Piping processing device

Abstract

The utility model relates to a tubing processing device. The purpose of the present invention is to suppress electrification of a pipe when the pipe constituting a substrate processing apparatus is processed. A pipe processing apparatus for processing a pipe constituting a substrate processing apparatus, the pipe processing apparatus being characterized by being provided with: a processing tool for processing the pipe by coming into contact with the pipe; and a de-energizing unit for de-energizing the piping during the machining process.

Description

Technical Field

[0001] The utility model relates to a pipe processing device. Background Art

[0002] Patent document 1 discloses a resin tube processing device, the processing device comprising: a tube holding mechanism that holds the resin tube; and a diameter expanding tool that expands the diameter of the end portion of the resin tube held by the tube holding mechanism by being inserted axially into the end portion of the resin tube. The processing device comprises: a pushing mechanism that manually pushes the diameter expanding tool axially toward the end portion of the resin tube so that the diameter expanding tool is inserted into the end portion of the resin tube; and a fixing mechanism that fixes the position of the diameter expanding tool in a state where the diameter expanding tool is inserted into the end portion of the resin tube.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1; Japanese Patent Application Publication No. 2012-232513 Utility Model Content

[0006] Problems to be solved by utility models

[0007] The technology of the utility model suppresses the charging of the pipes when processing the pipes constituting the substrate processing device.

[0008] Solutions for solving problems

[0009] A technical solution of the utility model is a piping processing device, which processes piping constituting a substrate processing device, and is characterized in that the piping processing device comprises: a processing tool, which processes the piping by contacting the piping; and a static elimination unit, which eliminates static electricity from the piping during the processing.

[0010] The pipe processing apparatus may include a holding portion that holds the pipe, and the processing tool may have a structure that processes the pipe while coming into contact with the pipe held by the holding portion.

[0011] The static eliminating unit may be an ion generator that releases a gas containing ions toward a portion where the processing tool and the pipe are in contact.

[0012] The processing tool may be an expander for expanding the diameter of the pipe end portion, and the static eliminating unit may be attached to the expander and arranged so that the gas contacts the pipe end portion.

[0013] Alternatively, the static-eliminating portion may have a blowout port for discharging the gas, and when the holding portion is divided into two regions using the pipe axis direction of the piping fixed to the holding portion when the holding portion is viewed from above as a boundary line, the blowout port is located in the wider region of the two regions.

[0014] Alternatively, the piping processing device may further include a control unit for controlling the operation of the de-staticizing unit, wherein the de-staticizing unit has a structure capable of adjusting the air volume of the gas, and the control unit performs control to adjust the air volume of the gas in such a manner that the air volume of the gas during the processing of the piping is greater than the air volume of the gas during the non-processing of the piping.

[0015] Alternatively, the piping processing device may further include a control unit for controlling the operation of the de-staticizing unit, wherein the de-staticizing unit has a structure capable of adjusting the concentration of the ions, and the control unit performs control to adjust the ion concentration in such a manner that the ion concentration during the processing of the piping is higher than the ion concentration during the non-processing of the piping.

[0016] Effect of utility model

[0017] According to the present invention, it is possible to suppress the charging of the pipes when processing the pipes constituting the substrate processing apparatus. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a longitudinal sectional view schematically showing the structure of the resist coating apparatus according to the embodiment.

[0019] Figure 2 It is a side view schematically showing the structure of the pipe processing device according to the embodiment.

[0020] Figure 3 This is a perspective view of the pipe processing device as seen from the front.

[0021] Figure 4 This is a top view of the pipe processing device (a view of the device viewed from above).

[0022] FIG. 5( a ) and FIG. 5( b ) are views for explaining a method of expanding the diameter of a pipe using a pipe processing apparatus.

[0023] Figure 6 It is a top view showing an arrangement example of ion generators.

[0024] FIG. 7( a ) and FIG. 7( b ) are diagrams schematically showing the flow of wind blown out from the ion generator using arrows.

[0025] Figure 8 This is a diagram for explaining the arrangement area of ​​the ion generator.

[0026] Fig. 9 It is a side view showing another structural example of the pipe processing device.

