Working condition scanning electron microscope battery device

Abstract

The utility model provides a working condition scanning electron microscope battery device, which comprises a chip and a battery, a mounting window is arranged on a shell of the battery, and the chip is hermetically matched in the mounting window of the battery, so that the chip and the shell of the battery jointly form a closed cavity; the chip is provided with an observation window. Therefore, real-time dynamic observation of the battery is realized.

Description

Technical Field

[0001] The utility model relates to the field of working condition scanning electrochemistry, in particular to a working condition scanning electron microscope battery device. Background Art

[0002] At present, in the process of battery development and application, the observation of the internal microstructure of the battery is mostly achieved through traditional non-in-situ methods. It is necessary to wait until the charging and discharging process is over before putting the battery into the test equipment for detection. It is impossible to observe the real-time dynamics during the reaction process, which will miss a lot of important information. Real-time observation and analysis of the changes and relationships between the internal morphology structure, element composition and electrochemical performance of the battery during the charging and discharging process to effectively study its charging and discharging process under working conditions is one of the important problems that need to be solved urgently. Utility Model Content

[0003] To this end, the utility model provides a working condition scanning electron microscope battery device to achieve real-time dynamic observation of the battery.

[0004] To achieve the above purpose, the technical solution provided by the utility model is as follows:

[0005] A working scanning electron microscope battery device comprises a chip and a battery. The battery shell is provided with an installation window. The chip is sealed in the battery installation window so that the chip and the battery shell together form a closed chamber. The chip is provided with an observation window.

[0006] Furthermore, the battery also has a current collector located in the housing, the current collector is provided with a through hole corresponding to the installation window, and the observation window of the chip corresponds to the through hole on the current collector.

[0007] Furthermore, the chip includes a silicon substrate, a bottom insulating layer and an electrode layer stacked in sequence from top to bottom; the observation window is opened on the silicon substrate, and the electrode layer forms an electrical contact with the current collector.

[0008] Furthermore, the chip also includes a top insulating layer, the top insulating layer is attached to the upper surface of the silicon substrate, and the observation window is opened on the top insulating layer and the silicon substrate.

[0009] Furthermore, the chip is sealed and bonded in the installation window by an adhesive.

[0010] Furthermore, the battery is a button battery, the outer shell of the button battery is formed by covering a positive electrode shell and a negative electrode shell, and the installation window is opened on the positive electrode shell or the negative electrode shell.

[0011] The technical solution provided by the utility model has the following beneficial effects:

[0012] The working scanning electron microscope battery device realizes real-time dynamic observation of the battery and continuous dynamic observation from millimeter to micrometer and nanometer scales. It plays an important role in studying the electrochemical reaction process and mass transfer and phase changes in the microscopic field under liquid electrochemical working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 The figure shows a partial structural decomposition diagram of the chip in the first embodiment, wherein the top insulating layer is hidden;

[0014] Figure 2 The figure shows a partial structural side view of the chip in the first embodiment, wherein the top insulating layer is hidden;

[0015] Figure 3 The figure shows a top view of a part of the structure of the chip in the first embodiment, wherein the top insulating layer is hidden;

[0016] Figure 4 The figure shows a top view of the SEM battery device in working condition in Example 1;

[0017] Figure 5 The figure shows a schematic diagram of the structural decomposition of the scanning electron microscope battery device in the working state in the first embodiment. DETAILED DESCRIPTION

[0018] To further illustrate the various embodiments, the present invention provides drawings. These drawings are part of the disclosure of the present invention, which are mainly used to illustrate the embodiments and can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, a person of ordinary skill in the art should be able to understand other possible implementations and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.

[0019] The utility model is now further described in conjunction with the accompanying drawings and specific implementation methods.

[0020] Embodiment 1

[0021] Reference Figures 1 to 5As shown, this embodiment provides a working scanning electron microscope battery device, including a chip 4 and a battery. Specifically, the battery is a button battery, also known as a button battery. The button battery adopts an existing structure, such as a negative electrode shell 11, a spring 10, a gasket 9, a negative electrode 8, a diaphragm 7, a positive electrode 6 and a positive electrode shell 5. A mounting window is provided on the positive electrode shell 5 of the button battery, and a through hole corresponding to the mounting window is provided on the current collector of the button battery (the current collector of the positive electrode 6 in this embodiment). The chip 4 is sealed and matched in the mounting window of the button battery, so that the chip 4, the positive electrode shell 5 and the negative electrode shell 11 together constitute a closed chamber; the chip 4 is provided with an observation window corresponding to the through hole of the current collector (the current collector of the positive electrode 6 in this embodiment).

