Retainer capable of preventing mechanical deformation of threads

Abstract

The utility model discloses a retainer for preventing mechanical deformation of threads, which comprises a retainer body, the retainer body is annular, a threaded hole for mounting a bolt is arranged on the upper surface of the retainer body, a tooth socket is arranged in the threaded hole, a groove is arranged on the outer side of the threaded hole, and a sealing ring is arranged in the groove. According to the protective ring capable of preventing the threads from mechanical deformation, the threaded sleeve is arranged in the threaded hole, the protective ring is prevented from mechanical deformation when the threads are fastened, the sealing ring is arranged on the outer ring of the threaded hole, a circle of isolation belt is formed in the direction in which grinding fluid easily enters, the threaded hole is protected, and the service life of the threaded hole is prolonged. The effect of delaying and reducing corrosion of the grinding fluid is achieved, the huge cost caused by maintaining and replacing the protective ring is reduced, and the operation benefits of enterprises are further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip processing, in particular to a retaining ring for preventing mechanical deformation of a thread. Background Art

[0002] In the current semiconductor chip processing field, wafers need to be ground. In this process, a guard ring assembly and a grinding pad are used, and the two need to be used together. The wafer is loaded in the guard ring assembly, and the guard ring assembly is placed on the upper surface of the grinding pad. During operation, the grinding pad will rotate on the lower surface of the guard ring assembly. The coordinated grinding between the two becomes the key factor in the success or failure of wafer grinding. The guard ring assembly has two main uses. One is to prevent the wafer from being thrown out due to centrifugal force during the grinding process, causing damage to personnel and equipment, so that it is always kept in the guard ring; the other function is to retain a certain amount of grinding fluid, so that it is in full contact with the wafer, produce a chemical reaction, corrode the surface of the wafer, and then cooperate with mechanical grinding to achieve the purpose of polishing.

[0003] The retainer assembly is composed of two parts, the upper and lower parts, which are tightly connected by threads to form a complete whole. At present, during use, due to the erosion of the grinding fluid, the upper and lower parts of the retainer assembly need to be disassembled and repaired frequently, but the repeated disassembly and assembly of the threads often cause mechanical deformation such as thread slippage and biting. There are often dozens of threaded holes on the retainer assembly. As long as one of the threads is mechanically deformed, the tightness of the entire retainer assembly will be insufficient, so that the grinding fluid will further erode the upper and lower parts of the retainer assembly, and finally it cannot be repaired, which is very likely to cause scrapping. Once scrapped, the loss caused is huge, which is a great loss for the company using this product. In order to prevent and eliminate such situations, a retainer with a new structure is designed. Utility Model Content

[0004] The purpose of the utility model is to provide a guard ring for preventing mechanical deformation of a thread. A toothed sleeve is arranged in a threaded hole to prevent mechanical deformation of the guard ring when the thread is tightened. A sealing ring is arranged on the outer ring of the threaded hole to form an isolation zone in the direction where the grinding fluid can easily enter, thereby protecting the threaded hole, delaying and reducing the corrosion of the grinding fluid, reducing the huge cost of repairing and replacing the guard ring, and further improving the business efficiency of the enterprise.

[0005] To achieve the above-mentioned purpose, the utility model provides a guard ring for preventing mechanical deformation of a thread, including a guard ring body, which is annular, and has a threaded hole for bolt installation on its upper surface, a socket in the threaded hole, a groove on the outside of the threaded hole, and a sealing ring in the groove.

[0006] Preferably, the threaded holes are provided in plurality and are evenly distributed along the circumference of the retaining ring, and a corresponding tooth sleeve is provided in each threaded hole.

[0007] Preferably, the length of the brace is smaller than the depth of the threaded hole, and the outer diameter of the brace is matched with the inner diameter of the threaded hole.

[0008] Preferably, the brace is in the shape of a hollow cylinder, a ring-shaped protrusion is provided on the top of the brace, a thread groove corresponding to the inner thread of the threaded hole is provided on the outer wall of the brace, and a thread groove corresponding to the thread on the bolt is provided on the inner wall of the brace.

