A uniform film deposition device

Abstract

The utility model discloses a uniform film coating evaporation device, which comprises: a vacuum coating chamber, an evaporation heater is arranged on the base of the vacuum coating chamber, an evaporation boat for loading evaporation materials is arranged on the evaporation heater, the opening of the evaporation boat is sleeved with the trumpet air inlet of the spiral drainage tube, the spiral drainage tube comprises a trumpet air inlet arranged at the bottom, a spiral tube body and an air outlet array, the air outlet array comprises a plurality of air outlets and is arranged in a circular shape, the area corresponding to each air outlet decreases from the periphery to the center, each air outlet is connected to a coating nozzle, and a coating umbrella frame for clamping a lens to be coated is arranged above the coating nozzle; wherein the spiral drainage tube is used to accelerate the flow rate and uniformly mix the vaporized evaporation material. The utility model ensures uniform coating while accelerating the coating efficiency and reducing the loss of evaporation materials.

Description

Technical Field

[0001] The utility model relates to the field of optical coating, in particular to a uniform coating evaporation device. Background Art

[0002] Evaporation technology refers to a process in which a certain heating evaporation method is used under vacuum conditions to evaporate the coating material to vaporize it, and the vaporized particles are deposited on the surface of the substrate or device to condense into a film. Evaporation equipment is mainly used to spray the film-forming material in the form of steam onto the substrate or device to be coated to form a film layer on the surface of the substrate or device.

[0003] Some evaporation equipment generally includes an evaporation source and a coating umbrella stand disposed above the evaporation source for carrying the coating substrate. During evaporation, the coating umbrella stand rotates to make the film thickness of the coating substrate distributed at various locations of the coating umbrella stand uniform. However, due to the high concentration of the evaporant directly above the evaporation source, the film layer on the substrate to be coated in the middle layer circle of the coating umbrella stand directly facing the evaporation source is thicker, while the film layer on the coating substrate located in the upper layer circle (near the center of the umbrella stand) and the coating substrate located in the lower layer circle (near the edge of the umbrella stand) is thinner. Therefore, the evaporation equipment usually also includes a coating correction plate disposed between the coating umbrella stand and the evaporation source, which is used to block the evaporant directly above the evaporation source to reduce the thickness of the film layer on the coating substrate directly facing the evaporation source, thereby correcting the difference in film layer thickness on the coating substrate located in different layers of the coating umbrella stand.

[0004] However, using a correction plate to block the film to make the evaporated film uniform will cause the vaporized evaporated material to adhere to the correction plate, which will reduce the coating efficiency and cause waste of evaporation materials. At the same time, even if a correction plate is used, the evaporated film material has no external force constraint and its movement is disordered, resulting in a rough and uneven film layer with poor quality. Utility Model Content

[0005] In view of the shortcomings of the prior art, the technical problem to be solved by the present invention is to provide a uniform film coating evaporation device, aiming to ensure uniform coating while accelerating the coating efficiency and reducing the loss of evaporation materials.

[0006] To achieve the above-mentioned purpose, the utility model provides a uniform film coating evaporation device, the uniform film coating evaporation device comprising: a vacuum coating chamber, an evaporation heater is arranged on the base of the vacuum coating chamber, an evaporation boat for loading evaporation materials is arranged on the evaporation heater, the opening of the evaporation boat is sleeved with the trumpet air inlet of the spiral drainage tube, the spiral drainage tube comprises the trumpet air inlet arranged at the bottom, a spiral tube body and an air outlet array, the air outlet array comprises a plurality of air outlets and is arranged in a circular shape, the area corresponding to each of the air outlets decreases from the periphery to the center, each of the air outlets is connected to a coating nozzle, and a coating umbrella frame for clamping the lens to be coated is arranged above the coating nozzle;

[0007] The spiral drainage tube is used to accelerate the flow rate of the vaporized evaporation material and mix it evenly.

[0008] Optionally, the coated umbrella stand is mounted on a rotating mechanism, and the rotating mechanism is used to drive the coated umbrella stand to rotate during the coating process.

