Fluid packaging device
By clamping the parts to be processed using a jacking cylinder and a motor module in a semiconductor fluid packaging device and achieving precise dispensing through the through holes on the cover plate, the offset and fall of the parts to be processed during the dispensing process is solved. Problem, improving the dispensing effect.
Patent Information
- Application Number
- CN202420848725.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-23
- Publication Date
- 2025-01-17
- Estimated Expiration
- 2034-04-23
AI Technical Summary
During the dispensing process of the existing semiconductor fluid packaging device, the parts to be processed are prone to offset or fall off, resulting in a reduced dispensing effect.
A fluid packaging device is designed, including a base, a conveying mechanism, a dispensing part and a drive mechanism. The hoisting part and a dispensing valve are driven by a hoisting cylinder and a motor module, so that the to-be-processed part is between the conveying part and the cover plate. It is clamped and the parts to be processed are exposed through the through holes on the cover plate, which facilitates precise dispensing of the dispensing valve.
It effectively limits the displacement of the parts to be processed, improves the dispensing effect of the dispensing valve on the parts to be processed, and improves the accuracy and quality of the dispensing.
Smart Images
Figure CN222358735U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor packaging devices, in particular to a fluid packaging device. Background Art
[0002] The semiconductor manufacturing process consists of wafer manufacturing, wafer testing, packaging, testing and other procedures. The packaging of the workpiece is to protect it from the influence of the surrounding environment (including physical and chemical influences). When the current semiconductor fluid packaging device is packaging the chip, the workpiece is prone to displacement or even fall off during the dispensing process, thereby reducing the dispensing effect of the dispensing valve on the workpiece. Utility Model Content
[0003] The main purpose of the utility model is to provide a fluid packaging device, which aims to reduce the possibility of deviation of a workpiece to be processed at a dispensing position, so as to improve the dispensing effect of a dispensing valve on the workpiece to be processed.
[0004] To achieve the above-mentioned purpose, the fluid packaging device proposed by the utility model comprises:
[0005] Base;
[0006] A conveying mechanism is arranged on the base, the conveying mechanism comprises a conveying member for conveying the workpiece to be processed, a lifting member arranged below the conveying member, and a cover plate arranged on the conveying member, the conveying member is provided with a glue dispensing position, the conveying member is used to transport the workpiece to be processed, the cover plate is located at the glue dispensing position, the cover plate is provided with a through hole, and the through hole is used to expose the conveying member;
[0007] A glue dispensing component, comprising a glue dispensing valve disposed above the conveying component, the glue dispensing valve being used to dispense glue to the workpiece to be processed; and
[0008] The driving mechanism includes a lifting cylinder connected to the lifting member and a motor module connected to the dispensing valve. The lifting cylinder is used to drive the lifting member to lift the workpiece to be processed upward to the dispensing position so that the workpiece to be processed is clamped between the lifting member and the cover plate. The motor module drives the dispensing valve to move to the dispensing position so that the dispensing valve can dispense glue to the workpiece to be processed.
[0009] In one embodiment, the conveying member is used to transport the workpiece to be processed to the dispensing position in a first direction, the cover plate extends along the first direction on the conveying member, the cover plate is provided with a plurality of through holes along the first direction, two adjacent through holes are not connected, and one through hole is used to expose one of the workpieces to be processed above the conveying member.
[0010] In one embodiment, a plurality of the dispensing valves are provided, and the plurality of dispensing valves are spaced apart and distributed along the first direction, and one dispensing valve at least corresponds to one dispensing position for dispensing.
[0011] In one embodiment, the motor module includes a plurality of first motors drivingly connected to the dispensing valves, a first servo motor drivingly connected to the plurality of the first motors, and a second motor drivingly connected to the conveying member, one of the first motors is correspondingly connected to one of the dispensing valves, the first servo motor drives the plurality of the first motors to move in the first direction, one of the first motors drives one of the dispensing valves to move in the second direction, and the second motor drives the conveying member to move in the first direction.
[0012] In one embodiment, the first servo motor has a plurality of mounting seats, one of the first motors is disposed on one of the mounting seats, and one side of the first motor is disposed on the mounting seat in a width direction of the first motor.
[0013] In one embodiment, the motor module also includes a second servo motor driving the dispensing valve, the second servo motor drives the dispensing valve to move in the up and down directions, and the dispensing valve is driven by the first motor, the first servo motor, and the second servo motor to move to the dispensing position.