[0009] Preferably, a mounting groove is provided at the top of the threaded hole, and the mounting groove is matched with the annular protrusion so that the height of the installed braces is not greater than the height of the upper surface plane of the retaining ring.

[0010] Preferably, the groove is located on the outer circle of the threaded hole and is annular.

[0011] Preferably, the performance and strength of the brace material are lower than those of the retaining ring material, and the wear resistance and corrosion resistance of the brace material are better than those of the retaining ring material.

[0012] Therefore, the utility model adopts the above-mentioned guard ring for preventing mechanical deformation of the thread, and arranges a sleeve in the threaded hole to prevent mechanical deformation of the guard ring when the thread is tightened. A sealing ring is arranged on the outer ring of the threaded hole to form an isolation zone in the direction where the grinding fluid can easily enter, thereby protecting the threaded hole, delaying and reducing the corrosion of the grinding fluid, reducing the huge cost of repairing and replacing the guard ring, and further improving the company's operating efficiency.

[0013] The technical solution of the utility model is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the overall structure of a retainer for preventing mechanical deformation of a thread in the utility model;

[0015] Figure 2 It is a schematic diagram of a tooth sleeve in a retainer for preventing mechanical deformation of a thread of the utility model;

[0016] Figure 3 This is a schematic diagram of a groove in a retainer for preventing mechanical deformation of a thread in the utility model;

[0017] Figure 4 It is a cross-sectional view of a retainer body in a retainer for preventing mechanical deformation of a thread of the utility model;

[0018] Figure 5 It is a schematic diagram of an installation groove in a retainer for preventing mechanical deformation of a thread of the utility model;

[0019] Figure 6 The utility model is a cross-sectional view of a tooth sleeve in a retaining ring for preventing mechanical deformation of a thread.

[0020] Reference numerals

[0021] 1. Retainer body; 2. Threaded hole; 3. Tooth sleeve; 4. Annular protrusion; 5. Groove; 6. Mounting groove. DETAILED DESCRIPTION

[0022] The technical solution of the utility model is further described below through the accompanying drawings and embodiments.

[0023] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "include" or "comprise" and the like mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0024] Example

[0025] like Figure 1 As shown, a retainer for preventing mechanical deformation of a thread comprises a retainer body 1, the retainer body 1 is annular, and a threaded hole 2 for bolt installation is provided on the upper surface of the retainer body 1. Figure 4 As shown, a toothed cap 3 is arranged in the threaded hole 2. There are multiple threaded holes 2 and they are evenly distributed along the circumference of the retainer, and a corresponding toothed cap 3 is arranged in each threaded hole 2. The toothed cap 3 is detachably connected to the threaded hole 2.

[0026] The length of the brace 3 is less than the depth of the threaded hole 2, and the outer diameter of the brace 3 is matched with the inner diameter of the threaded hole 2. A brace 3 that meets the size of the retaining ring threaded hole 2 is customized, and the material performance and strength of the brace 3 are slightly lower than the retaining ring thread, because if the strength of the brace 3 is higher than the retaining ring thread, once the brace 3 is damaged, the retaining ring thread will also be damaged. The wear resistance and corrosion resistance of the brace 3 material are better than the retaining ring thread. The customized brace 3 is installed in the retaining ring thread to form a protective ring. The brace 3 is easy to disassemble and replace. The specific size of the brace 3 is determined by the size of the retaining ring threaded hole 2, and the size of the retaining ring threaded hole 2 is determined according to the overall size ratio of the retaining ring.

[0027] like Figure 2 As shown, the mouthpiece 3 is hollow cylindrical, and a ring-shaped protrusion 4 is provided on the top of the mouthpiece 3. Figure 6 As shown, the outer wall of the socket 3 is provided with a thread groove corresponding to the internal thread of the threaded hole 2, and the inner wall of the socket 3 is provided with a thread groove corresponding to the thread on the bolt. When tightening the bolt, a suitable tightening torque should be used, and it should not be over-tightened. In the case of over-tightening, the internal and external threads are easily damaged. Bolt tightening torque: The formula: tightening torque = friction coefficient * pre-tightening force * nominal diameter is used to obtain a suitable tightening force, so that the tightening force of the bolt is within a suitable range, and it will not be over-tightened or under-tightened.

