Vacuum gas circuit device and vacuum holding equipment

By connecting the vacuum generator to the solenoid valve in the vacuum air circuit device and then connecting it with the vacuum suction cup, the problems of complex air circuit configuration and large use of solenoid valves in the conventional vacuum system are solved, and higher suction accuracy and stability are achieved.

CN222728976UActive Publication Date: 2025-04-08HANS LASER TECH IND GRP CO LTD
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Patent Information

Application Number
CN202420631311.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-28
Publication Date
2025-04-08
Estimated Expiration
2034-03-28

AI Technical Summary

Technical Problem

The air circuit configuration of conventional vacuum systems is complex and the solenoid valve is used in large quantities, which leads to high connection complexity and risk of connection errors, affecting the workpiece suction accuracy.

Method used

A vacuum air circuit device is designed in which the vacuum generator is not directly connected to the vacuum suction cup, but is first connected to the solenoid valve and then connected to the vacuum suction cup. The gas flow is regulated through the solenoid valve to reduce the use of the solenoid valve.

Benefits of technology

It effectively reduces the use of solenoid valves, reduces the complexity of the pipe and the risk of connection errors, and improves the accuracy and stability of the workpiece suction.

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Abstract

The utility model relates to a vacuum air path device and vacuum holding equipment, and the vacuum air path device specifically comprises an electromagnetic valve which comprises an air source side interface and a non-air source side interface, and the air source side interface can be connected with the air source output end of a positive pressure air source; the vacuum generator comprises a positive pressure gas receiving end and a negative pressure gas output end, the positive pressure gas receiving end is connected with the non-gas source side interface, and the negative pressure gas output end is connected with the gas source side interface; the vacuum suction cup comprises a positive and negative pressure gas input end and a material adsorption end, and the positive and negative pressure gas input end is connected with the non-gas-source side connector. Compared with a common vacuum gas circuit device, the vacuum generator is not directly connected with the vacuum suction cup, but is connected with the electromagnetic valve firstly and then connected with the vacuum suction cup, so that the use amount of the electromagnetic valve is reduced while the material adsorption is ensured, the problems of high pipe connecting complexity and wrong connecting risk are effectively solved, and the production efficiency is improved. And therefore, the sucking and holding precision and stability of materials (such as workpieces) are ensured.
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Description

Technical Field

[0001] The present application relates to the field of suction and holding technology, and in particular to a vacuum air path device and a vacuum suction and holding device. Background Art

[0002] With the continuous development of suction and holding technology and the continuous enrichment of suction and holding application scenarios, the requirements for each link in the workpiece suction and holding process are getting higher and higher. Vacuum suction and holding technology uses the vacuum principle to form negative pressure by reducing local gas pressure, thereby achieving the purpose of adsorbing the workpiece. It has the characteristics of strong adsorption force and is especially suitable for stable clamping and precise positioning of workpieces in mechanical automation production processes.

[0003] However, the conventional vacuum system gas circuit configuration generally requires multiple two-position three-way solenoid valves, which are not only costly but also complicated to connect. Experienced workers are often required to connect the pipelines, which poses a risk of wrong connection and affects the workpiece holding accuracy. Utility Model Content

[0004] Based on this, it is necessary to provide a vacuum air path device and a vacuum holding device to address the above technical problems.

[0005] A vacuum air passage device, comprising:

[0006] The solenoid valve comprises an air source side interface and a non-air source side interface, wherein the air source side interface can be connected to an air source output end of a positive pressure air source;

[0007] A vacuum generator, comprising a positive-pressure gas receiving end and a negative-pressure gas output end, wherein the positive-pressure gas receiving end is connected to the non-gas source side interface, and the negative-pressure gas output end is connected to the gas source side interface;

[0008] The vacuum suction cup comprises a positive and negative pressure gas input end and a material adsorption end, wherein the positive and negative pressure gas input end is connected to the non-gas source side interface.

