Air supply device and energy-saving clean room

Abstract

The utility model discloses an air supply device and an energy-saving clean room. The air supply device comprises an air supply mechanism; a filtering mechanism; wherein the air supply mechanism comprises a fan, an air inlet pipe and an air outlet pipe, the air inlet end of the fan is fixedly connected with the air inlet pipe, and the air outlet end of the fan is fixedly connected with the air outlet pipe; the filtering mechanism is located on one side of the air outlet pipe and comprises a first filtering bin, a second filtering bin and a third filtering bin which are sequentially arranged, and a first filtering net, a second filtering net and a third filtering net are installed in the first filtering bin, the second filtering bin and the third filtering bin respectively. By arranging the filtering mechanism with the three kinds of filtering materials, the filtering and purifying effects are excellent, air with the high cleanliness degree can be conveyed, and fresh air entering a clean room is filtered and purified so that the air quality requirement of the clean room can be met.

Description

Technical Field

[0001] The utility model belongs to the technical field of clean rooms, and in particular relates to an air supply device and an energy-saving clean room. Background Art

[0002] The development of clean rooms is closely linked to modern industry and cutting-edge technology. The environmental requirements of precision machinery industry (such as gyroscopes, micro bearings, etc.) and semiconductor industry (such as large-scale integrated circuit production) have promoted the development of clean room technology. According to statistics in China, the qualified rate of MOS circuit dies produced in an environment without clean level requirements is only 10% to 15%, and the qualified rate of 64-bit storage is only 2%. At present, the application of clean rooms in industries such as precision machinery, semiconductors, aerospace, and atomic energy is quite common.

[0003] After searching, the Chinese patent application number is: CN202310932921.0, which discloses an integrated clean room, including a workshop, an air conditioning exhaust box is arranged at the top edge of the workshop, an exhaust pipe is fixedly connected to the center top of the workshop, a filter is rollingly connected to the inner wall of the channel at one end of the exhaust pipe, and a rotating disc is slidingly connected to the other end of the exhaust pipe, and a plurality of cylindrical openings are arranged inside the rotating disc, and the filter is rollingly installed on the inner wall of the cylindrical opening. The invention uses a filter cleaning device to regularly clean the filter. During cleaning, after replacing the channel of the exhaust pipe, the filter is rotated, and the dust on the filter is thrown off by centrifugal rotation. There is no need to stop the machine for inspection, and the dust with air humidity can be cleaned because it is difficult to clean because it sticks to the surface of the filter. There is no need to use a brush, which avoids the risk of the brush damaging the filter during the cleaning process.

[0004] The above technical solution still has defects. It adopts a single filtering method, which has limited purification and filtering effects on the air. At the same time, the energy consumption of the clean room is high, which is not conducive to energy conservation and emission reduction. Therefore, it is of great significance to develop an efficient and energy-saving clean room air supply device and clean room system. Summary of the invention

[0005] The purpose of the utility model is to provide an air supply device and an energy-saving clean room. By setting a filtering mechanism with three kinds of filter materials, it has excellent filtering and purification effects, can deliver air with a high degree of cleanliness, and is used to filter and purify the fresh air entering the clean room to meet the air quality requirements of the clean room, so as to solve the problems in the prior art raised in the above-mentioned background technology.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] An air supply device, comprising: an air supply mechanism; a filtering mechanism; wherein the air supply mechanism comprises a fan, an air inlet pipe and an air outlet pipe, the air inlet end of the fan is fixedly connected to the air inlet pipe, and the air outlet end of the fan is fixedly connected to the air outlet pipe;

[0008] The filtering mechanism is located on one side of the air outlet duct, and includes a first filter chamber, a second filter chamber, and a third filter chamber arranged in sequence, wherein the first filter chamber, the second filter chamber, and the third filter chamber are respectively installed with a first filter net, a second filter net, and a third filter net, the first filter chamber, the second filter chamber, and the third filter chamber are respectively connected by pipes, and the first filter chamber is connected to one end of the air outlet duct by a pipe.

[0009] Preferably, the first filter bin, the second filter bin and the third filter bin each include two bin bodies, and the inner walls of the bin bodies are provided with an annular retaining ring.

[0010] Preferably, a rubber ring is bonded to one side of the retaining ring, and the rubber ring is arranged in a trumpet shape, and the ring openings on one side of the rubber rings in two adjacent bins both abut against the surface of the filter screen in the bin.

[0011] Preferably, two adjacent bin bodies are mounted together by fixing screws, and a peripheral edge is integrally formed on one side of the opening of the bin body, and a through hole for installing the fixing screws is provided on the peripheral edge.

[0012] Preferably, the first filter is made of non-woven fabric, the second filter is made of porous activated carbon, and the third filter is made of HEPA filter.

