Silicon wafer workbench and die bonder

Abstract

The utility model discloses a silicon wafer workbench, and belongs to the technical field of silicon wafer processing, the silicon wafer workbench comprises a fixed seat, a mounting seat, a rotating seat, a rotating mechanism and a lifting mechanism, the rotating seat is rotatably mounted on the mounting seat; the rotating mechanism comprises a rotating motor, a driving gear and a driven gear ring, the driven gear ring is coaxially and fixedly mounted on the peripheral surface of the rotating seat and meshed with the driving gear, and a rotating rod of the rotating seat is mounted on the mounting seat; the lifting mechanism comprises a lifting motor, lifting screw rods and a driving wheel, the lifting screw rods are rotationally mounted on the fixing seat, penetrate through the mounting seat and are in threaded fit with the mounting seat, the driving wheel is coaxially fixed to the output end of the lifting motor, and the driving wheel drives the two lifting screw rods to rotate through two transmission assemblies; the transmission assembly comprises a plurality of synchronous wheels coaxially and fixedly installed on the lifting screws and a synchronous belt arranged on the peripheral faces of the synchronous wheels in a winding mode. According to the invention, the surface mounting quality of the single silicon wafer, namely the wafer chip, mounted on the circuit board can be finally ensured.

Description

Technical Field

[0001] The invention relates to the field of silicon wafer processing, and in particular to a silicon wafer workbench and a crystal bonding machine. Background Art

[0002] A die bonder is a semiconductor packaging device, mainly used to bond chips to substrates. A die bonder usually has a silicon wafer workbench. For example, the invention patent with publication number CN116435223A discloses a die bonder workbench device. When in use, the silicon wafer, i.e., the wafer chip, is first placed on a UV film with an iron ring, and then the wafer is fixed as a whole in a film expansion fixture. The upper layer of the workbench is driven by a first drive component to move up and down to expand the wafer, i.e., increase the spacing between the wafer chips on the top of the UV film, so that a single silicon wafer, i.e., the wafer chip, can be mounted on a circuit board through a suction nozzle.

[0003] In addition, the second inner ring is usually driven to rotate by a second driving component to achieve angle adjustment of the wafer, so that there is no angle deviation after the single silicon chip, i.e., the wafer chip, is mounted on the circuit board; the first driving component and the second driving component in the related technology are usually driven by a single motor through a belt as a driving source, thereby ultimately driving the upper layer of the workbench to rise and fall or driving the wafer as a whole to rotate.

[0004] With regard to the above-mentioned related technologies, when the wafer size is large, that is, the wafer is 12 inches, it is not convenient to use a single motor and a belt as the driving source to ensure the dimensional accuracy of the final wafer after lifting and adjusting the angle, and thus it is not convenient to ultimately ensure the mounting quality of a single silicon wafer, that is, the wafer chip, to the circuit board. Utility Model Content

[0005] In order to ensure the dimensional accuracy of the final wafer after lifting and angle adjustment, and ultimately ensure the mounting quality of a single silicon wafer, i.e., a wafer chip, to a circuit board, the present application provides a silicon wafer workbench.

[0006] In a first aspect, the present application provides a silicon wafer workbench, which adopts the following technical solution:

[0007] A silicon wafer workbench comprises a fixed seat, a mounting seat, a rotating seat, a rotating mechanism and a lifting mechanism, wherein the rotating seat is rotatably mounted on the mounting seat, the rotating mechanism is used to drive the rotating seat to rotate, and the lifting mechanism is used to drive the mounting seat to rise and fall;

[0008] The lifting mechanism comprises a lifting motor, a lifting screw and a driving wheel. The lifting screw is provided with two groups and is respectively located on both sides of the radial direction of the mounting seat. Each of the lifting screws is rotatably mounted on the fixing seat and is penetrated through the fixing seat and is threadedly matched with the fixing seat. The lifting motor is fixedly mounted on the fixing seat. The driving wheel is coaxially fixed to the output end of the lifting motor. The driving wheel drives the two groups of lifting screws to rotate through two groups of transmission components. The transmission components include a plurality of synchronous wheels coaxially fixedly mounted on each lifting screw and a synchronous belt wound around the outer circumference of the synchronous wheel.

[0009] The rotating mechanism includes a rotating motor, a driving gear and a driven gear ring, the rotating motor is installed on a fixed seat, the driving gear is fixedly installed on the output end of the rotating motor, the driven gear ring is rotatably installed on the fixed seat and meshes with the driving gear, the rotating seat is fixedly connected with a sliding rod, the sliding rod is vertically penetrated through the driven gear ring and slidingly cooperates with the driven gear ring.

[0010] By adopting the above technical solution, when in use, the synchronous rotation of each lifting screw driven by the lifting motor is used to realize the lifting and lowering of the mounting seat. During the lifting process of the mounting seat, the rotating seat is lifted and lowered together. The provision of two sets of synchronous wheels and synchronous belts is conducive to further ensuring the synchronous stability of each lifting screw during rotation, thereby ultimately ensuring the dimensional accuracy of the wafer after the lifting movement during the overall film expansion. In addition, when the driving gear is driven by the rotating motor to rotate, the driven gear ring drives the rotating seat to rotate together through the cooperation of the sliding rod. The meshing action between the driven gear ring and the driving gear is conducive to ensuring the synchronous stability of the driven gear ring during rotation, thereby ultimately ensuring the dimensional accuracy of the wafer after the angle adjustment, thereby ultimately ensuring the mounting quality of a single silicon wafer, i.e., a wafer chip, to a circuit board.