[0009] In one embodiment, the gas source side interface includes a positive pressure gas source receiving end and a negative pressure gas inlet end, the positive pressure gas source receiving end is connected to the gas source output end of the positive pressure gas source, and the negative pressure gas inlet end is connected to the negative pressure gas output end.

[0010] In one embodiment, the non-gas source side interface includes a first gas outflow end and a second gas outflow end, the first gas outflow end is connected to the positive pressure gas receiving end, and the second gas outflow end is connected to the positive and negative pressure gas input ends.

[0011] In one embodiment, the solenoid valve phase is provided with a plurality of working positions. When the solenoid valve is in a first working position, positive-pressure gas flows into the solenoid valve through the positive-pressure gas source receiving end, flows into the vacuum generator through the positive-pressure gas receiving end, outputs negative-pressure gas to the solenoid valve through the negative-pressure gas output end, and then flows out the negative-pressure gas to the vacuum suction cup through the second gas outflow end.

[0012] In one embodiment, the first gas outlet end is provided with a first plug, and the second gas outlet end is provided with a second plug. When the solenoid valve is in the second working position, the first plug acts on the first gas outlet end, and the second plug acts on the second gas outlet end.

[0013] In one embodiment, when the solenoid valve is in the third working position, the first plug acts on the first gas outflow end, the positive pressure gas flows into the solenoid valve through the positive pressure gas source receiving end, and the positive pressure gas flows out to the vacuum suction cup through the second gas outflow end.

[0014] In one of the embodiments, the size of the suction contact surface of the vacuum suction cup is adjustable.

[0015] In one embodiment, the solenoid valve is a three-position five-way solenoid valve.

[0016] A vacuum holding device, comprising:

[0017] The vacuum air path device as described above;

[0018] A positive pressure air source is connected to the solenoid valve of the vacuum air path device.

[0019] In one of the embodiments, a speed regulating valve is provided between the gas source output end of the positive pressure gas source and the gas source side interface of the solenoid valve.

[0020] The technical effects of the embodiments provided in this application are as follows:

[0021] The above-mentioned vacuum air circuit device, when vacuum holding a material (such as a workpiece), the solenoid valve receives the positive-pressure gas outputted through the air source output end through the air source side interface, and inputs the positive-pressure air source into the vacuum generator through the positive-pressure gas receiving end connected to the non-air source side interface. The vacuum generator generates negative-pressure gas after receiving the positive-pressure gas, and outputs the negative-pressure gas to the solenoid valve through the negative-pressure gas output end connected to the air source side interface, and then acts on the vacuum suction cup through the positive and negative pressure gas input ends connected to the non-air source side interface, so that the vacuum suction cup adsorbs the material (such as the workpiece) through the material adsorption end. Compared with the common vacuum air circuit device, the vacuum generator is no longer directly connected to the vacuum suction cup, but is first connected to the solenoid valve and then to the vacuum suction cup. This can reduce the use of the solenoid valve while ensuring the adsorption of the material, effectively improve the problems of high complexity of the connecting pipe and the risk of wrong connection, thereby ensuring the accuracy and stability of the adsorption of the material (such as the workpiece). BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 This is a schematic diagram of the structure of a vacuum air path device in one embodiment;

[0024] Figure 2 Schematic diagram of the working process of a vacuum air path device in one embodiment. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0026] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0027] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0029] Figure 1 , is a schematic diagram of the structure of a vacuum air path device in one embodiment.

[0030] In this embodiment, the vacuum air passage device is used to vacuum hold a material (such as a workpiece). Figure 1 As shown, the vacuum air path device includes a solenoid valve 10 , a vacuum generator 20 and a vacuum suction cup 30 .

[0031] The solenoid valve 10 comprises an air source side interface and a non-air source side interface, and the air source side interface can be connected to the air source output end of the positive pressure air source.

[0032] The solenoid valve 10 may be an actuator that controls the flow direction, flow velocity and other dynamic characteristics of the fluid by controlling the on and off current of the electromagnet. The air source side interface may be an interface provided on the side of the solenoid valve 10 close to the positive pressure air source. The non-air source interface may be an interface provided on the side of the solenoid valve 10 away from the positive pressure air source. The positive pressure air source may be a device that can continuously provide a gas with a higher gas pressure than normal pressure (i.e., one atmospheric pressure).