[0014] In one embodiment, the conveying mechanism also includes a test glue testing member, which is arranged on one side of the conveying member in the width direction. Before the dispensing valve dispenses glue, the test glue testing member is used to detect the dispensing amount and dispensing pressure of the dispensing valve to adjust the dispensing amount and dispensing pressure of the dispensing valve.
[0015] In one embodiment, a plurality of the test glue parts are provided, and the plurality of the test glue parts are arranged along the first direction, and one of the test glue parts corresponds to one of the dispensing valves.
[0016] In one embodiment, the fluid encapsulation device further comprises a distance sensor disposed on the dispensing component, wherein the distance sensor is used to detect the distance between the dispensing valve and the cover plate, so as to adjust the distance between the dispensing valve and the cover plate.
[0017] In one embodiment, the fluid encapsulation device further comprises a visual system disposed on the dispensing part, and the visual system is used to detect the workpiece to be processed located at the dispensing position.
[0018] In the technical solution of the utility model, when the conveying member transports the workpiece to be processed to the glue dispensing position, the lifting cylinder drives the lifting member to move upward to lift the workpiece to be processed and press it against the cover plate, so that the workpiece to be processed is clamped between the lifting member and the cover plate. On the one hand, the displacement of the workpiece to be processed on the conveying member is limited, so that the workpiece to be processed is not easy to offset, and the glue dispensing effect of the glue dispensing valve on the workpiece to be processed is improved; on the other hand, the workpiece to be processed is lifted up and separated from the conveying member and transported to the glue dispensing position. A through hole is opened on the cover plate to expose the workpiece to be processed above the conveying member, which is convenient for the glue dispensing valve to accurately dispense glue on the workpiece to be processed, thereby improving the glue dispensing effect of the workpiece to be processed. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.
[0020] Figure 1 This is a schematic structural diagram of an embodiment of the fluid packaging device of the utility model;
[0021] Figure 2 It is a structural schematic diagram of the conveying mechanism of the utility model;
[0022] Figure 3 It is a structural schematic diagram of a front view of the conveying mechanism of the utility model.
[0023] Description of Figure Numbers:
[0024] 100, conveying mechanism; 110, conveying member; 111, dispensing position; 120, lifting member; 130, cover plate; 131, through hole; 140, testing member; 200, dispensing member; 210, dispensing valve; 300, driving mechanism; 310, lifting cylinder; 321, first motor; 322, first servo motor; 323, second motor; 324, second servo motor; 325, mounting seat; 400, distance sensor; 500, visual system; 600, workpiece to be processed; 700, base.
[0025] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0027] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.
[0028] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or abutment, and it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0029] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.
[0030] The semiconductor manufacturing process consists of wafer manufacturing, wafer testing, packaging, testing and other processes. The packaging of the workpiece is to protect the workpiece from the influence of the surrounding environment (including physical and chemical influences). When the current semiconductor fluid packaging device packages the chip, the workpiece is prone to offset or even fall off during the dispensing process, thereby reducing the dispensing effect of the dispensing valve on the workpiece. To this end, the utility model proposes a fluid packaging device, which aims to reduce the possibility of the workpiece being offset at the dispensing position, so as to improve the dispensing effect of the dispensing valve on the workpiece.
[0031] Reference Figures 1 to 3 In the technical solution of the utility model, the fluid encapsulation device proposed includes a base 700, a conveying mechanism 100, a dispensing member 200, and a driving mechanism. The conveying mechanism 100 is arranged on the base 700. The conveying mechanism 100 includes a conveying member 110 for conveying a workpiece 600 to be processed, a lifting member 120 arranged below the conveying member 110, and a cover plate 130 arranged on the conveying member 110. The conveying member 110 is provided with a dispensing position 111. The conveying member 110 is used to transport the workpiece 600 to be processed. The cover plate 130 is located at the dispensing position 111. The cover plate 130 is provided with a through hole 131. The through hole 131 is used to expose the conveying member 1 10. The dispensing member 200 includes a dispensing valve 210 disposed above the conveying member 110. The dispensing valve 210 is used for dispensing glue on the workpiece 600 to be processed. The driving mechanism includes a lifting cylinder 310 driving the lifting member 120, and a motor module driving the dispensing valve 210. The lifting cylinder 310 is used to drive the lifting member 120 to lift the workpiece 600 to be processed upward to the dispensing position 111, so that the workpiece 600 to be processed is clamped between the lifting member 120 and the cover plate 130. The motor module drives the dispensing valve 210 to move to the dispensing position 111, so that the dispensing valve 210 can dispense glue on the workpiece 600 to be processed. In this way, when the conveying member 110 transports the workpiece 600 to the dispensing position 111, the lifting cylinder 310 drives the lifting member 120 to move upward to lift the workpiece 600 to be processed and to abut against the cover plate 130, so that the workpiece 600 to be processed is clamped between the lifting member 120 and the cover plate 130. On the one hand, the displacement of the workpiece 600 to be processed on the conveying member 110 is limited, so that the workpiece 600 to be processed is not easily offset, and the dispensing effect of the dispensing valve 210 on the workpiece 600 to be processed is improved; on the other hand, the workpiece 600 to be processed is lifted up and separated from the conveying member 110 and transported to the dispensing position 111. The cover plate 130 is provided with a through hole 131 for exposing the workpiece 600 to be processed above the conveying member 110, so that the dispensing valve 210 can accurately dispense glue on the workpiece 600 to improve the dispensing effect of the workpiece 600 to be processed.
