Spectral confocal shift and chromatic aberration measurement device

Abstract

The utility model provides a spectral confocal displacement and chromatic aberration measuring device, comprising a displacement measuring head, a chromatic aberration measuring head, an optical signal branching system and an optical signal processing system, wherein the displacement measuring head and the chromatic aberration measuring head are respectively connected to the optical signal processing system through the optical signal branching system, wherein the displacement measuring head comprises a first plano-concave lens, a second meniscus lens, a third plano-convex lens, a fourth cemented lens, a fifth biconvex lens and a sixth meniscus lens in sequence along the optical axis, and the chromatic aberration measuring head comprises a seventh plano-concave lens, an eighth meniscus lens, a ninth biconvex lens and a tenth meniscus lens in sequence along the optical axis. The spectral confocal displacement sensor of the device is integrated with the chromatic aberration detection function, thereby increasing the function of the measuring system and improving the utilization rate of the device.

Description

Technical Field

[0001] The utility model relates to the field of photoelectric measurement, in particular to a spectral confocal displacement and chromatic aberration measuring device. Background Art

[0002] Spectral confocal measurement technology, with its non-contact characteristics, can be applied to a variety of opaque materials, such as metals, ceramics and plastics. This technology is less sensitive to factors such as surface texture, tilt angle and stray light, and has rapid measurement capabilities. Therefore, it is widely used in many fields such as 3D profile scanning, roughness detection, and micro-displacement measurement.

[0003] Existing spectral confocal measurement devices generally have a single measuring head, which is used to measure the surface shape or thickness of the measured object. For some measured objects that not only need to measure the appearance but also want to obtain the color information of each part of the surface, two instruments are used to measure the measured objects separately to obtain the required position and color information. Existing spectral measuring instruments have single functions and poor scalability, and cannot meet actual needs.

[0004] Therefore, it is necessary to design a spectral confocal displacement and chromatic aberration measurement device to solve the above problems. Summary of the invention

[0005] The utility model aims to provide a spectral confocal displacement and chromatic aberration measuring device, in which a spectral confocal displacement sensor is integrated with a chromatic aberration detection function, thereby increasing the function of the measuring system and improving the utilization rate of the device.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a spectral confocal displacement and chromatic aberration measuring device, comprising a displacement measuring head, a chromatic aberration measuring head, an optical signal branching system and an optical signal processing system, wherein the displacement measuring head and the chromatic aberration measuring head are respectively connected to the optical signal processing system through the optical signal branching system, the displacement measuring head comprises a first plano-concave lens, a second meniscus lens, a third plano-convex lens, a fourth cemented lens, a fifth biconvex lens and a sixth meniscus lens in sequence along the optical axis, and the chromatic aberration measuring head comprises a seventh plano-concave lens, an eighth meniscus lens, a ninth biconvex lens and a tenth meniscus lens in sequence along the optical axis.

[0007] As a further improved technical solution of the utility model, the optical signal processing system includes an aperture, a collimating lens, a dispersion prism, a reflector, a converging lens and an image sensor.

[0008] As a further improved technical solution of the utility model, the optical signal branching system includes a first light source, a second light source, a first optical fiber coupler, a second optical fiber coupler and an optical fiber line.

[0009] As a further improved technical solution of the utility model, the first light source is connected to the first fiber optic coupler through an optical fiber line, the first fiber optic coupler is connected to the displacement measuring head through an optical fiber jumper, the second light source is connected to the second fiber optic coupler through an optical fiber line, and the second fiber optic coupler is connected to the chromatic aberration measuring head through an optical fiber jumper.

[0010] As a further improved technical solution of the utility model, the first fiber optic coupler and the second fiber optic coupler are connected to the aperture through optical fiber lines.

[0011] As a further improved technical solution of the utility model, the dispersion prism is an equilateral prism.

[0012] As a further improved technical solution of the present invention, the first light source and the second light source are LED white light sources.

