Developing device

Abstract

The utility model discloses a developing device, which belongs to the technical field of developing and comprises a developing tank and a conveying device for translating and conveying a substrate into the developing tank, the conveying device is provided with a conveying plane, and a two-fluid spraying device is arranged right above and / or right below the conveying plane. The spraying device is used for correspondingly spraying a two-fluid developing solution to the upper surface and / or the lower surface of the substrate on the conveying plane during developing work; the average particle size of the two-fluid developing solution is small, and the two-fluid developing solution can enter the mask opening with low width, so that the mask at the bottom of the mask opening is well removed.

Description

Technical Field

[0001] The utility model relates to the technical field of development, in particular to a development device. Background Art

[0002] In the production process of cells, PCBs and wafers, the development process is a necessary process after the exposure process, and the two are collectively called photolithography technology. Exposure refers to the photochemical reaction process in which the mask part set on the semi-finished product (referred to as the substrate) such as the cell, PCB or wafer undergoes photoinduced cross-linking, polymerization or decomposition with light. Development refers to the process in which the mask part that has not undergone photochemical reaction or has undergone photochemical reaction further reacts with the developer to form a mask opening.

[0003] Generally, a developer is used to immerse a substrate with a mask to remove part of the mask. However, when the removed part of the mask is a short-width strip-like structure (for example, a width of 5μm-50μm) to form a short-width mask opening (for example, a width of 5μm-50μm), it is difficult for the developer to enter the short-width mask opening, resulting in mask residue at the bottom of the mask opening, affecting subsequent processes, or it is difficult for the developer entering the short-width mask opening and the developer outside the mask opening to convect, resulting in the developer entering the short-width mask opening being unable / inefficient to remove the mask at the bottom of the mask opening, affecting subsequent processes. Utility Model Content

[0004] The purpose of the utility model is to provide a developing device to solve one of the technical problems mentioned in the background technology.

[0005] In order to achieve the above-mentioned purpose, the technical solutions provided in the embodiments of the present invention are as follows.

[0006] An embodiment of the utility model provides a developing device, including a developing tank and a conveying device for conveying a substrate into the developing tank in a translational manner, the conveying device having a conveying plane, and a two-fluid spraying device is arranged directly above and / or directly below the conveying plane to spray the two-fluid developer onto the upper surface and / or lower surface of the substrate on the conveying plane correspondingly during the developing operation.

[0007] In some embodiments, along the conveying direction of the conveying device, a liquid spraying device is also arranged upstream and / or downstream of the two-fluid spraying device, and the liquid spraying device is arranged directly above and / or directly below the conveying plane to spray the developing liquid onto the upper surface and / or lower surface of the substrate on the conveying plane accordingly during the development operation.

[0008] In some embodiments, along the conveying direction, the two-fluid spraying devices are arranged in a plurality of intervals in sequence, and the spacing between two adjacent two-fluid spraying devices is 0.25-1.5 times the length of the substrate along the conveying direction;

[0009] The distance between the spray outlet of the two-fluid spraying device and the substrate is 10mm-150mm.

[0010] In some embodiments, the two-fluid spraying device includes a two-fluid nozzle, and the two-fluid nozzle is provided with a first liquid inlet and an air inlet, the first liquid inlet is connected to the developer liquid supply device, and the air inlet is connected to the air supply device.

[0011] In some embodiments, along the second direction, the two-fluid spraying device includes a plurality of two-fluid nozzles spaced apart from each other in sequence, so that the spraying range of the two-fluid nozzles covers the length of at least one substrate along the second direction.

[0012] In some embodiments, the first liquid inlets of the multiple two-fluid nozzles arranged in sequence are all connected to the first liquid collecting pipe, and the first liquid collecting pipe is connected to the developer liquid supply device; the air inlets of the multiple two-fluid nozzles arranged in sequence are connected to the air supply device through the first air supply pipe.

[0013] In some embodiments, along the conveying direction, the two-fluid spraying device is a plurality of devices arranged in sequence and spaced apart from each other; in each of the two-fluid spraying devices, the air inlets of the plurality of two-fluid nozzles arranged in sequence and spaced apart from each other are respectively connected to an air collecting pipe through a first air supply pipe, and the air collecting pipe is connected to the air supply device.

