Wafer side image detection device

Abstract

The utility model discloses a wafer side image detection device, and relates to the technical field of wafer detection. The wafer side image detection device comprises a base, a detection lamp is arranged at the top of the base, a bearing mechanism is arranged at the top of the base, and a lifting mechanism is arranged at the top of the base. According to the wafer side edge image detection device, through arrangement of the connecting rod, when side edge image detection needs to be carried out on a plurality of wafers at the same time, the plurality of wafers are firstly placed at the top of the clamping plate, and then the threaded rod is rotated, so that the connecting rod drives the detection lamp and the detection head to ascend and descend at the top of the base; the multiple wafers placed on the top of the rotating disc through the clamping plate are detected at the same time, and side image detection can be conveniently conducted on the multiple wafers at the same time through the device.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer detection, and in particular relates to a wafer side image detection device. Background Art

[0002] Wafer side edge inspection is an important part of wafer inspection and is mainly used to inspect the quality and performance of the wafer side edge.

[0003] The prior art does not have a structure for simultaneously inspecting multiple groups of wafer stacks when in use, so that when performing side inspection on wafers, the prior art can only inspect the wafers one by one, which is inefficient. Based on the deficiencies of the prior art, the utility model designs a wafer side image inspection device. Utility Model Content

[0004] In order to solve the above problems existing in the prior art, the utility model provides a wafer side image detection device, which has the feature of simultaneously detecting multiple groups of wafer stacks.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a wafer side image detection device, comprising a base, a detection light is arranged on the top of the base, a bearing mechanism is arranged on the top of the base, and a lifting mechanism is arranged on the top of the base;

[0006] The lifting mechanism comprises a connecting rod and a threaded rod, wherein the connecting rod is slidably connected to the top of the base, and the inner thread of the connecting rod is connected to the threaded rod.

[0007] As an optimal technical solution of a wafer side image detection device of the utility model, the lifting mechanism also includes a turning handle, a limit block, a slider and a sliding rod. The turning handle is fixedly connected to the upper surface of the threaded rod, the limit block is fixedly connected to one side of the connecting rod, the slider is fixedly connected to one side of the connecting rod, and the sliding rod is slidably connected to the inside of the slider.

[0008] As a preferred technical solution of a wafer side image detection device of the utility model, a wafer body is arranged on the top of the base, a supporting seat is arranged on the top of the base, a turntable is arranged on the top of the supporting seat, and a clamping plate is arranged on the top of the turntable.

[0009] As an optimal technical solution of a wafer side image detection device of the utility model, a mounting plate is provided on the top of the base, a detection head is provided on the top of the mounting plate, the internal threads of the mounting plate are connected with fixing bolts, and a positioning plate is fixedly connected to the lower surface of the detection light.

[0010] As an optimal technical solution of a wafer side image detection device of the utility model, the supporting mechanism includes a supporting rod, a sliding groove, a limiting rod, a lifting groove and a side groove. The supporting rod is fixedly installed on the top of the base, a sliding groove is opened inside the supporting rod, the limiting rod is fixedly installed on the top of the base, a lifting groove is opened on one side of the limiting rod, and a side groove is opened on one side of the limiting rod.

[0011] As a preferred technical solution of a wafer side image detection device of the utility model, the connecting rod is slidably connected to the inside of the limiting rod, and the threaded rod is rotatably connected to the inside of the sliding groove.

[0012] As a preferred technical solution of a wafer side image detection device of the utility model, the sliding rod is fixedly connected to the inside of the bearing rod, and the sliding block is slidably connected to the inside of the sliding groove.

