Tail gas treatment device

Abstract

The utility model relates to the technical field of tail gas treatment equipment, in particular to a tail gas treatment device which comprises a main cavity, a plasma generator, a multi-stage cooling cavity, a drainage tank and a multi-stage separation tower. A plasma arc mode is adopted to decompose process gas needing to be treated, then multi-stage cooling and spraying are performed, water-soluble gas in treated tail gas is dissolved and discharged along with wastewater, and other gas enters a multi-stage separation tower to be subjected to water-vapor separation and is discharged until the conditions are met; the tail gas treatment efficiency is high, treatment is more thorough, and the treatment effect is good. The multiple stages of cooling cavities are formed in the outer side and the lower portion of the main cavity, each stage of cooling cavity is further provided with a plurality of cooling chambers, high-temperature gas treated in the main cavity is effectively cooled, and the cooling effect is better. And meanwhile, the gas can be further sprayed and washed, water-soluble gas in the gas is dissolved, and the tail gas treatment effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment equipment, in particular to a tail gas treatment device. Background Art

[0002] The production in the semiconductor industry will produce a large amount of harmful gases or inflammable and explosive gases such as silane, phosphine, TMA, etc. The concentration of these tail gases in the workshop exceeds the standard, which will cause great harm to the operators. Direct discharge will also cause great safety risks to the environment. Therefore, it is necessary to treat and release them in a timely manner. At present, the commonly used tail gas treatment methods in the existing technology are adsorption method, combustion method and catalytic method, but the tail gas treatment efficiency and treatment effect are not ideal, which is not conducive to the efficient operation of production. Utility Model Content

[0003] The purpose of the utility model is to provide an exhaust gas treatment device to solve the prior art problems existing in the above-mentioned background technology.

[0004] In order to solve the above-mentioned technical problems, the technical solution provided by the utility model is as follows: an exhaust gas treatment device is provided, including a main cavity, a plasma generator, a multi-stage cooling cavity, a drainage box and a multi-stage separation tower, wherein a plurality of air inlet pipes for introducing process gas are connected in the main cavity, the plasma generator is arranged at the top of the main cavity, the multi-stage cooling cavity is arranged at the outside and below the main cavity, the drainage box is arranged below the multi-stage cooling cavity, the multi-stage separation tower is arranged on one side of the main cavity and the bottom end is connected to the drainage box for water vapor separation.

[0005] Based on the above technical solution, the multi-stage cooling chamber includes a primary cooling chamber and a secondary cooling chamber. The primary cooling chamber is arranged on the outside of the main cavity, and the secondary cooling chamber is arranged below the main cavity. The top end of the secondary cooling chamber is connected to the main cavity, and the bottom end is connected to the drainage box.

[0006] On the basis of the above technical scheme, the primary cooling chamber includes an air cooling chamber and a circulating water cooling chamber which are arranged in sequence from the inside to the outside, the air cooling chamber is filled with air, and the circulating water cooling chamber is provided with circulating cooling water; the secondary cooling chamber includes a vortex water cooling chamber and a water curtain chamber, the vortex water cooling chamber is provided with vortex cooling water, a gap is provided at the top of the inner wall of the vortex water cooling chamber, the water curtain chamber is connected with the vortex water cooling chamber through the gap, the top of the water curtain chamber is connected with the main cavity, and the bottom is connected with the drainage tank.

[0007] Based on the above technical solution, the multi-stage separation tower includes a primary separation chamber, a secondary separation chamber and a gas-liquid separation chamber arranged in sequence from bottom to top, and the primary separation chamber, the secondary separation chamber and the gas-liquid separation chamber are each provided with a plurality of porous baffles, and the porous baffles are each filled with fillers for condensation.

[0008] On the basis of the above technical solution, an atomization chamber is arranged between the primary separation chamber and the secondary separation chamber, and atomization heads are symmetrically arranged in the atomization chamber.

[0009] Based on the above technical solution, the gas-liquid separation chamber is further provided with a first separation plate and a second separation plate. The first separation plate is obliquely arranged on the inner wall of the gas-liquid separation chamber, and the second separation plate is obliquely arranged on another symmetrical inner wall. The second separation plate is correspondingly arranged in the interval of the first separation plate.

[0010] On the basis of the above technical solution, the secondary separation chamber is connected to the gas-liquid separation chamber via a reducing pipe, and the top diameter of the reducing pipe is smaller than the bottom diameter.

