A valve based on single mechanical switch reversing

Abstract

The utility model is a valve based on single mechanical switch switching in the field of transmission valves, including a top cover, a flange connection shell, a valve plate, a pressure valve stem, a valve stem, a bellows assembly, a motion block, a valve stem fixing seat, a valve opening buffer seat, a valve closing buffer seat, a valve closing air nozzle, a valve closing air path, a valve opening air nozzle, a valve opening air path, a back plate, a shell, a valve closing mechanical switch, a valve opening mechanical switch, a transverse cylinder, a transverse cylinder cover, a transverse cylinder piston, a transverse cylinder piston seal, a piston rod locating pin, a longitudinal cylinder piston rod, a longitudinal cylinder upper sealing plug, an upper seal, a longitudinal cylinder piston, a longitudinal cylinder lower sealing plug, a lower seal, a cylindrical guide rail, and a longitudinal cylinder. The utility model simplifies the valve structure by establishing a valve based on single mechanical switch switching, and the valve has low vibration and low particle functions.

Description

Technical Field

[0001] The utility model relates to the field of transmission valves, in particular to a valve based on single mechanical switch reversing. Background Art

[0002] Transfer valves are essential basic components in vacuum system applications. They are mainly used in various situations where material transfer is required while maintaining vacuum, such as the transfer between various process chambers in the semiconductor wafer manufacturing process.

[0003] At present, the transmission valves widely used in the traditional vacuum field mostly adopt the following design:

[0004] 1. The valve plate is directly driven up and down by a single-acting cylinder and sealed by a traditional valve core structure;

[0005] 2. While using a single-acting cylinder to drive the valve plate to move up and down, the valve plate sealing ring is changed to a special-shaped structure for extrusion sealing.

[0006] However, the above design has the following problems:

[0007] 1. When the valve is switched on and off, the metal surface of the valve core is in direct contact with the metal surface of the valve body, which is easy to wear and produce dust and pollution particles;

[0008] 2. The material of the special-shaped sealing ring is rubber, which is prone to severe wear after multiple extrusions, thereby generating contamination particles.

[0009] Therefore, in order to meet the requirements of high cleanliness and high reliability in industries such as semiconductors, a low-particle, high-reliability transfer valve is needed. Utility Model Content

[0010] The utility model aims to propose a valve based on single mechanical switch reversing, aiming at the technical problem that the existing transmission valve is easy to generate polluted particles and cannot be applied to the semiconductor industry.

[0011] A valve based on single mechanical switch reversing, including a top cover, a flange connection shell, a valve plate, a pressure valve stem, a valve stem, a bellows assembly, a motion block, a valve stem fixing seat, a valve opening buffer seat, a valve closing buffer seat, a valve closing air nozzle, a valve closing air path, a valve opening air nozzle, a valve opening air path, a back plate, a housing, a valve closing mechanical switch, a valve opening mechanical switch, a transverse cylinder, a transverse cylinder cover, a transverse cylinder piston, a transverse cylinder piston seal, a piston rod locating pin, a longitudinal cylinder piston rod, a longitudinal cylinder upper sealing plug, an upper seal, a longitudinal cylinder piston, a longitudinal cylinder lower sealing plug, a lower seal, a cylindrical guide rail, and a longitudinal cylinder;

[0012] The top cover is fixedly connected to the flange connection shell, the valve plate is fixedly connected to the pressure valve stem, the valve stem is fixedly connected to the pressure valve stem, one end of the bellows assembly is fixedly connected to the valve stem, the other end of the bellows assembly is fixedly connected to the flange connection shell, the moving block and the valve stem are fixedly connected through the valve stem fixing seat, and the flange connection shell and the outer shell are fixedly connected;

[0013] The valve closing air nozzle is arranged below the top cover, the back plate and the shell are fixedly connected, and the valve closing mechanical switch is arranged inside the shell;

[0014] The valve opening air nozzle is arranged below the top cover, and the valve opening mechanical switch is arranged inside the housing;

[0015] The transverse cylinder is arranged on the housing, the piston rod positioning pin is arranged on the outside of the piston rod of the longitudinal cylinder, and the longitudinal cylinder is arranged below the transverse cylinder;

[0016] The cylindrical guide rail is connected to the moving block, and the trigger piece is fixed on the cylindrical guide rail.