[0013] The spectral confocal displacement and chromatic aberration measuring device of the utility model comprises two measuring heads, namely a displacement measuring head and a chromatic aberration measuring head. The two measuring heads are respectively a displacement signal collecting lens and a color signal collecting lens. The two measuring heads have the same working distance and can be installed and measured synchronously, so that the displacement information and the color information of the same position of the measured object can be obtained synchronously. The two measuring heads can also be used separately as needed, which has higher functions and efficiency. In addition, the two measuring heads directly use the same signal processing system and are integrated in the controller, which occupies a small space, has low cost and is more applicable. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is an overall schematic diagram of the spectral confocal displacement and chromatic aberration measuring device of the utility model.

[0015] Figure 2 It is a schematic diagram of the optical path of the displacement measuring head of the utility model.

[0016] Figure 3 The figure is a schematic diagram of the optical path of the color difference measuring head of the utility model.

[0017] Figure 4 Schematic diagram of the optical signal splitting system. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0019] Reference Figure 1A spectral confocal displacement and chromatic aberration measuring device of this embodiment includes a displacement measuring head 1, a chromatic aberration measuring head 2, an optical signal branching system 3 and an optical signal processing system 4. The displacement measuring head 1 and the chromatic aberration measuring head 2 are respectively connected to the optical signal processing system 4 through the optical signal branching system 3. The displacement measuring head 1 is used to measure the position information and surface morphology of the object to be measured, and the chromatic aberration measuring head 2 is used to identify the color of the object to be measured. The optical signal branching system 3 transmits the optical signal of the light source to the optical signal collector, and / or transmits the optical signal from the optical signal collector to the optical signal processing system 4. The optical signal processing system 4 is used to analyze and process the signal reflected back by the measuring head.

[0020] Specific reference Figure 2 The displacement measuring head 1 includes a first plano-concave lens 11, a second meniscus lens 12, a third plano-convex lens 13, a fourth cemented lens 14, a fifth biconvex lens 15, and a sixth meniscus lens 16 in sequence along the optical axis. The white light is sequentially emitted by the first plano-concave lens 11, the second meniscus lens 12, the third plano-convex lens 13, the fourth cemented lens 14, the fifth biconvex lens 15, and the sixth meniscus lens 16, and the light produces axial dispersion, thereby forming a series of focused light spots on the optical axis. The displacement measuring head 1 scans the surface of the object to be measured, and lights of different wavelengths hit the surface of the object to be measured. When the object to be measured is located in the axial dispersion range, the light of a specific single wavelength is reflected and re-enters the displacement measuring head 1. The peak wavelength is obtained by software analysis and algorithm processing. When the object under test moves within the measuring range, the peak wavelength will change. The extracted peak wavelength has a one-to-one correspondence with the position of the object under test. The mapping relationship between the peak wavelength and the position of the object under test can be obtained by calibration. During measurement, the displacement value of the object under test can be obtained through the change in the peak wavelength, thereby obtaining the position information and surface morphology information of the object under test.

[0021] Reference Figure 3 The color difference measuring head 2 includes a seventh plano-concave lens 21, an eighth meniscus lens 22, a ninth biconvex lens 23 and a tenth meniscus lens 24 along the optical axis. White light passes through the seventh plano-concave lens 21, the eighth meniscus lens 22, the ninth biconvex lens 23 and the tenth meniscus lens 24 in sequence to emit white light onto the surface of the object to be measured. The object to be measured will reflect light of different wavelengths into the color difference measuring head 2 according to its own color. For example, an object with a red surface absorbs all light except red, and the red light is returned to the optical signal processing system 4 by the color difference measuring head 2. After analysis and processing, the optical signal processing system displays the corresponding wavelength on the image sensor 46. If the color of the surface detection position is red, and similarly, if the detection position is other colors, the color of the specific surface of the object to be measured can be determined by analyzing the wavelength of the returned light.