[0027] Description of Reference Numerals

[0028] 1. Pipe processing device; 10. Expander; 30. Ion generator; 100. Anti-corrosion agent coating device; 109. Pipe. DETAILED DESCRIPTION

[0029] In the manufacturing process of semiconductor devices, for example, there is a process of forming a resist film for pattern formation on the surface of a substrate such as a semiconductor wafer (hereinafter sometimes referred to as a "wafer"). In this process, a resist liquid is ejected from a nozzle unit toward the center of the wafer held on a rotating holding disk. The resist liquid ejected from the nozzle unit is supplied from a resist liquid supply source such as a bottle storing the resist liquid.

[0030] In the supply path of the anti-corrosive liquid, a plurality of pipes are used, and a joint for connecting the pipes to each other is also used. Usually, when the pipe is installed on the joint, it is necessary to use a diameter expansion tool to expand the end of the pipe. The diameter expansion tool is, for example, a cylindrical member having a small diameter portion and a large diameter portion. The small diameter portion of the diameter expansion tool is inserted from the end face of the pipe, and then the diameter expansion tool is further pressed into the pipe side, so that the large diameter portion of the diameter expansion tool is inserted into the end of the pipe. In this way, the pipe is expanded.

[0031] However, when the expansion tool is pressed into the piping, the piping may be charged due to friction between the inner circumference of the piping and the outer circumference of the expansion tool. In particular, the piping and the expansion tool constituting the substrate processing device for performing various processes on the wafer are both formed of resin materials, so the piping is easily charged during the expansion process. In addition, the charged piping attracts particles existing in the surrounding environment, so particles are easily attached to the outer circumference and inner circumference of the end of the piping after expansion. Therefore, when using charged piping, it takes time to clean the piping.

[0032] Therefore, the technology of the present invention suppresses the charging of the pipes when processing the pipes constituting the substrate processing apparatus.

[0033] Hereinafter, the piping processing device of the present embodiment will be described with reference to the accompanying drawings. First, an example of a substrate processing device using piping will be described. In addition, in this specification and the accompanying drawings, the same reference numerals are used for elements having substantially the same functional structure, thereby omitting repeated descriptions.

[0034] <Resist coating apparatus>

[0035] Figure 1 It is a longitudinal sectional view schematically showing the structure of a resist coating apparatus as an example of the substrate processing apparatus according to the present embodiment.

[0036] The resist coating apparatus 100 includes a process container 101 that can be sealed inside. A wafer W carrying port (not shown) is formed on a side surface of the process container 101 .

[0037] A rotating holding plate 102 as a substrate holding portion for holding a wafer W is provided in the processing container 101. The rotating holding plate 102 can be rotated at a predetermined speed by a holding plate driving portion 103 having an actuator such as a motor, so that the wafer W held on the rotating holding plate 102 can be rotated. In addition, a lifting driving mechanism such as a cylinder is provided in the holding plate driving portion 103, so that the rotating holding plate 102 can be freely raised and lowered.

[0038] In addition, a cup 104 is provided in the processing container 101, and the cup 104 is arranged outside the rotating holding disk 102 to surround the wafer W held by the rotating holding disk 102. The cup 104 includes an outer cup 105 that receives and recovers liquid scattered or dropped from the wafer W, and an inner cup 106 that is located on the inner circumference of the outer cup 105.

[0039] The outer cup 105 has an opening 107 formed on its upper surface for allowing the wafer W to pass through when transferring the wafer W to and from the rotating holding plate 102. A nozzle unit 108 for spraying resist liquid onto the wafer W is provided in the processing container 101 so as to be movable vertically and horizontally.

[0040] The nozzle unit 108 is connected to a resist liquid supply source (not shown) such as a bottle storing the resist liquid via a plurality of pipes 109. The pipes 109 are formed of a resin material such as a fluororesin such as PFA. In the supply path of the resist liquid from the resist liquid supply source to the nozzle unit 108, a joint 110 is appropriately provided to connect the plurality of pipes 109 to each other.