[0022] By using this device, it can be transferred to a scanning electron microscope, and the electron beam passes through the observation window 12 and the through hole of the current collector of the positive electrode 6, so that the button battery can be intuitively observed in real time and dynamically, realizing continuous dynamic observation from millimeter to micrometer and nanometer scales, which plays an important role in studying the electrochemical reaction process and mass transfer in the microscopic field under liquid electrochemical working conditions, and phase changes.

[0023] Specifically, in this embodiment, the chip 4 is an in-situ chip for use with a transmission electron microscope. The chip 4 includes a silicon substrate 1, a bottom insulating layer 2, and an electrode layer 3 stacked in sequence from top to bottom; an observation window 12 corresponding to a through hole of a current collector of the positive electrode 6 is provided on the silicon substrate 1, and the electrode layer 3 forms an electrical contact with the current collector of the positive electrode 6.

[0024] Specifically, in this embodiment, the bottom insulating layer 2 can be a silicon nitride layer or a silicon oxide layer, and the material of the electrode layer 3 can be platinum, molybdenum, tungsten, gold or titanium, etc. The thickness of the bottom insulating layer 2 is 20-300 nanometers, and the thickness of the silicon substrate 1 is 50-500 micrometers.

[0025] Specifically, in this embodiment, the observation window 12 has an area not exceeding a rectangular area of ​​5 micrometers by 50 micrometers and is located in the center area of ​​the chip 4. The electrode layer 3 covers the peripheral area except the observation window 12.

[0026] Specifically, in this embodiment, the chip 4 is sealed and bonded in the installation window by an adhesive, and the adhesive bonding method can achieve sealed and firm assembly.

[0027] Embodiment 2

[0028] A working scanning electron microscope battery device provided in this embodiment has a structure roughly the same as that of the first embodiment, except that: in this embodiment, an installation window is opened on the negative electrode shell 11 of the button battery, and a through hole is opened on the current collector of the negative electrode 8, and the chip 4 is sealed in the installation window on the negative electrode shell 11, so that the chip 4, the positive electrode shell 5 and the negative electrode shell 11 together constitute a closed chamber; the observation window 12 of the chip 4 corresponds to the through hole on the current collector of the negative electrode 8.

[0029] Meanwhile, the chip 4 further comprises a top insulating layer (not shown), the top insulating layer being attached to the upper surface of the silicon substrate 1 , and the observation window being opened on the top insulating layer and the silicon substrate 1 .

[0030] Embodiment 3

[0031] The present embodiment provides a working scanning electron microscope battery device, which has a structure similar to that of the first embodiment, except that: in the present embodiment, the battery is a soft-pack battery, and there is no current collector structure in the battery. The installation window is provided on the shell of the soft-pack battery, and the chip 4 is sealed in the installation window of the soft-pack battery, so that the chip 4 and the battery shell together form a closed chamber; the chip is provided with an observation window. In this way, the interior of the soft-pack battery can be observed in real time and dynamically.

[0032] Although the present invention has been specifically demonstrated and described in conjunction with the preferred embodiments, those skilled in the art should understand that various changes may be made to the present invention in form and detail without departing from the spirit and scope of the present invention as defined in the appended claims, all of which are within the scope of protection of the present invention.

Claims

1. A working scanning electron microscope battery device, comprising a chip and a battery, characterized in that: The battery shell is provided with an installation window, and the chip is sealed and matched in the battery installation window, so that the chip and the battery shell together form a closed chamber; the chip is provided with an observation window.

2. The working scanning electron microscope battery device according to claim 1, characterized in that: The battery also has a current collector located in the shell, the current collector is provided with a through hole corresponding to the installation window, and the observation window of the chip corresponds to the through hole on the current collector.

3. The working state scanning electron microscope battery device according to claim 2 is characterized in that: The chip comprises a silicon substrate, a bottom insulating layer and an electrode layer which are stacked in sequence from top to bottom; the observation window is opened on the silicon substrate, and the electrode layer forms electrical contact with the current collector.

4. The working state scanning electron microscope battery device according to claim 3 is characterized in that: The chip further comprises a top insulating layer, wherein the top insulating layer is attached to the upper surface of the silicon substrate, and the observation window is opened on the top insulating layer and the silicon substrate.

5. The working scanning electron microscope battery device according to claim 1, characterized in that: The chip is sealed and bonded in the installation window by an adhesive.

6. The working scanning electron microscope battery device according to claim 1 or 2, characterized in that: The battery is a button battery, the outer shell of which is formed by covering a positive electrode shell and a negative electrode shell, and the installation window is opened on the positive electrode shell or the negative electrode shell.

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