[0011] Optionally, the mounting seat is rotatably mounted with a plurality of rollers that are evenly distributed circumferentially around its own axis, and a rolling groove is provided on the outer circumferential surface of the rotating seat, and each of the rollers rolls and fits in the rolling groove.

[0012] By adopting the above technical solution, the rolling cooperation between each roller and the rolling groove reduces the friction between the rotating seat and the mounting seat when the rotating seat rotates, thereby facilitating the rotation of the rotating seat and making it less likely to cause wear due to friction with the mounting seat when the rotating seat rotates.

[0013] Optionally, a receiving groove is provided at the bottom of the fixed seat, and the driven gear ring includes a gear ring part, a bottom ring part and a top ring part. The gear ring part is coaxially fixed on the outer peripheral surface of the bottom ring part and is located in the receiving groove. The top ring part is fixed to the top of the bottom ring part by bolts. The thickness of the top ring part is smaller than the thickness of the bottom ring part, and the sliding rod is slidably fitted in the bottom ring part.

[0014] By adopting the above technical scheme, the setting of the storage groove is convenient for reducing the space volume occupied by the overall structure and improving the rationality of the layout; the setting of the top ring part and the bottom ring part is convenient for separately realizing the production and processing of the driven gear ring rotating part and the top membrane part, which is beneficial to reduce the processing cost. At the same time, it is also convenient to replace the top ring parts of different heights according to the different stretching requirements of the wafer, and it has strong applicability.

[0015] Optionally, the two groups of transmission assemblies are respectively set as a first transmission assembly and a second transmission assembly, the first transmission assembly includes a first synchronous wheel, a first synchronous belt and a first pressing wheel, a plurality of first synchronous wheels are provided in one-to-one correspondence with one group of lifting screws and are respectively coaxially fixedly connected to each lifting screw, the first synchronous belt is sequentially wound around the outer circumference of each first synchronous wheel and the driving wheel, and the first pressing wheel is installed on a fixed seat and pressed against the first synchronous belt;

[0016] The second transmission assembly includes a driven wheel, a driving shaft, a driving wheel, a second synchronous wheel, a second synchronous belt and a second pressure wheel. The driving shaft is rotatably mounted on a fixed seat. The driven wheel and the driving wheel are both coaxially fixedly mounted on the driving shaft and distributed in a vertical direction. A driving belt is wound around the driving wheel and the driven wheel. A plurality of second synchronous wheels are arranged one by one corresponding to another group of lifting screws and are coaxially fixedly connected to each lifting screw. The second synchronous belt is sequentially wound around the outer circumference of each second synchronous wheel and the driving wheel. The second pressure wheel is mounted on a fixed seat and pressed against the second synchronous belt.

[0017] By adopting the above technical solution, when the lifting motor drives its own output end to rotate, the driving wheel drives the first synchronous wheels to rotate synchronously through the first synchronous belt. At the same time, the driving shaft rotates together through the cooperation of the driving belt and the driven wheel, and drives the second synchronous wheels to rotate synchronously through the second synchronous belt, thereby realizing the synchronous rotation of the two groups of lifting screws. The pressing and tensioning effect of the first pressure wheel and the second pressure wheel on the first synchronous belt and the second synchronous belt is beneficial to fully ensure the synchronous stability when the first synchronous belt and the second synchronous belt drive each lifting screw to rotate.

[0018] Optionally, the first pressure wheel has two first limiting rings, and the first synchronous belt is located between the two first limiting rings; the second pressure wheel has two second limiting rings, and the second synchronous belt is located between the two second limiting rings.

[0019] By adopting the above technical solution, the setting of the first limit ring and the second limit ring plays a role in limiting the position of the first synchronous belt and the second synchronous belt when they drive the first synchronous wheels and the second synchronous wheels to transmit, which is beneficial to ensure the stability of the first synchronous wheels and the second synchronous wheels when they drive the lifting screws to rotate.

[0020] Optionally, the fixed seat is provided with a pressure mounting assembly, and a plurality of pressure mounting assemblies are provided in a one-to-one correspondence with the first pressure wheel and the second pressure wheel, and the pressure mounting assembly includes a mounting block and a mounting bearing, the mounting block is fixedly mounted on the fixed seat by bolts, the inner ring of the mounting bearing is fixedly mounted on the mounting block, and the first pressure wheel and the second pressure wheel are coaxially mounted on the outer rings of each mounting bearing.

[0021] By adopting the above technical solution, the first pressure wheel and the second pressure wheel are respectively rotatably installed on the mounting block through the respective mounting bearings, so that the friction between the first pressure belt and the second pressure belt and the first pressure wheel and the second pressure wheel is rolling friction, and the friction force is relatively low, so that the first pressure belt and the second pressure belt are not prone to wear caused by repeated friction.

