A PECVD multi-station automatic coating equipment

Abstract

The utility model discloses a PECVD multi-station automatic coating equipment, which is provided with a placement tray, first slide grooves are symmetrically provided on both sides of the placement tray, a first plate is slidably provided in the first slide groove, a second slide groove is provided on the first plate, a second plate is provided on the second slide groove, a coating part for coating is provided in the coating machine, a pressing plate is symmetrically provided on the coating part, the second plate is always in a position extending out of the first plate under the default state by the elastic part, and when the coating part is driven downward, the first plate is pushed into the second slide groove by the pressing plate and hidden. The PECVD multi-station automatic coating equipment provided by the utility model places the workpiece through the placement tray, realizes sealing at the end of coating through the first slide groove, the second slide groove, the first plate and the second plate, realizes sealing without affecting coating through the elastic part and the pressing plate, and realizes a pre-sealed state under the default state through the elastic part.

Description

Technical Field

[0001] The utility model relates to the technical field of PECVD coating machines, in particular to a PECVD multi-station automatic coating device. Background Art

[0002] PECVD multi-station automatic coating equipment is a highly efficient coating tool that uses plasma enhanced chemical vapor deposition (PECVD) technology to coat multiple substrates at different stations simultaneously. This type of equipment usually has the characteristics of high automation, fast coating speed, and good film quality, and is widely used in optoelectronics, semiconductors, solar cells and other fields.

[0003] According to the publication (announcement) number: CN205556777U, the publication (announcement) date: 2016-09-07, the disclosed PECVD coating equipment includes a reaction chamber, a conveying device and a cooling chamber, the reaction chamber and the conveying device are arranged on the top of the cooling chamber, the bottom end of the connection part of the reaction chamber and the conveying device is connected with a baffle through a hinge, a controller is arranged on one side of the cooling chamber, a cooling device is arranged on the top of the cooling chamber, a vacuum pump is fixed to the top of the reaction chamber through a pipeline, a vacuum valve is arranged at the outlet of the vacuum pump, a temperature sensor is arranged at the top of the inside of the reaction chamber, a heater is fixed at the upper end of the inside of the reaction chamber, a special gas pipeline is arranged at the bottom of the inside of the reaction chamber, a graphite boat is arranged at the top of the conveying device at the bottom of the special gas pipeline, and square grid holes are arranged inside the graphite boat.

[0004] It is known from the above patents and prior art that when coating, the coating equipment needs to first perform vacuum treatment inside the coating machine. After coating, if there is still air in the coating machine, the coating surface will not achieve the expected effect, so re-coating is required, which wastes costs. Utility Model Content

[0005] The utility model aims to provide a PECVD multi-station automatic coating device, which realizes sealing after coating is completed.

[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a PECVD multi-station automatic coating device, comprising a coating machine, wherein a placement plate is arranged inside, first slide grooves are symmetrically provided on both sides of the placement plate, a first plate is slidably provided in the first slide groove, a second slide groove is provided on the first plate, a second plate is provided on the second slide groove, and a plurality of elastic members arranged in an array are provided in the second slide groove;

[0007] The coating machine is provided with a coating part for coating, and a pressing plate is symmetrically arranged on the coating part;

[0008] In a default state, the second plate is always in a position extending out of the first plate by the elastic member. When the coating member is driven downward, the first plate is pushed by the pressing plate into the second sliding groove and hidden.

[0009] Preferably, the placement plate is provided with symmetrical slots, and a clamping plate is rotatably arranged in the slots.

[0010] Preferably, a second plate is included, and the clamping plate is a convex plate and is clamped to the second plate.

[0011] Preferably, a rotating rod is rotatably provided on the second plate.

[0012] Preferably, the elastic member is a spring.

[0013] In the above technical scheme, the utility model provides a PECVD multi-station automatic coating equipment, which has the following beneficial effects: the workpiece is placed on a placing plate, the first slide groove, the second slide groove, the first plate and the second plate are used to achieve sealing at the end of coating, the elastic part and the pressing plate are used to achieve sealing without affecting the coating, and the elastic part is used to achieve a pre-sealed state in the default state. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0015] Figure 1 The overall structural diagram provided for the embodiment of the utility model;

[0016] Figure 2 A schematic diagram of the structure of the placement tray provided in an embodiment of the utility model;

[0017] Figure 3 A schematic structural diagram of a first plate member provided in an embodiment of the utility model.

[0018] Description of reference numerals:

[0019] 1. Coating machine; 11. Placement plate; 12. Coating member; 13. Telescopic rod; 14. Pressing plate; 21. First slide groove; 22. First plate member; 23. Second slide groove; 24. Second plate member; 25. Elastic member; 27. Card plate; 28. Notch; 29. ​​Rotating rod. DETAILED DESCRIPTION

[0020] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0021] like Figure 1-3 As shown, a PECVD multi-station automatic coating device includes a coating machine 1, in which a placing plate 11 is arranged, first slide grooves 21 are symmetrically opened on both sides of the placing plate 11, a first plate 22 is slidably arranged in the first slide groove 21, a second slide groove 23 is opened on the first plate 22, a second plate 24 is arranged on the second slide groove 23, and a plurality of elastic members 25 arranged in an array are arranged in the second slide groove 23;

[0022] The coating machine 1 is provided with a coating member 12 for coating, and a pressing plate 14 is symmetrically arranged on the coating member 12;

[0023] In a default state, the second plate 24 is always in a position extending out of the first plate 22 by the elastic member 25 . When the coating member 12 is driven downward, the first plate 22 is pushed by the pressing plate 14 into the second sliding groove 23 and hidden.