[0041] The pipe processing device described below is a device for expanding the diameter of the pipe 109 so as to attach the pipe 109 to the joint 110. In addition, in the present embodiment, the resist coating device 100 is exemplified as a substrate processing device using the pipe 109, but the substrate processing device may be a device other than the resist coating device 100, such as a developing device and a cleaning device. That is, the pipe to be processed by the pipe processing device described below is a pipe used in the substrate processing device.

[0042] <Pipe processing equipment>

[0043] Figure 2 It is a side view schematically showing the structure of the pipe processing device 1 according to the present embodiment. Figure 3 It is a perspective view of the pipe processing device 1 as viewed from the front. Figure 4It is a top view (a view in which the device is viewed from above) of the pipe processing device 1. The X direction, the Y direction, and the Z direction in each figure are directions perpendicular to each other.

[0044] The pipe processing apparatus 1 includes an expander 10 as a processing tool for expanding the pipe, a clamping mechanism 20 as a holding unit for holding the pipe to be processed, and an ion generator 30 as a static elimination unit for eliminating static electricity from the pipe.

[0045] The expander 10 is a device for expanding the diameter of a pipe held by a clamping mechanism 20 by advancing a cylindrical expanding tool 11 having a small diameter portion 11a and a large diameter portion 11b in the direction of the pipe axis (positive side in the X direction). Figure 2 The front side (negative side in the Y direction) in the vertical direction of the paper is called the "right side". Figure 2 The inner side in the vertical direction of the paper (the positive side in the Y direction) is called the "left side".

[0046] The expander 10 includes a main body 12 and a gripping portion 13 mounted on the main body 12. The main body 12 has a built-in propulsion mechanism (not shown) in a rectangular parallelepiped housing for moving the expansion tool 11 forward. The gripping portion 13 extends downward from the rear of the main body 12, and the operator can grasp the gripping portion 13 with one hand.

[0047] An operating rod 14 extending obliquely downward and forward from the main body 12 is provided in front of the grip 13. The operator holding the grip 13 can put his fingers on the operating rod 14 and pull it toward the front side (negative side in the X direction). A force-applying mechanism (not shown) for returning the operating rod 14 to the initial position is built into the main body 12. When the force applied to the operating rod 14 pulled toward the front is weak, the operating rod 14 moves forward and returns to the initial position.

[0048] like Figure 2 and Figure 4 As shown, a mounting rod 15 on which the diameter expansion tool 11 is mounted is provided at the front of the main body 12. Figure 3 In the expander 10, the mounting rod 15 is removed. The mounting rod 15 is advanced or retracted by a propulsion mechanism (not shown) built into the main body 12. The propulsion mechanism is configured to be linked with the movement of the above-mentioned operating rod 14, and the mounting rod 15 is advanced in conjunction with the movement of pulling the operating rod 14 backward, and on the other hand, it is retracted in conjunction with the movement of returning the operating rod 14 to the initial position.

[0049] A support body 16 for fixing the clamping mechanism 20 is installed below the mounting rod 15 at the front of the main body 12. The support body 16 extends further forward from the front surface of the main body 12, and the clamping mechanism 20 is located at the front end of the support body 16.

[0050] The clamping mechanism 20 includes a fixed jig 21 and a movable jig 22 disposed above the fixed jig 21 .

[0051] like Figure 3 As shown, a semi-cylindrical recess 21a opened upward is formed in the fixed jig 21, and the recess 21a extends in the front-rear direction (X direction) of the pipe processing device 1. In addition, a semi-cylindrical recess 22a opened downward is formed in the movable jig 22, and the recess 22a extends in the front-rear direction of the pipe processing device 1 similarly to the recess 21a. The recess 21a of the fixed jig 21 and the recess 22a of the movable jig 22 are located at opposing positions, and a cylindrical space for clamping and fixing the pipe is formed by the two recesses 21a and 22a.

[0052] A locking rod 23 is provided as a connecting member for fixing the movable clamp 22 to the fixed clamp 21 at the end on the negative side in the Y direction of the movable clamp 22. The upper end of the locking rod 23 is fixed to the movable clamp 22 by a connecting pin (not shown) in such a manner that the X direction becomes a rotation axis, and the locking rod 23 is configured to be able to rotate in the YZ plane with the connecting pin as a rotation axis. When the locking rod 23 is lowered, the end on the negative side in the Y direction of the movable clamp 22 is fixed to the fixed clamp 21, and when the locking rod 23 is raised, the fixed state between the end on the negative side in the Y direction of the movable clamp 22 and the fixed clamp 21 is released.