[0017] Furthermore, in a valve based on single mechanical switch reversing, the gas path connection structure of the valve closing gas path is:

[0018] The valve-off air nozzle is connected to the first air path, the first air path is connected to the first second air path, the first second air path is connected to the first third air path, and the first third air path is connected to the first fourth air path;

[0019] The valve closing air nozzle is connected to the second-first air path, the second-first air path is connected to the second-second air path, the second-second air path is connected to the inlet of the valve closing mechanical switch, the second-third air path is connected to the outlet of the valve closing mechanical switch, and the second-eighth air path and the outlet of the valve closing mechanical switch are connected through the second-fourth air path, the second-fifth air path, the second-sixth air path, and the second-seventh air path.

[0020] Furthermore, in a valve based on single mechanical switch reversing, the gas path connection structure of the valve opening gas path is:

[0021] The valve opening air nozzle is connected to the third-first air path, the third-first air path is connected to the third-second air path, and the third-second air path and the inlet of the valve opening mechanical switch are connected through the third-third air path;

[0022] The fourth-first gas path is connected to the outlet of the valve-opening mechanical switch, the fourth-first gas path is connected to the fourth-second gas path, and the fourth-third gas path is connected to the fourth-fourth gas path.

[0023] Further, a valve based on single mechanical switch reversing, the transverse cylinder comprises a transverse cylinder cover, a transverse cylinder piston, and a transverse cylinder piston seal;

[0024] The transverse cylinder piston is arranged in the groove of the housing, the transverse cylinder piston sealing member is arranged in the groove of the transverse cylinder piston, and the transverse cylinder cover is arranged on the outer side of the transverse cylinder piston.

[0025] Further, a valve based on single mechanical switch reversing, the longitudinal cylinder comprises a longitudinal cylinder piston rod, a longitudinal cylinder upper sealing plug, an upper sealing member, a longitudinal cylinder piston, a longitudinal cylinder lower sealing plug, and a lower sealing member;

[0026] The longitudinal cylinder piston rod is fixedly connected to the moving block through a piston rod locating pin, and the moving block and the piston rod locating pin are horizontally slidably connected. The upper seal, the longitudinal cylinder piston, and the lower seal are all arranged in the groove of the outer shell, the upper seal is arranged above the longitudinal cylinder piston, and the longitudinal cylinder lower sealing plug is arranged above the lower seal.

[0027] Further, a valve based on single mechanical switch reversing, the valve closing mechanical switch includes a valve closing mechanical switch upper sealing plug, a valve closing elastic member, a valve closing shaft sleeve, a valve closing sealing member, a valve closing switch seat, a valve closing switch piston rod, a first valve closing switch flow channel, and a second valve closing switch flow channel;

[0028] The shaft sleeve and the valve closing switch seat are both arranged in the groove of the outer shell, the valve closing switch piston rod is arranged in the valve closing switch seat, the valve closing seal is compressed on the valve closing shaft sleeve, the valve closing switch piston rod and the sealing plug on the valve closing mechanical switch are elastically connected through the valve closing elastic member, the first valve closing switch flow channel is connected to the second second air path, and the second valve closing switch flow channel is connected to the second third air path.

[0029] Further, a valve based on single mechanical switch reversing, the valve opening mechanical switch comprises a valve opening mechanical switch upper sealing plug, a valve opening elastic member, a valve opening shaft sleeve, a valve opening sealing member, a valve opening switch seat, a valve opening switch piston rod, a first valve opening switch flow channel, and a second valve opening switch flow channel;

[0030] The valve opening sleeve and the valve opening switch seat are both arranged in the groove of the outer shell, the valve opening switch piston rod is arranged in the valve opening switch seat, the valve opening seal is compressed on the valve opening sleeve, the valve opening switch piston rod and the sealing plug on the valve opening mechanical switch are elastically connected through the valve opening elastic member, the first valve opening switch flow channel is connected to the fourth gas path, and the second valve opening switch flow channel is connected to the third gas path.