[0022] Optionally, the first pressure wheel has the same structure as the second pressure wheel, a receiving groove is provided on one side of the first pressure wheel, a positioning groove is provided on the groove wall of the receiving groove, an elastic retaining ring is snap-fitted in the positioning groove, and the mounting bearing is located between the elastic retaining ring and the groove wall of the receiving groove away from its own groove opening.

[0023] By adopting the above technical solution, the first pressure wheel can be removed from the mounting block by removing the mounting block from the fixing seat and removing the elastic clamping ring from the clamping groove, thereby facilitating the disassembly, assembly and maintenance of the first pressure wheel and ensuring the use effect of the first pressure wheel.

[0024] Optionally, the mounting block includes an axial core portion, a rotating portion, a connecting portion and an adjusting portion, the rotating portion is rotatably mounted on a fixed seat, the axial core portion is fixedly mounted on the top of the rotating portion and is eccentrically arranged with the rotating portion, the inner ring of the mounting bearing is fixedly arranged on the axial core portion, the connecting portion is coaxially fixedly mounted on the bottom of the rotating portion, the cross-sectional size of the connecting portion is smaller than the cross-sectional size of the rotating portion, one end of the connecting portion is passed through the fixed seat and fixedly connected to the adjusting portion by bolts, and the adjusting portion is tightly fixed to the fixed seat by adjusting bolts.

[0025] By adopting the above technical solution, when the adjusting part rotates, the connecting part drives the rotating part and the shaft core part to rotate together, so that the first pressure wheel or the second pressure wheel fixed to the shaft core part by installing the bearing can be slightly adjusted in the horizontal direction, so as to facilitate the rapid adjustment of the tension of the first synchronous belt or the second synchronous belt when the first synchronous belt or the second synchronous belt is loose, which is beneficial to ultimately ensure the stability of each lifting screw during synchronous operation and extend the service life of the first synchronous belt or the second synchronous belt.

[0026] Optionally, a plurality of adjusting bolts are evenly distributed circumferentially around the axis of the adjusting portion, and an outer peripheral surface of the adjusting portion is provided with anti-slip patterns.

[0027] By adopting the above technical solution, the provision of multiple adjustment bolts is conducive to fully ensuring the stability of the position after the adjustment part drives the first pressure wheel or the second pressure wheel to finally rotate, and the provision of anti-slip patterns facilitates the operator to rotate the mounting block.

[0028] In the second aspect, the present application provides a crystal bonding machine, which adopts the following technical solution: it includes a silicon wafer workbench as described above, and also includes an x-axis linear module and a y-axis linear module, the y-axis linear module is installed on the slider of the x-axis linear module, and the fixed seat is installed on the slider of the y-axis linear module.

[0029] By adopting the above technical solution, when the x-axis linear module and the y-axis linear module drive their own sliders to move, the overall direction of the silicon wafer worktable can be moved, which is beneficial to the final assembly of the wafer in different positions. It has strong applicability, and the x-axis linear module and the y-axis linear module are beneficial to ensure the stability and accuracy of the overall movement of the worktable.

[0030] In summary, the present application includes at least one of the following beneficial technical effects:

[0031] 1. The setting of two sets of synchronous wheels and synchronous belts is conducive to further ensuring the synchronous stability of each lifting screw during rotation, and then to ultimately ensuring the dimensional accuracy of the wafer after lifting during the overall film expansion. At the same time, the meshing action between the driven gear ring and the driving gear is conducive to ensuring the synchronous stability of the driven gear ring during rotation, and ultimately ensuring the dimensional accuracy of the wafer after the angle adjustment, which is conducive to ultimately ensuring the mounting quality of a single silicon wafer, i.e., a wafer chip, to a circuit board.

[0032] 2. When the lifting screw drives the mounting seat and the rotating seat to perform lifting motion and the driven gear ring moves vertically together, the driven gear ring is always meshed with the driving gear, which is conducive to fully ensuring the stability of the rotating seat when it is lifted and rotated.

[0033] 3. When the adjusting part rotates, the connecting part drives the rotating part and the shaft core part to rotate together, so that the first pressure wheel or the second pressure wheel fixed to the shaft core part by installing the bearing can be slightly adjusted in the horizontal direction, so as to facilitate the rapid adjustment of the tension of the first synchronous belt or the second synchronous belt when the first synchronous belt or the second synchronous belt is loose, which is beneficial to ultimately ensure the stability of the synchronous operation of each lifting screw and extend the service life of the first synchronous belt or the second synchronous belt. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application.

[0035] Figure 2 It is an exploded schematic diagram of the rotating seat and the mounting seat in the embodiment of the present application.

[0036] Figure 3 yes Figure 2 A partial enlarged schematic diagram of part A.

[0037] Figure 4 It is a schematic diagram of the main structure of the driven gear ring in the embodiment of the present application.

[0038] Figure 5 It is a schematic diagram of the structure of the transmission assembly in the embodiment of the present application.

[0039] Figure 6 It is a partial cross-sectional schematic diagram of the transmission assembly in the embodiment of the present application.

[0040] Figure 7 yes Figure 6 A partial enlarged schematic diagram of part B.

