Air bearing structure

Abstract

The utility model discloses an air bearing structure which comprises a rotating ring and a central inner ring, the rotating ring inclines from outside to inside to form two inclined planes a, the inclined planes a protrude inwards, the interior of the rotating ring is connected with the central inner ring through a front half ring and a rear half ring, the front half ring is arranged on one side of the central inner ring, and the surface, corresponding to the inclined planes a, of the front half ring is provided with an inclined plane b; the rear half ring is arranged on the other side of the central inner ring, an inclined plane c is arranged on the surface, corresponding to the inclined plane a, of the rear half ring, a high-pressure gas area is formed among the inclined plane a, the inclined plane b and the inclined plane c, a plurality of vent holes are formed in the inclined plane b and the inclined plane c, and vent grooves are formed in the tail ends of the vent holes; through the arrangement of the two inclined planes a of the rotating ring, the front half ring inclined plane b and the rear half ring inclined plane c are matched with the inclined planes a to form the V-shaped support, and after ventilation, an air area is formed among the inclined planes a, the inclined planes b and the inclined planes c, so that the rotating ring can be centered, and the rotating ring can bear higher radial load and axial load.

Description

Technical Field

[0001] The present application relates to the technical fields of photovoltaic industry, semiconductor industry and optical cold processing industry, and specifically to an air bearing structure. Background Art

[0002] Air bearings are also called air bearings. They are used in high-speed and high-precision applications because of their low friction resistance and high rotation accuracy. When using air bearings in different scenarios, air bearings with different loads are required. Existing air bearings can either withstand high radial loads or high axial loads, but cannot take both into account. Therefore, this application proposes an air bearing structure to solve this problem. Summary of the invention

[0003] The technical problem to be solved by the present application is to overcome the existing defects and provide an air bearing structure that can effectively solve the problems in the background technology.

[0004] To achieve the above-mentioned purpose, the present application provides the following technical solutions: an air bearing structure, comprising a rotating ring and a central inner ring, wherein the rotating ring is inclined from the outside to the inside to form two inclined surfaces a, and the inclined surface a protrudes inward. The interior of the rotating ring is connected to the central inner ring through a front half circle and a rear half circle, the front half circle is arranged on one side of the central inner ring, and a inclined surface b is arranged on the surface of the front half circle corresponding to the inclined surface a, and the rear half circle is arranged on the other side of the central inner ring, and a inclined surface c is arranged on the surface of the rear half circle corresponding to the inclined surface a, a high-pressure air zone is formed by the two inclined surfaces a and the inclined surfaces b and c, and a plurality of ventilation holes are opened on the inclined surfaces b and c, and ventilation grooves are opened at the tail ends of the ventilation holes.

[0005] Furthermore, a hexagon socket bolt is threadedly connected in the vent hole, and a center hole is provided on the hexagon socket bolt.

[0006] Furthermore, an exhaust groove is provided in the middle of the outer side of the central inner ring, an exhaust hole is provided on the inner side of the central inner ring, and the exhaust hole is connected to the exhaust groove.

[0007] Furthermore, a front limit block is arranged on the lower surface of the front half circle, and a rear limit block is arranged on the lower surface of the rear half circle. Both the front limit block and the rear limit block are provided with countersunk holes for fixing the center inner ring.

[0008] Furthermore, the end faces of the front half circle and the rear half circle are both provided with step surfaces, wherein an outer copper ring is provided on the step surface of the front half circle, and the outer side of the outer copper ring is connected to the rotating ring.

[0009] Furthermore, an annular air groove is provided on the surface of the outer copper ring in contact with the rotating ring.

[0010] Furthermore, the end surfaces of the front half circle and the rear half circle are provided with air inlet holes communicating with the ventilation grooves.

[0011] Compared with the prior art: the present application sets two inclined surfaces a of the rotating ring, and the front half circle inclined surface b and the rear half circle inclined surface c cooperate therewith to form a V-shaped support. After ventilation, an air zone is formed between the inclined surfaces a, b and c, so that the rotating ring can be centered, so that the present application can withstand higher radial loads and axial loads. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a first structural schematic diagram of the present application;

[0013] Figure 2 This is a first structural schematic diagram of the present application;

[0014] Figure 3 for Figure 1 Sectional view of AA in the middle;

[0015] Figure 4 for Figure 2 Cross-sectional view of the middle BB;

[0016] Figure 5 for Figure 4 A partial enlarged view of middle C;

[0017] Figure 6 for Figure 3 A partial enlarged view of D in the middle.