[0032] Optionally, in one embodiment, the conveyor 110 is used to transport the workpiece 600 to be processed to the glue dispensing position 111 in the first direction, the cover plate 130 extends along the first direction on the conveyor 110, and the cover plate 130 is provided with a plurality of through holes 131 along the first direction, two adjacent through holes 131 are not connected, and a through hole 131 is used to expose a workpiece 600 to be processed above the conveyor 110. If adjacent workpieces 600 to be processed are not separated, glue is likely to remain between adjacent workpieces 600 to be processed, thereby causing unnecessary adhesion of the multiple workpieces 600 to be processed, and reducing the glue dispensing quality of the workpieces 600 to be processed. In this way, the cover plate 130 is provided with a plurality of through holes 131, and adjacent through holes 131 are not connected to each other, so as to separate a plurality of workpieces 600 to be processed. When the dispensing valve 210 dispenses glue on the workpieces 600, there is a structure between adjacent through holes 131 that can block glue, so as to reduce the possibility of glue overflowing and flowing into the gaps between adjacent workpieces 600 to be processed, thereby improving the dispensing quality of the dispensing valve 210 on the workpieces 600 to be processed.
[0033] Optionally, in another embodiment, the cover plate 130 can have many structural forms, and a long hole extending along the length direction of the cover plate 130 can be opened on the cover plate 130 to expose the workpiece 600 to be processed above the conveying member 110, so as to facilitate the dispensing valve 210 to dispense glue on the workpiece 600, as long as the workpiece 600 to be processed is fixed and the dispensing valve 210 is not hindered from dispensing glue on the workpiece 600.
[0034] Optionally, in one embodiment, the dispensing part 200 is provided with a plurality of dispensing valves 210, and the plurality of dispensing valves 210 are spaced apart along the first direction, and a dispensing valve 210 at least corresponds to a dispensing position 111 for dispensing. In this way, a plurality of dispensing valves 210 are provided to dispense glue to a plurality of workpieces 600 to be processed, thereby improving the dispensing efficiency of the dispensing valves 210 on the workpieces 600 to be processed. The plurality of dispensing valves 210 are provided in the first direction, thereby saving the space occupied by the plurality of dispensing valves 210 on the base 700, and making the overall structure of the fluid packaging device more compact.
[0035] Optionally, in another implementation, the number of dispensing valves 210 may be set in various situations, and only one dispensing valve 210 may be set to dispense glue to the workpiece 600 .
[0036] Optionally, in one embodiment, the motor module includes a plurality of first motors 321 drivingly connected to the dispensing valves 210, a first servo motor 322 drivingly connected to the plurality of first motors 321, and a second motor 323 drivingly connected to the conveyor 110, wherein one first motor 321 is connected to one dispensing valve 210, the first servo motor 322 drives the plurality of first motors 321 to move in the first direction, one first motor 321 drives one dispensing valve 210 to move in the second direction, and the second motor 323 drives the conveyor 110 to move in the first direction. In this way, the first motor 321 is set to drively connect to the plurality of dispensing valves 210 so that the plurality of dispensing valves 210 move in the second direction, and the first servo motor 322 is set to drive the first motor 321 to move in the first direction, and the first direction is different from the second direction, thereby realizing the driving of the dispensing valve 210 in the first direction and the second direction, so that the dispensing valve 210 can adjust its position in the first direction and the second direction to move toward the dispensing position 111, so that the dispensing valve 210 can accurately dispense glue to the workpiece 600.
