Coating vacuum drying machine

Abstract

The utility model relates to the technical field of vacuum drying devices, in particular to a coating vacuum drying machine which comprises a lower cavity, an upper cavity and a lower cavity, the upper cavity is hermetically and detachably connected to the top of the lower cavity; a drying cavity is defined between the upper cavity and the lower cavity, and an inner cavity of the lower cavity communicates with the drying cavity; the supporting piece is arranged at the top of the lower cavity, located in the drying cavity and suitable for supporting the glass base material; the vacuum valve is arranged in the lower cavity and is suitable for being communicated with external vacuum equipment through a vacuum pipe; the air valve is arranged in the lower cavity and is suitable for controlling air to flow into the drying cavity for vacuum breaking; and the air outlet end of the air filtering piece communicates with the air inlet end of the air valve, and the air inlet end of the filtering piece is suitable for being connected with external air inlet equipment. The technical problem that in the air inlet process of an existing coating machine vacuum drying unit device, particulate matter mixed in air is prone to being adsorbed to a glass base material, and the product performance is affected is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum drying devices, in particular to a coating vacuum drying machine. Background Art

[0002] In the battery manufacturing process, drying the glass substrate is one of the processes of battery manufacturing. In the related art, a coating machine vacuum drying unit device is usually used to dry the glass substrate. The existing coating machine vacuum drying unit device usually includes an upper cover plate, a bottom plate, a vacuum pump valve and a CDA control valve. The glass substrate can be placed in a cavity enclosed by the upper cover plate and the bottom plate, and the vacuum is drawn by the vacuum pump valve for drying, and then the air is introduced through the CDA control valve to break the vacuum. However, in the process of the CDA control valve introducing air, the particles mixed in the air are easy to contaminate the inside of the cavity. When it is used again, the residual particles are easy to be adsorbed on the glass substrate, or the particles mixed in the air are directly adsorbed on the glass substrate when the air is introduced, affecting the product performance. Utility Model Content

[0003] The utility model provides a coating vacuum dryer, which solves the technical problem that during the air intake process of the vacuum drying unit device of the existing coating machine, particles mixed in the air are easily adsorbed onto the glass substrate, thus affecting the product performance.

[0004] In view of this, the utility model provides a coating vacuum dryer, comprising:

[0005] Lower cavity;

[0006] The upper cavity is sealed and detachably connected to the top of the lower cavity; a drying cavity is enclosed between the upper cavity and the lower cavity, and the inner cavity of the lower cavity is connected to the drying cavity;

[0007] A support member, disposed on the top of the lower cavity and located in the drying cavity, suitable for supporting the glass substrate;

[0008] A vacuum valve, disposed in the lower cavity, adapted to communicate with an external vacuum device through a vacuum tube;

[0009] An air valve, disposed in the lower cavity, adapted to control the air to flow into the drying cavity to break the vacuum;

[0010] An air filter, the air outlet end of the air filter is connected to the air inlet end of the air valve, and the air inlet end of the air filter is suitable for connecting to an external air intake device.

[0011] Optionally, the support member includes a partition and a plurality of ejector pins, the bottom of the partition is connected to the top of the lower cavity through a plurality of support columns; the ejector pins are evenly arranged on the top of the partition, suitable for supporting the glass substrate.

[0012] Optionally, the partition is a stainless steel partition.

[0013] Optionally, a first groove is provided at the bottom of the upper cavity, and the first groove and the top of the lower cavity are combined to form the drying cavity; the top of the lower cavity is provided with a plurality of connecting ports, and the connecting ports connect the drying cavity and the inner cavity of the lower cavity.

[0014] Optionally, a first through hole communicating with the drying chamber is provided on the upper cavity body, and an observation window is sealedly connected to the first through hole via a sealing assembly.

[0015] Optionally, the sealing assembly includes a sealing cover and an annular baffle; a second groove is provided at the bottom of the sealing cover, the annular baffle is detachably connected in the second groove, and the observation window is clamped between the second groove and the annular baffle; a first sealing ring is provided between the second groove and the annular baffle; the sealing cover has a side on which the second groove is detachably connected to the upper cavity; a second sealing ring is provided between the sealing cover and the upper cavity; a second through hole is provided on the sealing cover, and the position of the second through hole corresponds to the position of the observation window.

