Plasma enhanced chemical vapor deposition (PECVD) film forming gas total amount control structure

Abstract

The utility model discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) film-forming gas total amount control structure which comprises a PECVD device body and a gas inlet assembly, and further comprises a base arranged on the PECVD device body; a pipeline of the air inlet assembly is provided with a connecting piece in running fit with the base, the connecting piece is connected with a sliding block through an elastic reset piece, the sliding block is provided with a locking rod, the base is provided with a groove, and the groove is provided with at least two clamping grooves matched with the locking rod. According to the PECVD film forming gas total amount control structure provided by the utility model, the connecting piece is matched with the base in a clamping manner to assist in dismounting the gas inlet valve and the threaded piece of the sample tube, when a sample is put into the sample tube, the sliding block slides upwards to enable the locking rod not to be clamped with the clamping groove, the gas inlet assembly is separated from the sample tube, and the sample is taken out; according to the device, through auxiliary fixation of the air inlet assembly, a worker can conveniently disassemble or assemble a sample tube and a threaded piece on the air inlet assembly, and operation is convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of PECVD, in particular to a PECVD film-forming gas total amount control structure. Background Art

[0002] As is known to all, PECVD stands for Plasma Enhanced Chemical Vapor Deposition, a common variant of CVD. It is a thin film growth technology that uses plasma for deposition at a relatively low temperature. Since plasma provides the energy for the reaction, the deposition temperature of PECVD is lower than that of traditional CVD, between 200 and 400 degrees Celsius, which is suitable for temperature-sensitive chip processes and is widely used in thin film process fields such as insulating layers, anti-reflective layers and optical films.

[0003] The specific process of PECVD is that after the gas enters the PECVD reaction chamber, the RF power supply ionizes the gas to generate plasma, and the free radicals in the plasma react on the surface of the wafer to form a thin film. This method has many advantages, such as good film quality, low basic temperature, fast deposition rate, fewer pinholes, and not easy to crack.

[0004] Before PECVD starts, the air intake valve of the PECVD machine needs to be connected to the sample tube through threaded parts. During the connection, the end of the air intake valve is heavy and needs to be supported by the operator. Then the end of the air intake valve is connected to the flange of the sample tube. When sampling, it is also necessary to support and then remove the threaded parts of the air intake valve and the sample tube. This is inconvenient to operate and reduces the efficiency of PECVD. Utility Model Content

[0005] In view of the above-mentioned problems existing in the prior art, one aspect of the present invention is to provide a PECVD film-forming gas total amount control structure to solve the above-mentioned deficiencies of the prior art.

[0006] In order to achieve the above-mentioned purpose, the utility model provides a PECVD film-forming gas total amount control structure, including a PECVD device body and an air intake assembly, and also includes: a base, which is arranged on the PECVD device body; a connecting piece that rotatably cooperates with the base is arranged on the pipeline of the air intake assembly, a slider is connected to the connecting piece through an elastic reset piece, and a locking rod is arranged on the slider; a groove is provided on the base, and at least two slots that cooperate with the locking rod are provided on the groove.

[0007] Preferably, the groove is an arc-shaped groove.

[0008] Preferably, a guide groove is provided on the connecting member, and the sliding block is slidably located in the guide groove.

[0009] Preferably, the air intake assembly comprises a second flange, a pipeline, an air intake valve and an air intake pipe which are connected in sequence.

[0010] Preferably, a reaction box is also provided on the PECVD device body, and a sample tube is provided on the reaction box.

[0011] Preferably, the sample tube is provided with a first flange connected to the second flange.

[0012] Preferably, a control screen is also provided on the reaction box.

[0013] Preferably, a controller is also provided on the air intake assembly.