[0041] Description of reference numerals:

[0042] 1. Fixed seat; 101. First fixed plate; 102. Connecting seat; 103. Second fixed plate; 104. Fixed ring; 2. Mounting seat; 201. Mounting plate; 202. Mounting ring; 3. Rotating seat; 301. Rotating ring; 302. Driving ring; 303. Mounting part; 4. Rotating motor; 5. Driving gear; 6. Driven gear ring; 601. Gear ring part; 602. Bottom ring part; 603. Top ring part; 7. Strip groove; 8. Strip block; 9. Storage groove; 10. Roller; 11. Rolling groove; 12. Lifting motor; 13. Lifting screw; 14. Driving wheel; 15. Horizontal plate; 16. Long strip groove; 17. Long strip block ; 18. First synchronous wheel; 19. First synchronous belt; 20. First pressure wheel; 21. Mounting block; 211. Shaft core; 212. Rotating portion; 213. Connecting portion; 214. Adjusting portion; 22. Mounting bearing; 23. Accommodating groove; 24. Positioning groove; 25. Elastic retaining ring; 26. First limiting ring; 27. Driven wheel; 28. Driving shaft; 29. ​​Driving wheel; 30. Second synchronous wheel; 31. Second synchronous belt; 32. Second pressure wheel; 33. Driving belt; 34. Second limiting ring; 35. Partition plate; 36. Adjusting bolt; 37. X-axis linear module; 38. Y-axis linear module; 39. Sliding rod. DETAILED DESCRIPTION

[0043] The following is combined with Figure 1-6 This application is described in further detail.

[0044] The embodiment of the present application discloses a silicon wafer workbench.

[0045] Reference Figure 1The silicon wafer workbench includes a fixed seat 1, a mounting seat 2, a rotating seat 3, a rotating mechanism and a lifting mechanism, wherein the rotating seat 3 is rotatably mounted on the mounting seat 2, the rotating mechanism is used to drive the rotating seat 3 to rotate around its own axis, and the lifting mechanism is used to drive the mounting seat 2 to be lifted and lowered in the vertical direction.

[0046] Reference Figure 1 and Figure 2 The rotating mechanism includes a rotating motor 4, a driving gear 5 and a driven gear ring 6, wherein the fixed seat 1 includes a first fixed plate 101, a connecting seat 102, a second fixed plate 103 and a fixing ring 104, the connecting seats 102 are rectangularly distributed and have four components and are fixedly mounted on the top of the first fixed plate 101 by bolts, the second fixed plates 103 are fixedly mounted on the top of each connecting seat 102 by bolts, the fixing ring 104 is fixedly mounted on the top of the second fixed plate 103 by bolts, and the rotating motor 4 is vertically mounted on the bottom of the second fixed plate 103.

[0047] Reference Figure 2 and Figure 3 Specifically, the second fixing plate 103 is provided with two strip grooves 7 that penetrate and extend in the horizontal direction. The top of the second fixing plate 103 is provided with two strip blocks 8 that are respectively arranged corresponding to the positions of the two strip grooves 7. The rotating motor 4 is fixed to the second fixing plate 103 by two groups of bolts that are respectively penetrated through the two strip grooves 7 and the two strip blocks 8. Each group of bolts for fixing the rotating motor 4 is provided with two, so that the installation position of the rotating motor 4 can be fine-tuned along the length direction of the strip groove 7. The provision of the strip block 8 makes the force uniform when the rotating motor 4 is fixed, so that the bolts for fixing the rotating motor 4 are not prone to wear of the second fixing plate 103 due to excessive pressure against the second fixing plate 103. The driving gear 5 is coaxially fixedly installed at the output end of the rotating motor 4 and is located at the top of the second fixing plate 103. When the strip block 8 moves along the extension direction of the strip groove 7, the driving gear 5 moves in the direction close to or away from the rotating seat 3.

[0048] Reference Figure 1 and Figure 2 The rotating seat 3 includes a rotating ring 301, a connecting block 302 and a mounting portion 303. The rotating ring 301 is rotatably mounted on the mounting seat 2. Two connecting blocks 302 are provided and are fixedly mounted on the top of the rotating ring 301 by bolts. Two mounting portions 303 are provided corresponding to the connecting blocks 302 and are fixedly mounted on the tops of the two connecting blocks 302 respectively. The two mounting portions 303 are arranged in an arc shape coaxial with the driving ring 302.

[0049] Reference Figure 2 and Figure 4, the driven gear ring 6 includes a gear ring portion 601, a bottom ring portion 602 and a top ring portion 603. A receiving groove 9 is provided at the bottom of the fixed ring 104. The gear ring portion 601 is coaxially and integrally fixedly sleeved on the outer peripheral surface of the bottom ring portion 602 and is located in the receiving groove 9. The gear ring portion 601 is meshed with the driving gear 5, and the bottom ring portion 602 is rotatably matched with the fixed ring 104 through a bearing. The top ring portion 603 is fixedly installed on the top of the bottom ring portion 602 by bolts. The inner diameter of the top ring portion 603 is the same as that of the bottom ring portion 602, and the thickness of the top ring portion 603 is less than that of the bottom ring portion 602. A vertically arranged sliding rod 39 is fixedly installed on the top of the rotating ring 301 by bolts. In the embodiment of the present application, three sliding rods 39 are evenly distributed around the axis of the rotating ring 301. Each sliding rod 39 is vertically penetrated through the bottom ring portion 602 and slides with the bottom ring portion 602.