[0016] Optionally, the air filter element is an air source triplex element.

[0017] Optionally, the vacuum valve is a first solenoid valve; the air outlet end of the air filter is connected to the first solenoid valve, and is suitable for providing an air source for the on and off of the first solenoid valve.

[0018] Optionally, the air valve is a second solenoid valve; the air outlet end of the air filter is connected to the second solenoid valve, and is suitable for providing an air source for the on and off of the second solenoid valve.

[0019] Optionally, it further comprises a vacuum detection component, a control screen and a frame; the lower cavity is arranged on the top of the frame, and the control screen is arranged on the frame; the vacuum detection component is arranged in the lower cavity and is in communication connection with the control screen;

[0020] And / or, it also includes a telescopic rod; one end of the upper cavity is hinged to one end of the lower cavity; one end of the telescopic rod is hinged to the side wall of the upper cavity, and the other end is hinged to the side wall of the lower cavity.

[0021] The technical solution of the utility model has the following advantages:

[0022] In the utility model, when it is necessary to dry the glass substrate, the upper cavity is opened, the glass substrate is placed on the support, and then the upper cavity is sealed and connected with the lower cavity, so that the glass substrate is sealed in the drying cavity. By opening the vacuum valve, the external equipment performs vacuum processing on the drying cavity through the vacuum tube and the vacuum valve, so that the drying cavity reaches a vacuum state. The opening of the vacuum valve and the suction force of the external vacuum equipment are controlled. Under the condition of ensuring sufficient pumping speed, a good pumping rate is achieved, and a good vacuum pressure holding rate is possessed to improve the drying effect. After the drying is completed, the air valve is opened, so that the air passes through the air filter and then enters the lower cavity and the drying cavity through the air valve to break the vacuum, so that the pressure is restored, so that the upper cavity is opened to take out the glass substrate. At the same time, the air entering the drying cavity is filtered by the air filter, and the particles in the air are filtered out to avoid entering the drying cavity to pollute the drying cavity and adhering to the glass substrate to affect the performance of the glass substrate. At the same time, the structure is simple, and the sizes of the upper cavity and the lower cavity can be set according to actual conditions, so that it can be applied under the condition of limited local space, thereby improving the scope of application. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 A schematic diagram of the structure of a coating vacuum dryer provided by the utility model at a first viewing angle;

[0025] Figure 2 A schematic diagram of the partial structure of a coating vacuum dryer provided by the utility model at a second viewing angle;

[0026] Figure 3 A schematic diagram of the partial structure of a coating vacuum dryer provided by the utility model;

[0027] Figure 4 A schematic diagram of the structure of the upper cavity provided by the utility model;

[0028] Figure 5 for Figure 4 Middle AA section view.

[0029] Description of reference numerals:

[0030] 1. Lower cavity; 2. Upper cavity; 3. Glass substrate; 4. Vacuum valve; 5. Air valve; 6. Air filter; 7. Partition; 8. Ejector pin; 9. First groove; 10. First through hole; 11. Observation window; 12. Sealing cover; 13. Annular baffle; 14. Second groove; 15. First sealing ring; 16. Second sealing ring; 17. Second through hole; 18. Vacuum detection element; 19. Control panel; 20. Frame; 21. Telescopic rod; 22. Vacuum tube; 23. Support column. DETAILED DESCRIPTION

[0031] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0035] Example 1

[0036] Please refer to 1 to Figure 5The present embodiment provides a coating vacuum dryer, comprising: a lower cavity 1; an upper cavity 2, which is sealed and detachably connected to the top of the lower cavity 1; a drying cavity is enclosed between the upper cavity 2 and the lower cavity 1, and the inner cavity of the lower cavity 1 is connected to the drying cavity; a support member is arranged at the top of the lower cavity 1 and located in the drying cavity, suitable for supporting a glass substrate 3; a vacuum valve 4 is arranged in the lower cavity 1, suitable for connecting with an external vacuum device through a vacuum tube 22; an air valve 5 is arranged in the lower cavity 1, suitable for controlling the air to flow into the drying cavity to break the vacuum; an air filter 6, the air outlet end of the air filter 6 is connected to the air inlet end of the air valve 5, and the air inlet end of the air filter 6 is suitable for connecting with an external air inlet device.