[0031] Beneficial effects of the utility model:

[0032] 1. Simplicity of the valve: Compared with the traditional valve which needs an external cylinder outside the shell, the transmission valve of the present invention has a more streamlined overall structure. Each gas path is placed inside the valve parts, and the two cylinders are also placed inside the shell and processed together with the shell, which reduces the space occupied by the valve and makes the valve more streamlined as a whole.

[0033] 2. It has low vibration and low particle functions: the valve body and the flange connection shell are connected with a metal bellows, and there is no metal friction in the flange connection shell, so no contamination particles will be generated to affect the passing products. The power source of the valve actuator is composed of a combination of longitudinal and transverse cylinders. The valve stem is fixedly connected to the moving block, which moves on the cylindrical guide rail, then drives the valve stem, and finally drives the valve plate to move, which improves the overall stability of the valve and reduces vibration to a minimum. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is the state diagram of the valve closed.

[0035] Figure 2 This is the state diagram of the valve opening.

[0036] Figure 3 This is the structural diagram of the valve closing gas circuit.

[0037] Figure 4 This is the structural diagram of the valve opening gas circuit.

[0038] Figure 5 This is the structural diagram of the transverse cylinder and the longitudinal cylinder.

[0039] Figure 6 A is a cross-sectional view of the valve closing mechanical switch.

[0040] Figure 7 B is a cross-sectional view of the valve closing mechanical switch.

[0041] Figure 8 A is a cross-sectional view of the valve opening mechanical switch.

[0042] Fig. 9 B is a cross-sectional view of the valve opening mechanical switch.

[0043] In the figure, 1-top cover, 2-flange connection shell, 3-valve plate, 4-pressure valve stem, 5-valve stem, 6-bellows assembly, 7-movement block, 8-valve stem fixing seat, 9-open valve buffer seat, 10-close valve buffer seat, 11-close valve air nozzle, 12-close valve air path, 13-open valve air nozzle, 14-open valve air path, 15-back plate, 16-shell, 17-close valve mechanical switch, 18-open valve mechanical switch, 19-transverse cylinder, 20-transverse cylinder head, 21-transverse cylinder piston, 22-transverse cylinder piston seal, 23-piston rod locating pin, 24-longitudinal cylinder piston rod, 25-longitudinal cylinder upper sealing plug, 26-upper seal, 27-longitudinal cylinder piston, 28-longitudinal cylinder lower sealing plug, 29-lower seal, 30-cylindrical guide, 31-longitudinal cylinder;

[0044] 111-1st gas path, 112-1st 2nd gas path, 113-1st 3rd gas path, 114-1st 4th gas path, 121-1st 2nd gas path, 122-2nd 2nd gas path, 123-2nd 3rd gas path, 124-2nd 4th gas path, 125-2nd 5th gas path, 126-2nd 6th gas path, 127-2nd 7th gas path, 128-2nd 8th gas path, 131-3rd 1st gas path, 132-3rd 2nd gas path, 133-3rd 3rd gas path, 141-4th 1st gas path, 142-4th 2nd gas path, 143-4th 3rd gas path, 144-4th 4th gas path;

[0045] 171-sealing plug on the valve closing mechanical switch, 172-valve closing elastic member, 173-valve closing sleeve, 174-valve closing seal, 175-valve closing switch seat, 176-valve closing switch piston rod, 177-first valve closing switch flow channel, 178-second valve closing switch flow channel, 181-sealing plug on the valve opening mechanical switch, 182-valve opening elastic member, 183-valve opening sleeve, 184-valve opening seal, 185-valve opening switch seat, 186-valve opening switch piston rod, 187-first valve opening switch flow channel, 188-second valve opening switch flow channel. DETAILED DESCRIPTION

[0046] In order to have a clearer understanding of the technical features, purposes and effects of the utility model, the specific implementation methods of the utility model are now described with reference to the accompanying drawings.