[0050] When the rotating motor 4 drives the driving gear 5 to rotate, the driven gear ring 6 drives the entire rotating base 3 to rotate synchronously through the sliding rod 39. When the silicon wafer, i.e., the wafer chip, is placed on the UV film with the iron ring and installed on the mounting part 303, and the mounting part 303 moves in the vertical direction, the top ring part 603 finally realizes the film expansion processing of the wafer.

[0051] Reference Figure 2 and Figure 3 The mounting seat 2 includes two mounting plates 201 and a mounting ring 202. The two mounting plates 201 are respectively arranged near the two groups of connecting seats 102. The mounting ring 202 is fixedly installed on the top of the two mounting plates 201. The rotating ring 301 is rotatably installed on the fixed ring 104. Specifically, the mounting ring 202 is rotatably installed with a plurality of rollers 10 uniformly distributed circumferentially around its own axis. The outer peripheral surface of the rotating ring 301 is provided with a circle of rolling grooves 11 in a closed shape. Each roller 10 is rollingly fitted in the rolling groove 11, so that the friction between the rotating ring 301 and the fixed ring 104 is rolling friction, thereby facilitating the rotation of the rotating ring 301 and making it less likely for the rotating ring 301 to be worn due to friction with the mounting seat 2 when rotating.

[0052] Reference Figure 1 and Figure 2 The lifting mechanism includes a lifting motor 12, a lifting screw 13 and a driving wheel 14, wherein the lifting screws 13 are provided in two groups and are respectively located on both sides of the radial direction of the mounting seat 2, each group of lifting screws 13 is provided with two, and the two lifting screws 13 of each group are respectively penetrated in the two mounting plates 201 along the vertical direction and are threadedly matched with the two mounting plates 201, so that when each lifting screw 13 rotates, the two mounting plates 201 drive the mounting ring 202 to move in the vertical direction.

[0053] Reference Figure 2, wherein the lifting motor 12 is vertically installed at the bottom of the first fixed plate 101. Specifically, the first fixed plate 101 is fixed with a horizontal plate 15 by bolts. The horizontal plate 15 is roughly rectangular. In the embodiment of the present application, the width direction of the horizontal plate 15 is the x-axis direction, and the length direction is the y-axis direction. The horizontal plate 15 is located on one side of the x-axis direction of the first fixed plate 101 and extends along the y-axis direction.

[0054] Reference Figure 2 and Figure 5 The horizontal plate 15 is provided with two long grooves 16 which penetrate through and extend along the y-axis direction. Two long blocks 17 which are respectively arranged corresponding to the positions of the two long grooves 16 are arranged on the top of the horizontal plate 15. The connection method between the lifting motor 12 and the horizontal plate 15 and the long blocks 17 is the same as the connection method between the rotating motor 4 and the second fixed plate 103 and the strip block 8, and the effect is the same, so it is not repeated here. The driving wheel 14 is coaxially fixedly connected to the output end of the lifting motor 12 and is located at the top of the horizontal plate 15. When the long block 17 moves along the extension direction of the long groove 16, that is, the y-axis direction, the y-axis direction of the lifting motor 12 and the driving wheel 14 are fine-tuned.

[0055] Continue to refer to Figure 2 and Figure 5 The driving wheel 14 drives the two groups of lifting screws 13 to rotate respectively through two groups of transmission components. The two groups of transmission components are respectively set as the first transmission component and the second transmission component, wherein the first transmission component includes a first synchronous wheel 18, a first synchronous belt 19 and a first pressure wheel 20. The first synchronous wheel 18 is correspondingly provided with two lifting screws 13 of one group and is coaxially fixedly connected to the two lifting screws 13 of the group. The first synchronous belt 19 is sequentially wound around the outer circumference of each first synchronous wheel 18 and the driving wheel 14. The first synchronous wheel 18 and the first synchronous belt 19 are selected as toothed synchronous belt wheels in the embodiment of the present application. When the driving wheel 14 rotates, the first synchronous belt 19 drives the two first synchronous wheels 18 and the two lifting screws 13 of one group to rotate synchronously.

[0056] Reference Figure 5 There are two first pressure wheels 20 located on both sides of the first synchronous belt 19. The first pressure wheels 20 are installed on the first fixed plate 101 through a pressure installation assembly. The two first pressure wheels 20 are pressed against the first synchronous belt 19 from the outside of the first synchronous belt 19 toward each other to further ensure the stability of the first synchronous belt 19 during operation.

[0057] Continue to refer to Figure 5Specifically, the pressure mounting assembly includes a mounting block 21 and a mounting bearing 22. The mounting block 21 is mounted on the top of the first fixed plate 101. The inner ring of the mounting bearing 22 is fixedly mounted on the mounting block 21. A receiving groove 23 is provided at the end of the first pressure wheel 20. The side groove wall of the receiving groove 23 is provided with a circle of clamping grooves 24 in a closed shape. An elastic snap ring 25 is snap-fitted in the clamping groove 24. The outer ring of the mounting bearing 22 is fixed between the elastic snap ring 25 and the groove wall of the receiving groove 23 away from its own groove, so as to facilitate the disassembly and assembly of the mounting bearing 22. At the same time, the setting of the mounting bearing 22 makes the friction between the first pressure wheel 20 and the first synchronous belt 19 rolling friction, so that the first synchronous belt 19 is not prone to wear caused by repeated friction with the first pressure wheel 20, which is beneficial to prolonging the service life of the first synchronous belt 19.

