Equipment for preparing perovskite battery thin film

Abstract

The utility model relates to equipment for preparing a perovskite battery thin film, and the equipment comprises a spraying head frame assembly which is used for moving a spraying head assembly to a spraying station, and comprises a vertical movement module which is connected with the spraying head assembly and is used for driving at least part of the spraying head assembly to move in the vertical direction; and the horizontal movement module is connected with the vertical movement module and used for driving the vertical movement module to move in the horizontal direction. The equipment can be used for efficiently and accurately preparing the perovskite thin film layer of the perovskite solar cell.

Description

Technical Field

[0001] The present disclosure generally relates to the technical field of preparing perovskite battery thin films, and in particular, to a device for preparing perovskite battery thin films. Background Art

[0002] Perovskite solar cells are solar cells that use perovskite-type organic metal halide semiconductors as light-absorbing materials. Perovskite solar cells are generally considered to be the third generation of solar cells that will replace silicon-based solar cells because of their advantages such as high photoluminescence lifetime, mobility, and power conversion efficiency (PCE), and low material cost.

[0003] Traditional equipment for preparing perovskite solar cells has poor accuracy and efficiency in preparing thin films. Utility Model Content

[0004] The present disclosure provides a device for preparing a perovskite cell thin film, which can prepare a perovskite thin film layer of a perovskite solar cell with high efficiency and accuracy.

[0005] According to a first aspect of the present disclosure, a device for preparing a perovskite battery thin film is provided. The device comprises: a substrate moving assembly for moving the substrate to a spraying station; a spray head frame assembly for moving the spray head assembly to the spraying station; and a spray head assembly, which is arranged on the spray head frame assembly and is used to spray a solution to be sprayed on the substrate, wherein the solution to be sprayed comprises a perovskite precursor solution or a reaction component solution for reacting to generate a perovskite precursor solution.

[0006] In some embodiments, the spray head frame assembly includes: a vertical motion module connected to the spray head assembly, used to drive at least part of the spray head assembly to move in a vertical direction; and a horizontal motion module connected to the vertical motion module, used to drive the vertical motion module to move in a horizontal direction.

[0007] In some embodiments, the nozzle assembly includes: a first nozzle assembly for spraying a first type of solution to be sprayed; and a second nozzle assembly for spraying a second type of solution to be sprayed; and the horizontal motion module is also used to drive the vertical motion module to move in a horizontal direction so as to move the first nozzle assembly or the second nozzle assembly to the spraying station.

[0008] In some embodiments, the spray head assembly includes: a spray head for spraying the solution to be sprayed; and a first mist suction assembly, the first mist suction assembly includes: a mist suction cavity formed by a plurality of shell walls, the mist suction cavity surrounding the spray head; a mist suction through hole, arranged on at least one of the plurality of shell walls to connect the inside and outside of the mist suction cavity; a first mist suction pipeline, connected between the mist suction cavity and the mist suction fan; and a mist suction fan.

[0009] In some embodiments, the plurality of shell walls include a top wall and a bottom wall opposite to the top wall, and the middle portion of the bottom wall is higher than both ends of the bottom wall, so that the liquid accumulated in the mist absorption cavity flows to the two ends of the bottom wall.

[0010] In some embodiments, the nozzle assembly also includes a second mist suction assembly, which includes: a cover body, which surrounds the nozzle, and an opening is provided at the lower part of the cover body; an edge assembly, which is connected to the cover body and surrounds the opening of the cover body, a cavity is provided in the edge assembly, and a gap connected to the cavity is provided between the edge assembly and the cover body so that mist can enter the cavity; and a second mist suction pipeline, which is connected between the cavity of the edge assembly and the mist suction fan.

[0011] In some embodiments, the middle of the cavity is higher than the two ends of the cavity, so that the liquid accumulated in the cavity flows to the two ends of the cavity.

[0012] In some embodiments, the cover body surrounds the mist absorbing cavity of the first mist absorbing assembly, and the mist absorbing cavity is provided with a top screw abutting against the inner wall of the cover body to prevent the first mist absorbing assembly from shaking relative to the cover body.

[0013] In some embodiments, the spray head frame assembly also includes: a first lifting platform, which is arranged on the horizontal motion module and is used to drive the first connecting structure to lift and lower; and a first connecting structure, which includes: a crossbeam, which is arranged in the horizontal direction and is connected to the first lifting platform, and the two ends of the crossbeam respectively extend beyond the opposite sides of the first lifting platform along the first direction; and a trapezoidal frame, which is arranged in the vertical direction, the upper base of the trapezoidal frame is connected to one end of the crossbeam, and the lower base of the trapezoidal frame has a first extension portion and a second extension portion, the first extension portion and the second extension portion respectively extend beyond the opposite sides of the first lifting platform along the second direction, the first direction is perpendicular to the second direction, and at least one of the first extension portion and the second extension portion is connected to the corresponding second mist suction assembly.

[0014] In some embodiments, the substrate moving assembly includes: a substrate carrier plate for carrying the substrate; and a heating platform disposed below the substrate carrier plate and in contact with the substrate carrier plate for heating the substrate.

[0015] In some embodiments, the device also includes a moisturizing liquid receiving assembly, which includes: a liquid receiving tray, on which a water absorption component is provided; and a second lifting platform, which is arranged below the liquid receiving tray and is used to drive the liquid receiving tray to rise and fall so that the needle tip of the spray needle of the nozzle assembly is immersed in the water absorption component for moisturizing.

[0016] In some embodiments, the device also includes: a filter paper upper and lower line assembly, used to move the filter paper on the filter paper tray to the substrate carrier of the substrate movement assembly so as to cooperate with the substrate on the substrate carrier, and to remove the sprayed filter paper from the substrate carrier; and a filter paper tray, used to carry the filter paper, and a paper separating pin is provided at the edge of the filter paper tray.

[0017] In some embodiments, the device also includes a substrate tray assembly, which includes: a support plate; a slide rail assembly, which is arranged on the support plate; a substrate tray, which is arranged on the slide rail assembly, and a plurality of substrate placement areas are arranged on the substrate tray, and limiting steps extending along a first direction are arranged between adjacent substrate placement areas, and each substrate placement area is provided with a groove extending along a second direction; and a cylinder assembly, which is connected to the substrate tray and is used to drive the substrate tray to move along the slide rail assembly.

[0018] In some embodiments, the substrate moving assembly further includes: a first negative pressure adsorption assembly configured to generate negative pressure so as to adsorb the substrate onto the surface of the substrate carrier.

[0019] In some embodiments, the substrate carrier is provided with an adsorption hole connected to the upper surface of the substrate carrier, and the first negative pressure adsorption component is connected to the adsorption hole to generate negative pressure to adsorb the substrate set on the upper surface of the substrate carrier onto the surface of the substrate carrier.

[0020] According to a second aspect of the present disclosure, a spraying method is provided. The method is implemented using the device according to the first aspect of the present disclosure. The method comprises: moving a substrate to a spraying station via a substrate moving assembly; moving a spray head assembly to the spraying station via a spray head frame assembly; and spraying a solution to be sprayed onto the substrate via the spray head assembly.

[0021] In some embodiments, the method also includes: grabbing the substrate on the substrate tray to the substrate moving component via the substrate grabbing component; moving the filter paper on the filter paper tray to the substrate moving component via the filter paper upper and lower line component so as to cooperate with the substrate on the substrate moving component; removing the sprayed filter paper from the substrate carrier via the filter paper upper and lower line component; moving the sprayed substrate to the drying station via the substrate moving component; and drying the sprayed substrate via the drying component.

[0022] In some embodiments, the method further includes: causing the nozzle assembly and the liquid receiving tray of the moisturizing liquid receiving assembly to move relative to each other so that the needle tip of the nozzle needle of the nozzle assembly is immersed in the water absorbing component of the moisturizing liquid receiving assembly to moisturize the needle tip of the nozzle needle.

