Compatible vertical wafer spin dryer rotor
By designing a compatible vertical wafer dryer rotor, the compatible use of large and small wafer boxes is achieved using multi-bar body and bayonet structure, solving the problem of high equipment costs in the existing technology, improving utilization and reducing utilization production costs.
Patent Information
- Application Number
- CN202420417943.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-05
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-03-05
AI Technical Summary
In existing vertical SRDs, Rotor is not compatible with Wafer cassettes of different sizes, resulting in higher equipment costs.
A compatible vertical wafer dryer rotor is designed, including large-size rotors and small-size fixtures. It is connected by clamping strips to achieve compatible use of large-size and small-size wafer boxes, adopting multi-bar structure and bayonets Designed to ensure stability and reduce overall quality through annular and L-shaped plates.
It realizes compatible use of large and small wafer boxes, improves the utilization rate of wafer dryers, saves space and reduces production costs.
Smart Images
Figure CN222260972U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of integrated circuit processing, and in particular to a compatible vertical wafer drying machine rotor. Background Art
[0002] In the prior art, when a large-sized wafer cassette (wafer box) and a small-sized wafer cassette (wafer box) are used to spin-dry wafers in a vertical SRD (wafer spin dryer), it is necessary to select a rotor of different sizes according to the size. The existing rotor cannot be compatible with wafer cassettes of different sizes, so the equipment cost for processing and drying the wafers is relatively high. Utility Model Content
[0003] In order to overcome the problems existing in the prior art, the present application provides a compatible vertical wafer dryer rotor.
[0004] A compatible vertical wafer drying machine rotor provided in this application adopts the following technical solution:
[0005] A compatible vertical wafer drying machine rotor comprises a large-sized rotor and a small-sized fixture installed in the large-sized rotor, a gap is provided between the large-sized rotor and the small-sized fixture, and the four top corners of the small-sized fixture are connected to the large-sized rotor through clamping strips, the large-sized rotor is used to place a large-sized wafer box, and the small-sized fixture is used to fix the small-sized wafer box.
[0006] By adopting the above technical solution, a large-size wafer box can be placed normally in a large-size rotor. When a small-size wafer box is needed, a small-size fixture can be placed on the basis of the original large-size rotor, thereby achieving compatible use of large-size wafer boxes and small-size wafer boxes.
[0007] Preferably, the large-size rotor includes an outer plate, an inner plate and a plurality of rods connecting the outer plate and the inner plate, wherein a placement opening is provided at the center of the outer plate, and a rotating shaft is installed at the center of the outer side of the inner plate.
[0008] By adopting the above technical solution, the placement opening opened on the outer plate of the large-size rotor is used to place a large-size wafer box or a small-size fixture, and the rotating shaft installed on the outer side of the inner plate is used to connect to the wafer dryer to drive the large-size rotor to rotate as a whole.
[0009] Preferably, one end of the rod body is connected to the edge of the placement opening of the outer plate, wherein snap-in openings are provided inside the rod body at the four top corners of the placement opening.
[0010] Preferably, the bayonet adopts a right-angle opening, and the four top corners of the small-sized clamp are connected to the bayonet through clamping strips.
[0011] By adopting the above technical solution, the rod body is arranged at the edge of the placement port, and right-angle clips are opened on the inner side of the four top corners of the placement port, which can effectively stabilize and reinforce the large-sized wafer box or small-sized clamp placed in the placement port.
[0012] Preferably, the small-size clamp comprises annular plates on both sides and connecting rods connecting the annular plates, and the connecting rods are connected to the inner sides of the annular plates.
[0013] By adopting the above technical solution, the annular plates on both sides of the small-sized clamp are connected by connecting rods, and the ends of the annular plates can be used to place the small-sized wafer box.
[0014] Preferably, the inner sides of the four top corners of the annular plate also adopt bayonet joints, wherein the four top corners of the annular plate are connected by an L-shaped plate, and a plurality of strip-shaped through holes are opened on the L-shaped plate.
[0015] By adopting the above technical solution, the bayonet used at the four top corners of the annular plate can adapt to the edge of the small-sized wafer box, and the L-shaped plates at the four top corners can support it, and the strip through holes opened on the L-shaped plates can reduce the mass of the overall structure.
[0016] Preferably, a plurality of through holes are formed on the top of the annular plate.