[0013] An energy-saving clean room, comprising:

[0014] Main structure;

[0015] Circulation mechanism;

[0016] Wherein, the main structure includes a building body and a door panel arranged on the building body;

[0017] The circulation mechanism includes a circulation pipe, an air inlet cover and a circulation cover, wherein the air inlet cover is installed at the end of the air inlet pipe and communicated with the interior of the building body, the circulation cover is installed at one end of the circulation pipe and communicated with the interior of the building body, and the other end of the circulation pipe is connected to the third filter bin through a flange;

[0018] Also includes thermal insulation structure.

[0019] Preferably, the thermal insulation structure is arranged outside the air inlet pipe, the air outlet pipe and the circulation pipe, and the thermal insulation structure includes a first thermal insulation layer and a second thermal insulation layer from inside to outside.

[0020] Preferably, the first thermal insulation layer is made of polyurethane foam material, and the second thermal insulation layer is made of rock wool material.

[0021] Preferably, a control panel is installed on one side of the door panel on the building main body, and a display screen and control buttons are provided on the control panel.

[0022] Technical effects and advantages of the utility model: Compared with the prior art, the air supply device and energy-saving clean room proposed by the utility model have the following advantages:

[0023] 1. The utility model is provided with an air supply mechanism including a fan, an air inlet pipe and an air outlet pipe. One end of the air outlet pipe is connected with a filtering mechanism including a first filter chamber, a second filter chamber and a third filter chamber. The first filter chamber, the second filter chamber and the third filter chamber are respectively provided with a first filter screen, a second filter screen and a third filter screen. The first filter screen, the second filter screen and the third filter screen are respectively made of three different filter materials. The device has a simple structure and is easy to use. By providing a filtering mechanism with three filter materials, it has excellent filtering and purification effects, can deliver air with a high degree of cleanliness, and is used to filter and purify fresh air entering the clean room to meet the air quality requirements of the clean room.

[0024] 2. The utility model is provided with a main structure including a building body and door panels, and a circulation mechanism including a circulation pipe, an air inlet hood and a circulation hood. The air inlet hood and the circulation hood are respectively connected to the air inlet pipe and the circulation pipe for circulating ventilation in the clean room. The air in the clean room is extracted by a fan, filtered and purified, and then circulated back to the clean room. While ensuring the air quality in the clean room, the heat energy in the exhausted air is effectively recovered, and the preheating or cooling demand of the fresh air is reduced, thereby saving energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the utility model;

[0026] Figure 2 It is a structural schematic diagram of the main building of the utility model;

[0027] Figure 3 It is a structural schematic diagram of the thermal insulation structure of the utility model;

[0028] Figure 4 This is a schematic diagram of the structure of the filter mechanism of the utility model;

[0029] Figure 5 This is a schematic diagram of the structure of the warehouse body of the utility model;

[0030] Figure 6 It is a structural schematic diagram of the rubber ring of the utility model.

[0031] In the figure: 1. building body; 2. door panel; 3. control panel; 4. mounting base; 5. fan; 6. air inlet duct; 7. air outlet duct; 8. circulation duct; 9. air inlet hood; 10. circulation hood; 11. first insulation layer; 12. second insulation layer; 13. first filter chamber; 14. second filter chamber; 15. third filter chamber; 16. first filter screen; 17. second filter screen; 18. third filter screen; 19. retaining ring; 20. rubber ring; 21. surrounding edge; 22. chamber body. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. The specific embodiments described here are only used to explain the utility model and are not used to limit the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0033] like Figure 1 , Figure 4-5 As shown:

[0034] An air supply device, comprising: an air supply fan 5; the air supply fan 5 comprises a fan 5, an air inlet pipe 6 and an air outlet pipe 7, the air inlet end of the fan 5 is fixedly connected to the air inlet pipe 6, and the air outlet end of the fan 5 is fixedly connected to the air outlet pipe 7;

[0035] Filter mechanism: The filter mechanism is located at one side of the air outlet pipe 7, and the filter mechanism includes a first filter chamber 13, a second filter chamber 14, and a third filter chamber 15, which are arranged in sequence. The first filter chamber 13, the second filter chamber 14, and the third filter chamber 15 are respectively installed with a first filter screen 16, a second filter screen 17, and a third filter screen 18. The first filter chamber 13, the second filter chamber 14, and the third filter chamber 15 are respectively connected by pipes, and the first filter chamber 13 is connected to one end of the air outlet pipe 7 by a pipe. The first filter screen 16 is set to a non-woven fabric material, the second filter screen 17 is set to a porous activated carbon material, and the third filter screen 18 is set to a HEPA filter screen material.