[0011] On the basis of the above technical solution, it also includes a cleaning device arranged on the intake pipe, the cleaning device includes a driving mechanism and an elastic cleaning part, the driving mechanism is arranged on the outer wall of the intake pipe and the free end extends into the intake pipe, the elastic cleaning part is fixedly arranged at the free end of the driving mechanism and is driven to slide by the driving mechanism.

[0012] Based on the above technical solution, the cleaning device also includes an air blowing mechanism, which includes an air inlet and an air blowing pipe. The air inlet is arranged on the side wall of the driving mechanism, and the air blowing pipe is arranged at the free end of the driving mechanism. The driving mechanism is arranged as an internal hollow structure and one end is connected to the air inlet, and the other end is connected to the air blowing pipe.

[0013] Based on the above technical solution, a plurality of spray pipes are arranged in the drainage box, and a circulation pump is also arranged in the drainage box.

[0014] The beneficial effects of the technical solution provided by the utility model are:

[0015] 1. The utility model provides a tail gas treatment device, which uses a plasma arc to decompose the process gas to be treated, and then multi-stage cooling and spraying, dissolves the water-soluble gas in the treated tail gas and discharges it with waste water, and other gases enter a multi-stage separation tower for water vapor separation until they meet the conditions and are discharged; the tail gas treatment efficiency is high, the treatment is more thorough, and the treatment effect is good.

[0016] 2. By arranging multiple cooling chambers on the outside and below of the main chamber, and each cooling chamber is also provided with multiple cooling chambers, the high-temperature gas treated in the main chamber is effectively cooled down, and the cooling effect is better. At the same time, the gas can be further sprayed and washed to dissolve the water-soluble gas in the gas and improve the exhaust gas treatment effect.

[0017] 3. The cooled gas enters the post-treatment stage, i.e., enters a multi-stage separation tower, and passes through a primary separation chamber, a secondary separation chamber, and a gas-liquid separation chamber from the bottom in sequence to separate the water vapor in the gas. After multi-stage water vapor separation, the water vapor separation is more thorough, thereby improving the exhaust gas treatment effect; preferably, the primary separation chamber and the secondary separation chamber can be provided with multiple ones according to the treated gas, so as to make the gas-liquid separation more complete.

[0018] 4. By arranging a cleaning device in the air inlet pipe, especially near the bend of the air inlet pipe, impurities accumulated in the air inlet pipe can be cleaned during long-term use, which is more convenient to use and reduces the impact on the process gas treatment effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0020] Figure 2 It is a three-dimensional structural schematic diagram of the utility model from another angle;

[0021] Figure 3 It is an internal cross-sectional view of the utility model;

[0022] Figure 4 It is a structural schematic diagram of the first-level cooling chamber in the utility model;

[0023] Figure 5 It is a structural schematic diagram of the secondary cooling chamber in the utility model;

[0024] Figure 6 It is a structural schematic diagram of a multi-stage separation tower in the utility model;

[0025] Figure 7 It is a schematic diagram of the internal structure of the gas-liquid separation chamber in the utility model;

[0026] Figure 8 It is a schematic diagram of the structure of the cleaning device in Embodiment 2 of the present utility model;

[0027] Fig. 9 It is an internal cross-sectional view of the cleaning device in the utility model;

[0028] Fig.10 It is a schematic diagram of the structure of the utility model in use;

[0029] Fig.11 It is a schematic diagram of the structure of two sets of processing devices in the utility model when in use; DETAILED DESCRIPTION

[0030] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0031] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the description of the present invention, it should be understood that the terms "left", "right", "front", "back", "top", "bottom", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0033] like Figures 1 to 11 As shown, an exhaust gas treatment device includes a main cavity 1, a plasma generator 2, a multi-stage cooling cavity 3, a drainage box 4 and a multi-stage separation tower 5. The main cavity 1 is connected with a plurality of air inlet pipes 11 for introducing process gas, the plasma generator 2 is arranged at the top of the main cavity 1, the multi-stage cooling cavity 3 is arranged on the outside and below the main cavity 1, the drainage box 4 is arranged below the multi-stage cooling cavity 3, and the multi-stage separation tower 5 is arranged on one side of the main cavity 1 and the bottom end is connected to the drainage box 4 for water vapor separation.

[0034] The utility model provides a tail gas treatment device, which uses a plasma arc to decompose the process gas to be treated, and then performs multi-stage cooling and spraying to dissolve the water-soluble gas in the treated tail gas and discharge it with waste water, and other gases enter a multi-stage separation tower to separate water and steam until they meet the conditions and are discharged; the tail gas treatment efficiency is high, the treatment is more thorough, and the treatment effect is good.