[0037] Optionally, in one embodiment, the first servo motor 322 has a plurality of mounting seats 325, a first motor 321 is disposed on a mounting seat 325, and in the width direction of the first motor 321, one side of the first motor 321 is disposed on the mounting seat 325. In this way, the plurality of first motors 321 are mounted on the mounting seats 325 in a one-to-one correspondence, and in the width direction of the first motor 321, one side of the first motor 321 is mounted on the mounting seat 325. Since the size of the first motor 321 in the width direction is small, the space occupied by the first motor 321 on the mounting seat 325 is reduced, which greatly saves the layout space of the first motor 321 in the first direction, reduces the space occupied by the plurality of first motors 321 in the first direction, makes the overall structure of the fluid encapsulation device more compact, and thus reduces the overall volume of the fluid encapsulation device.
[0038] Optionally, in another implementation, the first motor 321 can be installed on the mounting base 325 in a variety of ways. One side of the first motor 321 can also be installed on the mounting base 325 in the thickness direction of the first motor 321, as long as the installation of the first motor 321 can be achieved.
[0039] Optionally, in one embodiment, the motor module further includes a second servo motor 324 driving the dispensing valve 210, the second servo motor 324 drives the dispensing valve 210 to move in the up-down direction, and the dispensing valve 210 is driven by the first motor 321, the first servo motor 322, and the second servo motor 324 to move to the dispensing position 111. In this way, the second servo motor 324 is set to drive the dispensing valve 210 in the up-down direction, so that the dispensing valve 210 can approach or move away from the dispensing position 111 in the up-down direction. Under the drive of the first motor 321, the first servo motor 322, and the second servo motor 324, the dispensing valve 210 can adjust its position in the first direction, the second direction, and the up-down direction, so that the dispensing valve 210 can accurately move to the dispensing position 111 to dispense glue to the workpiece 600.
[0040] Optionally, in one embodiment, the conveying mechanism 100 further includes a test glue member 140, which is disposed on one side of the conveying member 110 in the width direction. Before the glue dispensing valve 210 dispenses glue, the test glue member 140 is used to detect the glue dispensing amount and glue dispensing pressure of the glue dispensing valve 210, so as to adjust the glue dispensing amount and glue dispensing pressure of the glue dispensing valve 210. Before the glue dispensing valve 210 dispenses glue on the workpiece 600, it is necessary to detect parameters such as the glue dispensing amount and glue dispensing pressure of the glue dispensing valve 210. In this way, a test glue part 140 is set, and before the dispensing valve 210 dispenses glue on the workpiece 600, the dispensing amount and the dispensing pressure of the dispensing valve 210 are detected. The fluid packaging device also includes a controller connected to the test glue part 140. When the dispensing amount and the dispensing pressure of the dispensing valve 210 are outside the preset numerical range, the test glue part 140 feeds back the detected signal to the controller, and the controller reminds the staff to adjust the parameters such as the dispensing amount or the dispensing pressure of the dispensing valve 210 according to the feedback signal, so as to improve the reliability and stability of the dispensing valve 210 during dispensing.
[0041] Optionally, in another implementation, the structure of the test piece 140 may be omitted to save the development cost of the fluid packaging device.
[0042] Optionally, in one embodiment, a plurality of test rubber members 140 are provided, and the plurality of test rubber members 140 are arranged along the first direction, and one test rubber member 140 is arranged corresponding to one point rubber valve 210. In this way, a plurality of test rubber members 140 are provided, and one test rubber member 140 is arranged corresponding to one point rubber valve 210, so as to improve the detection efficiency of the test rubber members 140 and ensure the stable operation of the fluid packaging device. At the same time, the plurality of test rubber members 140 are arranged on one side of the transmission member 110 in the first direction, so as to make the structure of the fluid packaging device more compact.
[0043] Optionally, in another implementation, the number of the test glue parts 140 may be varied, or only one test glue part 140 may be provided, as long as the detection function of the dispensing valve 210 can be realized.
[0044] Optionally, in one embodiment, the fluid encapsulation device further includes a distance sensor 400 disposed on the dispensing component 200 , and the distance sensor 400 is used to detect the distance between the dispensing valve 210 and the cover plate 130 , so as to adjust the distance between the dispensing valve 210 and the cover plate 130 . In this way, a distance sensor 400 is set on the dispensing part 200. When the dispensing work is performed, the distance sensor 400 is used to detect the distance between the dispensing valve 210 and the cover plate 130 to determine the distance between the dispensing valve 210 and the dispensing position 111. The distance sensor 400 transmits a distance signal to the controller, and the controller controls the first motor 321, the first servo motor 322, and the second servo motor 324 to continue to move the dispensing valve 210, so that the dispensing valve 210 moves to the dispensing position 111 to dispense glue to the workpiece 600, thereby reducing the possibility of dispensing glue on the workpiece 600 before the dispensing valve 210 reaches the dispensing position 111, reducing the waste of glue, and improving the dispensing accuracy and quality of the dispensing valve 210.