[0037] In this embodiment, when the glass substrate 3 needs to be dried, the upper cavity 2 is opened, the glass substrate 3 is placed on the support, and then the upper cavity 2 is sealed and connected with the lower cavity 1, so that the glass substrate 3 is sealed in the drying cavity. By opening the vacuum valve 4, the external equipment performs vacuum treatment on the drying cavity through the vacuum tube 22 and the vacuum valve 4, so that the drying cavity reaches a vacuum state, and the opening degree of the vacuum valve 4 and the suction force of the external vacuum equipment are controlled. Under the condition of ensuring sufficient pumping speed, a better pumping rate is achieved, and a better vacuum pressure holding rate is obtained to improve the drying effect. After the drying is completed, the vacuum valve 4 is opened. The air valve 5 is opened, so that the air passes through the air filter 6 and then enters the lower cavity 1 and the drying cavity through the air valve 5 to break the vacuum and restore the pressure, so as to facilitate opening the upper cavity 2 to take out the glass substrate 3. At the same time, the air entering the drying cavity is filtered by the air filter 6 to filter out the particles in the air to prevent the particles from entering the drying cavity and polluting the drying cavity, and adhering to the glass substrate 3 to affect the performance of the glass substrate 3. At the same time, the structure is simple, and the dimensions of the upper cavity 2 and the lower cavity 1 can be set according to actual conditions, so that it can be used under conditions where local space is limited, thereby improving the scope of application.

[0038] In specific applications, while ensuring sufficient pumping speed, the pressure can be reduced from room pressure to 150Pa within 2 seconds, pumped to below 10Pa within 10 seconds, and a high vacuum environment can be reached within 2 to 5 minutes, with a good pumping rate; when the vacuum pumping is stopped, the pressure rise is less than 50Pa in one minute, with a good vacuum pressure holding rate.

[0039] Example 2

[0040] As a further improvement to Example 1, Figure 1 and Figure 2 As shown, the support member includes a partition 7 and a plurality of ejector pins 8. The bottom of the partition 7 is connected to the top of the lower cavity 1 through a plurality of support columns 23. The ejector pins 8 are evenly arranged on the top of the partition 7 and are suitable for supporting the glass substrate 3.

[0041] It should be noted that the partition 7 is located between the lower cavity 1 and the glass substrate 3 .

[0042] In this embodiment, by arranging the partition 7 between the glass substrate 3 and the lower cavity 1, it is prevented that the suction force generated by the vacuum valve 4 during evacuation is directly directed to the glass substrate 3, causing the position of the glass substrate 3 on the ejector pin 8 to shift, thereby affecting the drying effect.

[0043] Specifically, the area of ​​the partition plate 7 is larger than the area of ​​the glass substrate 3, so as to further reduce the influence of the suction force generated by the vacuum valve 4 on the glass substrate 3.

[0044] On the basis of the above-mentioned embodiment, in a preferred embodiment, the partition plate 7 is a stainless steel partition plate 7 .

[0045] In this embodiment, the partition plate 7 is made of stainless steel to improve the strength, avoid deformation under the suction of the vacuum valve 4, and increase the service life.

[0046] Based on the above implementation, in a preferred implementation, Figure 1 and Figure 2 As shown, a first groove 9 is provided at the bottom of the upper cavity 2, and the first groove 9 and the top of the lower cavity 1 are combined to form a drying cavity; a plurality of connecting ports are provided at the top of the lower cavity 1, and the connecting ports connect the drying cavity and the inner cavity of the lower cavity 1.

[0047] In this embodiment, a drying chamber is formed by enclosing the first groove 9 at the bottom of the upper chamber 2 and the top of the lower chamber 1, which is convenient for placing the glass substrate 3 and is easy to disassemble. The drying chamber and the inner cavity of the lower chamber 1 are connected through a connecting port to facilitate vacuuming.