[0023] In some embodiments, the nozzle assembly includes a first nozzle assembly and a second nozzle assembly, the first nozzle assembly is used to spray a first type of solution to be sprayed, and the second nozzle assembly is used to spray a second type of solution to be sprayed; the nozzle assembly is moved to a spraying station via a spray head frame assembly, and spraying the solution to be sprayed on the substrate via the nozzle assembly includes: moving the first nozzle assembly to the spraying station so as to spray the first type of solution to be sprayed on the substrate; after the substrate sprayed with the first type of solution to be sprayed is dried, moving the substrate to the spraying station; and moving the second nozzle assembly to the spraying station so as to spray the second type of solution to be sprayed on the substrate.

[0024] In some embodiments, the method further includes: before spraying the solution to be sprayed on the substrate, performing plasma laser treatment on the surface of the substrate.

[0025] In some embodiments, drying the sprayed substrate via a drying component includes: starting a vacuum pump of the drying component to allow the internal cavity of the drying component to reach a predetermined vacuum degree; matching the sprayed substrate with a suction cup of the drying component; and opening a drying valve of the drying component to allow the internal cavity of the drying component to communicate with the sprayed substrate, so as to perform instantaneous decompression drying on the sprayed substrate.

[0026] The utility model summary is provided to introduce a selection of concepts in a simplified form, which will be further described in the following detailed description. The utility model summary is not intended to identify the key features or essential features of the present disclosure, nor is it intended to limit the scope of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A schematic diagram showing a portion of a device for preparing a perovskite battery thin film according to an embodiment of the present disclosure is shown.

[0028] Figure 2 A partial schematic diagram of an apparatus for preparing a perovskite battery thin film according to an embodiment of the present disclosure is shown.

[0029] Figure 3 A schematic cross-sectional view of a spray head assembly according to an embodiment of the present disclosure is shown.

[0030] Figure 4 A schematic diagram of a first mist suction assembly according to an embodiment of the present disclosure is shown.

[0031] Figure 5A schematic diagram of a first mist suction assembly according to an embodiment of the present disclosure is shown.

[0032] Figure 6 A schematic diagram of a second mist suction assembly according to an embodiment of the present disclosure is shown.

[0033] Figure 7 A schematic cross-sectional view of a second mist absorbing assembly according to an embodiment of the present disclosure is shown.

[0034] Figure 8 A partial cutaway schematic diagram of the second mist absorbing assembly of an embodiment of the present disclosure is shown.

[0035] Fig. 9 A partial schematic diagram of a second mist suction assembly according to an embodiment of the present disclosure is shown.

[0036] Fig.10 A schematic diagram showing a portion of a spray head frame assembly according to an embodiment of the present disclosure is shown.

[0037] Fig.11 A schematic diagram showing a portion of a spray head frame assembly according to an embodiment of the present disclosure is shown.

[0038] Fig.12 A schematic structural diagram of a substrate support plate assembly according to an embodiment of the present disclosure is shown.

[0039] Fig.13 A schematic diagram of a substrate tray according to an embodiment of the present disclosure is shown.

[0040] Fig.14 A schematic diagram showing a portion of a substrate tray according to an embodiment of the present disclosure is shown.

[0041] Fig.15 A schematic diagram of a moisturizing liquid-connecting assembly according to an embodiment of the present disclosure is shown.

[0042] Fig.16 A schematic diagram of a filter paper tray according to an embodiment of the present disclosure is shown.

[0043] Fig.17 A flow chart of a spraying method according to an embodiment of the present disclosure is shown.

[0044] Fig.18 A flow chart of a spraying method according to an embodiment of the present disclosure is shown.

[0045] Fig.19 A flow chart of a spraying method according to an embodiment of the present disclosure is shown.

[0046] Fig. 20 A schematic block diagram of an example electronic device that can be used to implement the method of an embodiment of the present disclosure is shown.

[0047] Fig.21A schematic structural diagram of a drying assembly of the present disclosure is shown.

[0048] Fig. 22 A schematic diagram of a substrate movement assembly according to an embodiment of the present disclosure is shown.

[0049] Fig.23 A schematic diagram showing a portion of a substrate moving assembly according to an embodiment of the present disclosure is shown.

[0050] Fig.24 A schematic diagram showing a portion of a substrate moving assembly according to an embodiment of the present disclosure is shown.

[0051] Fig.25 A schematic diagram of a jacking assembly according to an embodiment of the present disclosure is shown.

[0052] In the various drawings, the same or corresponding reference numerals represent the same or corresponding parts. DETAILED DESCRIPTION

[0053] The preferred embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the preferred embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to make the present disclosure more thorough and complete, and to fully convey the scope of the present disclosure to those skilled in the art.

[0054] As used herein, the term "including" and its variations mean open inclusion, i.e., "including but not limited to". Unless otherwise stated, the term "or" means "and / or". The term "based on" means "based at least in part on". The terms "an example embodiment" and "an embodiment" mean "at least one example embodiment". The term "another embodiment" means "at least one additional embodiment". The terms "first", "second", etc. may refer to different or the same objects.

[0055] As described above, conventional methods for preparing perovskite solar cells include, for example, spin coating and vapor deposition. Conventional preparation methods have defects such as poor uniformity and thus poor film quality.

[0056] In order to at least partially solve one or more of the above problems and other potential problems, the exemplary embodiment of the utility model proposes a device, which moves the substrate to the spraying station based on the substrate movement component, moves the spray head assembly to the spraying station based on the spray head frame component; and sprays the spray solution to be sprayed on the substrate based on the spray head assembly. The operation of preparing the perovskite thin film layer of the perovskite solar cell with high efficiency and high quality can be realized.

[0057] The following is an exemplary description of the equipment used to prepare the perovskite battery film with reference to the accompanying drawings. Figure 1A partial schematic diagram of an apparatus 100 for preparing a perovskite battery thin film according to an embodiment of the present disclosure is shown. Figure 2 A partial schematic diagram of an apparatus 100 for preparing a perovskite battery film according to an embodiment of the present disclosure is shown. For ease of explanation, arrows are used to indicate the directions of the X-axis, Y-axis, and Z-axis in the figure. The apparatus 100 includes a substrate motion component 102, a spray head rack component 104, and a nozzle component 106. In some embodiments, the apparatus 100 further includes a moisturizing liquid receiving component 108, a filter paper upper and lower line component 110, a filter paper tray 112, and a substrate tray component 114. The main bodies of the substrate motion component 102, the spray head rack component 104, and the nozzle component 106 are, for example, arranged on a base 103 by a bracket. The apparatus 100 further includes, for example, a control device (not shown in the figure), which is used to generate control instructions to control the actions of related components and devices, thereby realizing the preparation process of the perovskite battery film.

[0058] Regarding the substrate movement component 102, it is used to move the substrate 101 to the spraying station. It should be understood that the spraying station is a station set up to implement the spraying operation. The substrate movement component includes, for example, a substrate carrier 151, a heating platform 152, and a linear motor 153. The substrate carrier 151 is used to carry the substrate. The heating platform 152 is arranged below the substrate carrier 151 and contacts the substrate carrier 151 for heating the substrate. The heating platform 152 is arranged on the hollow plate 1214, and the hollow plate 1214 is connected to the linear motor 153. The linear motor 153 drives the hollow plate 1214, the heating platform 152 and the substrate carrier 151 to move so as to move the substrate 101 on the substrate carrier 151 to the target position (e.g., the spraying station).

[0059] Regarding the spray head frame assembly 104 , it is used to move the spray head assembly 106 to the spraying station so as to implement the spraying operation using the spray head assembly 106 .

[0060] Regarding the spray head assembly 106, it is arranged on the spray head frame assembly 104 so as to be driven by the spray head frame assembly 104. The spray head assembly 106 is used to spray the solution to be sprayed on the substrate 101. The solution to be sprayed includes a perovskite precursor solution or a reaction component solution for reacting to generate a perovskite precursor solution.

[0061] The spray head frame assembly 104 includes a support 201 , a horizontal motion module 202 , and a vertical motion module 203 .

[0062] The support 201 is used to support the horizontal motion module 202 and the vertical motion module 203. The horizontal motion module 202 is, for example, disposed on the support 201. The horizontal motion module 202 includes a linear motor.