[0013] As a preferred technical solution of a wafer side image detection device of the utility model, the positioning plate is arranged on the top of the limiting block, and the fixing bolt is threadedly connected to the inside of the limiting block.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. When the utility model is in use, by setting a connecting rod, when it is necessary to perform side image detection on multiple wafers at the same time, firstly, multiple wafers are placed on the top of the card plate, and then by rotating the threaded rod, the connecting rod drives the detection lamp and the detection head to rise and fall on the top of the base, and the multiple wafers placed on the top of the turntable through the card plate are detected at the same time. The device is convenient for performing side image detection on multiple wafers at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0017] Figure 1 This is a schematic diagram of the base structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the structure of the detection lamp of the utility model;

[0019] Figure 3 This is a schematic diagram of the card structure of the utility model;

[0020] Figure 4 This is a schematic diagram of the lifting mechanism structure of the utility model;

[0021] Figure 5 It is a schematic diagram of the structure of the bearing mechanism of the utility model.

[0022] In the figure: 1. base; 101. wafer body; 102. bearing seat; 103. turntable; 104. clamping plate; 2. detection lamp; 201. detection head; 202. mounting plate; 203. positioning plate; 204. fixing bolt; 3. bearing mechanism; 301. bearing rod; 302. slide groove; 303. limit rod; 304. lifting groove; 305. side groove; 4. lifting mechanism; 401. connecting rod; 402. threaded rod; 403. turning handle; 404. limit block; 405. slider; 406. slide rod. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1

[0025] See also Figure 1-5 , the utility model provides the following technical solutions: a wafer side image detection device, comprising a base 1, a detection lamp 2 is arranged on the top of the base 1, a bearing mechanism 3 is arranged on the top of the base 1, and a lifting mechanism 4 is arranged on the top of the base 1;

[0026] A wafer body 101 is disposed on the top of the base 1 , a supporting seat 102 is disposed on the top of the base 1 , a turntable 103 is disposed on the top of the supporting seat 102 , and a clamping plate 104 is disposed on the top of the turntable 103 .

[0027] A mounting plate 202 is disposed on the top of the base 1 , a detection head 201 is disposed on the top of the mounting plate 202 , a fixing bolt 204 is connected to the inner thread of the mounting plate 202 , and a positioning plate 203 is fixedly connected to the lower surface of the detection lamp 2 .

[0028] The bearing mechanism 3 includes a bearing rod 301, a sliding groove 302, a limiting rod 303, a lifting groove 304 and a side groove 305. The bearing rod 301 is fixedly installed on the top of the base 1, and a sliding groove 302 is opened inside the bearing rod 301. The limiting rod 303 is fixedly installed on the top of the base 1, and a lifting groove 304 is opened on one side of the limiting rod 303. A side groove 305 is opened on one side of the limiting rod 303.

[0029] The positioning plate 203 is disposed on the top of the limiting block 404 , and the fixing bolt 204 is threadedly connected to the inside of the limiting block 404 .

[0030] What needs to be further explained is that: by setting the clamping plate 104, it is convenient to place multiple wafers on the top of the turntable 103, and a supporting mechanism 3 is set on the top of the base 1. By setting the supporting mechanism 3, it is convenient to carry the lifting mechanism 4. By setting the lifting mechanism 4, it is convenient to drive the detection light 2 and the detection head 201 to rise and fall, so as to facilitate the side image detection of multiple wafers at the same time.

[0031] Example 2

[0032] See also Figure 4-5 , the utility model provides the following technical solutions:

[0033] The lifting mechanism 4 includes a connecting rod 401 and a threaded rod 402 . The connecting rod 401 is slidably connected to the top of the base 1 , and the inner thread of the connecting rod 401 is connected to the threaded rod 402 .

[0034] The lifting mechanism 4 also includes a turning handle 403, a limit block 404, a slider 405 and a slide rod 406. The turning handle 403 is fixedly connected to the upper surface of the threaded rod 402, the limit block 404 is fixedly connected to one side of the connecting rod 401, the slider 405 is fixedly connected to one side of the connecting rod 401, and the slide rod 406 is slidably connected to the inside of the slider 405.

[0035] The connecting rod 401 is slidably connected to the inside of the limiting rod 303 , and the threaded rod 402 is rotatably connected to the inside of the sliding groove 302 .

[0036] The sliding rod 406 is fixedly connected to the inside of the bearing rod 301 , and the sliding block 405 is slidably connected to the inside of the sliding groove 302 .