[0048] Based on the above implementation, in a preferred implementation, Figure 1 , Figure 2 and Figure 5 As shown, the upper cavity body 2 is provided with a first through hole 10 communicating with the drying cavity, and the first through hole 10 is sealed with an observation window 11 through a sealing assembly.

[0049] It should be noted that the sealing assembly is connected to the upper cavity 2 and covers the first through hole 10 .

[0050] In this embodiment, a first through hole 10 is opened in the upper cavity 2, and an observation window 11 is provided at the first through hole 10 to seal the first through hole 10, so that the interior of the drying chamber can be observed through the observation window 11 to check the drying conditions, while ensuring the sealing of the drying chamber and the vacuum pressure maintenance rate.

[0051] Specifically, the observation window 11 is a transparent glass plate or a transparent plastic plate.

[0052] Based on the above implementation, in a preferred implementation, Figure 4 and Figure 5 As shown, the sealing assembly includes a sealing cover 12 and an annular baffle 13; a second groove 14 is provided at the bottom of the sealing cover 12, the annular baffle 13 is detachably connected in the second groove 14, and the observation window 11 is clamped between the second groove 14 and the annular baffle 13; a first sealing ring 15 is provided between the second groove 14 and the annular baffle 13; the side of the sealing cover 12 provided with the second groove 14 is detachably connected to the upper cavity 2; a second sealing ring 16 is provided between the sealing cover 12 and the upper cavity 2; a second through hole 17 is provided on the sealing cover 12, and the position of the second through hole 17 corresponds to the position of the observation window 11.

[0053] It should be noted that the second through hole 17 is coaxially arranged with the second groove 14 , and the diameter of the second through hole 17 is smaller than that of the second groove 14 .

[0054] In this embodiment, during installation, the observation window 11 is first placed in the second groove 14, and then the observation window 11 is clamped by the annular baffle 13, and the annular baffle 13 is connected to the second groove 14, and then the sealing cover 12 is connected to the upper cavity 2 to complete the installation of the observation window 11, and at the same time, it is sealed by the first sealing ring 15 and the second sealing ring 16 to improve the sealing performance.

[0055] Specifically, Figure 3 As shown, the vacuum tube 22 is sealed through the lower cavity 1 and connected to the external vacuum equipment to improve the sealing performance.

[0056] Specifically, Figure 3 As shown, the air filter 6 is sealed through the lower cavity 1 and connected to the external air intake device to improve the sealing performance.

[0057] Specifically, Figure 5 As shown, the annular baffle 13 is screwed into the second groove 14 for easy installation and removal.

[0058] Specifically, Figure 5 As shown, the sealing cover 12 is connected to the upper cavity 2 by screws, which is convenient for installation and disassembly.

[0059] Specifically, Figure 5 As shown, the sealing cover 12 is arranged on the top of the upper cavity 2 for easy installation and removal.

[0060] On the basis of the above-mentioned embodiment, in a preferred embodiment, the air filter element 6 is an air source triplex element.

[0061] It should be noted that in pneumatic technology, the assembly of three air source processing components, namely, air filter, pressure reducing valve and oil mist collector, is called a pneumatic triplet.

[0062] In this embodiment, it can play the role of voltage stabilization, filtering and lubrication.

[0063] On the basis of the above-mentioned embodiment, in a preferred embodiment, the vacuum valve 4 is a first solenoid valve; the air outlet end of the air filter 6 is connected to the first solenoid valve, and is suitable for providing an air source for the on and off of the first solenoid valve.

[0064] In this embodiment, the vacuum valve 4 adopts a first solenoid valve, which is connected to the first solenoid valve through the air outlet end of the air filter 6. When the first solenoid valve adopts gas as a power source, it is convenient to provide a gas source to control the on and off.

[0065] On the basis of the above-mentioned embodiment, in a preferred embodiment, the air valve 5 is a second solenoid valve; the air outlet end of the air filter 6 is connected to the second solenoid valve, and is suitable for providing an air source for the on and off of the second solenoid valve.

