A filter wafer testing machine

Abstract

The utility model discloses a wafer tester, belongs to the technical field of wafer testers, and specifically relates to a filter wafer tester, including: a test device and a moving probe station; the test device and the moving probe station are connected through a communication interface to control the movement of the probe station, and the probe card is connected to a matrix switch for testing; the test device includes a network analyzer, a matrix switch and an industrial computer; the industrial computer is connected to the moving probe station, and the industrial computer is simultaneously connected to the network analyzer and the matrix switch respectively, and the network analyzer is connected to the matrix switch. The utility model replaces the PXI system by the matrix switch, reducing the hardware cost of the system; through the optimization of the software architecture, the same measurement speed can be achieved, and the SnP data can be read by multiple industrial computers and then processed, and complex probe performance compensation can be performed. Compared with the instrument itself, the test accuracy is high. At the same time, when processing the specification book, the calculation speed is also faster.

Description

Technical Field

[0001] The utility model discloses a wafer testing machine, belongs to the technical field of wafer testing machines, and specifically relates to a filter wafer testing machine. Background Art

[0002] With the development of Saw / Baw filter wafer-level packaging technology, Saw filters are required to be tested directly on the wafer with probes. If 20,000 Saw filters are on a wafer and tested individually, the probe has to move each time. Assuming 0.5 seconds per time, the light movement time is 8.3 hours, that is, it takes about 10 hours to test a wafer. This test efficiency is very low, so multi-channel testing is generally used. For example, 8 pieces are tested together, and the test time can be shortened to 2 hours.

[0003] The traditional multi-channel test method is to use a vector network analyzer of the PXI system, but the price of a 16-port PXI network analyzer is very expensive, so it is a good idea to use a matrix switch system to replace the multi-port instrument. However, it is also necessary to solve the problems of matrix switch switching time, multi-channel measurement speed, data storage efficiency, etc. Utility Model Content

[0004] Purpose of the utility model: to provide a filter wafer testing machine to solve the above-mentioned problems.

[0005] Technical solution: A filter wafer tester includes: a test device and a moving probe station; the test device and the moving probe station are connected through a communication interface to control the movement of the probe station, and the probe card is connected to a matrix switch for testing;

[0006] The test device comprises a 4-port network analyzer, 4 1-to-4 matrix switches and an industrial computer; the industrial computer is connected to the motion probe station, and the industrial computer is simultaneously connected to the network analyzer and the matrix switch respectively, and the network analyzer is connected to the matrix switch.

[0007] In a further embodiment, the network analyzer, the matrix switch and the industrial computer are installed on a machine body; the interior of the machine body is divided into several layers by partitions; the network analyzer, the matrix switch and the industrial computer are respectively installed on the partitions inside the machine body.

[0008] In a further embodiment, the industrial computer is externally connected to an operation display screen, and the operation display screen is installed on the machine body.

[0009] In a further embodiment, a switch door is provided on the back of the machine body, and a plurality of cooling fans are provided on the switch door.

[0010] In a further embodiment, a louvered filter fan is provided on one side of the machine body.

[0011] In a further embodiment, a keyboard drawer is provided on the machine body, and a keyboard connected to the industrial computer is provided in the keyboard drawer.

[0012] In a further embodiment, a power switch, a start switch and a USB interface are provided at the operation display screen of the body; a USB interface, a serial port interface and a network port are provided at the back of the body, and a driving wheel is provided at the bottom of the body.

[0013] The utility model has the following beneficial effects:

[0014] By replacing the PXI system with a matrix switch, the hardware cost of the system is reduced; by optimizing the software architecture, the same measurement speed can be achieved.

[0015] After the SnP data is read by an industrial computer and then processed, complex probe performance compensation can be performed. Compared with the instrument itself, the test accuracy is high. At the same time, the calculation speed is also faster when processing the specification sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is an axonometric drawing of the utility model.

[0017] Figure 2 It is the front view of the utility model.

[0018] Figure 3 It is a cross-sectional view of the utility model.

[0019] Figure 4 It is a rear view of the utility model.

[0020] Figure numerals: network analyzer 1, matrix switch 2, industrial computer 3, body 4, partition 5, operation display screen 6, switch door 7, cooling fan 8, shutter filter fan 9, keyboard drawer 10, power switch 11, start switch 12, USB interface 13, serial port interface 14, network port 15, driving wheel 16. DETAILED DESCRIPTION

[0021] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0023] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, the technical features involved in the different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0024] A filter wafer tester comprises: a test device and a moving probe station; the test device and the moving probe station are connected via a communication interface to control the movement of the probe station, and the probe card is connected to a matrix switch for testing;

[0025] In one embodiment, Figures 1 to 4 As shown, the test device includes a 4-port network analyzer, 4 1-to-4 matrix switches and an industrial computer; the industrial computer is connected to the motion probe station, and the industrial computer is simultaneously connected to the network analyzer and the matrix switch respectively, and the network analyzer is connected to the matrix switch.