[0047] As attached Figures 1 to 4 As shown, a valve based on single mechanical switch reversing includes a top cover 1, a flange connection shell 2, a valve plate 3, a pressure valve stem 4, a valve stem 5, a bellows assembly 6, a moving block 7, a valve stem fixing seat 8, a valve opening buffer seat 9, a valve closing buffer seat 10, a valve closing air nozzle 11, a valve closing air path 12, a valve opening air nozzle 13, a valve opening air path 14, a back plate 15, a shell 16, a valve closing mechanical switch 17, a valve opening mechanical switch 18, a transverse cylinder 19, a transverse cylinder cover 20, a transverse cylinder piston 21, a transverse cylinder piston seal 22, a piston rod locating pin 23, a longitudinal cylinder piston rod 24, a longitudinal cylinder upper sealing plug 25, an upper seal 26, a longitudinal cylinder piston 27, a longitudinal cylinder lower sealing plug 28, a lower seal 29, a cylindrical guide rail 30, and a longitudinal cylinder 31;

[0048] The top cover 1 is fixedly connected to the flange connection shell 2, the valve plate 3 is fixedly connected to the pressure valve stem 4, the valve stem 5 is fixedly connected to the pressure valve stem 4, one end of the bellows assembly 6 is fixedly connected to the valve stem 5, the other end of the bellows assembly 6 is fixedly connected to the flange connection shell 2, the moving block 7 and the valve stem 5 are fixedly connected through the valve stem fixing seat 8, and the flange connection shell 2 and the outer shell 16 are fixedly connected;

[0049] The valve closing nozzle 11 is arranged below the top cover 1, the back plate 15 and the housing 16 are fixedly connected, and the valve closing mechanical switch 17 is arranged inside the housing 16;

[0050] The valve opening nozzle 13 is arranged below the top cover 1, and the valve opening mechanical switch 18 is arranged inside the housing 16;

[0051] The transverse cylinder 19 is arranged on the housing 16, the piston rod positioning pin 23 is arranged outside the longitudinal cylinder piston rod 24, and the longitudinal cylinder 31 is arranged below the transverse cylinder 19;

[0052] The cylindrical guide rail 30 is connected to the moving block 7 , and the trigger piece is fixed on the cylindrical guide rail 30 .

[0053] As attached Figure 3 As shown, a valve based on single mechanical switch reversing, the gas path connection structure of the valve closing gas path 12 is:

[0054] The valve-off gas nozzle 11 is connected to the first gas path 111, the first gas path 111 is connected to the first second gas path 112, the first second gas path 112 is connected to the first third gas path 113, and the first third gas path 113 is connected to the first fourth gas path 114;

[0055] The valve closing nozzle 11 is connected to the second first gas path 121, the second first gas path 121 is connected to the second second gas path 122, the second second gas path 122 is connected to the inlet of the valve closing mechanical switch 17, the second third gas path 123 is connected to the outlet of the valve closing mechanical switch 17, and the second eighth gas path 128 is connected to the outlet of the valve closing mechanical switch 17 through the second fourth gas path 124, the second fifth gas path 125, the second sixth gas path 126, and the second seventh gas path 127;

[0056] The gas in the first four gas paths 114 is the gas source for the longitudinal cylinder 31 to push the valve plate 3 in the positive direction;

[0057] The gas in the second eight gas path 128 is the gas source for the transverse cylinder 19 to push the valve plate 3 in the positive direction;

[0058] The positive direction is a direction approaching the sealing portion from a distance.

[0059] As attached Figure 4 As shown, a valve based on single mechanical switch reversing, the gas path connection structure of the valve opening gas path 14 is:

[0060] The valve opening nozzle 13 is connected to the third-first gas path 131, the third-first gas path 131 is connected to the third-second gas path 132, and the third-second gas path 132 and the inlet of the valve opening mechanical switch 18 are connected through the third-third gas path 133;

[0061] The fourth first gas path 141 is connected to the outlet of the valve opening mechanical switch 18, the fourth first gas path 141 is connected to the fourth second gas path 142, and the fourth third gas path 143 is connected to the fourth fourth gas path 144;

[0062] The gas of the fourth gas path 144 is the gas source for the longitudinal cylinder 31 to push the valve plate 3 in the reverse direction;

[0063] The gas in the third gas path 133 is the gas source for the transverse cylinder 19 to push the valve plate 3 in the opposite direction;

[0064] The positive direction is a direction away from the sealing portion from the near side.