[0066] In this embodiment, the air valve 5 adopts a second solenoid valve, which is connected to the second solenoid valve through the air outlet end of the air filter 6. When the second solenoid valve adopts gas as a power source, it is convenient to provide a gas source to control the on and off.

[0067] Based on the above implementation, in a preferred implementation, Figure 3 As shown, the coating vacuum dryer also includes a vacuum detection component 18, a control panel 19 and a frame 20; the lower cavity 1 is arranged on the top of the frame 20, and the control panel 19 is arranged on the frame 20; the vacuum detection component 18 is arranged in the lower cavity 1 and is communicated with the control panel 19.

[0068] In this embodiment, a vacuum detection element 18 is provided in the lower cavity 1 to detect the vacuum degree in the drying cavity, and the vacuum degree information is fed back to the control panel 19, through which the vacuum pressure change in the drying cavity can be understood.

[0069] Specifically, the vacuum detection member 18 is a vacuum gauge.

[0070] Specifically, the vacuum valve 4 and the air valve 5 are both connected to the control panel 19 for communication, so that the vacuum valve 4 and the air valve 5 can be controlled by the control panel 19 .

[0071] Specifically, a plurality of supporting feet are evenly arranged at the bottom of the frame 20 to improve the stability of the support.

[0072] Based on the above implementation, in a preferred implementation, Figure 1 and Figure 2 As shown, the coating vacuum dryer also includes a telescopic rod 21; one end of the upper cavity 2 is hinged to one end of the lower cavity 1; one end of the telescopic rod 21 is hinged to the side wall of the upper cavity 2, and the other end is hinged to the side wall of the lower cavity 1.

[0073] It should be noted that the telescopic rod 21 is located on the same side of the upper cavity 2 and the lower cavity 1 .

[0074] In this embodiment, the upper cavity 2 is hinged to the lower cavity 1, and when the upper cavity 2 is opened, it is supported by the telescopic rod 21, which facilitates the placement of the glass substrate 3 without moving the upper cavity 2, thereby improving work efficiency.

[0075] Specifically, the telescopic rod 21 may be a hydraulic telescopic rod 21 or an electric telescopic rod 21 .

[0076] Specifically, the upper cavity 2 and the lower cavity 1 are snap-connected at one end away from the hinge to facilitate closing and opening.

[0077] As a convertible implementation, the upper cavity 2 and the lower cavity 1 may be connected by screws to improve the connection strength.

[0078] Specifically, a third sealing ring is provided between the upper cavity 2 and the lower cavity 1 to further improve the sealing performance.

[0079] The specific working principle of the coating vacuum dryer provided in this embodiment is as follows: when the glass substrate 3 needs to be dried, the upper cavity 2 is opened and supported by the telescopic rod 21, and then the glass substrate 3 is placed on the support, and then the telescopic rod 21 is retracted, the upper cavity 2 is rotated downward and then sealed and connected with the lower cavity 1, so that the glass substrate 3 is sealed in the drying cavity, the first electromagnetic valve is controlled to open, so that the external equipment performs vacuum treatment on the drying cavity through the vacuum tube 22 and the vacuum valve 4, so that the drying cavity reaches a vacuum state, and the opening of the first electromagnetic valve and the suction force of the external vacuum equipment are controlled. Under the condition of ensuring sufficient pumping speed, a better pumping rate is achieved, and a better vacuum pressure holding rate is achieved to improve the drying effect, and the drying process can be observed through the observation window. 11 observes the changes of the glass substrate 3, and at the same time, the changes of the vacuum pressure in the drying chamber are fed back to the control panel 19 in real time. After the drying is completed, the air valve 5 is controlled to open, so that the air passes through the air source triplet and then enters the lower chamber 1 and the drying chamber through the air valve 5 to break the vacuum and restore the pressure, so that the upper chamber 2 can be opened to take out the glass substrate 3. At the same time, the air entering the drying chamber is filtered through the air source triplet to filter out the particles in the air to avoid entering the drying chamber to pollute the drying chamber and adhering to the glass substrate 3 to affect the performance of the glass substrate 3. At the same time, the structure is simple, and the size of the upper chamber 2 and the lower chamber 1 can be set according to the actual situation, so that it can be used under the condition of limited local space, thereby improving the scope of application. The technical problem that the particles mixed in the air are easily adsorbed on the glass substrate 3 and affect the product performance during the air intake process of the existing vacuum drying unit device of the coating machine is solved.