[0018] In the figure: 1 rotating ring, 2 rear half circle, 3 front half circle, 4 outer copper ring, 5 center inner ring, 6 ventilation groove, 7 exhaust groove, 8 exhaust hole, 9 hexagon socket bolt, 10 center hole, 11 ventilation hole, 12 front limit block, 13 rear limit block, 14 inclined surface a, 15 inclined surface b, 16 inclined surface c. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application (for the convenience of description and understanding, the following is Figure 3 All other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0020] See also Figure 1-6The present application provides a technical solution for an air bearing structure: an air bearing structure, comprising a rotating ring 1 and a central inner ring 5, the rotating ring 1 is tilted from the outside to the inside to form two inclined surfaces a14, the inclined surface a14 protrudes inward, the interior of the rotating ring 1 is connected to the central inner ring 5 through a front half circle 3 and a rear half circle 2, the front half circle 3 is arranged on one side of the central inner ring 5, and a inclined surface b15 is arranged on the surface of the front half circle 3 corresponding to the inclined surface a14, the rear half circle 2 is arranged on the other side of the central inner ring 5, and a inclined surface c16 is arranged on the surface of the rear half circle 2 corresponding to the inclined surface a14, a high-pressure air zone is formed between the two inclined surfaces a14 and the inclined surfaces b15 and c16, a plurality of ventilation holes 11 are opened on the inclined surfaces b15 and c16, and a ventilation groove 6 is opened at the tail end of the ventilation hole 11.

[0021] Specifically, the two inclined surfaces a14 are V-shaped, the inclined surfaces b15 and c16 are parallel to the inclined surface a14, and there is a certain gap between the inclined surfaces a14 and the inclined surfaces b15 and c16, thereby forming a high-pressure gas area after ventilation to support the rotating ring 1.

[0022] More specifically, air inlet holes communicating with the ventilation groove 6 are formed on the end surfaces of the front half circle 3 and the rear half circle 2 .

[0023] In this arrangement, compressed air is input into the ventilation groove 6 through the air inlet, and the compressed air enters into the space between the inclined surface a14, the inclined surface b15 and the inclined surface c16 through the ventilation hole 11 to form a high-pressure gas area, thereby supporting and centering the rotating ring 1. The compressed air output from the ventilation hole 11 on the front half circle 3 and the rear half circle 2 moves downward along the inclined surface a14, and moves upward along the inclined surface a14. The gas moving downward passes through the exhaust groove 7 on the outer side of the central inner ring 5 and is discharged from the exhaust hole 8, while the gas moving upward between the inclined surface a14 and the inclined surface b15 diffuses into the annular gas groove of the outer copper ring 4 to form a sealed gas groove and is then discharged, and the gas moving upward between the inclined surface a14 and the inclined surface c16 is discharged upward.

[0024] Furthermore, a hexagon socket bolt 9 is threadedly connected in the vent hole 11 , and a center hole 10 is provided in the hexagon socket bolt 9 .

[0025] Specifically, by setting the center hole 10 on the hexagon socket bolt 9, the pressure of the high-pressure gas zone between the bevel a14 and the bevel b15 and the bevel c16 can be increased. The space at both ends of the center hole 10 is small. When the compressed air passes through the center hole 10, the gas flow rate will increase significantly due to the narrower space. The high-pressure gas zone between the two bevels a14 and the bevels b15 and the bevel c16 is also a small space. After the gas flows out of the center hole 10, the flow rate will slow down and the pressure will recover to a certain extent, but it will usually still be lower than the pressure on the upstream side.

[0026] Furthermore, an exhaust groove 7 is opened in the middle of the outer side of the central inner ring 5 , an exhaust hole 8 is opened on the inner side of the central inner ring 5 , and the exhaust hole 8 is connected to the exhaust groove 7 .

[0027] Specifically, the central inner ring 5 does not contact the rotating ring 1 , and the front half circle 3 and the rear half circle 2 do not contact each other.

[0028] Furthermore, a front limit block 12 is provided on the lower surface of the front half circle 3 , and a rear limit block 13 is provided on the lower surface of the rear half circle 2 . Both the front limit block 12 and the rear limit block 13 are provided with countersunk holes for fixing the center inner ring 5 .

[0029] Specifically, the front limiting block 12 and the rear limiting block 13 are fixedly connected to the central inner ring 5 by bolts penetrating the countersunk holes, thereby fixing the central inner ring 5.