[0037] What needs to be further explained is: multiple wafers are placed on the top of the card plate 104, and then by rotating the threaded rod 402, the connecting rod 401 drives the detection light 2 and the detection head 201 to rise and fall on the top of the base 1, and the multiple wafers placed on the top of the turntable 103 through the card plate 104 are detected at the same time.

[0038] Working principle: When a wafer side image detection device is used, firstly, a plurality of wafers are placed on the top of the turntable 103 by setting a card plate 104, and a bearing mechanism 3 is set on the top of the base 1. The bearing mechanism 3 is set to carry the lifting mechanism 4, and the lifting mechanism 4 is set to drive the detection lamp 2 and the detection head 201 to rise and fall, so as to perform side image detection on multiple wafers at the same time;

[0039] When it is necessary to perform side image detection on multiple wafers at the same time, first place the multiple wafers on the top of the card plate 104, and then rotate the threaded rod 402 so that the connecting rod 401 drives the detection light 2 and the detection head 201 to rise and fall on the top of the base 1, and detect the multiple wafers placed on the top of the turntable 103 through the card plate 104 at the same time. This device facilitates the simultaneous side image detection of multiple wafers.

[0040] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions described in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A wafer side image detection device, comprising a base (1), characterized in that: A detection lamp (2) is arranged on the top of the base (1), a bearing mechanism (3) is arranged on the top of the base (1), and a lifting mechanism (4) is arranged on the top of the base (1); A lifting mechanism (4) comprises a connecting rod (401) and a threaded rod (402), wherein the connecting rod (401) is slidably connected to the top of the base (1), and the threaded rod (402) is connected to the inner thread of the connecting rod (401).

2. The wafer side image detection device according to claim 1, characterized in that: The lifting mechanism (4) further comprises a turning handle (403), a limiting block (404), a sliding block (405) and a sliding rod (406); the turning handle (403) is fixedly connected to the upper surface of the threaded rod (402); the limiting block (404) is fixedly connected to one side of the connecting rod (401); the sliding block (405) is fixedly connected to one side of the connecting rod (401); and the sliding rod (406) is slidably connected to the inside of the sliding block (405).

3. The wafer side image detection device according to claim 1, characterized in that: A wafer body (101) is arranged on the top of the base (1), a bearing seat (102) is arranged on the top of the base (1), a turntable (103) is arranged on the top of the bearing seat (102), and a clamping plate (104) is arranged on the top of the turntable (103).

4. The wafer side image detection device according to claim 1, characterized in that: A mounting plate (202) is arranged on the top of the base (1), a detection head (201) is arranged on the top of the mounting plate (202), a fixing bolt (204) is connected to the inner thread of the mounting plate (202), and a positioning plate (203) is fixedly connected to the lower surface of the detection lamp (2).

5. The wafer side image detection device according to claim 1, characterized in that: The bearing mechanism (3) comprises a bearing rod (301), a sliding groove (302), a limiting rod (303), a lifting groove (304) and a side groove (305); the bearing rod (301) is fixedly mounted on the top of the base (1); a sliding groove (302) is provided inside the bearing rod (301); the limiting rod (303) is fixedly mounted on the top of the base (1); a lifting groove (304) is provided on one side of the limiting rod (303); and a side groove (305) is provided on one side of the limiting rod (303).

6. The wafer side image detection device according to claim 1, characterized in that: The connecting rod (401) is slidably connected to the inside of the limiting rod (303), and the threaded rod (402) is rotationally connected to the inside of the sliding groove (302).

7. The wafer side image detection device according to claim 2, characterized in that: The sliding rod (406) is fixedly connected to the inside of the bearing rod (301), and the sliding block (405) is slidably connected to the inside of the sliding groove (302).

8. The wafer side image detection device according to claim 4, characterized in that: The positioning plate (203) is arranged on the top of the limiting block (404), and the fixing bolt (204) is threadedly connected to the inside of the limiting block (404).

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