[0058] Reference Figure 6 and Figure 7 Furthermore, the mounting block 21 includes an axial core portion 211, a rotating portion 212, a connecting portion 213 and an adjusting portion 214, wherein the rotating portion 212 is in the shape of a circular plate and is rotatably mounted on the first fixed plate 101, the axial core portion 211 is fixedly mounted on the top of the rotating portion 212 and is eccentrically arranged with respect to the rotating portion 212, the axial core portion 211 is in the shape of a cylinder, and the inner ring of the mounting bearing 22 is fixedly arranged on the axial core portion 211.

[0059] Continue to refer to Figure 6 and Figure 7 The connecting portion 213 is coaxially fixedly installed at the bottom of the rotating portion 212. The cross-sectional dimension of the connecting portion 213 is smaller than the cross-sectional dimension of the rotating portion 212. One end of the connecting portion 213 is passed through the bottom of the first fixed plate 101 and is fixedly connected to the adjusting portion 214 by bolts. The adjusting portion 214 is in the shape of a circular plate, and is threaded with an adjusting bolt 36. The adjusting bolt 36 is pressed against the bottom of the first fixed plate 101 to fix the position of the adjusting plate. The adjusting bolt 36 fixed by the bottom facilitates the installation block 21 to be installed at different positions of the first fixed plate 101, and has strong applicability. In order to fully ensure the stability of the position of the adjusting portion 214, a plurality of adjusting bolts 36 are evenly distributed around the axis of the adjusting portion 214. The outer peripheral surface of the adjusting portion 214 is provided with anti-slip patterns to facilitate the operator to apply force to rotate the adjusting portion 214.

[0060] Reference Figure 5 and Figure 7When the adjusting portion 214 rotates, the connecting portion 213 drives the rotating portion 212 and the shaft core portion 211 to rotate together. Due to the eccentric setting of the shaft core portion 211, the first pressure wheel 20 or the second pressure wheel 32 fixed to the shaft core portion 211 by installing the bearing 22 can be slightly adjusted in the horizontal direction, so as to facilitate the rapid adjustment of the tension of the first synchronous belt 19 or the second synchronous belt 31 when the first synchronous belt 19 or the second synchronous belt 31 is relaxed, which is beneficial to ultimately ensure the stability of the synchronous operation of each lifting screw 13 and extend the service life of the first synchronous belt 19 or the second synchronous belt 31.

[0061] Reference Figure 5 The outer circumferential surface of the first pressure wheel 20 is smooth, and the outer circumferential surface of the first pressure wheel 20 has two first limiting rings 26, which are respectively arranged at the two ends of the first limiting rings 26, and the first synchronous belt 19 is located between the two first limiting rings 26. The two first limiting rings 26 play a further limiting role in the operation of the first synchronous belt 19, which is beneficial to further ensure the stability of the first synchronous belt 19 during operation.

[0062] Continue to refer to Figure 5 The second transmission assembly includes a driven wheel 27, a driving shaft 28, a driving wheel 29, a second synchronous wheel 30, a second synchronous belt 31 and a second pressure wheel 32, wherein the driving shaft 28 is vertically rotatably installed on the top of the horizontal plate 15, the driving wheel 14 and the driving shaft 28 are distributed along the y-axis direction and symmetrically distributed about the midline of the length direction of the first fixed plate 101, the driven wheel 27 and the driving wheel 29 are coaxially fixedly installed on the driving shaft 28 and distributed from top to bottom in the vertical direction, a driving belt 33 is wound between the driving wheel 14 and the driven wheel 27, and the driving belt 33 and the first synchronous belt 19 are distributed from top to bottom in the vertical direction, and when the lifting motor 12 drives the driving wheel 14 to rotate, the driving wheel 14 drives the driven wheel 27, the driving shaft 28 and the driving wheel 29 to rotate stably and synchronously.

[0063] Reference Figure 2 and Figure 5 The second synchronous wheel 30 is provided with two corresponding lifting screws 13 of another group and is coaxially fixedly connected to the two lifting screws 13 of the group. The second synchronous belt 31 is sequentially wound around the outer circumference of each second synchronous wheel 30 and the driving wheel 29. The driven wheel 27 and the driving belt 33, the second synchronous wheel 30 and the second synchronous belt 31 are all selected as toothed synchronous belt wheels in the embodiment of the present application. When the driving wheel 29 rotates, the second synchronous belt 31 drives the two second synchronous wheels 30 and the two lifting screws 13 of another group to rotate synchronously.