[0036] By setting up an air supply fan 5 including a fan 5, an air inlet pipe 6 and an air outlet pipe 7, one end of the air outlet pipe 7 is connected to a filtering mechanism including a first filter chamber 13, a second filter chamber 14 and a third filter chamber 15, and the first filter chamber 13, the second filter chamber 14 and the third filter chamber 15 are respectively provided with a first filter screen 16, a second filter screen 17 and a third filter screen 18, and the first filter screen 16, the second filter screen 17 and the third filter screen 18 are respectively three different filter materials. The device has a simple structure and is easy to use. By setting up a filtering mechanism with three filter materials, it has excellent filtering and purification effects, can transport air with a high degree of cleanliness, and is used to filter and purify fresh air entering the clean room to meet the air quality requirements of the clean room.

[0037] The first filter 16 is made of non-woven fabric, which has good air permeability and strong sealing performance. It is mainly used for primary filtration and can effectively remove large particles of dust, mold and animal hair.

[0038] The second filter 17 is made of porous activated carbon, which can fully contact with the air, absorb impurities, and quickly absorb toxic gas molecules into the holes. It can not only absorb large molecular organic gases such as benzene, but also small molecular gaseous pollutants such as formaldehyde and hydrogen sulfide;

[0039] The third filter 18 is configured to be a HEPA filter material. The HEPA high-efficiency filter can remove particles with a diameter of less than 0.3 microns (1 / 200 of the diameter of a hair) at a removal efficiency of more than 99.7%, and is the most effective filtering medium for pollutants such as smoke, dust and bacteria.

[0040] In addition, if Figure 4-6 As shown:

[0041] In order to facilitate the installation and replacement of filter materials, this application makes the following design:

[0042] The first filter chamber 13, the second filter chamber 14 and the third filter chamber 15 each include two chamber bodies 22, and the inner wall of the chamber body 22 is provided with an annular retaining ring 19. A rubber ring 20 is bonded to one side of the retaining ring 19, and the rubber ring 20 is provided in a trumpet shape, and the openings of one side of the rubber rings 20 in two adjacent chamber bodies 22 are in contact with the surface of the filter screen in the chamber. Two adjacent chamber bodies 22 are mounted together by fixing screws, and a peripheral edge 21 is integrally formed on one side of the opening of the chamber body 22, and a through hole for installing the fixing screw is opened on the peripheral edge 21.

[0043] When installing the filter material, open two adjacent bin bodies 22, put the filter material between the two retaining rings 19, and when the two bin bodies 22 are assembled by fixing screws, the rubber ring 20 contacts the filter material. Since the rubber ring 20 has certain elasticity and deformation ability, on the one hand, the two rubber rings 20 can fix and position the filter material to prevent the filter material from being easily displaced during use; on the other hand, the two rubber rings 20 can form a certain sealing structure, and the air entering the filter bin can only pass through the channel formed by the two rubber rings 20 and pass through the filter material to enter the next filter bin, so that the air can be fully and thoroughly filtered and purified;

[0044] When replacing or cleaning the filter material, the two adjacent bins 22 can be removed and opened by removing the fixing screws on the surrounding edge 21, and the filter material in the filter bin can be easily replaced or cleaned, which greatly improves the convenience of using the device.

[0045] like Figure 1-2 As shown:

[0046] An energy-saving clean room, comprising:

[0047] The main structure comprises a building body 1 and a door panel 2 arranged on the building body 1; a control panel 3 is installed on one side of the door panel 2 on the building body 1, and a display screen and control buttons are arranged on the control panel 3.

[0048] Circulation mechanism; the circulation mechanism includes a circulation pipe 8, an air inlet cover 9 and a circulation cover 10, the air inlet cover 9 is installed at the end of the air inlet pipe 6 and is connected to the interior of the building body 1, the circulation cover 10 is installed at one end of the circulation pipe 8 and is connected to the interior of the building body 1, and the other end of the circulation pipe 8 is connected to the third filter bin 15 through a flange;

[0049] In actual use, the fan 5 is installed on the building body 1 through the mounting base 4. The fan 5 extracts air in the clean room, and generates clean air that meets the air quality requirements of the clean room through the filtering mechanism, and then circulates it back to the clean room through the circulation pipe 8 to form convection;

[0050] The temperature in the clean room is mainly for the comfort of the workers. Therefore, the temperature of the clean room is 20-22°C in winter and 24-26°C in summer, which is more suitable. When ventilating the clean room, if the external air is directly extracted and transported to the clean room after purification, the new air needs to be heated or cooled to meet the standards of the clean room, thereby consuming the energy of the clean room. In this application, the design of self-circulation of air in the clean room is adopted, the purpose is to reduce the energy required for pre-treatment of fresh air, because the extracted air itself meets the temperature requirements of the clean room, thereby forming heat recovery, thereby saving the energy that would otherwise be consumed.