[0022] Reference Figure 4The optical signal branching system 3 includes a first light source 31, a second light source 32, a first fiber coupler 33, a second fiber coupler 34 and an optical fiber line 35. The first light source 31 and the second light source 32 are LED white light sources. The first light source 31 is connected to the first fiber coupler 33 through the optical fiber line 35, and the first fiber coupler 33 is connected to the displacement measuring head 1 through the optical fiber jumper 36 to provide a light source for the displacement measuring head 1. The second light source 32 is connected to the second fiber coupler 34 through the optical fiber line 34, and the second fiber coupler 34 is connected to the chromatic aberration measuring head 2 through the optical fiber jumper 36 to provide a light source for the chromatic aberration measuring head 2. The first fiber coupler 33 and the second fiber coupler 34 are connected to the aperture 41 through the optical fiber line 35.

[0023] Further references Figure 1 The optical signal processing system 4 includes an aperture 41, a collimating lens 42, a dispersion prism 43, a reflector 44, a convergent lens 45 and an image sensor 46. The dispersion prism 43 is an equilateral prism. The single-wavelength optical signals reflected by the displacement measuring head 1 and the chromatic aberration measuring head 2 are collected into the aperture 41 through the optical fiber line 35, and after entering the aperture 41 and diverging, they enter the collimating lens 42, the dispersion prism 43, the reflector 44, the convergent lens 45 and the image sensor 46 in sequence. The signal data of the two measuring heads are calculated and processed by the data analysis system of the image sensor 46. The collimating lens 42 is used to collimate the divergent incident light. The collimated light is incident on the beam splitter prism 43 to generate dispersion, and is transmitted to the converging lens 45 through the reflector 44. The converging lens 45 converges the light onto the image sensor 46 for imaging. In this embodiment, an area array camera is preferably used as the image acquisition component, which has more flexible installation position and provides the possibility for dual-channel signal reception. The setting of the reflector also further reduces the size of the controller, thereby making it more practical.

[0024] In addition, the above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. The understanding of this specification should be based on the technical personnel in the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, ordinary technical personnel in the field should understand that the technical personnel in the relevant technical field can still modify or make equivalent substitutions to the present invention, and all technical solutions and improvements thereof that do not depart from the spirit and scope of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A spectral confocal displacement and chromatic aberration measurement device, characterized in that: The invention comprises a displacement measuring head, a chromatic aberration measuring head, an optical signal branching system and an optical signal processing system. The displacement measuring head and the chromatic aberration measuring head are respectively connected to the optical signal processing system through the optical signal branching system. The displacement measuring head comprises a first plano-concave lens, a second meniscus lens, a third plano-convex lens, a fourth cemented lens, a fifth biconvex lens and a sixth meniscus lens in sequence along the optical axis. The chromatic aberration measuring head comprises a seventh plano-concave lens, an eighth meniscus lens, a ninth biconvex lens and a tenth meniscus lens in sequence along the optical axis.

2. The spectral confocal shift and chromatic aberration measuring device according to claim 1, characterized in that: The optical signal processing system includes an aperture, a collimating lens, a dispersion prism, a reflecting mirror, a converging lens and an image sensor.

3. The spectral confocal shift and chromatic aberration measuring device according to claim 2, characterized in that: The optical signal branching system comprises a first light source, a second light source, a first optical fiber coupler, a second optical fiber coupler and an optical fiber line.

4. The spectral confocal shift and chromatic aberration measuring device according to claim 3, characterized in that: The first light source is connected to a first fiber coupler via an optical fiber line, the first fiber coupler is connected to the displacement measuring head via an optical fiber jumper, the second light source is connected to a second fiber coupler via an optical fiber line, and the second fiber coupler is connected to the chromatic aberration measuring head via an optical fiber jumper.

5. The spectral confocal shift and chromatic aberration measuring device according to claim 3, characterized in that: The first fiber coupler and the second fiber coupler are connected to the aperture through optical fiber lines.

6. The spectral confocal shift and chromatic aberration measuring device according to claim 2, characterized in that: The dispersion prism is an equilateral prism.

7. The spectral confocal shift and chromatic aberration measuring device according to claim 3, characterized in that: The first light source and the second light source are LED white light sources.

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