[0064] Reference Figure 5 and Figure 6Two second pressing wheels 32 are provided and located on both sides of the second synchronous belt 31. The second pressing wheels 32 are also installed on the first fixed plate 101 through the pressing installation assembly. The two second pressing wheels 32 are pressed against the second synchronous belt 31 from the outside of the second synchronous belt 31 in the direction of approaching each other, so as to further ensure the stability of the second synchronous belt 31 during operation. The specific distribution mode of the second pressing wheels 32 and the second synchronous belt 31 is symmetrical with the specific distribution mode of the first pressing wheels 20 and the first synchronous belt 19 about the midline of the length direction of the first fixed plate 101, so as to fully ensure the stability of the two groups of lifting screws 13 during synchronous operation.

[0065] Reference Figure 5 The outer circumference of the second pressure wheel 32 is smooth, and the outer circumference of the second pressure wheel 32 has two second limiting rings 34, the two second limiting rings 34 are respectively arranged at the two ends of the second limiting rings 34, and the second synchronous belt 31 is located between the two second limiting rings 34. The two second limiting rings 34 play a further limiting role in the operation of the second synchronous belt 31, which is beneficial to further ensure the stability of the second synchronous belt 31 during operation.

[0066] Reference Figure 1 and Figure 2 A partition plate 35 is provided between two adjacent connecting seats 102 along the x-axis direction. Two sections of the partition plate 35 in the length direction are fixedly installed on the two connecting seats 102 by bolts. Two sets of lifting screws 13 are respectively passed through the two partition plates 35 and rotate with the two partition plates 35. The two first synchronous wheels 18 and the two second synchronous wheels 30 are respectively located at the bottom of the two partition plates 35, and the two mounting plates 201 are respectively located at the top of the two partition plates 35. The setting of the partition plate 35 is beneficial to further ensure the stability of the lifting screw 13 during rotation, and on the other hand, the movement of the mounting plate 201 in the vertical direction is limited, which is beneficial to ensure the stability of the mounting plate 201 when it moves in the vertical direction.

[0067] The implementation principle of the embodiment of the present application is: the lifting motor 12 drives the synchronous rotation of each lifting screw 13 to finally realize the lifting and lowering of the mounting seat 2 and the rotating seat 3. The setting of two sets of synchronous wheels and synchronous belts is conducive to fully ensuring the synchronous stability of each lifting screw 13 during rotation, and then it is convenient to finally ensure the dimensional accuracy of the wafer after lifting during the overall film expansion. At the same time, when the rotating motor 4 drives the driving gear 5 to rotate, the driven gear ring 6 drives the rotating seat 3 to rotate as a whole. The meshing action between the driven gear ring 6 and the driving gear 5 is conducive to ensuring the synchronous stability of the driven gear ring 6 during rotation, and then it is convenient to finally ensure the dimensional accuracy of the wafer after the angle adjustment, which is conducive to finally ensuring the mounting quality of a single silicon wafer, i.e., a wafer chip, to a circuit board.

[0068] The present application also discloses a die bonding machine. Figure 1The crystal bonding machine includes the silicon wafer workbench in Example 1 or Example 2, and also includes an x-axis linear module 37 and a y-axis linear module 38. The y-axis linear module 38 is installed on the slider of the x-axis linear module 37, and the first fixed plate 101 is installed on the slider of the y-axis linear module 38. When the x-axis linear module 37 and the y-axis linear module 38 drive their own sliders to move, the movement of the overall direction of the silicon wafer workbench is realized, which is beneficial to the final assembly of the wafer at different positions. The applicability is strong, and the x-axis linear module 37 and the y-axis linear module 38 are beneficial to ensure the stability and accuracy of the overall movement of the workbench.

[0069] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A silicon wafer workbench, characterized in that: It comprises a fixed seat (1), a mounting seat (2), a rotating seat (3), a rotating mechanism and a lifting mechanism, wherein the rotating seat (3) is rotatably mounted on the mounting seat (2), the rotating mechanism is used to drive the rotating seat (3) to rotate, and the lifting mechanism is used to drive the mounting seat (2) to rise and fall; The lifting mechanism comprises a lifting motor (12), a lifting screw (13) and a driving wheel (14); the lifting screw (13) is provided with two groups and is respectively located on both sides of the mounting seat (2) in the radial direction; each of the lifting screws (13) is rotatably mounted on the fixing seat (1) and is penetrated through the fixing seat (2) and threadedly matched with the fixing seat (2); the lifting motor (12) is fixedly mounted on the fixing seat (1); the driving wheel (14) is coaxially fixed to the output end of the lifting motor (12); the driving wheel (14) drives the two groups of lifting screws (13) to rotate through two groups of transmission components; the transmission components include a plurality of synchronous wheels respectively coaxially fixedly mounted on each lifting screw (13) and a synchronous belt wound around the outer circumference of the synchronous wheel; The rotating mechanism comprises a rotating motor (4), a driving gear (5) and a driven gear ring (6); the rotating motor (4) is mounted on a fixed seat (1); the driving gear (5) is fixedly mounted on the output end of the rotating motor (4); the driven gear ring (6) is rotatably mounted on the fixed seat (1) and meshes with the driving gear (5); the rotating seat (3) is fixedly connected with a sliding rod (39); the sliding rod is vertically penetrated through the driven gear ring (6) and is slidably matched with the driven gear ring (6).