[0080] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A coating vacuum dryer, characterized in that: include: A lower cavity (1); The upper cavity (2) is connected to the top of the lower cavity (1) in a sealed and detachable manner; a drying cavity is formed between the upper cavity (2) and the lower cavity (1), and the inner cavity of the lower cavity (1) is connected to the drying cavity; A support member, arranged on the top of the lower cavity (1) and located in the drying cavity, suitable for supporting the glass substrate (3); A vacuum valve (4), arranged in the lower cavity (1), adapted to be connected to an external vacuum device via a vacuum tube (22); An air valve (5) is arranged in the lower cavity (1) and is suitable for controlling the air to flow into the drying cavity to break the vacuum; An air filter (6), the air outlet end of the air filter (6) is connected to the air inlet end of the air valve (5), and the air inlet end of the air filter (6) is suitable for connecting to an external air intake device.

2. The coating vacuum dryer according to claim 1, characterized in that: The support member comprises a partition (7) and a plurality of ejector pins (8); the bottom of the partition (7) is connected to the top of the lower cavity (1) via a plurality of support columns (23); the ejector pins (8) are evenly arranged on the top of the partition (7) and are suitable for supporting the glass substrate (3).

3. The coating vacuum dryer according to claim 2, characterized in that: The partition plate (7) is a stainless steel partition plate (7).

4. The coating vacuum dryer according to claim 1, characterized in that: The bottom of the upper cavity (2) is provided with a first groove (9), and the first groove (9) and the top of the lower cavity (1) are combined to form the drying cavity; the top of the lower cavity (1) is provided with a plurality of communication ports, and the communication ports are connected with the drying cavity and the inner cavity of the lower cavity (1).

5. The coating vacuum dryer according to claim 1, characterized in that: The upper cavity body (2) is provided with a first through hole (10) communicating with the drying cavity, and the first through hole (10) is sealed with an observation window (11) via a sealing component.

6. The coating vacuum dryer according to claim 5, characterized in that: The sealing assembly comprises a sealing cover (12) and an annular baffle (13); a second groove (14) is provided at the bottom of the sealing cover (12), the annular baffle (13) is detachably connected in the second groove (14), and the observation window (11) is clamped between the second groove (14) and the annular baffle (13); a first sealing ring (15) is provided between the second groove (14) and the annular baffle (13); a side of the sealing cover (12) provided with the second groove (14) is detachably connected to the upper cavity (2); a second sealing ring (16) is provided between the sealing cover (12) and the upper cavity (2); a second through hole (17) is provided on the sealing cover (12), and the position of the second through hole (17) corresponds to the position of the observation window (11).

7. The coating vacuum dryer according to claim 1, characterized in that: The air filter (6) is an air source triplex component.

8. The coating vacuum dryer according to claim 1, characterized in that: The vacuum valve (4) is a first electromagnetic valve; the air outlet end of the air filter (6) is connected to the first electromagnetic valve and is suitable for providing an air source for the on and off of the first electromagnetic valve.

9. The coating vacuum dryer according to claim 1, characterized in that: The air valve (5) is a second electromagnetic valve; the air outlet end of the air filter (6) is connected to the second electromagnetic valve, and is suitable for providing an air source for the on and off of the second electromagnetic valve.

10. The coating vacuum dryer according to any one of claims 1 to 9, characterized in that: It also includes a vacuum detection element (18), a control screen (19) and a frame (20); the lower cavity (1) is arranged on the top of the frame (20), and the control screen (19) is arranged on the frame (20); the vacuum detection element (18) is arranged in the lower cavity (1) and is in communication connection with the control screen (19); And / or, it also includes a telescopic rod (21); one end of the upper cavity (2) is hinged to one end of the lower cavity (1); one end of the telescopic rod (21) is hinged to the side wall of the upper cavity (2), and the other end is hinged to the side wall of the lower cavity (1).

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