[0063] Regarding the vertical motion module 203, it is connected to the nozzle assembly 106 and is used to drive at least part of the nozzle assembly 106 to move in the vertical direction (e.g., the Z-axis direction). For example, the nozzle assembly 106 includes a nozzle, and the vertical motion module 203 is used to drive the nozzle to move in the vertical direction. The vertical motion module 203 can be, for example, a linear motor.

[0064] Regarding the horizontal motion module 202, it is connected to the vertical motion module 203 and is used to drive the vertical motion module 203 to move in the horizontal direction (e.g., the Y-axis direction). It should be understood that the nozzle assembly 106 is connected to the vertical motion module 203, and when the horizontal motion module 202 drives the vertical motion module 203 to move in the horizontal direction, the nozzle assembly 106 moves synchronously with the vertical motion module 203. The vertical motion module 203 is connected to the horizontal motion module 202, for example, through the bracket 2311.

[0065] Based on the vertical motion module 203 and the horizontal motion module 202 , the nozzle assembly 106 can be moved in the vertical direction and the horizontal direction, so as to move the nozzle assembly 106 to the target position (eg, the spraying station).

[0066] In some embodiments, the nozzle assembly includes, for example, a first nozzle assembly 204, a second nozzle assembly 205, and a third nozzle assembly 206. The first nozzle assembly 204 and the second nozzle assembly 205 are arranged along the Y-axis direction (i.e., parallel to the movement direction of the horizontal motion module 202), and the first nozzle assembly 204 and the second nozzle assembly 205 are respectively arranged on both sides of the vertical motion module 203. The first nozzle assembly 204 and the third nozzle assembly 206 are arranged along the X-axis direction (i.e., perpendicular to the movement direction of the horizontal motion module 202). The first nozzle assembly 204 and the third nozzle assembly 206 are respectively arranged on both sides of the horizontal motion module 202.

[0067] Among them, the first nozzle assembly 204 is used to spray the first type of solution to be sprayed; the second nozzle assembly 205 is used to spray the second type of solution to be sprayed; the third nozzle assembly 206 is used, for example, to spray the third type of solution to be sprayed. In the process of preparing the perovskite battery film, the first nozzle assembly 204, the second nozzle assembly 205, and the third nozzle assembly 206 can be moved to the spraying station in sequence according to the predetermined process, so as to spray the corresponding solutions in sequence, thereby realizing the preparation of the corresponding film. For example, the first nozzle assembly 204 or the second nozzle assembly 205 can be moved to the spraying station by using the horizontal motion module 202 to drive the vertical motion module 203 to move in the horizontal direction.

[0068] Figure 3A schematic cross-sectional view of a nozzle assembly of an embodiment of the present disclosure is shown. Regarding the nozzle assembly 106, it includes, for example, a nozzle 207 and a mist suction device. The nozzle is used to spray the liquid to be sprayed. The mist suction device is arranged in conjunction with the nozzle to absorb at least part of the mist formed by the liquid to be sprayed sprayed from the nozzle.

[0069] The mist absorbing device includes a first mist absorbing assembly 208 and a second mist absorbing assembly 209. The first mist absorbing assembly 208 is, for example, an upper mist absorbing assembly, and the second mist absorbing assembly 209 is, for example, a side mist absorbing assembly.

[0070] Figure 4 A schematic diagram of a first mist suction assembly according to an embodiment of the present disclosure is shown. Figure 5 A schematic diagram of the first mist suction component of an embodiment of the present disclosure is shown. Regarding the first mist suction component 208, it includes, for example, a mist suction cavity 210, a mist suction through hole 211, a first mist suction pipeline (not shown in the figure), and a mist suction fan 213. The mist suction cavity 210 is formed by being surrounded by a plurality of shell walls, and the mist suction cavity 210 surrounds the nozzle 207. The mist suction through hole 211 is provided on at least one of the plurality of shell walls so that the interior of the mist suction cavity 210 is connected with the outside. The first mist suction pipeline is connected between the mist suction cavity 210 and the mist suction fan. For example, a mist suction pipeline connector 212 is provided on the mist suction cavity 210 for docking with the first mist suction pipeline.

[0071] The multiple shell walls used to form the mist suction chamber 210 include, for example, a top wall 2113 and a bottom wall 214 opposite to the top wall 2113, and also include multiple side walls. The multiple side walls include, for example, an inner side wall 215 close to the nozzle 207 and an outer side wall 216 away from the nozzle 207. For example, a mist suction through hole 211 is provided on each shell wall except the top wall 2113. The mist suction through hole 211 is, for example, in the shape of a slit. In some embodiments, the mist suction through hole 211 can also be a variety of optional shapes such as a circular hole, a triangle, and a wave shape. It should be understood that after the mist suction fan 213 is started, the mist is sucked into the mist suction chamber 210 through the mist suction through hole 211, and then enters the mist suction fan 213 through the first mist suction pipeline. A filter device 218 is provided at the mist suction fan 213, and the mist is discharged after being filtered by the filter device 218.

[0072] It is worth noting that in some embodiments, a mist absorption hole 211 is provided on the outer wall 216 to improve the mist absorption effect. For example, the mist absorption hole 211 of the outer wall 216 can facilitate the mist at the cover 291 close to the second mist absorption component 209 to be absorbed into the mist absorption cavity 210.

[0073] In some embodiments, the middle of the bottom wall 214 is higher than the two ends of the bottom wall 214, so that the liquid accumulated in the mist absorption cavity 210 flows to the two ends of the bottom wall 214. For example, the cross-section of the bottom wall 214 is in the shape of a "human". In the process of preparing the perovskite battery film, the substrate 101 is moved to the printing station, for example, along the Y-axis direction, and the nozzle 207 is moved, for example, along the Y-axis direction for real-time spraying operation. In this process, the two ends of the bottom wall 214 span the two sides of the substrate 101, that is, the two ends of the bottom wall 214 extend to the outside of the two sides of the substrate 101. Therefore, even if the mist absorption cavity 210 accumulates liquid, it will flow to the two ends of the bottom wall 214. Even if liquid drips from the mist absorption cavity 210, it will only occur at the two ends of the bottom wall 214, and not in the middle of the bottom wall 214. Therefore, the second mist absorption component 209 can effectively avoid contaminating the substrate 101 due to the dripping of the accumulated liquid.

[0074] In some embodiments, the mist absorption cavity 210 surrounds the nozzle 207. That is, the mist absorption cavity structure formed by the multiple shell walls has a hole structure 219, and the main body of the nozzle 207 passes through the hole structure 219. The nozzle 207 is connected and fixed to the first mist absorption component 208 through the first connecting mechanism 220. The first mist absorption component 208 and the nozzle 207 are connected and fixed to the vertical motion module 203, for example, through a hanging plate 221. The nozzle 207 moves with the first mist absorption component 208 following the vertical motion module 203. It should be understood that the spray needle of the nozzle 207 is not higher than the first mist absorption component 208.

[0075] Figure 6 A schematic diagram of a second mist suction assembly according to an embodiment of the present disclosure is shown. Figure 7 A schematic cross-sectional view of a second mist absorbing assembly according to an embodiment of the present disclosure is shown. Figure 8 A partial cutaway schematic diagram of the second mist absorbing assembly of an embodiment of the present disclosure is shown. Fig. 9A partial schematic diagram of the second mist suction assembly of an embodiment of the present disclosure is shown. Regarding the second mist suction assembly 209, it includes, for example, a cover body 291, an edge assembly 292, and a second mist suction pipeline (not shown in the figure). The cover body 291 surrounds the nozzle 207, and an opening is provided at the lower part of the cover body 291. The edge assembly 292 is connected to the cover body 291 and surrounds the opening of the cover body 291. A cavity 293 is provided in the edge assembly 292, and a gap 294 connected to the cavity 293 is provided between the edge assembly 292 and the cover body 291 so that the mist enters the cavity 293. For example, the edge assembly 292 is arranged on the outer side wall of the cover body 291, and a closed structure is formed between the upper part of the edge assembly 292 (for example, the part above the cavity 293) and the cover body 291 (to avoid the release of mist), and a gap 294 is provided between the lower part of the edge assembly 292 (for example, the part below the cavity 293) and the cover body 291. The second mist suction pipeline is connected between the cavity 293 of the edge component and the mist suction fan 213. The edge component 292 is provided with a joint 295, for example, which is connected to the cavity 293 and is used to connect with the second mist suction pipeline.