[0026] In one embodiment, Figures 1 to 4 As shown, the network analyzer, the matrix switch and the industrial computer are installed on the body; the interior of the body is divided into several layers by partitions; the network analyzer, the matrix switch and the industrial computer are respectively installed on the partitions inside the body.

[0027] In one embodiment, Figures 1 to 4 As shown, the industrial computer is externally connected to an operation display screen, and the operation display screen is installed on the machine body.

[0028] In one embodiment, Figures 1 to 4 As shown, a switch door is provided on the back of the machine body, and a plurality of cooling fans are provided on the switch door.

[0029] In one embodiment, Figures 1 to 4 As shown, a shutter filter fan is provided on one side of the machine body.

[0030] In one embodiment, Figures 1 to 4 As shown, a keyboard drawer is provided on the machine body, and a keyboard connected to the industrial computer is provided in the keyboard drawer.

[0031] In one embodiment, Figures 1 to 4 As shown, a power switch, a start switch and a USB interface are provided at the operation display screen of the body; a USB interface, a serial port interface and a network port are provided at the back of the body, and a driving wheel is provided at the bottom of the body.

[0032] Working principle: The utility model is aimed at the Saw / Bar filter development system. The test device includes a 4-port network analyzer, 4 1-to-4 matrix switches and an industrial computer. The test device of the utility model is connected to the motion probe station through a communication interface to control the movement of the probe station, and the probe card is connected to the matrix switch for testing.

[0033] The testing process is as follows:

[0034] Step 1. The industrial computer controls the probe station to move the wafer to the position of the filter to be tested. At this time, the probe will contact multiple Saw / Bar filters at the same time.

[0035] Step 2. Switch the matrix switch, switch the measured channel to filter 1, and then measure, only record the SnP parameters, and then switch to channel 2, continue to measure, read the SnP parameters, until all filter SnP parameters are read. Note that the key point at this time is that the specification judgment function of the network analyzer cannot be used directly, otherwise the measurement will consume a lot of time resources.

[0036] Step 3. While performing step 2, the background will process the SnP data. Due to the use of high-performance industrial computers, the speed of calculating product specifications is very fast at this time, which is basically equivalent to the test time, that is, it does not take up test time.

[0037] Step 4. After completing the test of multiple filters at one position, start the probe station movement again. During this process, functions such as data saving need to be performed.

[0038] By using the above test methods, the test device can achieve almost the same test efficiency as the multi-port PXI test.

[0039] In addition to having very high test efficiency, the test device can also easily compensate for the performance of the probe because it only reads the SnP file. This function is richer than the probe compensation function of the network analysis, and shows very good test performance in practical applications.

[0040] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A filter wafer testing machine, characterized in that: The test machine comprises: a test device and a moving probe station; the test device and the moving probe station are connected via a communication interface to control the movement of the probe station, and the probe card is connected to a matrix switch for testing; The test device comprises a 4-port network analyzer, 4 1-to-4 matrix switches and an industrial computer; the industrial computer is connected to the motion probe station, and the industrial computer is simultaneously connected to the network analyzer and the matrix switch respectively, and the network analyzer is connected to the matrix switch.

2. A filter wafer testing machine according to claim 1, characterized in that: The network analyzer, the matrix switch and the industrial computer are installed on the machine body; the interior of the machine body is divided into several layers by partitions; the network analyzer, the matrix switch and the industrial computer are respectively installed on the partitions inside the machine body.

3. A filter wafer testing machine according to claim 2, characterized in that: The industrial computer is externally connected with an operation display screen, and the operation display screen is installed on the machine body.

4. A filter wafer testing machine according to claim 2, characterized in that: A switch door is arranged on the back of the machine body, and a plurality of cooling fans are arranged on the switch door.

5. A filter wafer testing machine according to claim 2, characterized in that: A shutter filter fan is arranged on one side of the machine body.

6. A filter wafer testing machine according to claim 2, characterized in that: A keyboard drawer is provided on the machine body, and a keyboard connected to the industrial computer is provided in the keyboard drawer.

7. A filter wafer testing machine according to claim 2, characterized in that: A power switch, a start switch and a USB interface are arranged at the operation display screen of the machine body; a USB interface, a serial port interface and a network port are arranged at the back of the machine body, and a driving wheel is arranged at the bottom of the machine body.

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