Process for producing an ultraporous Ga2O3 aeromaterial

Abstract

The invention relates to the field of technological physics, in particular to nanotechnology, with high potential in applications such as catalysis, gas sensors and optoelectronic devices, and proposes a process for producing an ultraporous Ga2O3-based aeromaterial, using a cost-effective and environmentally friendly technology.The process for producing an ultraporous Ga2O3aeromaterial comprises producing ZnO microtetrapods by the method for thermal evaporation of zinc powder at a temperature of 970°C, followed by the deposition of Ga2O3from aerosols on the surface of ZnO microtetrapods, thermal treatment for crystallization of Ga2O3in the beta phase, and selective chemical corrosion of the ZnO substrate, with the obtaining of ultraporous Ga2O3aeromaterial, formed by hollow microtetrapods, the arms of which are microtubes with a diameter of 1…2 µm, a length of 20…40 µm, and a wall thickness of 400 nm.