[0017] By adopting the above technical solution, the perforations opened on the top of the annular plate play a role in adjusting the center of mass to achieve overall balance.
[0018] Preferably, wafer box fixing grooves are provided on the tops of the large-sized rotor and the small-sized clamp.
[0019] By adopting the above technical solution, the wafer box fixing groove is convenient for fixing and limiting the large-sized wafer and the top protrusion of the small-sized wafer box, ensuring the stability of both in the large-sized rotor or the small-sized fixture.
[0020] In summary, the present application includes at least one of the following beneficial technical effects:
[0021] 1. The large-size wafer box in this application can be normally placed in the large-size rotor. When a small-size wafer box is needed, a small-size fixture can be placed on the basis of the original large-size rotor, thereby achieving the compatible use of large-size wafer boxes and small-size wafer boxes;
[0022] 2. This application can improve the utilization rate of a single wafer spin dryer, save space and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a schematic diagram of the overall structure of a compatible vertical wafer drying machine rotor;
[0024] Figure 2 It is a front view of a compatible vertical wafer dryer rotor;
[0025] Figure 3 is a top view of a compatible vertical wafer spin dryer rotor;
[0026] Figure 4 The invention is a schematic diagram of the exploded structure of a large-sized rotor, a large-sized wafer box, a small-sized rotor and a small-sized wafer box in a compatible vertical wafer spin dryer rotor.
[0027] Explanation of the reference numerals: 1. large-size rotor; 11. outer plate; 111. placement opening; 112. latch; 12. inner plate; 121. rotating shaft; 13. rod body; 2. small-size clamp; 21. annular plate; 211. through hole; 22. connecting rod; 23. L-shaped plate; 231. strip through hole; 3. latch strip; 4. large-size wafer box; 5. small-size wafer box; 6. wafer box fixing groove. DETAILED DESCRIPTION
[0028] The following is combined with Figure 1-4 This application is described in further detail.
[0029] The embodiment of the present application discloses a compatible vertical wafer dryer rotor.
[0030] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 A compatible vertical wafer drying machine rotor includes a large-sized rotor 1 and a small-sized fixture 2 installed in the large-sized rotor 1. A gap is provided between the large-sized rotor 1 and the small-sized fixture 2, and the four vertex corners of the small-sized fixture 2 are connected to the large-sized rotor 1 through a clamping strip 3. The large-sized rotor 1 is used to place a large-sized wafer box 4, and the small-sized fixture 2 is used to fix a small-sized wafer box 5. The large-sized wafer box 4 can be normally placed in the large-sized rotor 1. When a small-sized wafer box is needed, the small-sized fixture 2 can be placed on the basis of the original large-sized rotor 1, thereby realizing the compatible use of the large-sized wafer box 4 and the small-sized wafer box 5.
[0031] Reference Figure 1 , Figure 2 and Figure 3The large-size rotor 1 includes an outer plate 11, an inner plate 12, and a plurality of rods 13 connecting the two, wherein a placement opening 111 is provided at the center of the outer plate 11, and a rotating shaft 121 is installed at the center of the outer side of the inner plate 12. The placement opening 111 provided on the outer plate 11 of the large-size rotor 1 is used to place a large-size wafer box 4 or a small-size fixture 2, and the rotating shaft 121 installed on the outer side of the inner plate 12 is used to be connected to the wafer spin dryer to drive the large-size rotor 1 to rotate as a whole.
[0032] Reference Figure 1 , Figure 2 and Figure 3 One end of the rod body 13 is connected to the edge of the placement opening 111 of the outer plate 11, wherein a bayonet 112 is provided inside the rod body 13 at the four vertices of the placement opening 111. The bayonet 112 is a right-angle opening, and the four vertices of the small-sized fixture 2 are connected to the bayonet 112 through the clamping strip 3. The rod body 13 is arranged at the edge of the placement opening 111, and the four vertices of the placement opening 111 are provided with a right-angle bayonet 112 inside, which can effectively stabilize and reinforce the large-sized wafer box 4 or the small-sized fixture 2 placed in the placement opening 111.
[0033] Reference Figure 1 , Figure 2 and Figure 3 The small-size fixture 2 includes annular plates 21 on both sides and connecting rods 22 connecting the annular plates 21, and the connecting rods 22 connect the inner sides of the annular plates 21. The annular plates 21 on both sides of the small-size fixture 2 are connected by the connecting rods 22, and the ends of the annular plates 21 can be used to place the small-size wafer box 5.