[0014] In the above technical scheme, a PECVD film-forming gas total amount control structure provided by the utility model has the following beneficial effects: the utility model, when sampling, through the clamping cooperation between the connecting piece and the base, assists in fixing and removing the threaded parts of the air intake valve and the sample tube, and is easy to operate. When putting the sample into the sample tube, first slide the slider upward so that the locking rod is no longer clamped with the slot, so that the connecting piece can rotate on the base, thereby assisting the air intake component to be removed from the connection with the sample tube and then rotate, so that the two can be separated to take out the sample in the sample tube. The device facilitates the staff to disassemble or install the sample tube and the threaded parts on the air intake component by auxiliary fixation of the air intake component, and is easy to operate, which weakens or even avoids the problem that the end of the air intake valve is heavy and needs to be supported by the operator during connection, and then the end of the air intake valve is connected to the flange of the sample tube. When sampling, it is also necessary to support and then disassemble the threaded parts of the air intake valve and the sample tube, which is inconvenient to operate and reduces the efficiency of PECVD. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a partial enlarged structural schematic diagram of the connector of the utility model;

[0018] Figure 3 This is a schematic diagram of a partially enlarged structure of the groove of the utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the air intake assembly of the utility model in another state.

[0020] Description of reference numerals:

[0021] 1. PECVD device body; 2. Reaction box; 3. Base; 4. Air inlet assembly; 5. Air inlet pipe; 2.1. Control panel; 2.2. Sample tube; 2.3. First flange; 3.1. Groove; 3.2. Card slot; 4.1. Controller; 4.2. Connector; 4.3. Guide groove; 4.4. Elastic reset member; 4.5. Slider; 4.6. Locking rod. DETAILED DESCRIPTION

[0022] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0023] See also Figure 1-4 The PECVD film-forming gas total amount control structure is used to solve the problem that before the start of PECVD, the air intake valve of the PECVD machine needs to be connected to the sample tube through a threaded part. During the connection, the end of the air intake valve is heavy and needs to be supported by the operator. Then the end of the air intake valve is connected to the flange of the sample tube. When sampling, it is also necessary to support and then remove the threaded parts of the air intake valve and the sample tube, which is inconvenient to operate and reduces the efficiency of PECVD.

[0024] As a further technical solution proposed by the utility model, it includes a PECVD device body 1 and an air intake assembly 4, and also includes: a base 3, which is arranged on the PECVD device body 1; a connecting piece 4.2 that rotatably cooperates with the base 3 is arranged on the pipeline of the air intake assembly 4, a slider 4.5 is connected to the connecting piece 4.2 through an elastic reset piece, and a locking rod 4.6 is arranged on the slider 4.5; a groove 3.1 is provided on the base 3, and at least two card slots 3.2 that cooperate with the locking rod 4.6 are provided on the groove 3.1. Specifically, when sampling, the card connection between the connecting piece 4.2 and the base 3 is used to assist in disassembling the threaded parts of the air intake valve and the sample tube, which is easy to operate, and when the sample is placed in the sample tube 2.2, First, slide the slider 4.5 upward so that the locking rod 4.6 is no longer engaged with the slot 3.2, allowing the connector 4.2 to rotate on the base 3, thereby assisting the air intake component 4 to be removed from the connection with the sample tube 2.2 and then rotate, so that the two can be separated and the sample in the sample tube 2.2 can be taken out. The device facilitates the staff to disassemble or connect the sample tube 2.2 and the threaded parts on the air intake component 4 by auxiliary fixation of the air intake component 4, and is easy to operate. It reduces or even avoids the problem that the end of the air intake valve is heavy and needs the operator to support it during connection, and then the end of the air intake valve is connected to the flange of the sample tube. When sampling, it is also necessary to support and then disassemble the threaded parts of the air intake valve and the sample tube, which is inconvenient to operate and reduces the efficiency of PECVD.

[0025] In this embodiment, there are at least two card slots 3.2, such as Figure 3 As shown in the state, before disassembly, the connector 4.2 is in a vertical state, at which time it fixes the air intake assembly 4 by snap-fitting, so that the staff can disassemble the threaded fasteners on the flange of the air intake assembly 4 and the sample tube 2.2 later. When the connector 4.2 is in another state, as shown in the state Figure 4 As shown in the state, after the connecting piece 4.2 is rotated, the locking rod 4.6 is engaged with another slot 3.2. At this time, the air intake assembly 4 and the sample tube 2.2 are separated, which is convenient for the staff to take out the sample in the sample tube 2.2.

