Subsequently, the rack 106 can be clamped together by the first clamping part 134 and the second clamping part 136 at two intervals along the length direction of the rack 106. For crystal boats 102 of different specifications, the positions of the first clamping part 134 and the second clamping part 136 on the height adjustment rod 160 can be readjusted, without the need to set up clamping structures with fixed heights for racks 106 of different lengths.

[0082] Thus, by setting a height adjustment rod 160 extending parallel to the centering axis and enabling at least two clamping parts to adjust their positions along the extension direction of the height adjustment rod 160, the clamping height of multiple clamping parts can be flexibly changed according to the length of the rack 106 or the target clamping position, so that the same rack clamping assembly can clamp the rack 106 at multiple points at different height positions, thereby improving the adaptability to racks 106 of different lengths.

[0083] In some embodiments, please refer to Figure 5 and Figure 6Each of the clamping parts includes a clamping base 164 and two elastic clamping members 166; the clamping base 164 is provided with an adjustment slide 168, and the two elastic clamping members 166 are movably disposed in the adjustment slide 168 to adjust the distance between the clamping position defined by the two elastic clamping members 166 and the centering axis.

[0084] In this embodiment, in conjunction with the aforementioned height adjustment rod 160, the clamping part can be disposed on the height adjustment rod 160, and its height position can be adjusted along the extending direction of the height adjustment rod 160. For example, as Figure 5 As shown, the height adjustment rod 160 may be provided with a vertical slide 162 extending along its extension direction, and the clamping part can change its position relative to the height adjustment rod 160 based on the vertical slide 162. Furthermore, this embodiment further enables the clamping part to adjust the radial clamping position of the rack through the clamping base 164, the elastic clamping member 166, and the adjusting slide 168, thereby coordinating the clamping height adjustment with the distance adjustment of the clamping position relative to the centering axis.

[0085] Please refer to the following: Figure 5 and Figure 6 The clamping base 164 may include two opposing clamping arms 165, forming a clamping space between the two clamping arms 165 for accommodating the rack 106. Each clamping arm 165 is provided with an adjusting slide 168, and two elastic clamping members 166 are movably disposed in the adjusting slides 168 of the two clamping arms 165, respectively. Thus, the two elastic clamping members 166 can change their position relative to the clamping base 164 along their respective adjusting slides 168.

[0086] Two elastic clamping members 166 can be arranged opposite to each other, forming a clamping area between them for accommodating and clamping the rack. After the two elastic clamping members 166 jointly clamp the rack 106, the position of the rack 106 between the two elastic clamping members 166 is the clamping position jointly defined by the two elastic clamping members 166. This clamping position can correspond to the radial mounting position of the rack 106 in the crystal boat 102.

[0087] Since the base plate 104 is centered and clamped by the base plate clamping assembly 108, the centering axis can serve as a positioning reference for the center position of the base plate 104. Therefore, the distance between the clamping position jointly defined by the two elastic clamping members 166 and the centering axis corresponds to the installation radius of the rack 106 relative to the center of the base plate 104. When the two elastic clamping members 166 move along their respective adjusting slides 168, the radial position of the clamping position jointly defined by them can be changed, making the clamping position closer to or further away from the centering axis. Thus, the two elastic clamping members 166 can be adjusted to the corresponding positions according to the target installation radius of the rack 106 in the crystal boat 102 to be clamped. Here, the distance between the clamping position jointly defined by the two elastic clamping members 166 and the centering axis is adjusted; the clamping spacing between the two elastic clamping members 166 can be set separately.

[0088] For example, when the rack 106 of the crystal boat 102 to be clamped has a small target installation radius, the two elastic clamping members 166 can be adjusted along the corresponding adjusting slide 168 to a position where the clamping position is close to the centering axis; when the rack 106 has a large target installation radius, the two elastic clamping members 166 can be adjusted to a position where the clamping position is far away from the centering axis. In this way, without changing the main structure such as the guide mechanism 122 or the height adjusting rod 160, the clamping part can be adapted to crystal boats 102 with different rack installation radii.

[0089] The specific driving or positioning method for adjusting the radial position of the two elastic clamping members 166 along the adjusting slide 168 can be set according to actual needs. For example, the positions of the two elastic clamping members 166 can be adjusted separately, or an adjustment structure that can drive the two elastic clamping members 166 to adjust their positions accordingly can be set. As long as the distance between the clamping position jointly defined by the two elastic clamping members 166 and the centering axis can be changed, this application does not make specific limitations in this regard.