[0035] Specifically, a plurality of air inlet pipes 11 are arranged on the main cavity 1 to introduce the process gas to be treated. The process gas enters the main cavity 1 for mixing. The plasma generator 2 is arranged in the middle of the main cavity 1. The plasma generator 2 generates a high-temperature, jet-like plasma arc. The edge temperature of the flame is as high as 3000°C. The incoming process waste gas is ionized, bombarded, and decomposed at high temperature in the main cavity, so that the waste gas molecules are converted into various active particles, and the reaction generates harmless substances such as H2O and CO2. The cooling cavity cools it, sprays it, flushes it, and hydrolyzes it in water. The substances dissolved in water are discharged as wastewater. The gas that meets the treatment standards passes through a multi-stage separation tower and is discharged to the central system of the plant affairs in a direction. It is discharged after being tested to meet the discharge conditions. It should be noted that the plasma generator can be obtained from the prior art, and the present application does not involve improvements to the specific structure of the plasma generator.

[0036] Based on the above technical solution, the multi-stage cooling chamber 3 includes a primary cooling chamber 31 and a secondary cooling chamber 32. The primary cooling chamber 31 is arranged on the outside of the main cavity 1, and the secondary cooling chamber 32 is arranged below the main cavity 1. The top end of the secondary cooling chamber 32 is connected to the main cavity 1, and the bottom end is connected to the drainage box 4.

[0037] On the basis of the above technical scheme, the primary cooling chamber 31 includes an air cooling chamber 311 and a circulating water cooling chamber 312 which are arranged in sequence from the inside to the outside, the air cooling chamber 311 is filled with air, and the circulating water cooling chamber 312 is provided with circulating cooling water; the secondary cooling chamber 32 includes a vortex water cooling chamber 321 and a water curtain chamber 322, the vortex water cooling chamber 321 is provided with vortex cooling water, and a gap 33 is provided at the top of the inner wall of the vortex water cooling chamber 321, and the water curtain chamber 322 is connected with the vortex water cooling chamber 321 through the gap 33, and the top of the water curtain chamber 322 is connected with the main cavity 1, and the bottom is connected with the drainage box 4.

[0038] By arranging multiple cooling chambers on the outside and below the main chamber, and each cooling chamber is also provided with multiple cooling chambers, the high-temperature gas treated in the main chamber is effectively cooled down, and the cooling effect is better. At the same time, the gas can be further sprayed and washed to dissolve the water-soluble gas in the gas and improve the exhaust gas treatment effect.

[0039] Specifically, a first water inlet 121 is provided at the bottom end of the outer wall of the circulating water cooling chamber 312, and a first water outlet 122 is provided at the top end, so that the circulating cooling water can continuously circulate into the main cavity 1 to cool it; a second water inlet 211 and a second water outlet 212 are obliquely provided on the outer wall of the vortex water cooling chamber 321, and the second water inlet 211 and the second water outlet 212 are symmetrically arranged. By sequentially arranging an air cooling chamber 311 and a circulating water cooling chamber 312 on the outside of the main cavity 1, a two-layer cooling chamber is used to realize the cooling operation of the exhaust gas treatment in the main cavity 1, and the cooling effect is good; at the same time, in the secondary cooling chamber 32 arranged below the primary cooling chamber 31, cooling water enters from the inclined second water inlet 212 and flows in a vortex shape in the vortex water cooling chamber 321, thereby increasing the cooling effect. At the same time, the water in the vortex water cooling chamber 321 will enter the water curtain chamber 322 through the gap 33 at the top, and flow down along the side wall in the shape of a water curtain, so that the gas flowing out of the main cavity 1 can be further washed with water, and the water-soluble substances can be dissolved and fall into the drainage box.

[0040] Preferably, a plurality of spray ports 34 are provided on the water curtain cavity 322. By providing a plurality of spray ports 34 on the water curtain cavity 322, the treated gas can be sprayed and washed, and the water-soluble part is dissolved and collected in the drainage box 4, so as to further process the gas.

[0041] On the basis of the above technical solution, the multi-stage separation tower 5 includes a primary separation chamber 51, a secondary separation chamber 52 and a gas-liquid separation chamber 53 which are arranged in sequence from bottom to top. A plurality of porous baffles 54 are arranged in the primary separation chamber 51, the secondary separation chamber 52 and the gas-liquid separation chamber 53, and fillers for condensation are filled between the porous baffles 54.