[0076] In some embodiments, the middle of the cavity 293 is higher than both ends of the cavity 293, so that the liquid accumulated in the cavity 293 flows to both ends of the cavity 293. This structure can effectively prevent the liquid accumulated in the cavity 293 from dripping and contaminating the substrate 101.

[0077] In some embodiments, the cover 291 surrounds the nozzle 207 and the first mist absorbing assembly 208. For example, the cover 291 surrounds the mist absorbing cavity 210 of the first mist absorbing assembly 208, and the mist absorbing cavity 210 is provided with a top screw (not shown in the figure) that abuts against the inner wall of the cover 291, so as to prevent the first mist absorbing assembly 208 from shaking relative to the cover 291. For example, an L-shaped mounting plate 222 is provided on the top wall 2113 of the first mist absorbing assembly 208, and a through hole for mounting the top screw is provided on the L-shaped mounting plate 222.

[0078] The spray head assembly 106 further includes a syringe pump 2314, which is in communication with the spray head 207 and is used to deliver the solution to be sprayed to the spray head 207. The syringe pump 2314 is disposed on the syringe pump bracket 2313.

[0079] Fig.10 A schematic diagram showing a portion of a spray head frame assembly according to an embodiment of the present disclosure is shown. Fig.11 A partial schematic diagram of the spray head frame assembly of an embodiment of the present disclosure is shown. The spray head frame assembly 104 also includes a first lifting platform 241 and a first connecting structure. The first lifting platform 241 is arranged on the horizontal motion module 202, and is used to drive the first connecting structure to rise and fall. The first connecting mechanism is connected to the second mist suction component 209, so that the second mist suction component 209 rises and falls with the first connecting mechanism.

[0080] The first connection structure includes a crossbeam 242 and a trapezoidal frame 243. The crossbeam 242 is arranged in the horizontal direction and connected to the first lifting platform 241, and the two ends of the crossbeam 242 respectively exceed the opposite sides of the first lifting platform 241 along the first direction (for example, the Y-axis direction). The trapezoidal frame 243 is arranged in the vertical direction, the upper bottom side 244 of the trapezoidal frame 243 is connected to one end of the crossbeam 242, and the lower bottom side 245 of the trapezoidal frame 243 has a first extension portion 246 and a second extension portion 247, and the first extension portion 246 and the second extension portion 247 respectively exceed the opposite sides of the first lifting platform 241 along the second direction (for example, the X-axis direction). The first direction is perpendicular to the second direction. At least one of the first extension portion 246 and the second extension portion 247 is connected to the corresponding second mist suction assembly 208. For example, the first extension portion 246 is connected to the first nozzle assembly 204, and the second extension portion 247 is connected to the third nozzle assembly 206.

[0081] It should be understood that the lifting and lowering of the second mist absorbing assembly 208 is driven by the first lifting platform 241. The first lifting platform 241 is arranged on the horizontal motion module 202, and is driven by the horizontal motion module 202 to perform horizontal motion. The first lifting platform 241 is connected to the second mist absorbing assembly 208 through a first connecting structure. Among them, the first connecting structure includes a crossbeam 242, which is arranged in the horizontal direction and connected to the first lifting platform 241. The lower bottom edge of the trapezoidal frame 243 is connected to the second mist absorbing assembly 208. The crossbeam 242 extends, for example, in the direction of movement of the horizontal motion module 202. The crossbeam 242 spans both sides of the vertical motion module 203. A trapezoidal frame 243 is respectively arranged at both ends of the crossbeam 242. The trapezoidal frame 243 extends, for example, along the X-axis direction. The shorter upper bottom side of the trapezoidal frame 243 is connected to the crossbeam, and the longer lower bottom side of the trapezoidal frame spans both sides of the horizontal motion module 202 along the X-axis direction, so that a second mist suction assembly 208 can be installed on each side of the horizontal motion module 202. Therefore, a plurality of second mist suction assemblies 208 can be installed on the first connection structure. Accordingly, a plurality of nozzles 207 can be installed on the second connection structure. In some embodiments, a plurality of nozzles 207 can be used to spray different liquids, respectively, so as to cooperate with a plurality of different spraying processes. For example, in order to form a thin perovskite film of a solar cell, it is necessary to spray a perovskite precursor solution or a reaction component solution on the substrate according to the target process. In this process, different nozzles 207 can be used to spray different solutions in sequence.

[0082] It is worth noting that, during the spraying process, the horizontal motion module 202 can be used to move the corresponding nozzle assembly to the printing station so as to correspond to the substrate 101 at the printing station. Then, the height of the nozzle 207 is adjusted by the vertical motion module 203 so that the nozzle 207 is at a better spraying height. In addition, the height of the second mist suction component 208 is adjusted by the first lifting platform 241 so that the second mist suction component 208 is at a better height, for example, so that the edge component of the second mist suction component 208 cooperates with the substrate carrier 151 of the substrate motion component 102 (for example, the two fit together). Then, the mist suction fan 213 is started, and the first mist suction component 208 and the second mist suction component 209 start working. Then, the control device controls the nozzle 207 to spray the corresponding solution on the substrate 101. During the spraying process, the first mist suction component 208 and the second mist suction component 209 absorb the mist generated during the spraying process, which can effectively prevent the mist generated during the spraying process from floating in the air, thereby effectively avoiding pollution to the air and / or printing equipment.

[0083] Before the substrate 101 is placed on the substrate moving assembly 102 , the substrate 101 is placed on the substrate support assembly 114 . Fig.12 A schematic structural diagram of a substrate support plate assembly 114 according to an embodiment of the present disclosure is shown. Fig.13 A schematic diagram of a substrate tray according to an embodiment of the present disclosure is shown. Fig.14 A partial schematic diagram of a substrate tray of an embodiment of the present disclosure is shown. The substrate tray assembly 114 includes a support plate 142, a slide rail assembly 145, a substrate tray 141, and a cylinder assembly 143. The slide rail assembly 145 is disposed on the support plate 142. The substrate tray 141 is disposed on the slide rail assembly 145, and a plurality of substrate placement areas 146 are disposed on the substrate tray 141. A limiting step 147 extending along a first direction is disposed between adjacent substrate placement areas 146, and each substrate placement area 146 is provided with a groove 148 extending along a second direction. The cylinder assembly 143 is connected to the substrate tray 141, and is used to drive the substrate tray 141 to move along the slide rail assembly 145. In a specific implementation, the slide rail assembly 145 includes a slide rail 1481 connected to the support plate 142, and a slider 149 disposed on the slide rail and capable of sliding along the slide rail 1481. The support plate 1411 is connected to the slider 149 , and the substrate tray 141 is disposed on the support plate 1411 .

[0084] The upper surface of the substrate tray 141 is used to carry the substrate 101 . The substrate grabbing assembly can grab the original substrate 101 from the substrate tray 141 , and place the substrate 101 after the spraying process on the substrate tray 141 .

[0085] The upper surface of the substrate tray 141 is provided with a limiting step 147 arranged along a first direction and a groove 148 arranged along a second direction. The first direction is, for example, the width direction of the substrate tray 141, and the second direction is, for example, the length direction of the substrate tray 141. For example, a plurality of substrates 101 can be arranged along the second direction on the substrate tray 141. The limiting step 147 can separate adjacent substrates 101 and limit the substrate 101, so that the substrate 101 can be placed and taken out easily.

[0086] In some embodiments, the width of the substrate tray 141 is smaller than the corresponding width of the substrate 101. That is, the substrate 101 extends beyond the edge of the substrate tray 141 along the first direction to facilitate the substrate 101 to be grasped by a substrate grasping component (eg, a clamp).

[0087] It is worth noting that the grooves on the substrate tray 141 can make the substrate tray 141 adapt to substrates 101 of different sizes. For example, for a substrate 101 of smaller size, when it is placed, one edge of the substrate 101 can extend beyond the edge of the substrate tray 141, so that the other opposite edge of the substrate 101 extends to the top of the groove 148. In this way, it is also convenient for the clamp to grasp the substrate. It should be noted that the number of grooves 148 is, for example, greater than or equal to two, so as to adapt to substrates 101 of more sizes. In addition, when placed, the two opposite edges of the substrate 101 can also be respectively located above the two grooves 148 so that the clamp can grasp the substrate 101.