[0033] Optionally, the solenoid valve 10 may be a three-position five-way solenoid valve 10. The air source side interface may be an interface provided on the side of the air source output end close to the positive pressure air source on the three-position five-way solenoid valve 10. The non-air source side interface may be an interface provided on the side of the three-position five-way solenoid valve 10 away from the air source output end close to the positive pressure air source and close to the vacuum generator 20.

[0034] It should be noted that the interior of the three-position five-way solenoid valve 10 is a closed cavity, and through holes are opened at different positions of the air source side interface and the non-air source interface. Each through hole can be connected to different pipes, and two electromagnets are arranged on both sides of the cavity. When the solenoid valve 10 is working, the electromagnet on which side has current conduction will produce adsorption effect, and the valve body will be attracted to that side. The through holes at different positions are opened or closed by controlling the movement of the valve body.

[0035] The gas source side interface includes a positive pressure gas source receiving end and a negative pressure gas inlet end, the positive pressure gas source receiving end is connected to the gas source output end of the positive pressure gas source, and the negative pressure gas inlet end is connected to the negative pressure gas output end.

[0036] The positive pressure gas source receiving end may be a port in the gas source side interface that can be connected to the gas source output end of the positive pressure gas source and receive the positive pressure gas output by the positive pressure gas source. The negative pressure gas inflow end may be a port in the gas source side interface that can be connected to the negative pressure gas output end of the vacuum generator 20 and receive the negative pressure gas output by the vacuum generator 20.

[0037] The non-gas source side interface includes a first gas outflow end and a second gas outflow end, the first gas outflow end is connected to the positive pressure gas receiving end, and the second gas outflow end is connected to the positive and negative pressure gas input ends.

[0038] The first gas outflow end may be a port in the non-gas source side interface that can be connected to the positive pressure gas receiving end of the vacuum generator 20, and output the positive pressure gas in the solenoid valve 10 to the vacuum generator 20. The second gas outflow end may be a port in the non-gas source side interface that can be connected to the positive and negative pressure gas input ends of the vacuum suction cup 30, and output the negative pressure gas or positive pressure gas in the solenoid valve 10 to the vacuum suction cup 30.

[0039] The vacuum generator 20 includes a positive-pressure gas receiving end and a negative-pressure gas output end. The positive-pressure gas receiving end is connected to the non-gas source side interface, and the negative-pressure gas output end is connected to the gas source side interface.

[0040] The vacuum generator 20 may be a processing device that is connected to the gas source side interface and the non-gas source side interface of the solenoid valve 10, and is capable of receiving the positive pressure gas output by the solenoid valve 10, and generating a negative pressure gas with suction force at a pressure lower than the atmospheric pressure according to the positive pressure gas. The positive pressure gas receiving end may be a port in the vacuum generator 20 that is capable of communicating with the non-gas source side interface of the solenoid valve 10, and receiving the positive pressure gas output via the solenoid valve 10. The negative pressure gas output end may be a port in the vacuum generator 20 that is capable of communicating with the gas source side interface of the solenoid valve 10, and outputting the negative pressure gas generated in the vacuum generator 20 to the solenoid valve 10.

[0041] The vacuum suction cup 30 includes a positive and negative pressure gas input end and a material adsorption end, and the positive and negative pressure gas input end is connected to the non-gas source side interface.