[0090] In some embodiments, the elastic clamping member 166 may have an elastic contact portion on the side of the rack to be clamped. Two elastic clamping members 166 contact the rack from both sides respectively. When clamping is achieved, the elastic contact portion can undergo appropriate elastic deformation, thereby reducing the local stress generated by rigid contact and buffering some vibrations transmitted to the rack during assembly or processing. In some embodiments, the elastic contact portion may be made of polyurethane material; in other embodiments, other elastic materials that can balance friction performance, wear resistance, and cushioning performance may also be used.

[0091] In some embodiments, V-shaped guide grooves may be formed on the side of the two elastic clamping members 166 facing the rack. The two V-shaped guide grooves are arranged opposite each other, and when the rack enters between the two elastic clamping members 166 and is clamped, the two V-shaped guide grooves can guide the rack from both sides, causing the rack to tend to remain in the clamping position jointly defined by the two elastic clamping members 166. The included angle and groove depth of the V-shaped guide grooves can be set according to the cross-sectional shape of the clamped rack.

[0092] Thus, by providing an adjustment slide 168 on the clamping base 164 and movably setting the two elastic clamping members 166 on the adjustment slide 168, the distance between the clamping position defined by the two elastic clamping members 166 and the centering axis can be changed, so that the clamping part can adapt to different rack installation radii; at the same time, by forming elastic clamping from both sides of the rack through the two elastic clamping members 166, a corresponding clamping and guiding foundation can also be provided for the rack.

[0093] In some embodiments, please refer to Figure 6 The clamping base 164 is provided with a bidirectional adjusting screw 170, which has a first threaded section and a second threaded section with opposite directions of rotation. Two elastic clamping members 166 are respectively connected to the first threaded section and the second threaded section to move towards each other or away from each other when the bidirectional adjusting screw 170 rotates, thereby adjusting the clamping distance between the two elastic clamping members 166.

[0094] In this embodiment, the bidirectional adjusting screw 170 can be used to convert rotational motion into the movement of two elastic clamping members 166 in opposite directions. Specifically, the bidirectional adjusting screw 170 is disposed on a clamping base 164, which includes two opposing clamping arms 165. The two clamping arms 165 are respectively connected to a first threaded segment and a second threaded segment, and are respectively provided with elastic clamping members 166. The threads of the first threaded segment and the second threaded segment have opposite directions. Thus, when the bidirectional adjusting screw 170 rotates in one direction, the two clamping arms 165 can move towards each other, and respectively drive the corresponding elastic clamping members 166 to move towards each other; when the bidirectional adjusting screw 170 rotates in opposite directions, the two clamping arms 165 can move away from each other, and respectively drive the corresponding elastic clamping members 166 to move away from each other.

[0095] Please see Figure 5 and Figure 6Two clamping arms 165 are arranged opposite to each other, and each clamping arm 165 is provided with an adjusting slide 168. A corresponding elastic clamping member 166 is disposed in the adjusting slide 168. A bidirectional adjusting screw 170 is arranged along the relative direction of the two clamping arms 165, and a first threaded section and a second threaded section are respectively connected to the two clamping arms 165 for transmission. When the bidirectional adjusting screw 170 rotates, because the threads of the first threaded section and the second threaded section have opposite directions, the two clamping arms 165 can move synchronously towards each other or synchronously away from each other. The two elastic clamping members 166 move with the corresponding clamping arms 165, thereby changing the clamping distance between the two elastic clamping members 166 with the change in the distance between the two clamping arms 165.

[0096] The clamping distance here can be understood as the distance between the two elastic clamping members 166 when they contact and clamp the rack. When the two elastic clamping members 166 move towards each other, the clamping distance between them decreases, allowing them to gradually approach the rack from both sides until clamping is achieved; when the two elastic clamping members 166 move away from each other, the clamping distance between them increases, reducing or releasing the clamping effect on the rack. Therefore, the clamping and releasing states can be adjusted by changing the rotation direction of the bidirectional adjusting screw 170.

[0097] For example, when the thickness or width of the rack to be clamped is large, the two elastic clamping members 166 can be moved back to back to achieve a larger clamping gap. Then, the rack is placed between the two elastic clamping members 166, and the bidirectional adjusting screw 170 is rotated to move them towards each other until they clamp the sides of the rack. When the thickness or width of the rack to be clamped is small, the two elastic clamping members 166 can continue to move towards each other to obtain a clamping gap suitable for the smaller rack size. Therefore, racks of different thicknesses or widths can be adapted using the same clamping structure.