[0088] The cylinder assembly 143 is disposed on the support upright plate 142, and is used to drive the substrate tray 141 to move along the slide rail assembly 145. The cylinder assembly 143 is provided with a position sensor 144 and a speed regulating device 1441. Based on the position sensor 144, the height of the substrate tray 141 can be determined. The speed regulating device 1441 can be used to adjust the speed at which the cylinder assembly 143 drives the substrate tray 141 to move.

[0089] Fig.15A schematic diagram of a moisturizing liquid receiving assembly 108 of an embodiment of the present disclosure is shown. The moisturizing liquid receiving assembly 108 includes a liquid receiving tray 181 and a second lifting platform 182. A water absorbing component 183 is provided on the liquid receiving tray 181. The second lifting platform 182 is arranged below the liquid receiving tray 181, and is used to drive the liquid receiving tray 181 to rise and fall, so that the tip of the spray needle of the nozzle assembly 106 is immersed in the water absorbing component 183, so as to moisturize the tip of the spray needle. The water absorbing component 183 is, for example, a water absorbing sponge. A drainage hole 184 is also provided at the bottom of the liquid receiving tray 181, so as to discharge liquid. The second lifting platform is arranged below the liquid receiving tray, and is used to drive the liquid receiving tray to rise and fall. When the spraying operation is not performed, the nozzle and the liquid receiving tray 181 can be moved relative to each other, so that the tip of the spray needle of the nozzle is immersed in the water absorbing component, so as to moisturize the tip of the spray needle. The second lifting platform 182 is, for example, a scissor-type lifting platform.

[0090] The filter paper upper and lower line assembly 110 is used to move the filter paper 1102 on the filter paper tray 112 to the substrate carrier 151 of the substrate moving assembly 102 so as to cooperate with the substrate 101 on the substrate carrier 151, and to remove the sprayed filter paper 101 from the substrate carrier 151. For example, a suction cup is provided on the filter paper upper and lower line assembly 110 to absorb the filter paper 1102. The suction cup can also be used to absorb the used filter paper and place it on the waste filter paper tray.

[0091] Fig.16 A schematic diagram of a filter paper tray 112 of an embodiment of the present disclosure is shown. Regarding the filter paper tray 112, it is used to carry the filter paper 1102, and a paper separation nail 1121 is provided at the edge of the filter paper tray 112. For example, the four corners of the filter paper tray 112 are respectively provided with a rib 1122 that is higher than the upper surface of the filter paper tray. A paper separation nail 1121 is provided on the side of the rib 1122 facing the filter paper tray 112. The paper separation nail 1121 has a predetermined height from the upper surface of the filter paper tray 112 in the height direction. The paper separation nail 1121 has a determined distance from the corresponding baffle 1122 in the width (or length) direction. Among them, the distance between two opposite paper separation nails 1121 is smaller than the size of the filter paper 1102.

[0092] Multiple sheets of filter paper 1102 can be stacked on the filter paper tray 112 and located between the upper surface of the filter paper tray 112 and the paper separation pin 1121. The filter paper upper and lower line assembly 110 absorbs the filter paper 1102 on the uppermost layer through the suction cup, and the filter paper 1102 on the lower layer may move upward with it. The paper separation pin 1121 has a blocking effect on the upward movement of the filter paper 1102. Since the attraction force received by the filter paper 1102 on the lower layer is not enough to counteract the blocking of the paper separation pin 1121, the filter paper 1102 on the lower layer is blocked and will not be sucked together with the filter paper 1102 on the upper layer.

[0093] The device 100 further includes a gripping assembly, which includes, for example, a clamping claw. Under the control of the control device, the clamping claw can grab the substrate 101 from the substrate tray 141 and place it on the substrate moving assembly 102, so that the substrate moving assembly 102 drives the substrate 101 to the corresponding station for processing.

[0094] Fig.17 A flow chart of a spraying method 800 of an embodiment of the present disclosure is shown. It should be understood that the method 800 may also include additional steps not shown and / or the steps shown may be omitted, and the scope of the present disclosure is not limited in this respect. The method 800 may be implemented based on the device 100. The control device therein may be implemented using an MCU (Micro Controller Unit), a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), a GPGPU (General-purpose Computing on Graphics Processing Units), an FPGA (Field Programmable Gate Array) or other programmable logic devices, an ASIC (Application Specific Integrated Circuit), discrete gates or transistor logic devices, discrete hardware components, etc. The control device may also be implemented using Fig. 20 The electronic device 2000 shown is implemented.

[0095] At step 802, the substrate is moved to a spraying station via a substrate moving assembly.

[0096] At step 804, the spray head assembly is moved to a spraying station via the spray head frame assembly.

[0097] At step 806 , the solution to be sprayed is sprayed onto the substrate via the spray head assembly.

[0098] It should be understood that the substrate moving assembly 102 drives the substrate 101 to move to the spraying station. The spray head frame assembly 104 moves the spray head assembly 106 to the spraying station so as to correspond to the substrate 101. Then, the control device controls the spray head assembly 106 to spray the solution to be sprayed on the substrate 101. It should be understood that the solution to be sprayed includes a perovskite precursor solution or a reaction component solution for reacting to generate a perovskite precursor solution. The solution sprayed by the spray head assembly 106 matches the current processing procedure.

[0099] Fig.18The flowchart of the spraying method 900 of the embodiment of the present disclosure is shown. It should be understood that the method 900 may also include additional steps not shown and / or may omit the steps shown, and the scope of the present disclosure is not limited in this respect. The method 900 may be implemented based on the device 100.

[0100] At step 902, the substrate on the substrate tray is grabbed onto the substrate moving assembly via the substrate grabbing assembly. The grabbing assembly includes, for example, a clamp. Under the control of the control device, the clamp can grab the substrate 101 from the substrate tray 141 and place it on the substrate carrier 151 of the substrate moving assembly 102.

[0101] At step 904, the substrate is moved to a spraying station via a substrate moving assembly.

[0102] At step 906, the filter paper on the filter paper tray is moved to the substrate moving assembly via the filter paper upper and lower line assembly so as to cooperate with the substrate on the substrate moving assembly.

[0103] At the spraying station, the control device controls the suction cup of the filter paper upper and lower line assembly 110 to suck the filter paper 1102 from the filter paper tray 112, and places the filter paper 1102 on the substrate carrier 151 of the substrate moving assembly 102 so as to correspond to the substrate 101 on the substrate carrier 151. A through hole may be provided in the middle of the filter paper 1102 to expose the substrate 101. The size of the through hole may be slightly smaller than the size of the substrate 101 so as to cover the edge of the substrate 101 and prevent the sprayed liquid from contaminating the substrate carrier 151.

[0104] At step 908, the spray head assembly is moved to the spraying station via the spray head frame assembly.

[0105] At step 910 , the solution to be sprayed is sprayed onto the substrate via the spray head assembly.

[0106] At step 912, the sprayed filter paper is removed from the substrate carrier by the filter paper upper and lower line assembly. The suction cup of the filter paper upper and lower line assembly 110 sucks the used filter paper 1102 and places it on the waste filter paper support plate.

[0107] At step 914, the coated substrate is moved to a drying station via a substrate moving assembly.

[0108] At step 916, the spray-coated substrate is dried via a drying component.

[0109] The drying component 1111 can perform drying treatment on the substrate 101 after the solution is sprayed. After the drying treatment, the corresponding film preparation is completed. Then, the control device can control the relevant components to repeat the above steps to prepare the next layer of film for the substrate 101.

[0110] Fig.19 The flowchart of the spraying method 1000 of the embodiment of the present disclosure is shown. It should be understood that the method 1000 may also include additional steps not shown and / or may omit the steps shown, and the scope of the present disclosure is not limited in this respect. The method 1000 may be implemented based on the device 100.

[0111] In step 1002 , a substrate on a substrate tray is grabbed by a substrate grabbing assembly and placed on a substrate moving assembly.