[0024] Specifically, when in use, the workpiece is first placed in the placement tray 11, and then the first slide groove 21 and the second slide groove 21 are both provided with elastic members 25. In the default state, the elastic member 25 pushes the first plate member 22 and the second plate member 24, so that the first plate member 22 and the second plate member 24 are in an extended state. When the coating member 12 is pressed downward and coating is performed, the pressing plate 14 will first press the second plate member 24 downward until it is pressed into the second slide groove 23. When it reaches the end, it will continue to press downward until it is pressed into the first slide groove 21, and coating is performed at this time. After coating is completed, the coating member 12 is driven by the telescopic rod 13 to move upward, and moves a little more than in the default state. At this time, the first plate member 22 and the second plate member 24 are respectively pushed by the elastic member 25. After moving upward to the top point, the rotating shaft at the bottom of the first plate member 22 rotates, causing the first plate members 22 on both sides to deflect, thereby driving the second plate member 24 to deflect. At this time, the two second plates 24 are docked to seal the placement tray 11.

[0025] In the above scheme, the workpiece is placed on the placement plate 11, and the sealing at the end of coating is achieved by the first slide groove 21, the second slide groove 23, the first plate 22 and the second plate 24. The sealing is achieved without affecting the coating by the elastic member 25 and the pressing plate 14, and the pre-sealed state is achieved in the default state by the elastic member 25.

[0026] As an embodiment further provided by the present invention, according to Figure 1 , Figure 2 and Figure 3 As shown, slots 28 are symmetrically provided in the placement tray 11 , and a clamping plate 27 is rotatably provided in the slots 28 .

[0027] Furthermore, it includes a second plate member 24 , and the clamping plate 27 is a convex plate that is clamped to the second plate member 24 .

[0028] Furthermore, a rotating rod 29 is rotatably disposed on the second plate 24 .

[0029] Specifically, when the first plate 22 needs to be locked in the first slide groove 23, the rotating rod 29 is rotated to deflect the rotating rod 29. At this time, the plane on the first plate 22 is switched to a convex surface, and the first plate 22 is clamped and locked.

[0030] Working principle: When in use, first place the workpiece in the placement tray 11, and when the first plate 22 is locked in the first slide groove 23, rotate the rotating rod 29 to deflect the rotating rod 29. At this time, the convex surface on the first plate 22 is switched to a flat surface, and the first plate 22 is unlocked. Then, elastic members 25 are provided in the first slide groove 21 and the second slide groove 21. In the default state, the elastic member 25 pushes the first plate 22 and the second plate 24, so that the first plate 22 and the second plate 24 are in an extended state. When the coating member 12 is pressed downward and the coating is performed, the pressing plate 14 will first push the second plate 2 4 is pressed downward until it is pressed into the second slide groove 23. When it reaches the end, it will continue to press downward until it is pressed into the first slide groove 21. At this time, coating is carried out. After coating, the coating member 12 is driven by the telescopic rod 13 to move upward and move a little more than the default state. At this time, the first plate member 22 and the second plate member 24 are pushed by the elastic member 25 respectively. After moving upward to the top, the rotating shaft at the bottom of the first plate member 22 rotates to deflect the first plate members 22 on both sides, thereby driving the second plate members 24 to deflect. At this time, the two second plate members 24 are butted against each other to seal the placement plate 11.

[0031] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A PECVD multi-station automatic coating equipment, characterized in that: The coating machine (1) comprises a placing plate (11) arranged therein, first slide grooves (21) are symmetrically provided on both sides of the placing plate (11), a first plate (22) is slidably provided in the first slide groove (21), a second slide groove (23) is provided on the first plate (22), a second plate (24) is provided on the second slide groove (23), and a plurality of elastic members (25) arranged in an array are provided in the second slide groove (23); The coating machine (1) is provided with a coating component (12) for coating, and a pressing plate (14) is symmetrically arranged on the coating component (12); In a default state, the second plate member (24) is always in a position extending out of the first plate member (22) under the control of the elastic member (25); when the coating member (12) is driven downward, the first plate member (22) is pushed by the pressing plate (14) into the second sliding groove (23) and is hidden.

2. A PECVD multi-station automatic coating equipment according to claim 1, characterized in that: The placement plate (11) is symmetrically provided with slots (28), and a clamping plate (27) is rotatably arranged in the slots (28).

3. A PECVD multi-station automatic coating equipment according to claim 2, characterized in that: It comprises a second plate member (24), and the clamping plate (27) is a convex plate and is clamped to the second plate member (24).

4. The PECVD multi-station automatic coating equipment according to claim 3, characterized in that: A rotating rod (29) is rotatably arranged on the second plate (24).

5. The PECVD multi-station automatic coating equipment according to claim 1, characterized in that: The elastic member (25) is a spring.

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