[0065] As attached Figure 5 As shown, a valve based on single mechanical switch reversing, the transverse cylinder 19 includes a transverse cylinder cover 20, a transverse cylinder piston 21, and a transverse cylinder piston seal 22;

[0066] The transverse cylinder piston 21 is disposed in a groove of the housing 16 , the transverse cylinder piston seal 22 is disposed in the groove of the transverse cylinder piston 21 , and the transverse cylinder cover 20 is disposed on the outer side of the transverse cylinder piston 21 .

[0067] As attached Figure 5 As shown, a valve based on single mechanical switch reversing, the longitudinal cylinder 31 includes a longitudinal cylinder piston rod 24, a longitudinal cylinder upper sealing plug 25, an upper sealing member 26, a longitudinal cylinder piston 27, a longitudinal cylinder lower sealing plug 28, and a lower sealing member 29;

[0068] The longitudinal cylinder piston rod 24 is fixedly connected to the moving block 7 via the piston rod locating pin 23, and the moving block 7 is horizontally slidably connected to the piston rod locating pin 23. The upper seal 26, the longitudinal cylinder piston 27, and the lower seal 29 are all arranged in the groove of the outer shell 16. The upper seal 16 is arranged above the longitudinal cylinder piston 27, and the longitudinal cylinder lower sealing plug 28 is arranged above the lower seal 29.

[0069] As attached Figures 6 and 7 As shown, a valve based on single mechanical switch reversing, the valve closing mechanical switch 17 includes a valve closing mechanical switch upper sealing plug 171, a valve closing elastic member 172, a valve closing shaft sleeve 173, a valve closing seal 174, a valve closing switch seat 175, a valve closing switch piston rod 176, a first valve closing switch flow channel 177, and a second valve closing switch flow channel 178;

[0070] The shaft sleeve 173 and the valve closing switch seat 175 are both arranged in the groove of the housing 16, the valve closing switch piston rod 176 is arranged in the valve closing switch seat 175, the valve closing seal 174 is compressed on the valve closing shaft sleeve 173, the valve closing switch piston rod 176 and the sealing plug 171 on the valve closing mechanical switch are elastically connected through the valve closing elastic member 172, the first valve closing switch flow channel 177 is connected to the second second gas path 122, and the second valve closing switch flow channel 178 is connected to the second third gas path 123;

[0071] The first valve closing switch flow channel 177 is the inlet of the valve closing mechanical switch 17 , and the second valve closing switch flow channel 178 is the outlet of the valve closing mechanical switch 17 .

[0072] As attached Figures 8 and 9 As shown, a valve based on single mechanical switch reversing, the valve opening mechanical switch 18 includes a valve opening mechanical switch upper sealing plug 181, a valve opening elastic member 182, a valve opening shaft sleeve 183, a valve opening sealing member 184, a valve opening switch seat 185, a valve opening switch piston rod 186, a first valve opening switch flow channel 187, and a second valve opening switch flow channel 188;

[0073] The valve opening shaft sleeve 183 and the valve opening switch seat 185 are both arranged in the groove of the housing 16, the valve opening switch piston rod 186 is arranged in the valve opening switch seat 185, the valve opening seal 184 is compressed on the valve opening shaft sleeve 183, the valve opening switch piston rod 186 and the sealing plug 181 on the valve opening mechanical switch are elastically connected through the valve opening elastic member 182, the first valve opening switch flow channel 187 is connected to the fourth first gas path 141, and the second valve opening switch flow channel 188 is connected to the third third gas path 133;

[0074] The second valve opening switch flow channel 188 is the inlet of the valve opening mechanical switch 18 , and the first valve opening switch flow channel 187 is the outlet of the valve opening mechanical switch 18 .

[0075] A valve based on single mechanical switch reversing, the control method includes controlling the valve to close and controlling the valve to open;

[0076] The control valve closing comprises the following steps:

[0077] S1: The valve gas nozzle 11 is closed to allow air to enter. The gas passes through the first gas path 111, the second gas path 112, the third gas path 113, and the fourth gas path 114 in sequence to push the longitudinal cylinder piston 27 upward, driving the longitudinal cylinder piston rod 24 upward at the same time;

[0078] S2: The longitudinal cylinder piston rod 24 drives the moving block 7 to push upward, the moving block 7 drives the valve stem 5 to push upward, and the valve stem 5 drives the valve plate 3 to push upward;