[0112] At step 1004, the substrate is moved to a spraying station via a substrate moving assembly.

[0113] At step 1006, the filter paper on the filter paper tray is moved to the substrate moving assembly via the filter paper upper and lower line assembly so as to cooperate with the substrate on the substrate moving assembly.

[0114] At the spraying station, the control device controls the suction cup of the filter paper upper and lower line assembly 110 to suck the filter paper 1102 from the filter paper tray 112, and places the filter paper 1102 on the substrate carrier 151 of the substrate moving assembly 102 so as to correspond to the substrate 101 on the substrate carrier 151. A through hole may be provided in the middle of the filter paper 1102 to expose the substrate 101. The size of the through hole may be slightly smaller than the size of the substrate 101 so as to cover the edge of the substrate 101 and prevent the sprayed liquid from contaminating the substrate carrier 151.

[0115] At step 1008, the first spray head assembly is moved to the spraying station via the spray head frame assembly.

[0116] For example, the control device controls the horizontal motion module 202 to move the first nozzle assembly 204 to the spraying station. Then, the control device controls the vertical motion module 203 to adjust the height of the nozzle 207 of the first nozzle assembly 204 so that the nozzle 207 of the first nozzle assembly 204 is at a better spraying height. In addition, the control device controls the first lifting platform 241 to adjust the height of the second mist suction component 208 of the first nozzle assembly 204 so that the second mist suction component 208 of the first nozzle assembly 204 is at a better height, for example, so that the edge component of the second mist suction component 208 of the first nozzle assembly 204 cooperates with the substrate carrier 151 of the substrate motion component 102 (for example, the two fit together). Then, the control device starts the mist suction fan 213, and the first mist suction component 208 and the second mist suction component 209 of the first nozzle assembly 204 start to work.

[0117] In step 1010 , a solution to be sprayed is sprayed onto a substrate via a first spray head assembly.

[0118] The control device controls the nozzle 207 of the first nozzle assembly 204 to spray the corresponding solution on the substrate 101. The solution can be used, for example, to prepare the first thin film of the perovskite battery. During the spraying process, the first mist suction assembly 208 and the second mist suction assembly 209 of the first nozzle assembly 204 absorb the mist generated during the spraying process, which can effectively prevent the mist generated during the spraying process from floating in the air, thereby effectively avoiding pollution to the air and / or the printing equipment.

[0119] At step 1012, the sprayed filter paper is removed from the substrate carrier by the filter paper upper and lower line assembly. The suction cup of the filter paper upper and lower line assembly 110 sucks the used filter paper 1102 and places it on the waste filter paper support plate.

[0120] At step 1014, the coated substrate is moved to a drying station via a substrate moving assembly.

[0121] At step 1016, the sprayed substrate is dried via a drying component.

[0122] At step 1018, the substrate is moved to a spraying station via a substrate movement assembly.

[0123] At step 1020, the filter paper on the filter paper tray is moved to the substrate moving assembly via the filter paper upper and lower line assembly so as to cooperate with the substrate on the substrate moving assembly.

[0124] At step 1022, the second spray head assembly is moved to the spraying station via the spray head frame assembly.

[0125] For example, the control device controls the horizontal motion module 202 to move the second nozzle assembly 205 to the spraying station. Then, the control device controls the vertical motion module 203 to adjust the height of the nozzle 207 of the second nozzle assembly 205 so that the nozzle 207 of the second nozzle assembly 205 is at a better spraying height. In addition, the control device controls the first lifting platform 241 to adjust the height of the second mist suction component 208 of the second nozzle assembly 205 so that the second mist suction component 208 of the second nozzle assembly 205 is at a better height, for example, so that the edge component of the second mist suction component 208 of the second nozzle assembly 205 cooperates with the substrate carrier 151 of the substrate motion component 102 (for example, the two fit together). Then, the control device starts the mist suction fan 213, and the first mist suction component 208 and the second mist suction component 209 of the second nozzle assembly 205 start to work.

[0126] At step 1024 , the solution to be sprayed is sprayed onto the substrate via the second spray head assembly.

[0127] The control device controls the nozzle 207 of the second nozzle assembly 205 to spray the corresponding solution on the substrate 101. The solution can be used, for example, to prepare the second thin film of the perovskite battery. During the spraying process, the first mist suction component 208 and the second mist suction component 209 of the second nozzle assembly 205 absorb the mist generated during the spraying process, which can effectively prevent the mist generated during the spraying process from floating in the air, thereby effectively avoiding pollution to the air and / or the printing equipment.

[0128] At step 1026, the sprayed filter paper is removed from the substrate carrier via the filter paper upper and lower line assembly.

[0129] At step 1028, the coated substrate is moved to a drying station via a substrate moving assembly.

[0130] At step 1030, the spray-coated substrate is dried via a drying component.

[0131] At this point, the preparation of the first two layers of the perovskite cell can be completed. For the subsequent films, they can be implemented with reference to the above description and will not be repeated here.

[0132] In some embodiments, the method 1000 further includes: before spraying the solution to be sprayed on the substrate, performing a plasma laser treatment on the surface of the substrate. For example, when the substrate is on the substrate tray 141, the surface of the substrate is subjected to a plasma laser treatment using a treatment device to increase the leveling of the surface of the substrate.

[0133] In some embodiments, drying the sprayed substrate via a drying component includes: starting a vacuum pump of the drying component to allow the internal cavity of the drying component to reach a predetermined vacuum degree; matching the sprayed substrate with a suction cup of the drying component; and opening a drying valve of the drying component to allow the internal cavity of the drying component to communicate with the sprayed substrate, so as to perform instantaneous decompression drying on the sprayed substrate.

[0134] Fig.21 The structural schematic diagram of the drying component 1100 of the present disclosure is shown. The drying component 1100 is arranged at the reduced pressure drying station. The drying component 1100 includes a reduced pressure drying suction cup 1102 and a suction component. The suction component is connected to the reduced pressure drying suction cup. The suction component includes a suction line 1104 and a vacuum pump 1106. The vacuum pump 1106 is connected to the drying suction cup 1102 through the suction line 1104.

[0135] The vacuum drying suction cup 1102 is, for example, disposed on a vacuum drying suction cup support 1108. The vacuum drying suction cup support 1108 is, for example, a "door"-shaped structure. The opening of the vacuum drying suction cup 1102 faces downward. A sealing ring is disposed at the opening of the vacuum drying suction cup 1102 so as to fit the vacuum drying suction cup 1102 after contact with the substrate. The shape of the opening of the vacuum drying suction cup 1102 matches the shape of the substrate.

[0136] Fig.25 A schematic diagram of a lifting assembly 1215 of an embodiment of the present disclosure is shown. The substrate moving assembly further includes a lifting assembly 1215, which is disposed at a reduced pressure drying station. When the substrate carrier 151 moves to the reduced pressure drying station, the control device controls the lifting assembly to lift the substrate carrier 151 upward so that the printed substrate on the substrate carrier 151 fits with the reduced pressure drying suction cup 1102. The control device controls the drying assembly to perform a reduced pressure drying operation on the substrate.

[0137] The drying component further includes a first solenoid valve 1101, which is disposed at one end of the decompression drying pipeline 1104 close to the decompression drying suction cup. A vacuum tank 1103 is also disposed on the decompression drying pipeline 1104. The vacuum tank 1103 is a tank body with a predetermined capacity, which is connected to the decompression drying pipeline 1104. The drying component 1100 further includes a second solenoid valve 1105, through which the decompression drying pipeline 1104 is connected to the outside. The suction component further includes a filter 1109, which is disposed between the vacuum pump 1106 and the suction pipeline 1104.