[0098] It should be noted that the clamping distance adjustment in this embodiment is different from the aforementioned adjustment of the distance between the clamping position and the centering axis. The positional change of the two elastic clamping members 166 along the adjusting slide 168 can be used to change the distance between the clamping position defined by both members and the centering axis. In this embodiment, the two elastic clamping members 166 are driven to move towards or away from each other by the bidirectional adjusting screw 170, mainly to change the clamping distance between the two elastic clamping members 166. Thus, the installation radius of the rack and the thickness or width of the rack itself can be adjusted accordingly.

[0099] In some embodiments, the bidirectional adjusting screw 170 can be connected to an easily operable adjusting part. The operator rotates the adjusting part to drive the bidirectional adjusting screw 170 to rotate, thereby causing the two elastic clamping members 166 to move synchronously in opposite directions or away from each other. The specific pitch and length of the first and second threaded sections, as well as the specific travel of the two elastic clamping members 166, can be set according to the required rack size, and this embodiment does not limit this.

[0100] Thus, by providing a bidirectional adjusting screw 170 with a first threaded section and a second threaded section having opposite directions of rotation on the clamping base 164, and by connecting the two elastic clamping members 166 to the corresponding threaded sections respectively, the two elastic clamping members 166 can be moved towards or away from each other by rotating the bidirectional adjusting screw 170, thereby adjusting the clamping distance between them. This allows the clamping part to adapt to racks of different thicknesses or widths, and facilitates the clamping and release of the racks.

[0101] In some embodiments, please refer to Figure 5 and Figure 6 Each of the clamping parts also includes a mounting base 172, which is disposed on the height adjustment rod 160, and the clamping base 164 is detachably connected to the mounting base 172.

[0102] In this embodiment, the mounting base 172 serves as the mounting foundation between the clamping base 164 and the height adjustment rod 160. In conjunction with the aforementioned embodiments, the clamping base 164 supports two elastic clamping members 166 and is provided with an adjusting slide 168 for the movement of the elastic clamping members 166. This embodiment further clarifies that the clamping base 164 is not directly fixed to the height adjustment rod 160, but is connected to the height adjustment rod 160 via the mounting base 172. Thus, when it is necessary to clamp the rack using the clamping part, the clamping base 164 can be connected to the mounting base 172 to maintain the clamping base 164 and the elastic clamping members 166 disposed thereon in the corresponding clamping positions; when it is necessary to remove the corresponding clamping structure, the connection between the clamping base 164 and the mounting base 172 can be released.

[0103] like Figure 5 As shown, the mounting base 172 can be disposed on the height adjustment rod 160 and positioned at a corresponding height along with the clamping part on the height adjustment rod 160. Therefore, when adjusting the position of the clamping part along the height adjustment rod 160, the mounting base 172 can determine the installation position of the clamping base 164 on the height adjustment rod 160; after this position is determined, the clamping base 164 and the elastic clamping member 166 clamp the corresponding rack. This detachable connection can be understood as allowing the clamping base 164 and the mounting base 172 to switch between a connected state and a separated state without damaging their main structures.

[0104] In some embodiments, the clamping base 164 and the mounting base 172 can be connected by a detachable structure with a sliding fit. For example, a dovetail groove can be provided in the clamping base 164, and a protrusion that mates with the dovetail groove can be provided in the mounting base 172. During assembly, the protrusion can slide in along the dovetail groove, connecting the clamping base 164 to the mounting base 172; during disassembly, the protrusion can be withdrawn along the dovetail groove, separating the clamping base 164 from the mounting base 172. The fit between the dovetail groove and the protrusion can also limit the offset of the clamping base 164 relative to the mounting base 172 in the clamped state, keeping the clamping base 164 in the corresponding mounting position.

[0105] In some embodiments, to further maintain the connection stability between the clamping base 164 and the mounting base 172 in the clamping state, fasteners, limiting members, or elastic positioning members may also be provided between the dovetail groove and the protrusion. The above structures are all optional connection retention methods, as long as they can maintain the connection between the clamping base 164 and the mounting base 172 during the clamping process and allow the two to be disconnected when needed.

[0106] For example, after the crystal boat is processed or assembled, the two elastic clamping members 166 can be released from their grip on the corresponding racks, and then the connection between the clamping base 164 and the mounting base 172 can be released. The clamping base 164 and the elastic clamping members 166 it carries, which may be located on the outer periphery of the crystal boat and affect the removal path, can be removed from the mounting base 172. The mounting base 172 can remain mounted on the height adjustment rod 160, while the clamping structure extending to one side of the crystal boat is removed. This creates a corresponding clearance space on the outer periphery of the crystal boat to reduce the interference of the clamping structure on the removal of the crystal boat.