[0053] The end of the movable jig 22 on the positive side in the Y direction is fixed to the fixed jig 21 by a connecting pin (not shown) so that the X direction becomes a rotation axis. The movable jig 22 is configured to be rotatable in the YZ plane with the connecting pin as a rotation axis.

[0054] When the pipe is clamped by the clamping mechanism 20 thus configured, the pipe can be fixed by lifting the locking lever 23 to open the movable clamp 22, placing the pipe on the recessed portion 21a of the fixed clamp 21, closing the movable clamp 22, and lowering the locking lever 23. When the pipe is removed from the clamping mechanism 20 after the diameter expansion process, the pipe can be removed by lifting the locking lever 23 to open the movable clamp 22.

[0055] In addition, the specific structure of the holding part that holds the pipe is not limited to the structure of the clamping mechanism 20 described in this embodiment. That is, the holding part of the pipe only needs to have a structure that can hold the pipe.

[0056] The ion generator 30 is a blower type static elimination device that emits air as a gas containing ions for static elimination. A blow outlet 31 for releasing the air containing ions is formed on the front surface of the ion generator 30. When the switch of the ion generator 30 is turned on (not shown), the air containing ions is released forward from the blow outlet 31. When the switch is turned off, the release of the air containing ions is stopped. A power cable 32 is connected to the rear surface of the ion generator 30, and the power cable 32 is connected to an external power source (not shown).

[0057] The above-mentioned ion generator 30 is attached to the right side surface of the main body 12 of the diameter expander 10. The method of fixing the ion generator 30 to the diameter expander 10 is not particularly limited, and the ion generator 30 is fixed by bolt fastening via a bracket (not shown), for example.

[0058] In addition, the structure of the ion generator 30 is not limited to the structure demonstrated in this embodiment, and a well-known ion generator can be applied.

[0059] The pipe processing apparatus 1 is configured as described above. Next, a pipe diameter expansion method using the pipe processing apparatus 1 will be described with reference to FIGS. 5( a ) and 5 ( b ).

[0060] First, as shown in Fig. 5(a), the pipe 109 is fixed by the clamping mechanism 20. When the pipe 109 is fixed to the clamping mechanism 20, it is preferable to turn on the ion generator 30 in advance. Thus, the air containing ions emitted from the ion generator 30 contacts the clamping mechanism 20, and even if the pipe 109 is charged before or during the fixing operation, the pipe 109 can be de-charged.

[0061] Next, as shown in FIG5(b), the operator holds the grip 13 of the expander 10 and pulls the operating rod 14 forward. The mounting rod 15 moves forward in conjunction with the movement of the operating rod 14, and the small diameter portion 11a of the expanding tool 11 mounted on the top end of the mounting rod 15 is inserted from the end face of the pipe 109. Then, the operating rod 14 is further pulled forward, so that the large diameter portion 11b following the small diameter portion 11a is inserted into the end face of the pipe 109. As a result, the inner diameter of the end of the pipe is expanded to be equal to the outer diameter of the large diameter portion 11b.

[0062] When the pipe 109 is expanded, the pipe 109 is charged due to the friction between the outer peripheral surface of the expansion tool 11 and the inner peripheral surface of the pipe 109, but in the pipe processing device 1, the air containing ions for de-staticization is discharged forward from the ion generator 30. That is, according to the expansion processing method of this embodiment, the expansion processing can be performed while the air containing ions collides with the end of the pipe 109 to de-staticize, so the charging of the pipe 109 during the expansion processing can be suppressed. As a result, it is possible to suppress the adhesion of particles to the inner peripheral surface of the pipe 109, and the cleaning time of the pipe 109 can be shortened.