[0042] The vacuum suction cup 30 can be a suction device that can be connected to the first gas outflow end and the second gas outflow end of the solenoid valve 10, and can control the negative pressure gas and positive pressure gas flowing into the interior to adjust the internal air pressure state so as to produce or remove the adsorption effect on the surface of the material to be adsorbed. The positive and negative pressure gas input end can be a port in the vacuum suction cup 30 that can be connected to the second gas outflow end of the solenoid valve 10 and receive the negative pressure gas output by the solenoid valve 10 to adjust the internal air pressure state to a negative pressure state so as to produce an adsorption effect on the surface of the material to be adsorbed; the positive and negative pressure gas input end can also be a port in the vacuum suction cup 30 that can be connected to the first gas outflow end of the solenoid valve 10 and receive the positive pressure gas output by the solenoid valve 10 to adjust the internal air pressure state to a zero pressure or positive pressure state so as to remove the adsorption effect on the surface of the material to be adsorbed. The material adsorption end can be a port in the vacuum suction cup 30 that can directly contact the surface of the material to be adsorbed.

[0043] The vacuum air path device provided in the present embodiment, when vacuum holding a material (such as a workpiece), the solenoid valve 10 receives the positive-pressure gas outputted through the air source output end through the air source side interface, and inputs the positive-pressure gas into the vacuum generator 20 through the positive-pressure gas receiving end connected to the non-air source side interface. The vacuum generator 20 generates negative-pressure gas after receiving the positive-pressure gas, and outputs the negative-pressure gas to the solenoid valve 10 through the negative-pressure gas output end connected to the air source side interface, and then acts on the vacuum suction cup 30 through the positive and negative pressure gas input ends connected to the non-air source side interface, so that the vacuum suction cup 30 adsorbs the material (such as the workpiece) through the material adsorption end. Compared with the common vacuum air path device, the vacuum generator 20 is no longer directly connected to the vacuum suction cup 30, but is first connected to the solenoid valve 10 and then connected to the vacuum suction cup 30. This can reduce the use of the solenoid valve 10 while ensuring the adsorption of the material, effectively improve the problems of high complexity of the connection and the risk of wrong connection, and thus ensure the accuracy and stability of the adsorption of the material (such as the workpiece).

[0044] In one embodiment, the solenoid valve 10 is phase-set with multiple working positions. When the solenoid valve 10 is in the first working position, the positive-pressure gas flows into the solenoid valve 10 through the positive-pressure gas source receiving end, and flows into the vacuum generator 20 through the positive-pressure gas receiving end, and outputs the negative-pressure gas to the solenoid valve 10 through the negative-pressure gas output end, and then flows out the negative-pressure gas to the vacuum suction cup 30 through the second gas outflow end.

[0045] The first working position may be a working position corresponding to the adsorption effect on the surface of the material to be adsorbed. Optionally, the first working position may be that the solenoid valve 10 is phase-shifted to the side of the internal cavity close to the second gas outflow end.

[0046] The first gas outflow end is provided with a first plug, and the second gas outflow end is provided with a second plug. When the solenoid valve 10 is in the second working position, the first plug acts on the first gas outflow end, and the second plug acts on the second gas outflow end.

[0047] The second working position may be a working position corresponding to the ability to maintain adsorption on the surface of the material to be adsorbed. Optionally, the second working position may be a phase shift of the solenoid valve 10 to the middle of the internal cavity. The first plug may be a functional component disposed on one side of the first gas outflow end and capable of sealing the first gas outflow end. The second plug may be a functional component disposed on one side of the second gas outflow end and capable of sealing the second gas outflow end.

[0048] When the solenoid valve 10 is in the third working position, the first plug acts on the first gas outflow end, and the positive pressure gas flows into the solenoid valve 10 through the positive pressure gas source receiving end, and flows out of the positive pressure gas to the vacuum suction cup 30 through the second gas outflow end.

[0049] The third working position may be a working position corresponding to the desorption of the surface of the material to be adsorbed. Optionally, the third working position may be that the solenoid valve 10 is phase-shifted to the side of the internal cavity close to the first gas outflow end.