[0042] A spray head is also provided in the first-stage separation chamber; the cooled gas enters the post-treatment stage, i.e., enters the multi-stage separation tower 5, and passes through the first-stage separation chamber 51, the second-stage separation chamber 52 and the gas-liquid separation chamber 53 from the bottom in sequence to separate the water vapor in the gas. After the multi-stage water vapor separation, the water vapor separation is more thorough, thereby improving the exhaust gas treatment effect; more preferably, the first-stage separation chamber 51 and the second-stage separation chamber 52 can be provided with multiple ones according to the treated gas, so as to make the gas-liquid separation more complete.

[0043] The first-stage separation chamber 51, the second-stage separation chamber 52, and the gas-liquid separation chamber 53 are all provided with fillers for condensation, that is, in order to increase the contact area with the gas during the gas flow process and improve the gas-liquid separation effect, the condensed water can drip into the drainage box and be discharged in a centralized manner; more preferably, the filler can also play a certain blocking role, that is, even if the gas carries impurities such as dust, it can be attached to the filler and flushed into the drainage box 4. The function of the porous baffle 7 is to carry the filler, ensure that the filler does not fall off, and at the same time, the condensed water can be returned to the drainage box 4. By providing a spray head 55 in the first-stage separation chamber 51, the gas can be further sprayed and washed, and the gas components dissolved in water can be fully dissolved and fall into the drainage box for centralized discharge.

[0044] It should be noted that the function of the filler in the present application is to extend the flow path of the gas and facilitate the condensation of water vapor. It is a hollow filler with multiple faces, which can effectively block the airflow and condense the water. Existing technologies such as Hakaiden filler, Raschig ring filler or Pall ring filler can also be used. The present application does not involve improvements to the specific structure of the filler.

[0045] On the basis of the above technical solution, an atomization chamber 56 is arranged between the primary separation chamber 51 and the secondary separation chamber 52 , and an atomization head 561 is symmetrically arranged in the atomization chamber 56 .

[0046] The head end of the atomizing head 561 is connected with a high-pressure gas port and a water port, which is similar to the spray head structure of the prior art sprayer. Water is atomized under the action of high-pressure gas, and the gas flowing inside is further atomized and cleaned to achieve a better exhaust gas treatment effect. The head end mentioned above is defined according to the flow direction of the atomized water vapor, which is only for the convenience of understanding and description of the present technical solution, and does not constitute a limitation to the present application.

[0047] Based on the above technical solution, a first separation plate 531 and a second separation plate 532 are further provided in the gas-liquid separation chamber 53. The first separation plate 531 is obliquely arranged on the inner wall of the gas-liquid separation chamber 53, and the second separation plate 532 is obliquely arranged on another symmetrical inner wall. The second separation plate 532 is correspondingly arranged in the interval of the first separation plate 531.

[0048] By symmetrically arranging the first separation plate 531 and the second separation plate 532 on the inner side walls of the gas-liquid separation chamber 53 and both being arranged inclined, the flow path of the gas is effectively extended in the process of the gas winding upward between the multiple crossed separation plates, and the contact area between the gas and the separation plates is increased. The first separation plate 531 and the second separation plate 532 effectively condense the moisture contained in the gas, and the water condenses from the multiple separation plates, thereby achieving further water vapor separation, improving the water vapor separation effect, and making the exhausted gas more in line with environmental protection requirements.

[0049] On the basis of the above technical solution, the secondary separation chamber 52 and the gas-liquid separation chamber 53 are connected via a reducer 57 , and the top diameter of the reducer 57 is smaller than the bottom diameter.

[0050] By providing the reducer 57, the flow velocity of the gas is reduced during the flow from the secondary separation chamber 52 to the gas-liquid separation chamber 53, thereby improving the gas-liquid separation effect. Specifically, the diameter of the reducer 57 is smaller at the top and larger at the bottom, that is, the diameter of the bottom end of the gas-liquid separation chamber 53 is smaller than the diameter of the secondary separation chamber 52, and the top end of the reducer 57 is connected to the gas-liquid separation chamber 53, and the bottom end is connected to the secondary separation chamber 52.

[0051] The top of the gas-liquid separation chamber 53 is provided with an exhaust pipe 58, and a temperature sensor and a pressure sensor are provided on the exhaust pipe 58. Preferably, a plurality of detectors are provided at the top of the multi-stage separation tower 5, which can detect parameters such as temperature and pressure of the treated gas, so as to better meet the requirements of environmental emissions, and then perform the final exhaust operation.