[0009] Optionally, the coated umbrella stand includes a flipping mechanism and a clamping mechanism, the flipping mechanism and the clamping mechanism are connected, the clamping mechanism is used to clamp the lens to be coated, and the flipping mechanism is used to flip the clamping mechanism.

[0010] Optionally, the uniform coating evaporation equipment further includes: a vacuum pump, the vacuum pump is connected to the vacuum coating chamber, and the vacuum pump is used to evacuate the vacuum coating chamber before coating.

[0011] Optionally, the air outlet array specifically includes: a main air outlet, a grid is arranged at the main air outlet, and the grid divides the main air outlet into a plurality of air outlets to form the air outlet array; wherein the area corresponding to the grid decreases from the periphery to the center.

[0012] Optionally, the coating nozzle located in the center is vertically upward, and the corresponding inclinations of the remaining coating nozzles gradually increase from the center to the surroundings; wherein the inclination is the angle between the spraying direction of the coating nozzle and the vertical line.

[0013] Optionally, the spraying range of each coating nozzle just covers the lens to be coated clamped on the coating umbrella stand.

[0014] Optionally, the spiral drainage tube and the coating nozzle are made of high temperature resistant materials.

[0015] The beneficial effects of the utility model are as follows: 1. The opening of the evaporation boat of the utility model is sleeved with the trumpet air inlet of the spiral drainage tube, and the spiral drainage tube includes a trumpet air inlet arranged at the bottom, a spiral tube body and an air outlet array. The utility model guides the flow direction of the vaporized evaporation material in the evaporation boat through the spiral drainage tube, so that the vaporized evaporation material changes from disordered motion to directional motion. At the same time, the spiral drainage tube accelerates the flow rate of the vaporized evaporation material through the small diameter of the pipe. The film layer can be made more uniform by guiding the vaporized evaporation material to make the vaporized evaporation material directional coating, and the coating efficiency can be accelerated by accelerating the flow rate of the vaporized evaporation material. 2. The air outlet array includes a plurality of air outlets and is arranged in a circular shape. The area corresponding to each air outlet decreases from the periphery to the center, and each air outlet is connected to a coating nozzle. The utility model sets the air outlet array structure so that the coating nozzles closer to the edge spray more evaporation materials, avoiding a high concentration of evaporation directly above the evaporation source, and making the coating more uniform. 3. The coating nozzle located in the center of the utility model is vertically upward, and the corresponding inclination of the other coating nozzles gradually increases from the center to the surroundings; wherein, the inclination is the angle between the spray direction of the coating nozzle and the vertical line. Such a structure can also avoid the high concentration of evaporation directly above the evaporation source, making the coating more uniform. 4. Since the utility model does not use a correction plate, the loss of evaporation materials can be reduced.

[0016] In summary, the utility model ensures uniform coating while accelerating coating efficiency and reducing the loss of evaporation materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a uniform film coating evaporation device in a specific embodiment of the utility model. DETAILED DESCRIPTION

[0018] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0019] In the description of this patent, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this patent and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this patent.

[0020] In the description of this patent, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense, for example, it can be fixedly connected or set, or it can be detachably connected or set, or connected or set in one piece. For ordinary technicians in this field, the specific meanings of the above terms in this patent can be understood according to specific circumstances.

[0021] The applicant has found through research that using a correction plate to block the film to make the evaporated film uniform will cause the vaporized evaporated material to adhere to the correction plate, which will reduce the coating efficiency and cause waste of evaporated materials. At the same time, even if a correction plate is used, the evaporated film material is not constrained by external forces and its movement is disordered, resulting in a rough and uneven film layer with poor quality.