[0030] Furthermore, the end faces of the front half circle 3 and the rear half circle 2 are both provided with step surfaces, wherein an outer copper ring 4 is provided on the step surface of the front half circle 3 , and the outer side of the outer copper ring 4 is connected to the rotating ring 1 .

[0031] Specifically, when the air bearing is used for a turntable, the rear half circle 2 is arranged downward, and the front half circle 3 with the outer copper ring 4 fixed thereto is arranged upward.

[0032] Furthermore, an annular air groove is provided on the surface of the outer copper ring 4 that contacts the rotating ring 1 .

[0033] Specifically, the outer side of the outer copper ring 4 is divided into an inner ring and an outer ring by setting an annular air groove, wherein the outer ring contacts the rotating ring 1, and there is a gap between the inner ring and the rotating ring 1, so that the gas between the inclined surface a14 and the inclined surface b15 diffuses into the annular air groove to form a sealed air groove.

[0034] Furthermore, air inlet holes communicating with the ventilation groove 6 are formed on the end surfaces of the front half circle 3 and the rear half circle 2 .

[0035] Specifically, compressed air is injected into the ventilation grooves 6 of the front half circle 3 and the rear half circle 2 through the air inlet holes, and the compressed air enters the ventilation holes 11 through the ventilation grooves 6 .

[0036] During use: compressed air is input into the ventilation groove 6 through the air inlet hole, the compressed air enters the center hole 10 on the hexagon socket bolt 9 through the ventilation hole 11, and enters the inclined surface a14 and the inclined surface b15 and the inclined surface c16 through the center hole 10 to form a high-pressure gas area, thereby supporting and centering the rotating ring 1, and the gas ejected from the center hole 10 is divided into two streams, one moves downward along the inclined surface a14, and the other moves upward along the inclined surface a14. The gas moving downward passes through the exhaust groove 7 on the outside of the central inner ring 5 and is discharged from the exhaust hole 8, while the gas moving upward between the inclined surface a14 and the inclined surface b15 diffuses to the annular gas groove of the outer copper ring 4 to form a sealed gas groove and then is discharged, and the gas moving upward between the inclined surface a14 and the inclined surface c16 is discharged upward.

[0037] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. An air bearing structure, characterized in that: The invention comprises a rotating ring (1) and a central inner ring (5), wherein the rotating ring (1) is inclined from the outside to the inside to form two inclined surfaces a (14), the inclined surface a (14) protruding inwardly, the interior of the rotating ring (1) is connected to the central inner ring (5) through a front half circle (3) and a rear half circle (2), the front half circle (3) is arranged on one side of the central inner ring (5), and a surface of the front half circle (3) corresponding to the inclined surface a (14) is provided with an inclined surface b (15), the rear half circle (2) is arranged on the other side of the central inner ring (5), and a surface of the rear half circle (2) corresponding to the inclined surface a (14) is provided with an inclined surface c (16), a high-pressure gas area is formed between the two inclined surfaces a (14) and the inclined surfaces b (15) and c (16), and a plurality of ventilation holes (11) are provided on the inclined surfaces b (15) and c (16), and a ventilation groove (6) is provided at the rear end of the ventilation hole (11).

2. An air bearing structure according to claim 1, characterized in that: A hexagon socket bolt (9) is threadedly connected to the vent hole (11), and a center hole (10) is provided on the hexagon socket bolt (9).

3. An air bearing structure according to claim 1, characterized in that: An exhaust groove (7) is provided in the middle of the outer side of the central inner ring (5), an exhaust hole (8) is provided on the inner side of the central inner ring (5), and the exhaust hole (8) is connected to the exhaust groove (7).

4. The air bearing structure according to claim 1, characterized in that: The lower surface of the front half circle (3) is provided with a front limit block (12), and the lower surface of the rear half circle (2) is provided with a rear limit block (13). The front limit block (12) and the rear limit block (13) are both provided with countersunk holes for fixing the central inner ring (5).

5. An air bearing structure according to claim 4, characterized in that: The end faces of the front half ring (3) and the rear half ring (2) are both provided with step surfaces, wherein an outer copper ring (4) is provided on the step surface of the front half ring (3), and the outer side of the outer copper ring (4) is connected to the rotating ring (1).

6. An air bearing structure according to claim 5, characterized in that: An annular air groove is provided on the surface of the outer copper ring (4) that contacts the rotating ring (1).

7. The air bearing structure according to claim 1, characterized in that: The end surfaces of the front half circle (3) and the rear half circle (2) are provided with air inlet holes which are in communication with the ventilation groove (6).

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