[0063] (Example of ion generator configuration)

[0064] exist Figure 4 In the example shown, the ion generator 30 is arranged on the right side (negative side in the Y direction) of the expander 10, but the ion generator 30 may also be arranged as shown in FIG. Figure 6 As shown in FIG. 1 , the ion generator 30 is arranged on the left side (positive side in the Y direction) of the diameter expander 10. In addition, for example, the ion generator 30 may be arranged on both the right side and the left side of the diameter expander 10. However, as shown in FIG. Figure 4 As shown, when the lock lever 23 of the clamp mechanism 20 is arranged in the right region of the diameter expander 10, it is preferable that the ion generator 30 is also arranged on the right side of the diameter expander 10. The reason is as follows.

[0065] Fig. 7 (a) and Fig. 7 (b) schematically show the flow of wind blown from the ion generator 30, that is, the flow of air containing ions, using arrows. In Fig. 7 (a) and Fig. 7 (b), a part of the structure of the expander 10 is omitted from illustration.

[0066] First, in the clamping mechanism 20 in which the locking rod 23 is arranged on the right side of the movable clamp 22, if the width from the pipe 109 to the left end of the clamping mechanism 20 is compared with the width from the pipe 109 to the right end of the clamping mechanism 20, the width from the pipe 109 to the right end where the locking rod 23 is arranged is longer.

[0067] Therefore, as shown in FIG. 7A , when the ion generator 30 is disposed on the right side of the expander 10 , the wind released forward from the ion generator 30 does not easily reach the rear side (positive side in the X direction) of the clamping mechanism 20 due to collision with the clamping mechanism 20 .

[0068] On the other hand, as shown in FIG. 7B , when the ion generator 30 is disposed on the left side of the expander 10 , at least part of the wind released forward from the ion generator 30 easily passes through the left side of the clamping mechanism 20 and flows toward the rear side of the clamping mechanism 20 .

[0069] When the flow of wind to the rear side of the clamping mechanism 20 is blocked, it is possible to suppress the flying of particles existing in the environment behind the clamping mechanism 20. Therefore, from the viewpoint of suppressing the flying of such particles and suppressing the adhesion of particles to the surface of the pipe 109, it is preferred that the blowout port 31 of the ion generator 30 is located in the area of ​​the installation side of the locking rod 23 and the non-installation side.

[0070] In other words, if Figure 8 As shown in FIG. 1 , when the clamping mechanism 20 is divided into two regions A and B with the pipe axis direction C of the pipe 109 as the boundary line when the clamping mechanism 20 is viewed from above, the blowout port 31 of the ion generator 30 is preferably located in the wider region. Figure 8 In the embodiment, the width of the region B where the locking rod 23 is provided is wider than the width of the region A, so the blowing port 31 is preferably also located in the region B. In addition, the pipe axis direction C of the pipe 109 clamped by the clamping mechanism 20 coincides with the center line of the cylindrical expanding tool 11, so the above-mentioned boundary line is also the center line of the expanding tool 11.

[0071] (Other structural examples)

[0072] The ion generator 30 may also be configured to be able to adjust the air volume, ion concentration, etc. Fig. 9 As shown, a control unit 40 for controlling the operation of the ion generator 30 may be built into the main body 12 of the expander 10 to perform control of adjusting the air volume, ion concentration, etc. in the middle of a series of expansion processes. The control unit 40 is, for example, a computer equipped with a CPU, a memory, etc., and the control unit 40 has a program storage unit (not shown). Various programs including instructions for controlling the air volume adjustment, ion concentration adjustment, etc. described below are stored in the program storage unit.

[0073] The air volume adjustment control is performed, for example, as follows. First, before the pipe is fixed to the clamping mechanism 20, the ion generator 30 is turned on in advance to release air containing ions at a first air volume. Thereafter, when the operator lowers the locking lever 23 to fix the pipe, when the operator grasps the grip 13 of the expander 10, or when the operator pulls the operating lever 14 forward, the air volume is adjusted to a second air volume higher than the first air volume.

[0074] That is, by controlling the air volume during the diameter expansion process to be greater than the air volume during the non-processing process, the static elimination capability of the ion generator 30 can be increased only during the diameter expansion process in which the charging of the piping is likely to occur. In other words, before the diameter expansion process in which the charging of the piping is relatively unlikely to occur, the static elimination capability of the ion generator 30 is suppressed, thereby achieving energy saving. In addition, by suppressing the air volume before the diameter expansion process, the flying of particles around the piping processing device 1 can also be suppressed.