[0107] Thus, by setting a mounting base 172 on the height adjustment rod 160 and detachably connecting the clamping base 164 to the mounting base 172, the mounting base 172 can be used to maintain the installation position of the clamping base 164 during the clamping process, and the clamping base 164 and its elastic clamping member 166 can be removed from the mounting base 172 after processing or assembly, thereby creating clearance space for the removal of the crystal boat and facilitating the disassembly operation after clamping.

[0108] In some embodiments, please refer to Figure 3 The base plate clamping assembly 108 includes a base 110, a chuck 112, and multiple jaws 116. The chuck 112 is embedded in the base 110 and has multiple slots 114 extending radially along the chuck 112. Each jaw 116 is slidably connected to its corresponding slot 114. Each jaw 116 has a stepped portion 118 for abutting against the base plate to position the base plate. The chuck 112 also has a locking handle 120, which is kinetically connected to the multiple jaws 116 and can simultaneously lock the positions of the multiple jaws 116 relative to their corresponding slots 114.

[0109] In this embodiment, the base 110 can be used to support the chuck 112 and provide an installation base for the base plate clamping assembly 108. The chuck 112 is embedded in the base 110, meaning that at least a portion of the structure of the chuck 112 is housed in the corresponding installation area of ​​the base 110, allowing the chuck 112 to be held on the base 110 and enabling the multiple jaws 116 to clamp the base plate within the corresponding area of ​​the base 110. This embodiment does not further limit the specific installation method of the chuck 112 embedded in the base 110.

[0110] The slot 114 extends radially along the chuck 112 and defines the direction of movement of the corresponding jaw 116 relative to the chuck 112. Each jaw 116 is slidably connected to its corresponding slot 114, allowing the jaw 116 to change position radially along the chuck 112. Thus, the positions of multiple jaws 116 can be adjusted according to the size of the base plate to be clamped, enabling the multiple jaws 116 to position and clamp the base plate from its periphery.

[0111] The stepped portion 118 on the jaw 116 can be used to form a positioning position that abuts against the base plate. Specifically, when the base plate is placed between multiple jaws 116, the base plate can abut against multiple stepped portions 118, and the multiple stepped portions 118 together support or limit the position of the base plate, keeping the base plate in the clamping position corresponding to the base plate clamping assembly 108. Subsequently, the radial position of each jaw 116 can be adjusted along the corresponding slot 114, so that the jaws 116 further form a corresponding clamping relationship with the base plate.

[0112] For example, when clamping a relatively large base plate, the multiple jaws 116 can be adjusted along the corresponding slots 114 in a direction away from the center of the chuck 112 to create a larger space for accommodating the base plate; when clamping a relatively small base plate, the multiple jaws 116 can be adjusted along the corresponding slots 114 in a direction closer to the center of the chuck 112. In this way, by changing the position of the jaws 116 relative to the slots 114, the base plate clamping assembly 108 can be adapted to base plates of different sizes.

[0113] A locking handle 120 is disposed on the chuck 112 and is drivenly connected to multiple jaws 116. This drive connection can be understood as follows: when the locking handle 120 is operated, the operation of the locking handle 120 is transmitted to the multiple jaws 116 to control the position of the multiple jaws 116 relative to their corresponding slots 114. This embodiment does not limit the specific internal transmission structure used between the locking handle 120 and the jaws 116.

[0114] During the clamping process, the base plate is first placed between the multiple jaws 116, with the base plate abutting against the stepped portion 118 of each jaw 116. Then, the position of the multiple jaws 116 is adjusted along the corresponding slots 114 according to the size of the base plate, so that the multiple jaws 116 form a clamping position adapted to the base plate. After the position adjustment is completed, the locking handle 120 can be operated to lock the position of the multiple jaws 116 relative to the corresponding slots 114, thereby maintaining the positioning of the multiple jaws 116 on the base plate. When it is necessary to release the base plate, the locking handle 120 can be released, allowing the jaws 116 to readjust their position along the slots 114.

[0115] In some embodiments, a removable clamping pad may be provided at the contact point between the jaw 116 and the base plate. The clamping pad may have a contact portion formed of an elastic wear-resistant material such as polyurethane to increase friction at the contact point with the base plate and reduce the possibility of scratching the surface of the base plate during clamping. In some embodiments, the base 110 may be made of a material with high rigidity to reduce structural deformation of the base 110 itself during clamping or processing; the base 110 may also be provided with anti-slip components or vibration damping components to improve the stability of the base plate clamping assembly 108 during use.