[0079] S3: When the valve plate 3 moves longitudinally to the limit position, the valve closing mechanical switch 17 is triggered, and the gas path of the valve closing gas path 12 is switched from the second gas path 122 to the second gas path 23;

[0080] S4: The gas passes through the second fourth gas path 124, the second fifth gas path 125, the second sixth gas path 126, and the second seventh gas path 127 in sequence, and reaches the second eighth gas path 128, pushing the transverse cylinder piston 21 to move, and at the same time, the valve plate 3 moves first longitudinally and then transversely, completing the valve closing;

[0081] The control valve opening comprises the following steps:

[0082] I1: Open the valve nozzle 13 to let in air, and the gas reaches the third second air path 132 through the third first air path 131, pushing the transverse cylinder piston 21 to move in the opposite direction, and at the same time, the moving block 7 and the valve plate 3 start to move away from the sealing surface;

[0083] I2: The cylindrical guide rail 30 moves together with the moving block 7. When the lateral movement reaches the limit position, the trigger piece on the cylindrical guide rail 30 triggers the valve opening mechanical switch 18, and the valve opening gas path 14 is switched from the third gas path 133 to the fourth gas path 141;

[0084] I3: The gas then passes through the fourth second gas path 142 and the fourth third gas path 143 in sequence to reach the fourth fourth gas path 144, and the longitudinal cylinder piston 27 is pushed downward, driving the moving block 7 and the valve plate 3 to move downward together. When the moving reaches the longitudinal limit position, the valve is opened.

[0085] Among them, all the sealing components are designed to achieve the purpose of sealing, among which the bellows assembly 6 plays the role of shaft feeding seal.

[0086] Further, a valve based on single mechanical switch reversing, the control method also includes controlling the valve closing mechanical switch 17 and controlling the valve opening mechanical switch 18;

[0087] The control of the valve closing mechanical switch 17 comprises the following steps:

[0088] A1: When the valve closing switch piston rod 176 is not triggered, the gas reaches the second valve closing switch flow channel 178 through the second third gas path 123, and does not reach the first valve closing switch flow channel 177;

[0089] A2: When the valve closing switch piston rod 176 is triggered by the longitudinal cylinder piston rod 24, the valve closing switch piston rod 176 moves upward to compress the valve closing elastic member 172;

[0090] A3: The hole located at the valve closing sleeve 173 is aligned with the first valve closing switch flow channel 177, and the gas reaches the second gas path 122 through the first valve closing switch flow channel 177 to complete the reversal;

[0091] The control of the valve opening mechanical switch 18 comprises the following steps:

[0092] W1: When the valve opening switch piston rod 186 is not triggered, the gas reaches the first valve opening switch flow channel 187 through the fourth gas path 141, and does not reach the second valve closing switch flow channel 188;

[0093] W2: When the valve opening switch piston rod 186 is triggered by the longitudinal cylinder piston rod 24, the valve opening switch piston rod 186 moves upward to compress the valve opening elastic member 182;

[0094] W3: The hole located at the valve opening sleeve 183 is aligned with the second valve closing switch flow channel 188, and the gas reaches the third gas path 133 through the second valve closing switch flow channel 188 to complete the reversal.

[0095] Specific embodiment A design principle of a valve based on single mechanical switch reversing:

[0096] Realization of low particle function: The driving mechanism of the valve plate 3 is the key to realize the low particle function. In the actual working process of the valve, the parts that are most likely to produce metal friction are the valve plate 3 and the housing 16;

[0097] The utility model is designed to independently drive the horizontal and vertical cylinders, which first go straight up to the valve closing position, and then the horizontal cylinder 19 pushes the valve plate 3 laterally to tighten and seal, and the gas paths of the two horizontal and vertical cylinders are connected through a single mechanical switch reversing valve.