2. A silicon wafer workbench according to claim 1, characterized in that: The mounting seat (2) is rotatably mounted with a plurality of rollers (10) uniformly distributed circumferentially around its own axis, and a rolling groove (11) is provided on the outer circumference of the rotating seat (3), and each of the rollers (10) is rollingly fitted in the rolling groove (11).

3. The silicon wafer workbench according to claim 1, characterized in that: The bottom of the fixed seat (1) is provided with a receiving groove (9); the driven gear ring (6) comprises a gear ring portion (601), a bottom ring portion (602) and a top ring portion (603); the gear ring portion (601) is coaxially fixedly sleeved on the outer peripheral surface of the bottom ring portion (602) and is located in the receiving groove (9); the top ring portion (603) is fixedly mounted on the top of the bottom ring portion (602) by bolts; the thickness of the top ring portion (603) is smaller than the thickness of the bottom ring portion (602); and the sliding rod (39) is slidingly matched with the bottom ring portion (602).

4. The silicon wafer workbench according to claim 1, characterized in that: The two groups of transmission components are respectively set as a first transmission component and a second transmission component, the first transmission component comprises a first synchronous wheel (18), a first synchronous belt (19) and a first pressing wheel (20), a plurality of the first synchronous wheels (18) are arranged one by one corresponding to one group of the lifting screw rods (13) and are respectively coaxially fixedly connected to each lifting screw rod (13), the first synchronous belt (19) is sequentially wound around the outer circumference of each first synchronous wheel (18) and the driving wheel (14), and the first pressing wheel (20) is installed on the fixed seat (1) and pressed against the first synchronous belt (19); The second transmission assembly comprises a driven wheel (27), a driving shaft (28), a driving wheel (29), a second synchronous wheel (30), a second synchronous belt (31) and a second pressing wheel (32); the driving shaft (28) is rotatably mounted on a fixed seat (1); the driven wheel (27) and the driving wheel (29) are both coaxially fixedly mounted on the driving shaft (28) and distributed in a vertical direction; a driving belt (33) is wound between the driving wheel (14) and the driven wheel (27); a plurality of second synchronous wheels (30) are arranged one by one corresponding to another group of lifting screws (13) and are coaxially fixedly connected to each lifting screw (13); the second synchronous belt (31) is sequentially wound around the outer circumference of each second synchronous wheel (30) and the driving wheel (29); and the second pressing wheel (32) is mounted on the fixed seat (1) and pressed against the second synchronous belt (31).

5. A silicon wafer workbench according to claim 4, characterized in that: The first pressing wheel (20) has two first limiting rings (26), and the first synchronous belt (19) is located between the two first limiting rings (26); The second pressing wheel (32) has two second limiting rings (34), and the second synchronous belt (31) is located between the two second limiting rings (34).

6. A silicon wafer workbench according to claim 4, characterized in that: The fixed seat (1) is provided with a pressing installation assembly, and a plurality of pressing installation assemblies are provided in a one-to-one correspondence with the first pressing wheel (20) and the second pressing wheel (32). The pressing installation assembly comprises a mounting block (21) and a mounting bearing (22). The mounting block (21) is fixedly mounted on the fixed seat (1) by bolts, and the inner ring of the mounting bearing (22) is fixedly mounted on the mounting block (21). The first pressing wheel (20) and the second pressing wheel (32) are respectively coaxially mounted on the outer ring of each mounting bearing (22).

7. A silicon wafer workbench according to claim 6, characterized in that: The first pressing wheel (20) and the second pressing wheel (32) have the same structure. A receiving groove (23) is provided on one side of the first pressing wheel (20). A clamping groove (24) is provided on the groove wall of the receiving groove (23). An elastic clamping ring (25) is clamped in the clamping groove (24). The mounting bearing (22) is located between the elastic clamping ring (25) and the groove wall of the receiving groove (23) away from the groove opening thereof.

8. The silicon wafer workbench according to claim 6, characterized in that: The mounting block (21) comprises an axial core portion (211), a rotating portion (212), a connecting portion (213) and an adjusting portion (214); the rotating portion (212) is rotatably mounted on the fixed seat (1); the axial core portion (211) is fixedly mounted on the top of the rotating portion (212) and is eccentrically arranged with respect to the rotating portion (212); the inner ring of the mounting bearing (22) is fixedly arranged on the axial core portion (211); the connecting portion (213) is coaxially fixedly mounted on the bottom of the rotating portion (212); the cross-sectional dimension of the connecting portion (213) is smaller than the cross-sectional dimension of the rotating portion (212); one end of the connecting portion (213) is penetrated through the fixed seat (1) and is fixedly connected to the adjusting portion (214) by a bolt; the adjusting portion (214) is tightly fixed to the fixed seat (1) by an adjusting bolt (36).

9. A silicon wafer workbench according to claim 8, characterized in that: A plurality of adjusting bolts (36) are evenly distributed in the circumferential direction around the axis of the adjusting portion (214), and an outer circumferential surface of the adjusting portion (214) is provided with anti-slip patterns.

10. A die bonding machine, characterized in that: A silicon wafer workbench comprising any one of claims 1-9, further comprising an x-axis linear module (37) and a y-axis linear module (38), wherein the y-axis linear module (38) is mounted on a slider of the x-axis linear module (37), and the fixed seat (1) is mounted on the slider of the y-axis linear module (38).

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