[0075] The ion concentration is also adjusted and controlled in the same manner as the air volume adjustment control described above. That is, first, before the pipe is fixed to the clamping mechanism 20, the ion generator 30 is turned on in advance to release air containing ions at the first ion concentration. Thereafter, when the operator lowers the locking lever 23 to fix the pipe, grasps the gripping portion 13 of the expander 10, or pulls the operating lever 14 forward, the ion concentration is adjusted to a second ion concentration higher than the first ion concentration.

[0076] That is, by controlling the ion concentration during the diameter expansion process to be higher than the ion concentration during the non-processing process, the static elimination capability of the ion generator 30 can be increased only during the diameter expansion process, which is likely to cause charging of the piping. In other words, before the diameter expansion process, which is relatively unlikely to cause charging of the piping, the static elimination capability of the ion generator 30 is suppressed, thereby achieving energy saving.

[0077] In the above, the schematic structure of the pipe processing apparatus 1 according to the present embodiment and the diameter expansion processing method using the pipe processing apparatus 1 have been described.

[0078] In addition, the pipe processing device 1 described above is a device in which the clamping mechanism 20 as a holding portion is fixed to the expander 10, but the clamping mechanism 20 may not be included as a structural element of the pipe processing device 1. For example, the pipe can be fixed to the clamping mechanism 20 fixed on a workbench (not shown), and the operator brings the pipe processing device 1 equipped with the expander 10 and the ion generator 30 close to the end of the pipe to perform the expansion process.

[0079] In the above-mentioned embodiment, the expansion tool 11 is moved forward and backward in a manner linked to the operating lever 14 operated by the operator, but the expansion tool 11 may be moved forward and backward automatically. For example, the expander may be configured so that after the pipe is fixed to the clamping mechanism 20, the operator advances the expansion tool by pressing a switch.

[0080] In the above description, as an example of piping processing, the expansion processing is illustrated, but the type of processing is not limited to the expansion, and other processing such as cutting of the piping can also be used. In addition, in the above description, the ion generator 30 is used as the static elimination unit, but the structure of the static elimination unit is not particularly limited, as long as the static elimination of the piping can be performed during the piping processing.

[0081] It should be considered that the embodiments disclosed this time are illustrative in all aspects and are not restrictive. The above-mentioned embodiments can also be omitted, replaced, and changed in various forms without departing from the attached claims, the structural examples belonging to the technical scope of the utility model described later, and the main purpose thereof. For example, the structural elements of the above-mentioned embodiments can be combined arbitrarily. By this arbitrary combination, it is of course possible to obtain the effects and effects of each structural element in the combination, and it is possible to obtain other effects and other effects that can be clearly understood by those skilled in the art from the description of this specification.

[0082] In addition, the effects described in this specification are only illustrative or exemplary, and are not restrictive. That is, the technology of the utility model can have other effects that can be clearly understood by those skilled in the art from the description of this specification in addition to or instead of the above effects.

[0083] In addition, the following structural examples also belong to the technical scope of the present invention.

[0084] (1) A piping processing device for processing piping constituting a substrate processing device, characterized in that:

[0085] The pipe processing device has:

[0086] a processing tool that processes the pipe by coming into contact with the pipe; and

[0087] The static elimination unit removes static electricity from the pipe during processing.

[0088] (2) The pipe processing device according to (1), characterized in that:

[0089] The pipe processing device includes a holding portion for holding the pipe.

[0090] The processing tool has a structure for processing the pipe while coming into contact with the pipe held by the holding portion.

[0091] (3) The pipe processing device according to (1) or (2), characterized in that:

[0092] The static elimination unit is an ion generator that emits a gas containing ions toward a portion where the processing tool and the pipe are in contact.

[0093] (4) The pipe processing device according to (3), characterized in that:

[0094] The processing tool is an expander for expanding the diameter of the pipe end.