[0050] Specifically, Figure 2 As shown, when it is necessary to hold the material, the solenoid valve 10 is phase-shifted to the side of the internal cavity close to the second gas outflow end (i.e., the first working position), and the positive pressure gas output by the positive pressure gas source (not shown) enters from the P port (i.e., the positive pressure gas source receiving end) of the solenoid valve 10 and flows out through the B port (i.e., the first gas outflow end), and then enters from the C port (i.e., the positive pressure gas receiving end) of the vacuum generator 20, so that the D port (i.e., the negative pressure gas output end) of the vacuum generator 20 generates negative pressure gas, and then the negative pressure gas acts on the R1 port (i.e., the negative pressure gas inflow end) of the solenoid valve 10. When the negative pressure gas exists at the A port (i.e., the second gas outflow end) of the solenoid valve 10 which is connected to the R1 port of the solenoid valve 10, the M port (i.e., the positive and negative pressure gas input end) of the vacuum suction cup 30 which is connected to the A port (i.e., the second gas outflow end) of the solenoid valve 10 receives the negative pressure gas output from the A port (i.e., the second gas outflow end) of the solenoid valve 10 to adjust the internal air pressure state to the negative pressure state so as to produce an adsorption effect on the surface of the material to be adsorbed, and then vacuum-holds the material through the N port (i.e., the material adsorption end) of the vacuum suction cup 30 which is in direct contact with the surface of the material to be adsorbed.

[0051] When the vacuum suction cup 30 has finished holding the material, the solenoid valve 10 is phase-shifted to the middle of the internal cavity (i.e., the second working position), and the A port passage of the solenoid valve 10 is disconnected by the second plug, so that the vacuum suction cup 30 maintains negative pressure, and the material is adsorbed without consuming compressed air. When the material needs to be put down, the solenoid valve 10 is phase-shifted to the side of the internal cavity close to the first gas outflow end (i.e., the third working position), and the compressed air enters from the C port (i.e., the positive pressure gas receiving end) of the vacuum generator 20 and flows out from the A port (i.e., the second gas outflow end) of the solenoid valve 10. The M port (i.e., the positive and negative pressure gas input end) of the vacuum suction cup 30 connected to the A port (i.e., the second gas outflow end) of the solenoid valve 10 receives the positive pressure gas output from the A port (i.e., the second gas outflow end) of the solenoid valve 10, so as to adjust the internal air pressure state to zero pressure or positive pressure state, thereby removing the adsorption effect on the surface of the material to be adsorbed, blowing away the material and speeding up the material unloading process, saving time.

[0052] In one embodiment, the size of the adsorption contact surface of the vacuum suction cup 30 is adjustable. The adsorption contact surface may be a component of the vacuum suction cup 30 that is in direct contact with the surface of the material to be adsorbed. The contact area between the vacuum suction cup 30 and the material to be adsorbed may be changed by adjusting the size of the adsorption contact surface, that is, when adsorbing a larger material to be adsorbed, the adsorption stability and the adsorption efficiency may be greatly improved.

[0053] The present application also provides a vacuum holding device, which includes a vacuum air path device and a positive pressure air source as in the above embodiment, and the positive pressure air source is connected to the solenoid valve 10 of the vacuum air path device. Optionally, a speed regulating valve is provided between the air source output end of the positive pressure air source and the air source side interface of the solenoid valve 10.

[0054] The speed regulating valve can be a combination valve composed of a differential pressure reducing valve and a throttle valve in series. The throttle valve is used to adjust the flow rate, and the differential pressure reducing valve automatically compensates for the influence of load changes, so that the pressure difference before and after the throttle valve is a fixed value, eliminating the influence of load changes on the flow rate.

[0055] It should be noted that the pressure before and after the throttle valve is respectively led to the right and left ends of the pressure reducing valve core. When the load pressure increases, the liquid pressure acting on the left end of the pressure reducing valve core increases, the valve core moves to the right, the pressure reducing port increases, and the pressure drop decreases, thereby keeping the pressure difference of the throttle valve unchanged; vice versa, this maintains the flow rate of the speed regulating valve constant (not affected by the load) and ensures the stability of gas circulation.

[0056] The division of the various modules in the above-mentioned vacuum air path device is only for illustration. In other embodiments, the vacuum air path device can be divided into different modules as needed to complete all or part of the functions of the above-mentioned vacuum air path device.