[0034] Reference Figure 1 , Figure 2 and Figure 3 , the inner sides of the four top corners of the annular plate 21 also adopt the bayonet 112, wherein the four top corners of the annular plate 21 are connected by an L-shaped plate 23, and a plurality of strip-shaped through holes 231 are opened on the L-shaped plate 23. The bayonet 112 used at the four top corners of the annular plate 21 can adapt to the edge of the small-sized wafer box 5, and the L-shaped plates 23 at the four top corners can support it, and the strip-shaped through holes 231 opened on the L-shaped plate 23 can reduce the mass of the overall structure.
[0035] Reference Figure 1 , Figure 2 and Figure 3 A plurality of through holes 211 are provided on the top of the annular plate 21. The through holes 211 provided on the top of the annular plate 21 are used to adjust the center of mass to achieve overall balance.
[0036] Reference Figure 1 , Figure 2 and Figure 3The top of the large-sized rotor 1 and the small-sized fixture 2 are both provided with a wafer box fixing groove 6. The wafer box fixing groove 6 is convenient for fixing and limiting with the top protrusion of the large-sized wafer and the small-sized wafer box 5 to ensure the stability of both in the large-sized rotor 1 or the small-sized fixture 2.
[0037] Working principle: A small-sized clamp 2 is added to the large-sized rotor 1. This is an adapter suitable for the large-sized rotor 1. It can run wafer boxes of various sizes in the cavity of a single wafer dryer. The large-sized rotor 1 uses multiple rods 13 to achieve the balance and fixation of the corresponding wafer boxes. In order to run smaller wafer boxes, a smaller-sized clamp needs to be added. The rod 13 of the large-sized rotor 1 can also be used to fix the clamp, and the function of the clamp is to fix and balance the smaller wafer box through its own connecting rod 22.
[0038] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.
Claims
1. A compatible vertical wafer drying machine rotor, characterized in that: The invention comprises a large-sized rotor (1) and a small-sized fixture (2) installed in the large-sized rotor (1); a gap is provided between the large-sized rotor (1) and the small-sized fixture (2); and the four top corners of the small-sized fixture (2) are connected to the large-sized rotor (1) via clamping strips (3); the large-sized rotor (1) is used to place a large-sized wafer box (4), and the small-sized fixture (2) is used to fix a small-sized wafer box (5).
2. A compatible vertical wafer drying machine rotor according to claim 1, characterized in that: The large-size rotor (1) comprises an outer plate (11), an inner plate (12) and a plurality of rods (13) connecting the two, wherein a placement opening (111) is provided at the center of the outer plate (11), and a rotating shaft (121) is installed at the center of the outer side of the inner plate (12).
3. A compatible vertical wafer drying machine rotor according to claim 2, characterized in that: One end of the rod body (13) is connected to the edge of the placement opening (111) of the outer plate (11), wherein snap-on openings (112) are provided inside the rod body (13) at the four top corners of the placement opening (111).
4. A compatible vertical wafer drying machine rotor according to claim 3, characterized in that: The bayonet (112) is a right-angle opening, and the four top corners of the small-sized clamp (2) are connected to the bayonet (112) via clamping strips (3).
5. A compatible vertical wafer drying machine rotor according to claim 1, characterized in that: The small-size clamp (2) comprises annular plates (21) on both sides and connecting rods (22) connecting the annular plates (21), wherein the connecting rods (22) are connected to the inner sides of the annular plates (21).
6. A compatible vertical wafer drying machine rotor according to claim 5, characterized in that: The inner sides of the four top corners of the annular plate (21) also adopt bayonet (112), wherein the four top corners of the annular plate (21) are connected by an L-shaped plate (23), and a plurality of strip-shaped through holes (231) are opened on the L-shaped plate (23).
7. A compatible vertical wafer drying machine rotor according to claim 5, characterized in that: The top of the annular plate (21) is provided with a plurality of through holes (211).
8. The compatible vertical wafer drying machine rotor according to claim 1, characterized in that: The tops of the large-sized rotor (1) and the small-sized clamp (2) are both provided with wafer box fixing grooves (6).