[0022] Therefore, the embodiment of the utility model provides a uniform film deposition device, such as Figure 1 As shown, the uniform coating evaporation equipment includes: a vacuum coating chamber 1, an evaporation heater 2 is arranged on the base of the vacuum coating chamber 1, an evaporation boat 3 for loading evaporation materials is arranged on the evaporation heater 2, the opening of the evaporation boat 3 is socketed with the trumpet air inlet 4 of the spiral drainage tube, the spiral drainage tube includes the trumpet air inlet 4 arranged at the bottom, a spiral tube body 5 and an air outlet array 6, the air outlet array 6 includes a plurality of air outlets and is arranged in a circular shape, the area corresponding to each air outlet decreases from the periphery to the center, each air outlet is connected to a coating nozzle 7, and a coating umbrella frame 8 for clamping the lens to be coated is arranged above the coating nozzle 7.

[0023] The spiral drainage tube is used to accelerate the flow rate and evenly mix the vaporized evaporation material.

[0024] It should be noted that the utility model guides the vaporized evaporation material through the setting of the spiral drainage tube so that the disordered motion becomes directional motion, and the coating is more uniform. At the same time, the pipeline transportation of the spiral drainage tube allows the evaporation material that was originally vaporized in a large range to enter the pipeline, the diameter is reduced, the flow rate becomes faster, and the coating efficiency is accelerated. The air outlet array 6 includes a plurality of air outlets and is arranged in a circular shape. The area corresponding to each air outlet decreases from the periphery to the center. Each air outlet is connected to the coating nozzle 7. Such a structure avoids the high concentration of evaporants directly above the evaporation source, making the coating more uniform.

[0025] It is worth mentioning that the spiral pipe can make the vaporized evaporation material more evenly mixed after sufficient movement time through the spiral structure, further making the coating more uniform.

[0026] In a specific embodiment, the coated umbrella stand 8 is mounted on a rotating mechanism, and the rotating mechanism is used to drive the coated umbrella stand 8 to rotate during the coating process.

[0027] It should be noted that the coating umbrella stand 8 rotates to drive the lens to be coated so that the coating can be more uniform.

[0028] In a specific embodiment, the coating umbrella stand 8 includes a flipping mechanism and a clamping mechanism, which are connected to each other. The clamping mechanism is used to clamp the lens to be coated, and the flipping mechanism is used to flip the clamping mechanism.

[0029] It should be noted that some lenses require double-sided coating, and the muscle-enhancing flipping mechanism can achieve higher automation and reduce manpower.

[0030] In a specific embodiment, the uniform coating evaporation device further includes: a vacuum pump, which is connected to the vacuum coating chamber 1, and the vacuum pump is used to evacuate the vacuum coating chamber 1 before the coating operation.

[0031] It should be noted that vacuuming is the basic process of evaporation, which can prevent the coating process from being disturbed by air.

[0032] In a specific embodiment, the air outlet array 6 specifically includes: a main air outlet, a grid is arranged at the main air outlet, and the grid divides the main air outlet into multiple air outlets to form the air outlet array 6; wherein the area corresponding to the grid decreases from the periphery to the center.

[0033] It should be noted that such a mechanism can allow the surrounding air outlets to spray more evaporation materials, thereby preventing the evaporation materials from gathering right above, making the coating more uniform.

[0034] In a specific embodiment, the coating nozzle 7 located in the center is vertically upward, and the corresponding inclinations of the other coating nozzles 7 gradually increase from the center to the surroundings; wherein the inclination is the angle between the spraying direction of the coating nozzle 7 and the vertical line.

[0035] Such a structure can avoid a high concentration of evaporants directly above the evaporation source, making the coating more uniform.

[0036] In a specific embodiment, the spraying range of each coating nozzle 7 just covers the lens to be coated clamped on the coating umbrella frame 8 .

[0037] In a specific embodiment, the spiral drainage tube and the coating nozzle 7 are made of high temperature resistant materials.