[0116] Thus, by setting radially extending slots 114 in the chuck 112, multiple jaws 116 can adjust their radial positions along the corresponding slots 114, and the stepped portions 118 of the jaws 116 can be used to abut and position the base plate. Then, by locking the handle 120, the positions of the multiple jaws 116 relative to the slots 114 can be locked simultaneously. Multiple clamping positions can be adjusted and maintained according to the size of the base plate, thereby achieving stable positioning and clamping of the base plate.

[0117] It is understood that the specific examples in this document are only intended to help those skilled in the art better understand the embodiments of this application, and are not intended to limit the scope of the invention.

[0118] It is understood that in the various embodiments of this application, the sequence number of each process does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0119] It is understood that the various implementation methods described in this application can be implemented individually or in combination, and the implementation methods in this application are not limited in this respect.

[0120] Unless otherwise stated, all technical and scientific terms used in the embodiments of this application have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to limit the scope of this application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items. The singular forms "a," "the," and "the" as used in the embodiments of this application are also intended to include the plural forms unless the context clearly indicates otherwise.

[0121] The above description is merely a specific embodiment of this application, but the protection scope of this invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the protection scope of this application.

Claims

1. A crystal boat clamping device for clamping a crystal boat including a base plate and multiple racks, characterized in that, include: A base plate clamping assembly for centering and clamping the base plate, the base plate clamping assembly having a centering axis extending in the vertical direction; The guiding mechanism extends around the centering axis; Multiple rack clamping assemblies are movable and cooperate with the guide mechanism and can be fixed at different circumferential positions of the guide mechanism; each rack clamping assembly has at least two clamping parts, which are spaced apart along a direction parallel to the centering axis and are used to jointly clamp the same rack of the crystal boat.

2. The crystal boat clamping device according to claim 1, characterized in that, It also includes a verticality detection component, which comprises: The sliding part is detected and moves in coordination with the guide mechanism; An optical detection element is disposed in the detection sliding part and is used to emit detection light rays parallel to the centering axis; The detection sliding part is used to move along the guide mechanism so that the optical detection element moves to a circumferential position corresponding to different racks.

3. The crystal boat clamping device according to claim 2, characterized in that, The optical detection device includes a laser; The detection sliding part includes a detection platform and rollers disposed on the detection platform, and the rollers are in rolling cooperation with the guide mechanism.

4. The crystal boat clamping device according to claim 1, characterized in that, The guiding mechanism includes a first guiding section and a second guiding section, which are spaced apart along a direction parallel to the centering axis. Each of the rack clamping assemblies includes a first movable member and a second movable member, the first movable member being movably engaged with the first guide portion, and the second movable member being movably engaged with the second guide portion; The at least two clamping parts include a first clamping part and a second clamping part, wherein the first clamping part moves with the first moving member and the second clamping part moves with the second moving member.

5. The crystal boat clamping device according to claim 4, characterized in that, Both the first moving member and the second moving member include a sliding platform and a pulley disposed on the sliding platform. The first guide portion and the second guide portion each have a slide rail for the corresponding pulley to roll.

6. The crystal boat clamping device according to claim 5, characterized in that, It also includes a locking mechanism, the locking mechanism comprising: The first locking unit is used to lock the pulley corresponding to the first moving member; The second locking unit is used to lock the pulley corresponding to the second moving part; A linkage component connects the first locking unit and the second locking unit, and is used to enable the first locking unit and the second locking unit to lock or unlock synchronously.

7. The crystal boat clamping device according to claim 1, characterized in that, Each of the rack clamping assemblies further includes a height adjusting rod that extends in a direction parallel to the centering axis; The at least two clamping parts are disposed on the height adjusting rod and are capable of adjusting their position along the extension direction of the height adjusting rod.

8. The crystal boat clamping device according to claim 7, characterized in that, Each of the clamping parts includes a clamping base and two elastic clamping members; The clamping base is provided with an adjustment slide, and the two elastic clamping members are movably disposed in the adjustment slide to adjust the distance between the clamping position defined by the two elastic clamping members and the centering axis.

9. The crystal boat clamping device according to claim 8, characterized in that, The clamping base is provided with a bidirectional adjusting screw, which has a first thread section and a second thread section with opposite directions of rotation. The two elastic clamping members are respectively connected to the first threaded segment and the second threaded segment to move towards each other or away from each other when the bidirectional adjusting screw rotates, thereby adjusting the clamping distance between the two elastic clamping members.

10. The crystal boat clamping device according to claim 8, characterized in that, Each of the clamping parts further includes a mounting base disposed on the height adjustment rod, and the clamping base is detachably connected to the mounting base.

Images