[0098] The specific implementation method is: in the valve closing process, first, the longitudinal cylinder 31 pushes the valve plate 3 to the closed position in a positive direction, and at the same time, the valve closing switch piston rod 176 of the cylinder triggers the valve closing mechanical switch 17, and the switching first valve closing switch flow channel 177 is opened, and the gas flows through the gas path to the positive push cylinder body of the transverse cylinder 19, pushing the valve plate 3 to press laterally to complete the valve closing seal;

[0099] During the valve opening process, first, the transverse cylinder 19 pushes the valve plate 3 in the reverse direction to leave the valve closing position. At this time, the valve opening mechanical switch 18 is pressed, and the reversing second valve closing switch flow channel 188 is opened. The gas flows through the gas path to the reverse thrust cylinder of the longitudinal cylinder 31, pushing the valve plate 3 back to the initial valve opening position longitudinally, completing the valve opening action.

[0100] The utility model avoids metal friction when the valve plate 3 moves in the shell 16, and the whole valve switching action is similar to an L shape.

[0101] The utility model uses a valve based on a single mechanical switch reversing. Compared with the traditional valve which needs an external cylinder outside the shell, the transmission valve of the utility model has a more streamlined overall structure. Each gas path is placed inside the valve parts, and the two types of cylinders are also placed inside the shell and are processed as a whole with the shell, which reduces the space occupied by the valve and makes the valve more streamlined as a whole. The shell part of the valve is connected to the flange connection shell by a metal bellows, and there is no metal friction in the flange connection shell, and no contamination particles are generated to affect the passing products. The power source of the valve actuator is formed by combining two types of vertical and horizontal cylinders. The valve stem is fixedly connected to the moving block. The moving block moves on the cylindrical guide rail, and then drives the valve stem, and finally drives the valve plate to move, thereby improving the overall stability of the valve and reducing vibration to a minimum.

[0102] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A valve based on single mechanical switch reversing, characterized in that: It comprises a top cover (1), a flange connection shell (2), a valve plate (3), a valve pressing stem (4), a valve stem (5), a bellows assembly (6), a moving block (7), a valve stem fixing seat (8), a valve opening buffer seat (9), a valve closing buffer seat (10), a valve closing air nozzle (11), a valve closing air path (12), a valve opening air nozzle (13), a valve opening air path (14), a back plate (15), a housing (16), a valve closing mechanical switch (17), a valve opening mechanical switch (18), a transverse cylinder (19), a transverse cylinder cover (20), a transverse cylinder piston (21), a transverse cylinder piston seal (22), a piston rod locating pin (23), a longitudinal cylinder piston rod (24), a longitudinal cylinder upper sealing plug (25), an upper sealing member (26), a longitudinal cylinder piston (27), a longitudinal cylinder lower sealing plug (28), a lower sealing member (29), a cylindrical guide rail (30), and a longitudinal cylinder (31); The top cover (1) is fixedly connected to the flange connection shell (2), the valve plate (3) is fixedly connected to the pressure valve stem (4), the valve stem (5) is fixedly connected to the pressure valve stem (4), one end of the bellows assembly (6) is fixedly connected to the valve stem (5), the other end of the bellows assembly (6) is fixedly connected to the flange connection shell (2), the moving block (7) and the valve stem (5) are fixedly connected via the valve stem fixing seat (8), and the flange connection shell (2) and the outer shell (16) are fixedly connected; The valve closing air nozzle (11) is arranged below the top cover (1), the back plate (15) and the outer shell (16) are fixedly connected, and the valve closing mechanical switch (17) is arranged inside the outer shell (16); The valve opening nozzle (13) is arranged below the top cover (1), and the valve opening mechanical switch (18) is arranged inside the housing (16); The transverse cylinder (19) is arranged on the housing (16), the piston rod positioning pin (23) is arranged outside the longitudinal cylinder piston rod (24), and the longitudinal cylinder (31) is arranged below the transverse cylinder (19); The cylindrical guide rail (30) is connected to the moving block (7), and the trigger plate is fixed on the cylindrical guide rail (30).

2. A valve based on single mechanical switch reversing as claimed in claim 1, characterized in that: The gas path connection structure of the valve closing gas path (12) is: The valve-off gas nozzle (11) is connected to the first gas path (111), the first gas path (111) is connected to the first second gas path (112), the first second gas path (112) is connected to the first third gas path (113), and the first third gas path (113) is connected to the first fourth gas path (114); The valve closing air nozzle (11) is connected to the second first air path (121), the second first air path (121) is connected to the second second air path (122), the second second air path (122) is connected to the inlet of the valve closing mechanical switch (17), the second third air path (123) is connected to the outlet of the valve closing mechanical switch (17), and the second eighth air path (128) and the outlet of the valve closing mechanical switch (17) are connected via the second fourth air path (124), the second fifth air path (125), the second sixth air path (126), and the second seventh air path (127).