[0057] The vacuum air circuit device and vacuum holding equipment provided in the above embodiments, when vacuum holding a material (such as a workpiece), the solenoid valve receives the positive-pressure gas outputted through the air source output end through the air source side interface, and inputs the positive-pressure gas into the vacuum generator through the positive-pressure gas receiving end connected to the non-air source side interface. The vacuum generator generates negative-pressure gas after receiving the positive-pressure gas, and outputs the negative-pressure gas to the solenoid valve through the negative-pressure gas output end connected to the air source side interface, and then acts on the vacuum suction cup through the positive and negative pressure gas input ends connected to the non-air source side interface, so that the vacuum suction cup adsorbs the material (such as the workpiece) through the material adsorption end. Compared with the common vacuum air circuit device, the vacuum generator is no longer directly connected to the vacuum suction cup, but is first connected to the solenoid valve and then to the vacuum suction cup. This can achieve the goal of reducing the use of the solenoid valve while ensuring the adsorption of the material, effectively improving the problems of high complexity of the takeover and the risk of wrong connection, thereby ensuring the accuracy and stability of the suction of materials (such as workpieces), and has important economic value and promotion and practical value.

[0058] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0059] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A vacuum air passage device, characterized in that: include: The solenoid valve comprises an air source side interface and a non-air source side interface, wherein the air source side interface can be connected to an air source output end of a positive pressure air source; A vacuum generator, comprising a positive-pressure gas receiving end and a negative-pressure gas output end, wherein the positive-pressure gas receiving end is connected to the non-gas source side interface, and the negative-pressure gas output end is connected to the gas source side interface; The vacuum suction cup comprises a positive and negative pressure gas input end and a material adsorption end, wherein the positive and negative pressure gas input end is connected to the non-gas source side interface.

2. The vacuum air passage device according to claim 1, characterized in that: The gas source side interface includes a positive pressure gas source receiving end and a negative pressure gas inlet end, the positive pressure gas source receiving end is connected to the gas source output end of the positive pressure gas source, and the negative pressure gas inlet end is connected to the negative pressure gas output end.

3. The vacuum air passage device according to claim 2, characterized in that: The non-gas source side interface includes a first gas outflow end and a second gas outflow end, the first gas outflow end is connected to the positive pressure gas receiving end, and the second gas outflow end is connected to the positive and negative pressure gas input ends.

4. The vacuum air passage device according to claim 3, characterized in that: The solenoid valve phase is provided with a plurality of working positions. When the solenoid valve is in the first working position, the positive-pressure gas flows into the solenoid valve through the positive-pressure gas source receiving end, flows into the vacuum generator through the positive-pressure gas receiving end, outputs the negative-pressure gas to the solenoid valve through the negative-pressure gas output end, and then flows out the negative-pressure gas to the vacuum suction cup through the second gas outflow end.

5. The vacuum air passage device according to claim 4, characterized in that: The first gas outlet end is provided with a first plug, and the second gas outlet end is provided with a second plug. When the solenoid valve is in the second working position, the first plug acts on the first gas outlet end, and the second plug acts on the second gas outlet end.

6. The vacuum air passage device according to claim 5, characterized in that: When the solenoid valve is in the third working position, the first plug acts on the first gas outflow end, and the positive pressure gas flows into the solenoid valve through the positive pressure gas source receiving end, and flows out of the positive pressure gas to the vacuum suction cup through the second gas outflow end.

7. The vacuum air passage device according to any one of claims 1 to 6, characterized in that: The size of the adsorption contact surface of the vacuum suction cup is adjustable.

8. The vacuum air passage device according to claim 7, characterized in that: The solenoid valve is a three-position five-way solenoid valve.

9. A vacuum holding device, characterized in that: include: The vacuum air passage device according to any one of claims 1 to 8; A positive pressure air source is connected to the solenoid valve of the vacuum air path device.

10. The vacuum holding device according to claim 9, characterized in that: A speed regulating valve is arranged between the gas source output end of the positive pressure gas source and the gas source side interface of the solenoid valve.