[0095] The static eliminating unit is attached to the diameter expander and is arranged so that the gas contacts the pipe end.

[0096] (5) The pipe processing device according to (3) or (4), characterized in that:

[0097] The static elimination unit has a blow-off port for releasing the gas.

[0098] When the holding portion is divided into two regions with the pipe axial direction of the pipe fixed to the holding portion as a boundary line when the holding portion is viewed from above, the air outlet is located in the wider region of the two regions.

[0099] (6) The pipe processing device according to any one of (3) to (5), characterized in that:

[0100] The pipe processing device further includes a control unit that controls the operation of the static elimination unit.

[0101] The static elimination unit has a structure capable of adjusting the air volume of the gas.

[0102] The control unit performs control to adjust the air volume of the gas so that the air volume of the gas during the processing of the pipe is larger than the air volume of the gas during the non-processing of the pipe.

[0103] (7) The pipe processing device according to any one of (1) to (6), characterized in that:

[0104] The pipe processing device further includes a control unit that controls the operation of the static elimination unit.

[0105] The static elimination unit has a structure capable of adjusting the concentration of ions.

[0106] The control unit performs control to adjust the ion concentration so that the ion concentration during the processing of the pipe is higher than the ion concentration during the non-processing of the pipe.

[0107] (8) A piping processing method for processing piping constituting a substrate processing apparatus, characterized in that:

[0108] The pipe is processed while static electricity is removed from the pipe using a processing tool that processes the pipe by coming into contact with the pipe.

[0109] (9) The pipe processing method according to (8), characterized in that:

[0110] The pipe is processed while a gas containing ions collides with a portion of the processing tool that contacts the pipe using an ion generator mounted on the processing tool.

[0111] (10) The pipe processing method according to (9), characterized in that:

[0112] The processing tool is a diameter expander for expanding the diameter of the pipe end portion, and the pipe is processed while the gas collides with the pipe end portion.

[0113] (11) The pipe processing method according to (9) or (10), characterized in that:

[0114] The static elimination is performed so that the air volume of the gas during the processing of the pipe is larger than the air volume of the gas during the non-processing of the pipe.

[0115] (12) The pipe processing method according to any one of (8) to (11), characterized in that:

[0116] The static elimination is performed so that the ion concentration during the processing of the pipe is higher than the ion concentration during the non-processing of the pipe.

Claims

1. A piping processing device for processing piping constituting a substrate processing device, characterized in that: The pipe processing device has: a processing tool that processes the pipe by coming into contact with the pipe; and The static elimination unit removes static electricity from the pipe during processing.

2. The pipe processing device according to claim 1, characterized in that: The pipe processing device includes a holding portion for holding the pipe. The processing tool has a structure for processing the pipe while coming into contact with the pipe held by the holding portion.

3. The pipe processing device according to claim 2, characterized in that: The static elimination unit is an ion generator that emits a gas containing ions toward a portion where the processing tool and the pipe are in contact.

4. The pipe processing device according to claim 3, characterized in that: The processing tool is an expander for expanding the diameter of the pipe end. The static eliminating unit is attached to the diameter expander and is arranged so that the gas contacts the pipe end.

5. The pipe processing device according to claim 3 or 4, characterized in that: The static elimination unit has a blow-off port for releasing the gas. When the holding portion is divided into two regions with the pipe axial direction of the pipe fixed to the holding portion as a boundary line when the holding portion is viewed from above, the air outlet is located in the wider region of the two regions.

6. The pipe processing device according to claim 3 or 4, characterized in that: The pipe processing device further includes a control unit that controls the operation of the static elimination unit. The static elimination unit has a structure capable of adjusting the air volume of the gas. The control unit performs control to adjust the air volume of the gas so that the air volume of the gas during the processing of the pipe is larger than the air volume of the gas during the non-processing of the pipe.

7. The pipe processing device according to claim 3 or 4, characterized in that: The pipe processing device further includes a control unit that controls the operation of the static elimination unit. The static elimination unit has a structure capable of adjusting the concentration of the ions. The control unit performs control to adjust the ion concentration so that the ion concentration during the processing of the pipe is higher than the ion concentration during the non-processing of the pipe.

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