[0138] In some embodiments, before the drying operation is performed, the control device controls the drying component to perform a pre-vacuuming operation. For example, the first solenoid valve 1101 (for example, as a drying valve) and the second solenoid valve 1105 are in a closed state. The control device controls the vacuum pump 1106 to start and evacuate the decompression drying pipeline 1104 and the vacuum tank 1103. When the predetermined vacuum degree is reached in the decompression drying pipeline 1104 (and the vacuum tank 1103), the control device controls the first solenoid valve 1101 to open. At this time, under the action of the pressure (negative pressure) of the decompression drying pipeline 1104 (and the vacuum tank 1103), the liquid remaining on the surface of the substrate that is in contact with the decompression drying suction cup 1102 is instantly decompressed and dried to provide uniformity and consistency of crystallization. During the implementation of the drying operation, the vacuum pump 1106 is in a working state. Then, the control device controls the second solenoid valve 1105 to open. As a result, the reduced-pressure drying pipeline 1104 is connected to the outside, the reduced-pressure drying pipeline 1104 is no longer in a vacuum state, the reduced-pressure drying pipeline 1104 no longer generates negative pressure on the substrate, and the drying operation is completed.

[0139] Fig. 22 A schematic diagram of a substrate movement assembly 102 according to an embodiment of the present disclosure is shown. Fig.23A partial schematic diagram of a substrate moving assembly according to an embodiment of the present disclosure is shown, wherein, for the convenience of description, a portion of the substrate moving assembly 102 is cut along a first direction to show the accommodating cavity 1211 . Fig.24 A schematic diagram of a part of the substrate movement assembly of an embodiment of the present disclosure is shown. For ease of explanation, a part of the substrate movement assembly 102 is cut along the second direction to show the accommodating cavity 1211. In some embodiments, the substrate movement assembly 102 further includes a first negative pressure adsorption assembly (not shown in the figure). The first negative pressure adsorption assembly is configured to generate negative pressure so as to adsorb the substrate 101 on the surface of the substrate carrier 151. The first negative pressure adsorption assembly includes, for example, a vacuum pump.

[0140] In some embodiments, the substrate carrier 151 is provided with adsorption holes 1212 connected to the upper surface of the substrate carrier 151, and the first negative pressure adsorption assembly is connected to the adsorption holes 1212. When the substrate 101 is placed on the upper surface of the substrate carrier 151, the substrate 101 covers the adsorption holes 1212. The first negative pressure adsorption assembly generates negative pressure, and the substrate 101 can be adsorbed on the surface of the substrate carrier 151.

[0141] In some embodiments, the substrate carrier 151 is provided with a receiving cavity 1211, and the pipeline of the first negative pressure adsorption component is connected with the adsorption hole 1212 via the receiving cavity 1211. In some embodiments, the number of the adsorption hole 1212 is multiple.

[0142] In some embodiments, the first negative pressure adsorption assembly is, for example, disposed in the accommodating chamber 1211 . The accommodating chamber 1211 is in communication with the outside through the adsorption hole 1212 , and the adsorption hole 1212 penetrates to the upper surface of the substrate carrier 151 .

[0143] When the substrate 101 is placed on the upper surface of the substrate carrier 151, the substrate 101 covers the adsorption hole 1212. When the substrate 101 is moved to the drying station, the first negative pressure adsorption component is activated. The negative pressure generated by the first negative pressure adsorption component can adsorb the substrate 101 on the upper surface of the substrate carrier 151, so that the substrate 101 will not separate from the substrate carrier 151. When the drying component 1100 is activated, the drying component 1100 generates an upward adsorption force on the substrate 101. At this time, the substrate 101 moves upward together with the substrate carrier 151 until the substrate 101 cooperates with the drying component 1100 (for example, the substrate 101 is in contact with the decompression drying suction cup 1102). At this time, the substrate carrier 151 is separated from the heating platform 152.

[0144] In some embodiments, the substrate carrier 151 is disposed above the heating platform 152, and the substrate carrier 151 has a flat upper surface for carrying the substrate 101. The size of the substrate carrier 151 is larger than the size of the heating platform 152, for example, the substrate carrier 151 has an extension portion 1511 extending to the outside of the edge of the heating platform 152. The extension portion 1511 is connected to the support plate 1213, and the support plate 1213 is, for example, disposed on both sides of the heating platform 152, and the support plate extends to the hollow plate 1214 located below. The lifting assembly 1215 is, for example, provided with a lifting plate 1216, and the lifting plate 1216 has a lifting protrusion corresponding to the support plate 1213. The lifting plate 1216 is, for example, driven by a three-axis cylinder 1217 to rise. When lifting, the upper surface of the lifting protrusion of the lifting plate 1216 contacts the lower surface of the support plate 1213 so as to apply pressure to the support plate 1213. The support plate applies pressure to the substrate carrier 151, thereby driving the substrate carrier 151 to rise. The hollow plate 1214 is connected to the linear motor 153, so as to drive the heating platform 151 and the substrate carrier 151 to move under the drive of the linear motor 153. The hollow plate 1214 is also provided with adjustment bolts 1219, which are arranged corresponding to the four corners of the heating platform 152 and can be used to perform a leveling operation on the heating platform 152.

[0145] In some embodiments, the substrate movement assembly includes a support component and a spring. The support component is used to support the substrate carrier, one end of the spring is connected to the substrate carrier, and the other end of the spring is connected to the support component. The support component is, for example, a hollow plate 1214. In some embodiments, the substrate carrier 151 is connected to the hollow plate 1214 through a spring 1218. For example, a bolt is provided on the side of the substrate carrier 151 for fixing one end of the spring 1218. A bolt is provided on the corresponding side of the hollow plate 1214 for fixing the other end of the spring 1218. When no lifting pressure is applied to the substrate carrier 151, the spring 1218 can, for example, tighten the substrate carrier 151 and the hollow plate 1214, thereby clamping the heating stage 152.

[0146] When lifting, the lifting assembly 1215 applies a thrust to the substrate carrier 151 to lift the substrate carrier 151. The hollow plate 1214 is fixed on the linear motor and will not be lifted. The substrate carrier 151 is separated from the heating platform 152, and the spring 1218 is stretched.

[0147] After the vacuum drying operation is completed, the vacuum drying assembly no longer applies negative pressure to the substrate 101. The control device controls the lifting assembly 1215 to descend, and with the rebound force of the spring 1218, the substrate carrier 151 descends and contacts the heating platform 152. Then, the control device controls the linear motor 153 to drive the substrate carrier 151 to move to the next station. Fig. 20A schematic block diagram of an example electronic device 2000 that can be used to implement the method of an embodiment of the present disclosure is shown. As shown, the electronic device 2000 includes a central processing unit (i.e., CPU 2001), which can perform various appropriate actions and processes according to the computer program instructions stored in a read-only memory (i.e., ROM 2002) or loaded from a storage unit 2008 into a random access memory (i.e., RAM 2003). In RAM 2003, various programs and data required for the operation of the electronic device 2000 can also be stored. CPU 2001, ROM 2002, and RAM 2003 are connected to each other by bus 2004. An input / output interface (i.e., I / O interface 2005) is also connected to bus 2004.

[0148] Multiple components in the electronic device 2000 are connected to the I / O interface 2005, including: an input unit 2006, such as a keyboard, a mouse, a microphone, etc.; an output unit 2007, such as various types of displays, speakers, etc.; a storage unit 2008, such as a disk, an optical disk, etc.; and a communication unit 2009, such as a network card, a modem, a wireless communication transceiver, etc. The communication unit 2009 allows the electronic device 2000 to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks.

[0149] The various processes and processing described above, such as method 800, method 900, and method 1000, may be executed by the CPU 2001. For example, in some embodiments, method 800, method 900, and method 1000 may be implemented as a computer software program, which is tangibly contained in a machine-readable medium, such as a storage unit 2008. In some embodiments, part or all of the computer program may be loaded and / or installed on the electronic device 2000 via the ROM 2002 and / or the communication unit 2009. When the computer program is loaded into the RAM 2003 and executed by the CPU 2001, one or more actions of the methods 800, method 900, and method 1000 described above may be performed.

[0150] The present disclosure relates to methods, electronic devices, computer-readable storage media and / or computer program products. The computer program product may include computer-readable program instructions for executing various aspects of the present disclosure.