[0026] In another embodiment of the present invention, preferably, the groove 3.1 is specifically an arc groove, such as Figure 3 As shown in the state, the arc groove facilitates the connector 4.2 to engage with the two engaging grooves 3.2 in the groove after rotation.

[0027] In another embodiment of the utility model, preferably, a guide groove 4.3 is provided on the connecting member 4.2, and the slider 4.5 is slidably located in the guide groove 4.3. Furthermore, the stability of the slider 4.5 during sliding is improved by the guide groove 4.3.

[0028] In another embodiment of the present invention, the air intake assembly 4 includes a second flange, a pipeline, an air intake valve and an air intake pipe 5 which are connected in sequence. Figure 1 As shown in the state, it is the prior art, the air intake component 4 is threadedly connected to the first flange 2.3 on the sample tube 2.2 through the second flange on the pipeline, that is, the end of the air intake component 4 is heavier and is auxiliaryly fixed by the connecting piece 4.2 and the base 3 through the clamping fit, so that the staff can disassemble or install the threaded fasteners connecting the air intake component 4 and the sample tube 2.2.

[0029] In another embodiment of the present invention, the PECVD device body 1 is further provided with a reaction box 2, and the reaction box 2 is provided with a sample tube 2.2. Figure 1 As shown in the state, the sample tube 2.2 is used to place the sample. After the sample is placed in, it is located in the middle of the reaction box 2, so that the sample is heated evenly when the reaction box 2 is working. This is the prior art.

[0030] In another embodiment of the present invention, a first flange 2.3 connected to a second flange is provided on the sample tube 2.2. Figure 1 As shown in the state, the sample tube 2.2 is threadedly connected to the pipeline on the air inlet assembly 4 through the first flange 2.3, so that the two are connected to allow the PECVD device to perform normal subsequent work.

[0031] In another embodiment of the utility model, a control panel 2.1 is further provided on the reaction box 2, and a controller 4.1 is further provided on the air intake component 4. Furthermore, the control panel 2.1 on the reaction box 2 is used to control the working time and heating temperature of the reaction box 2, etc., and the controller 4.1 on the air intake component 4 is used to check the working status of the air intake component 4 and operate its working mode. This is the prior art and will not be described in detail.

[0032] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A PECVD film-forming gas total amount control structure, comprising a PECVD device body (1) and an air inlet assembly (4), characterized in that: Also includes: A base (3) disposed on the PECVD device body (1); A connecting piece (4.2) rotatably matched with the base (3) is provided on the pipeline of the air intake assembly (4), a sliding block (4.5) is connected to the connecting piece (4.2) via an elastic reset piece, and a locking rod (4.6) is provided on the sliding block (4.5); The base (3) is provided with a groove (3.1), and the groove (3.1) is provided with at least two locking grooves (3.2) that match the locking rod (4.6).

2. The PECVD film-forming gas total amount control structure according to claim 1, characterized in that: The groove (3.1) is specifically an arc-shaped groove.

3. The PECVD film-forming gas total amount control structure according to claim 1, characterized in that: The connecting piece (4.2) is provided with a guide groove (4.3), and the sliding block (4.5) is slidably located in the guide groove (4.3).

4. The PECVD film-forming gas total amount control structure according to claim 1, characterized in that: The air intake assembly (4) comprises a second flange, a pipeline, an air intake valve and an air intake pipe (5) which are connected in sequence.

5. The PECVD film-forming gas total amount control structure according to claim 4, characterized in that: A reaction box (2) is also provided on the PECVD device body (1), and a sample tube (2.2) is provided on the reaction box (2).

6. The PECVD film-forming gas total amount control structure according to claim 5, characterized in that: The sample tube (2.2) is provided with a first flange (2.3) connected to the second flange.

7. The PECVD film-forming gas total amount control structure according to claim 6, characterized in that: The reaction box (2) is also provided with a control screen (2.1).

8. The PECVD film-forming gas total amount control structure according to claim 1, characterized in that: The air intake assembly (4) is also provided with a controller (4.1).

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