[0038] The opening of the evaporation boat 3 of the utility model embodiment is sleeved with the trumpet air inlet 4 of the spiral drainage tube, and the spiral drainage tube includes the trumpet air inlet 4 arranged at the bottom, the spiral tube body 5 and the air outlet array 6. The utility model embodiment guides the flow direction of the vaporized evaporation material in the evaporation boat 3 through the spiral drainage tube, so that the vaporized evaporation material changes from disordered motion to directional motion. At the same time, the spiral drainage tube accelerates the flow rate of the vaporized evaporation material by the small diameter of the pipe. By guiding the vaporized evaporation material to make the vaporized evaporation material directional coating, the film layer can be made more uniform, and by accelerating the flow rate of the vaporized evaporation material, the coating efficiency can be accelerated.

[0039] The gas outlet array 6 includes a plurality of gas outlets arranged in a circular shape, and the area corresponding to each gas outlet decreases from the periphery to the center, and each gas outlet is connected to the coating nozzle 7. The utility model arranges the gas outlet array 6 structure so that the coating nozzle 7 closer to the edge sprays more evaporation material, thereby avoiding a high concentration of evaporation material directly above the evaporation source, and making the coating more uniform.

[0040] The coating nozzle 7 in the center of the embodiment of the utility model is vertically upward, and the corresponding inclinations of the other coating nozzles 7 gradually increase from the center to the surroundings; wherein the inclination is the angle between the spray direction of the coating nozzle 7 and the vertical line. Such a structure can also avoid a high concentration of evaporation directly above the evaporation source, making the coating more uniform.

[0041] Since the embodiment of the utility model does not use a correction plate, the loss of evaporation material can be reduced.

[0042] In summary, the embodiments of the present invention ensure uniform coating while increasing coating efficiency and reducing the loss of evaporation materials.

[0043] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the utility model without creative work. Therefore, all technical solutions that can be obtained by technicians in this technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.

Claims

1. A uniform film deposition device, characterized in that: The uniform coating evaporation device comprises: a vacuum coating chamber, an evaporation heater is arranged on the base of the vacuum coating chamber, an evaporation boat for loading evaporation materials is arranged on the evaporation heater, the opening of the evaporation boat is sleeved with the trumpet air inlet of the spiral drainage tube, the spiral drainage tube comprises the trumpet air inlet arranged at the bottom, a spiral tube body and an air outlet array, the air outlet array comprises a plurality of air outlets arranged in a circular shape, the area corresponding to each of the air outlets decreases from the periphery to the center, each of the air outlets is connected to a coating nozzle, and a coating umbrella frame for clamping the lens to be coated is arranged above the coating nozzle; The spiral drainage tube is used to accelerate the flow rate of the vaporized evaporation material and mix it evenly.

2. The uniform film deposition equipment according to claim 1, characterized in that: The coated umbrella stand is mounted on a rotating mechanism, and the rotating mechanism is used to drive the coated umbrella stand to rotate during the coating process.

3. The uniform film deposition equipment according to claim 1, characterized in that: The coated umbrella stand comprises a flipping mechanism and a clamping mechanism, wherein the flipping mechanism is connected to the clamping mechanism, the clamping mechanism is used to clamp the lens to be coated, and the flipping mechanism is used to flip the clamping mechanism.

4. The uniform film deposition equipment according to claim 1, characterized in that: The uniform coating evaporation equipment further includes: a vacuum pump, which is connected to the vacuum coating chamber and is used to evacuate the vacuum coating chamber before coating.

5. The uniform film deposition equipment according to claim 1, characterized in that: The air outlet array specifically includes: a main air outlet, a grid is arranged at the main air outlet, and the grid divides the main air outlet into a plurality of air outlets to form the air outlet array; wherein the area corresponding to the grid decreases from the periphery to the center.

6. The uniform film deposition equipment according to claim 1, characterized in that: The coating nozzle located in the center is vertically upward, and the corresponding inclinations of the other coating nozzles gradually increase from the center to the surroundings; wherein the inclination is the angle between the spraying direction of the coating nozzle and the vertical line.

7. The uniform film deposition equipment according to claim 1, characterized in that: The spraying range of each coating nozzle just covers the lens to be coated clamped on the coating umbrella stand.

8. The uniform film deposition equipment according to claim 1, characterized in that: The spiral drainage tube and the coating nozzle are made of high temperature resistant materials.

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