[0028] like Figure 5 As shown, a mounting groove 6 is provided at the top of the threaded hole 2, and the mounting groove 6 is matched with the annular protrusion 4, so that the height of the installed brace 3 is not greater than the height of the upper surface plane of the retainer. Before installing the brace 3, a step, namely the mounting groove 6, needs to be milled in the threaded hole 2 of the retainer, the annular protrusion 4 is installed in the mounting groove 6, and the cylindrical part of the brace 3 is installed in the threaded hole 2, so that the height of the installed brace 3 is less than or equal to the height of the retainer plane, which does not affect the accuracy of the fastening of the upper and lower components of the retainer.

[0029] like Figure 3 As shown, a groove 5 is provided on the outside of the threaded hole 2, and a sealing ring is provided in the groove 5. The groove 5 is located on the outer circle of the threaded hole 2, and the groove 5 is annular. In order to further prevent the erosion of the thread by the grinding fluid, a circle of groove 5 is milled on the outer circle of each retaining ring threaded hole 2, and then an O-ring is placed in the groove 5, forming a circle of isolation belt in the direction where the grinding fluid is easy to enter, protecting the threaded hole 2, and playing a role in delaying and reducing the corrosion of the grinding fluid. The depth of the groove 5 and the specific size of the edge chamfer are determined according to the overall size ratio of the retaining ring.

[0030] Therefore, the utility model adopts the above-mentioned guard ring for preventing mechanical deformation of the thread, and arranges a sleeve in the threaded hole to prevent mechanical deformation of the guard ring when the thread is tightened. A sealing ring is arranged on the outer ring of the threaded hole to form an isolation zone in the direction where the grinding fluid can easily enter, thereby protecting the threaded hole, delaying and reducing the corrosion of the grinding fluid, reducing the huge cost of repairing and replacing the guard ring, and further improving the company's operating efficiency.

[0031] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that they can still modify or replace the technical solution of the utility model with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the utility model.

Claims

1. A retainer for preventing mechanical deformation of a thread, characterized in that: The invention comprises a retainer body which is annular in shape, a threaded hole for bolt installation is arranged on the upper surface of the retainer body, a tooth sleeve is arranged in the threaded hole, a groove is arranged outside the threaded hole, and a sealing ring is arranged in the groove.

2. A retainer for preventing mechanical deformation of a thread according to claim 1, characterized in that: There are multiple threaded holes evenly distributed along the circumference of the retaining ring, and each threaded hole is provided with a corresponding tooth sleeve.

3. A retainer for preventing mechanical deformation of a thread according to claim 1, characterized in that: The length of the tooth sleeve is smaller than the depth of the threaded hole, and the outer diameter of the tooth sleeve is matched with the inner diameter of the threaded hole.

4. A retainer for preventing mechanical deformation of a thread according to claim 1, characterized in that: The tooth sleeve is in the shape of a hollow cylinder, a ring-shaped protrusion is arranged on the top of the tooth sleeve, a thread groove corresponding to the inner thread of the threaded hole is arranged on the outer wall of the tooth sleeve, and a thread groove corresponding to the thread on the bolt is arranged on the inner wall of the tooth sleeve.

5. A retainer for preventing mechanical deformation of a thread according to claim 4, characterized in that: An installation groove is provided at the top of the threaded hole, and the installation groove is matched with the annular protrusion so that the height of the installed braces is not greater than the height of the upper surface plane of the retaining ring.

6. A retainer for preventing mechanical deformation of a thread according to claim 1, characterized in that: The groove is located at the outer circle of the threaded hole and is annular.

7. A retainer for preventing mechanical deformation of a thread according to claim 1, characterized in that: The performance and strength of the brace material are lower than those of the retainer material, and the wear resistance and corrosion resistance of the brace material are better than those of the retainer material.

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