3. A valve based on single mechanical switch reversing as claimed in claim 1, characterized in that: The gas path connection structure of the valve opening gas path (14) is: The valve opening air nozzle (13) is connected to the third-first air path (131), the third-first air path (131) is connected to the third-second air path (132), and the third-second air path (132) and the inlet of the valve opening mechanical switch (18) are connected via the third-third air path (133); The fourth first gas path (141) is connected to the outlet of the valve opening mechanical switch (18), the fourth first gas path (141) is connected to the fourth second gas path (142), and the fourth third gas path (143) is connected to the fourth fourth gas path (144).

4. A valve based on single mechanical switch reversing as claimed in claim 1, characterized in that: The transverse cylinder (19) comprises a transverse cylinder cover (20), a transverse cylinder piston (21), and a transverse cylinder piston seal (22); The transverse cylinder piston (21) is arranged in a groove of the housing (16), the transverse cylinder piston seal (22) is arranged in the groove of the transverse cylinder piston (21), and the transverse cylinder cover (20) is arranged on the outside of the transverse cylinder piston (21).

5. A valve based on single mechanical switch reversing as claimed in claim 1, characterized in that: The longitudinal cylinder (31) comprises a longitudinal cylinder piston rod (24), a longitudinal cylinder upper sealing plug (25), an upper sealing member (26), a longitudinal cylinder piston (27), a longitudinal cylinder lower sealing plug (28), and a lower sealing member (29); The longitudinal cylinder piston rod (24) is fixedly connected to the moving block (7) via a piston rod positioning pin (23); the moving block (7) and the piston rod positioning pin (23) are horizontally slidably connected; an upper sealing member (26), a longitudinal cylinder piston (27), and a lower sealing member (29) are all arranged in a groove of the housing (16); the upper sealing member (26) is arranged above the longitudinal cylinder piston (27); and a longitudinal cylinder lower sealing plug (28) is arranged above the lower sealing member (29).

6. A valve based on single mechanical switch reversing as claimed in claim 1, characterized in that: The valve closing mechanical switch (17) comprises a valve closing mechanical switch upper sealing plug (171), a valve closing elastic member (172), a valve closing shaft sleeve (173), a valve closing sealing member (174), a valve closing switch seat (175), a valve closing switch piston rod (176), a first valve closing switch flow channel (177), and a second valve closing switch flow channel (178); The shaft sleeve (173) and the valve closing switch seat (175) are both arranged in a groove of the housing (16); the valve closing switch piston rod (176) is arranged in the valve closing switch seat (175); the valve closing seal (174) is compressed on the valve closing shaft sleeve (173); the valve closing switch piston rod (176) and the sealing plug (171) on the valve closing mechanical switch are elastically connected via the valve closing elastic member (172); the first valve closing switch flow channel (177) is connected to the second second gas path (122); and the second valve closing switch flow channel (178) is connected to the second third gas path (123).

7. A valve based on single mechanical switch reversing as claimed in claim 1, characterized in that: The valve opening mechanical switch (18) comprises a valve opening mechanical switch upper sealing plug (181), a valve opening elastic member (182), a valve opening shaft sleeve (183), a valve opening sealing member (184), a valve opening switch seat (185), a valve opening switch piston rod (186), a first valve opening switch flow channel (187), and a second valve opening switch flow channel (188); The valve opening sleeve (183) and the valve opening switch seat (185) are both arranged in a groove of the housing (16); the valve opening switch piston rod (186) is arranged in the valve opening switch seat (185); the valve opening seal (184) is compressed on the valve opening sleeve (183); the valve opening switch piston rod (186) and the sealing plug (181) on the valve opening mechanical switch are elastically connected via the valve opening elastic member (182); the first valve opening switch flow channel (187) is connected to the fourth gas path (141); and the second valve opening switch flow channel (188) is connected to the third gas path (133).

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