[0051] At the same time, the use of a circulation structure can also prevent cross-contamination of air in different spaces, and the recycled air will not carry external pollutants into the clean room.

[0052] In addition, if Figure 3 As shown: In order to further avoid heat loss, the present application also makes the following design:

[0053] The heat preservation structure is also included. The heat preservation structure is arranged outside the air inlet pipe 6, the air outlet pipe 7 and the circulation pipe 8, and the heat preservation structure includes a first heat preservation layer 11 and a second heat preservation layer 12 from the inside to the outside. The first heat preservation layer 11 is set to polyurethane foam material, and the second heat preservation layer 12 is set to rock wool material.

[0054] By arranging two heat-insulating layers outside the air inlet pipe 6, the air outlet pipe 7 and the circulation pipe 8, the heat loss during air circulation can be greatly reduced, thereby further playing an energy-saving role in the clean room.

[0055] The first insulation layer 11 is made of polyurethane foam, which has excellent insulation and mechanical properties. It has a low thermal conductivity and low water absorption.

[0056] The second thermal insulation layer 12 is made of rock wool, which has good thermal insulation and sound absorption properties, as well as good fire resistance and chemical stability.

[0057] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An air supply device, characterized in that: include: Air supply fan (5) mechanism and filtering mechanism; The air supply fan (5) structure comprises a fan (5), an air inlet pipe (6) and an air outlet pipe (7); the air inlet end of the fan (5) is fixedly connected to the air inlet pipe (6), and the air outlet end of the fan (5) is fixedly connected to the air outlet pipe (7); The filtering mechanism is located at one side of the air outlet pipe (7), and comprises a first filtering chamber (13), a second filtering chamber (14) and a third filtering chamber (15) which are arranged in sequence, wherein a first filter screen (16), a second filter screen (17) and a third filter screen (18) are respectively installed in the first filtering chamber (13), the second filtering chamber (14) and the third filtering chamber (15), and the first filtering chamber (13), the second filtering chamber (14) and the third filtering chamber (15) are respectively connected by pipelines, and the first filtering chamber (13) is connected to one end of the air outlet pipe (7) by the pipeline.

2. The air supply device according to claim 1, characterized in that: The first filter bin (13), the second filter bin (14) and the third filter bin (15) each comprise two bin bodies (22), and the inner walls of the bin bodies (22) are provided with an annular retaining ring (19).

3. The air supply device according to claim 2, characterized in that: A rubber ring (20) is bonded to one side of the retaining ring (19), and the rubber ring (20) is arranged in a trumpet shape.

4. The air supply device according to claim 3, characterized in that: The openings of one side of the rubber rings (20) in two adjacent bin bodies (22) both abut against the surface of the filter screen in the bin.

5. The air supply device according to claim 4, characterized in that: Two adjacent bin bodies (22) are mounted together by means of fixing screws, and a peripheral edge (21) is integrally formed on one side of the opening of the bin body (22), and a through hole for mounting the fixing screws is provided on the peripheral edge (21).

6. The air supply device according to claim 1, characterized in that: The first filter (16) is an integrated structure made of non-woven fabric, the second filter (17) is an integrated structure made of porous activated carbon, and the third filter (18) is an integrated structure made of a HEPA filter.

7. An energy-saving clean room, comprising the air supply device according to any one of claims 1 to 6, characterized in that: include: Main structure and circulation mechanism; The main structure comprises a building body (1) and a door panel (2) arranged on the building body (1); The circulation mechanism comprises a circulation pipe (8), an air inlet cover (9) and a circulation cover (10); the air inlet cover (9) is installed at the end of the air inlet pipe (6) and is connected to the interior of the building body (1); the circulation cover (10) is installed at one end of the circulation pipe (8) and is connected to the interior of the building body (1); the other end of the circulation pipe (8) is connected to the third filter bin (15) via a flange; Also includes thermal insulation structure.

8. The energy-saving clean room according to claim 7, characterized in that: The heat-insulating structure is arranged outside the air inlet pipe (6), the air outlet pipe (7) and the circulation pipe (8), and the heat-insulating structure comprises a first heat-insulating layer (11) and a second heat-insulating layer (12) from the inside to the outside.

9. The energy-saving clean room according to claim 8, characterized in that: The first thermal insulation layer (11) is an integrated structure made of polyurethane foam, and the second thermal insulation layer (12) is an integrated structure made of rock wool.

10. The energy-saving clean room according to claim 9, characterized in that: A control panel (3) is installed on one side of the door panel (2) on the building body (1), and a display screen and control buttons are provided on the control panel (3).

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