[0045] Optionally, in one implementation, there may be multiple types of distance sensors 400 , which may be laser distance sensors or infrared distance sensors, as long as they can measure the distance between the dispensing valve 210 and the cover plate 130 .
[0046] Optionally, in one embodiment, the fluid packaging device further includes a visual system 500 disposed on the dispensing part 200, and the visual system 500 is used to detect the workpiece 600 to be processed located at the dispensing position 111. In this way, the visual system 500 is set to detect the workpiece 600 to be processed, and the fluid packaging device can obtain image information of the workpiece 600 to be processed. If the visual system 500 does not detect the workpiece 600 to be processed, the image information processed by the visual system 500 is transmitted to the controller, and the controller stops the dispensing valve 210 from continuing to dispense glue according to the transmitted image information.
[0047] The above description is only an optional embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A fluid packaging device, characterized in that: include: Base; A conveying mechanism is arranged on the base, the conveying mechanism comprises a conveying member for conveying the workpiece to be processed, a lifting member arranged below the conveying member, and a cover plate arranged on the conveying member, the conveying member is provided with a glue dispensing position, the conveying member is used to transport the workpiece to be processed, the cover plate is located at the glue dispensing position, the cover plate is provided with a through hole, and the through hole is used to expose the conveying member; A glue dispensing component, comprising a glue dispensing valve disposed above the conveying component, the glue dispensing valve being used to dispense glue to the workpiece to be processed; as well as The driving mechanism includes a lifting cylinder connected to the lifting member and a motor module connected to the dispensing valve. The lifting cylinder is used to drive the lifting member to lift the workpiece to be processed upward to the dispensing position so that the workpiece to be processed is clamped between the lifting member and the cover plate. The motor module drives the dispensing valve to move to the dispensing position so that the dispensing valve can dispense glue to the workpiece to be processed.
2. The fluid encapsulation device according to claim 1, characterized in that: The conveying member is used to transport the workpiece to be processed to the dispensing position in a first direction, the cover plate extends along the first direction on the conveying member, and the cover plate is provided with a plurality of through holes along the first direction, two adjacent through holes are not connected, and one through hole is used to expose one of the workpieces to be processed above the conveying member.
3. The fluid encapsulation device according to claim 2, characterized in that: There are multiple dispensing valves, and the multiple dispensing valves are spaced apart along the first direction, and one dispensing valve at least corresponds to one dispensing position for dispensing.
4. The fluid encapsulation device according to claim 3, characterized in that: The motor module includes a plurality of first motors connected to the dispensing valves, a first servo motor connected to the plurality of the first motors, and a second motor connected to the conveying member. One of the first motors is connected to one of the dispensing valves, the first servo motor drives the plurality of the first motors to move in the first direction, one of the first motors drives the dispensing valve to move in the second direction, and the second motor drives the conveying member to move in the first direction.
5. The fluid encapsulation device according to claim 4, characterized in that: The first servo motor has a plurality of mounting seats, one of the first motors is disposed on one of the mounting seats, and one side of the first motor is disposed on the mounting seat in a width direction of the first motor.
6. The fluid encapsulation device according to claim 4, characterized in that: The motor module also includes a second servo motor driving the dispensing valve, the second servo motor drives the dispensing valve to move in the up and down directions, and the dispensing valve is driven by the first motor, the first servo motor, and the second servo motor to move to the dispensing position.
7. The fluid encapsulation device according to claim 2, characterized in that: The conveying mechanism also includes a test glue testing member, which is arranged on one side of the conveying member in the width direction. Before the dispensing valve dispenses glue, the test glue testing member is used to detect the dispensing amount and dispensing pressure of the dispensing valve to adjust the dispensing amount and dispensing pressure of the dispensing valve.
8. The fluid encapsulation device according to claim 7, characterized in that: There are a plurality of test glue test pieces, and the plurality of test glue test pieces are arranged along the first direction, and one test glue test piece corresponds to one dispensing valve.
9. The fluid encapsulation device according to claim 1, characterized in that: The fluid encapsulation device further comprises a distance sensor arranged on the dispensing component, wherein the distance sensor is used to detect the distance between the dispensing valve and the cover plate, so as to adjust the distance between the dispensing valve and the cover plate.
10. The fluid encapsulation device according to claim 1, characterized in that: The fluid packaging device further comprises a visual system arranged at the dispensing part, and the visual system is used to detect the workpiece to be processed located at the dispensing position.