[0151] A computer-readable storage medium may be a tangible device that can hold and store instructions used by an instruction execution device. A computer-readable storage medium may be, for example, but not limited to, an electrical storage device, a magnetic storage device, an optical storage device, an electromagnetic storage device, a semiconductor storage device, or any suitable combination of the foregoing. More specific examples of computer-readable storage media (a non-exhaustive list) include: a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a static random access memory (SRAM), a portable compact disk read-only memory (CD-ROM), a digital versatile disk (DVD), a memory stick, a floppy disk, a mechanical encoding device, such as a punch card or a raised structure in a groove on which instructions are stored, and any suitable combination of the foregoing. As used herein, a computer-readable storage medium is not to be interpreted as a transient signal per se, such as a radio wave or other freely propagating electromagnetic wave, an electromagnetic wave propagating through a waveguide or other transmission medium (e.g., a light pulse through a fiber optic cable), or an electrical signal transmitted through a wire.

[0152] The computer-readable program instructions described herein can be downloaded from a computer-readable storage medium to each computing / processing device, or downloaded to an external computer or external storage device via a network, such as the Internet, a local area network, a wide area network, and / or a wireless network. The network can include copper transmission cables, optical fiber transmission, wireless transmission, routers, firewalls, switches, gateway computers, and / or edge electronic devices. The network adapter card or network interface in each computing / processing device receives the computer-readable program instructions from the network and forwards the computer-readable program instructions for storage in a computer-readable storage medium in each computing / processing device.

[0153] The computer program instructions for performing the operation of the present disclosure may be assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-related instructions, microcode, firmware instructions, state setting data, or source code or object code written in any combination of one or more programming languages, including object-oriented programming languages, such as Smalltalk, C++, etc., and conventional procedural programming languages, such as "C" language or similar programming languages. Computer-readable program instructions may be executed entirely on a user's computer, partially on a user's computer, as an independent software package, partially on a user's computer, partially on a remote computer, or completely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer via any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., using an Internet service provider to connect via the Internet). In some embodiments, an electronic circuit, such as a programmable logic circuit, a field programmable gate array (FPGA), or a programmable logic array (PLA), may be customized by utilizing the state information of the computer-readable program instructions, and the electronic circuit may execute the computer-readable program instructions, thereby realizing various aspects of the present disclosure.

[0154] Various aspects of the present disclosure are described herein with reference to the flowcharts and / or block diagrams of the methods, devices (systems) and computer program products according to the embodiments of the present disclosure. It should be understood that each box in the flowchart and / or block diagram and the combination of each box in the flowchart and / or block diagram can be implemented by computer-readable program instructions.

[0155] These computer-readable program instructions can be provided to a processing unit of a general-purpose computer, a special-purpose computer, or other programmable data processing device, thereby producing a machine, so that when these instructions are executed by the processing unit of the computer or other programmable data processing device, a device that implements the functions / actions specified in one or more boxes in the flowchart and / or block diagram is generated. These computer-readable program instructions can also be stored in a computer-readable storage medium, and these instructions cause the computer, programmable data processing device, and / or other equipment to work in a specific manner, so that the computer-readable medium storing the instructions includes a manufactured product, which includes instructions for implementing various aspects of the functions / actions specified in one or more boxes in the flowchart and / or block diagram.

[0156] Computer-readable program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other device so that a series of operating steps are performed on the computer, other programmable data processing apparatus, or other device to produce a computer-implemented process, thereby causing the instructions executed on the computer, other programmable data processing apparatus, or other device to implement the functions / actions specified in one or more boxes in the flowchart and / or block diagram.

[0157] The flow chart and block diagram in the accompanying drawings show the possible architecture, function and operation of the equipment, method and computer program product according to multiple embodiments of the present disclosure. In this regard, each square box in the flow chart or block diagram can represent a part of a module, program segment or instruction, and a part of the module, program segment or instruction includes one or more executable instructions for realizing the specified logical function. In some alternative implementations, the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two continuous square boxes can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each square box in the block diagram and / or flow chart, and the combination of the square boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs the specified function or action, or can be implemented with a combination of special hardware and computer instructions.

[0158] The embodiments of the present disclosure have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.

[0159] The terms used in this document are selected to best explain the principles of the embodiments, practical applications or technical improvements in the marketplace, or to enable other ordinary technicians in this technical field to understand the embodiments disclosed herein.

[0160] The above are only optional embodiments of the present disclosure and are not intended to limit the present disclosure. For those skilled in the art, the present disclosure may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A device for preparing a perovskite battery thin film, characterized in that: include: The spray head rack assembly is used to move the spray head assembly to the spraying station, including: A vertical motion module connected to the nozzle assembly and used to drive at least a portion of the nozzle assembly to move in a vertical direction; and The horizontal motion module is connected to the vertical motion module and is used to drive the vertical motion module to move in the horizontal direction; The spray head frame assembly further includes: a spray head assembly, which is arranged on the spray head frame assembly and is used to spray the solution to be sprayed on the substrate, wherein the solution to be sprayed includes a perovskite precursor solution or a reaction component solution for reacting to generate a perovskite precursor solution, and the spray head assembly includes: A spray head, used for spraying the liquid to be sprayed; and The mist absorbing device is arranged in cooperation with the nozzle and is used for absorbing at least part of the mist formed by the liquid to be sprayed sprayed from the nozzle.

2. The device according to claim 1, characterized in that The nozzle assembly includes: A first spray head assembly, used for spraying a first type of solution to be sprayed; and A second spray head assembly, used for spraying a second type of solution to be sprayed; and The horizontal motion module is also used to drive the vertical motion module to move in the horizontal direction so as to move the first nozzle assembly or the second nozzle assembly to the spraying station.

3. The device according to claim 1, characterized in that The mist extraction device includes The first mist suction component includes: The mist absorption cavity is formed by being surrounded by a plurality of shell walls, and the mist absorption cavity surrounds the nozzle; A mist absorbing through hole is provided on at least one shell wall among the multiple shell walls so as to make the inside of the mist absorbing cavity communicate with the outside; A first mist suction pipeline is connected between the mist suction chamber and the mist suction fan; and Demisting fan.

4. The device according to claim 3, characterized in that The multiple shell walls include a top wall and a bottom wall opposite to the top wall, and the middle portion of the bottom wall is higher than both ends of the bottom wall, so that the liquid accumulated in the mist absorption cavity flows to the two ends of the bottom wall.

5. The device according to claim 3, characterized in that The nozzle assembly also includes a second mist suction assembly, and the second mist suction assembly includes: A cover body, which surrounds the nozzle and has an opening at the bottom thereof; an edge component connected to the cover body and surrounding the opening of the cover body, a cavity being arranged in the edge component, and a gap communicating with the cavity being arranged between the edge component and the cover body so that mist can enter the cavity; and The second mist suction pipeline is connected between the cavity of the edge component and the mist suction fan.

6. The device according to claim 5, characterized in that The middle part of the cavity is higher than the two ends of the cavity, so that the liquid accumulated in the cavity flows to the two ends of the cavity.

7. The device according to claim 5, characterized in that The cover body surrounds the mist absorbing cavity of the first mist absorbing assembly, and the mist absorbing cavity is provided with a top screw abutting against the inner wall of the cover body, so as to prevent the first mist absorbing assembly from shaking relative to the cover body.

8. The device according to claim 5, characterized in that The spray head frame assembly also includes: A first lifting platform, disposed on the horizontal motion module, for driving the first connecting structure to move up and down; and A first connection structure, the first connection structure comprising: a crossbeam, arranged in a horizontal direction and connected to the first lifting platform, wherein two ends of the crossbeam respectively extend beyond two opposite sides of the first lifting platform along a first direction; and A trapezoidal frame is arranged in a vertical direction, the upper base of the trapezoidal frame is connected to one end of the cross beam, the lower base of the trapezoidal frame has a first extension portion and a second extension portion, the first extension portion and the second extension portion respectively extend beyond the opposite sides of the first lifting platform along the second direction, the first direction is perpendicular to the second direction, and at least one of the first extension portion and the second extension portion is connected to the corresponding second mist suction component.

9. The device according to claim 1, characterized in that It also includes a moisturizing fluid-connecting component, which includes: A liquid receiving tray, wherein a water absorbing component is provided on the liquid receiving tray; and The second lifting platform is arranged below the liquid receiving tray and is used to drive the liquid receiving tray to rise and fall so that the needle tip of the spray needle of the spray head assembly is immersed in the water absorbing component for moisturizing.

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