[0052] On the basis of the above technical solution, a plurality of spray pipes 41 are arranged in the drainage box 4 , and a circulation pump 8 is also arranged in the drainage box 4 .

[0053] The spray pipe 41 disposed in the drainage box 4 can further spray the tail gas that has passed through the cooling cavity, further dissolve the water-soluble tail gas, and achieve a better treatment effect.

[0054] At the same time, in addition to collecting water that dissolves some gases, the drainage box 4 also collects condensed water and washing water in the multi-stage separation tower 5, and discharges them in a centralized manner, which is more convenient to use; more preferably, the circulating pump 8 can realize timely discharge of water in the drainage box 4, and a water level sensor is provided at a certain height in the drainage box 4. When the water level in the drainage box 4 reaches the position of the water level sensor, an electrical signal controls the circulation pump 8 to work, and realizes the drainage action in the drainage box 4. In addition, the circulation pump 8 can also provide power for the internal circulation of the circulating cooling water, and the connecting components are changed according to the actual operation process.

[0055] On the basis of the above technical solution, it also includes a heat exchanger 9, which is arranged on the pipeline of circulating cooling water.

[0056] By providing the cold-heat exchanger 9, the circulating cooling water used in the cooling process can be cooled after the temperature is increased, and then circulated to achieve a stable cooling effect.

[0057] In a preferred embodiment, two groups of plasma water-washing exhaust gas treatment systems are symmetrically arranged in the chassis, and a part of the air inlet pipe on the main cavity is connected through a pipeline, and a control valve is arranged on the pipeline.

[0058] The number of air inlet pipes on each main chamber is doubled compared to the original single-group processing system. In this way, when one of the processing systems fails to work, half of its air inlet pipes can be connected to the air inlet pipes of another normally working processing system and the control valve can be opened without affecting the normal processing of the process gas; when no failure occurs, the air inlet pipe connection valves of the two processing systems are closed, and the two systems are independent of each other and work separately. Therefore, by setting up two or more processing systems in the same chassis, the processing efficiency is high, and they can also back up each other, ensuring the normal operation of the unit in an emergency, and the operation is more convenient.

[0059] Example 2

[0060] On the basis of the above technical solution, the present embodiment further includes a cleaning device 6 disposed on the air intake pipe, the cleaning device 6 comprising a driving mechanism 61 and an elastic cleaning portion 62, the driving mechanism 61 being disposed on the outer wall of the air intake pipe 11 and having a free end extending into the air intake pipe 11, the elastic cleaning portion 62 being fixedly disposed at the free end of the driving mechanism 61 and driven to slide by the driving mechanism 61. Preferably, the driving mechanism 61 is configured as a cylinder, and the elastic cleaning portion 62 is configured as a spring.

[0061] Based on the above technical solution, the cleaning device 6 also includes an air blowing mechanism, which includes an air inlet 63 and an air blowing pipe 64. The air inlet 63 is arranged on the side wall of the driving mechanism 61, and the air blowing pipe 64 is arranged at the free end of the driving mechanism 61. The driving mechanism 61 is arranged as an internal hollow structure and one end is connected to the air inlet 63, and the other end is connected to the air blowing pipe 64.

[0062] Preferably, the cleaning gas is nitrogen or other inert gas, which can, on the one hand, play a better role in cleaning impurities, and on the other hand, does not affect the gas reaction or high-temperature decomposition process in the main cavity.

[0063] A cleaning device is provided on the air inlet pipe 11, especially near the bend of the air inlet pipe, so that impurities accumulated in the air inlet pipe can be cleaned during long-term use, which is more convenient to use and reduces the impact on the process gas treatment effect; specifically, the spring is driven by the cylinder to move, and the spring slides in the air inlet pipe 11 to remove the impurities attached to the inner wall of the air inlet pipe 11, which is easy to operate and causes less damage to the pipeline; more preferably, the driving mechanism 61 is also provided with a blowing mechanism, that is, compressed gas is connected to the air inlet 63, and impurities are cleaned with gas assistance during the movement of the spring. Preferably, the compressed gas is compressed nitrogen or other inert gas to avoid adverse effects on the plasma generator processing process gas, and the selected gas is also based on this.

[0064] The basic principle and main features of the utility model are shown and described above. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments. Therefore, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the appended claims rather than the above description. Therefore, it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

[0065] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A tail gas treatment device, characterized in that: The invention comprises a main cavity (1), a plasma generator (2), a multi-stage cooling cavity (3), a drainage box (4) and a multi-stage separation tower (5); the main cavity (1) is connected with a plurality of air inlet pipes (11) for introducing process gas; the plasma generator (2) is arranged at the top of the main cavity (1); the multi-stage cooling cavity (3) is arranged outside and below the main cavity (1); the drainage box (4) is arranged below the multi-stage cooling cavity (3); the multi-stage separation tower (5) is arranged at one side of the main cavity (1) and the bottom end is connected to the drainage box (4) for water vapor separation.

2. The exhaust gas treatment device according to claim 1, characterized in that: The multi-stage cooling chamber (3) comprises a primary cooling chamber (31) and a secondary cooling chamber (32); the primary cooling chamber (31) is arranged outside the main chamber (1); the secondary cooling chamber (32) is arranged below the main chamber (1); the top end of the secondary cooling chamber (32) is connected to the main chamber (1); and the bottom end is connected to the drainage box (4).

3. The exhaust gas treatment device according to claim 2, characterized in that: The primary cooling chamber (31) comprises an air cooling chamber (311) and a circulating water cooling chamber (312) which are arranged in sequence from the inside to the outside, the air cooling chamber (311) is filled with air, and the circulating water cooling chamber (312) is provided with circulating cooling water; the secondary cooling chamber (32) comprises a vortex water cooling chamber (321) and a water curtain chamber (322), the vortex water cooling chamber (321) is provided with vortex cooling water, a gap (33) is provided at the top end of the inner wall of the vortex water cooling chamber (321), the water curtain chamber (322) is connected to the vortex water cooling chamber (321) through the gap (33), the top end of the water curtain chamber (322) is connected to the main chamber (1), and the bottom end is connected to the drainage box (4).

4. The exhaust gas treatment device according to claim 1, characterized in that: The multi-stage separation tower (5) comprises a primary separation chamber (51), a secondary separation chamber (52) and a gas-liquid separation chamber (53) which are arranged in sequence from bottom to top. A plurality of porous baffles (54) are arranged in the primary separation chamber (51), the secondary separation chamber (52) and the gas-liquid separation chamber (53), and fillers for condensation are filled between the porous baffles (54).

5. The exhaust gas treatment device according to claim 4, characterized in that: An atomization chamber (56) is arranged between the primary separation chamber (51) and the secondary separation chamber (52), and an atomization head (561) is symmetrically arranged in the atomization chamber (56).

6. The exhaust gas treatment device according to claim 4, characterized in that: The gas-liquid separation chamber (53) is further provided with a first separation plate (531) and a second separation plate (532), wherein the first separation plate (531) is obliquely arranged on the inner wall of the gas-liquid separation chamber (53), and the second separation plate (532) is obliquely arranged on another symmetrical inner wall, and the second separation plate (532) is correspondingly arranged in the interval of the first separation plate (531).

7. The exhaust gas treatment device according to claim 4, characterized in that: The secondary separation chamber (52) is connected to the gas-liquid separation chamber (53) via a reducing pipe (57), and the diameter of the top end of the reducing pipe (57) is smaller than the diameter of the bottom end.

8. The exhaust gas treatment device according to claim 3, characterized in that: The invention also comprises a cleaning device (6) arranged on the air intake pipe, the cleaning device (6) comprising a driving mechanism (61) and an elastic cleaning portion (62), the driving mechanism (61) being arranged on the outer wall of the air intake pipe (11) and having a free end extending into the air intake pipe (11), the elastic cleaning portion (62) being fixedly arranged on the free end of the driving mechanism (61) and driven to slide by the driving mechanism (61).

9. The exhaust gas treatment device according to claim 8, characterized in that: The cleaning device (6) further comprises an air blowing mechanism, wherein the air blowing mechanism comprises an air inlet (63) and an air blowing pipe (64), wherein the air inlet (63) is arranged on a side wall of the driving mechanism (61), and the air blowing pipe (64) is arranged at a free end of the driving mechanism (61), and the driving mechanism (61) is arranged as an internal hollow structure with one end connected to the air inlet (63) and the other end connected to the air blowing pipe (64).

10. The exhaust gas treatment device according to claim 1, characterized in that: A plurality of spray pipes (41) are arranged in the drainage box (4), and a circulation pump (8) is also arranged in the drainage box (4).

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