[0014] In some embodiments, the gas collecting pipe is connected to the gas supply device through a second gas supply pipe, and the second gas supply pipe is provided with a flow regulating valve and / or a gas filter.

[0015] In some embodiments, when a two-fluid spraying device is arranged directly below the conveying plane, along the conveying direction, the two-fluid spraying device is multiple and arranged in sequence at intervals, and the conveying device includes multiple conveying rollers arranged in sequence at intervals, and the two-fluid spraying device is located in the intervals between the conveying rollers, so that the sprayed two-fluid developer can avoid the conveying rollers and reach the lower surface of the substrate.

[0016] In some embodiments, the two-fluid spraying device includes a two-fluid nozzle and a liquid nozzle, wherein the two-fluid nozzle is used to spray the two-fluid developer, and the liquid nozzle is used to spray the developer.

[0017] Due to the application of the above technical solution, the embodiments of the utility model have the following advantages compared with the prior art:

[0018] (1) The developing device in the embodiment of the utility model includes a two-fluid spraying device; during the developing operation, the two-fluid spraying device can spray the two-fluid developer onto the substrate on the conveying plane; the average particle size of the two-fluid developer is relatively small, generally 20-100 μm, and can enter the low-width mask opening, thereby better removing the mask at the bottom of the mask opening.

[0019] (2) In some embodiments of the utility model, a liquid spraying device is provided upstream of the two-fluid spraying device along the conveying direction of the conveying device, and the concentration of the effective component in the developer is generally higher than that in the two-fluid developer. The developer sprayed by the upstream liquid spraying device can quickly remove part of the mask on the substrate surface to form a prototype mask opening; on the basis of the prototype mask opening, the two-fluid developer sprayed by the downstream two-fluid spraying device can further remove the residual mask at the bottom of the prototype mask opening to form a good mask opening. Compared with the use of a liquid spraying device or a two-fluid spraying device alone, this solution can obtain a good mask opening while ensuring the development efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Attached Figure 1 This is a schematic diagram of the first structure of the developing device in the embodiment of the present application;

[0021] Attached Figure 2 A schematic diagram of the size relationship between the two-fluid spraying device and the substrate in the embodiment of the present application;

[0022] Attached Figure 3 This is a schematic diagram of a second structure of a developing device in an embodiment of the present application;

[0023] Attached Figure 4 This is a schematic diagram of a third structure of the developing device in the embodiment of the present application;

[0024] Attached Figure 5 This is a schematic diagram of the arrangement structure of multiple two-fluid spraying devices in an embodiment of the present application;

[0025] Attached Figure 6 This is a schematic diagram of the arrangement structure of the two-fluid spraying device and the liquid spraying device in the embodiment of the present application;

[0026] Attached Figure 7 It is a schematic diagram of the structure of the two-fluid spraying device in the embodiment of the present application including both the two-fluid nozzle and the nozzle;

[0027] The meanings of the reference numerals are as follows:

[0028] Conveying direction X, second direction Y, substrate 1, developing tank 10, conveying device 20, conveying roller 21, two-fluid spraying device 30, two-fluid nozzle 31, two-fluid developer 31a, first liquid inlet 311, air inlet 312, first liquid collecting pipe 32, first air supply pipe 33, air collecting pipe 34, second air supply pipe 35, flow regulating valve 36, gas filter 37, liquid spraying device 40, nozzle 41, developer 41a, second liquid inlet 411, second liquid collecting pipe 42. DETAILED DESCRIPTION

[0029] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. The embodiments of the present application are not just one embodiment, but a collection of embodiments with similar schemes or features, and the same is true for other embodiments.

[0030] like Figure 1 As shown, the developing device includes a developing tank 10 and a conveying device 20 for conveying the substrate 1 into the developing tank 10 in a translational manner. The conveying device 20 has a conveying plane, and a two-fluid spraying device 30 is arranged directly above the conveying plane. The substrate 1 can be a semi-finished product of a battery cell, a PCB or a wafer. During the development operation, the two-fluid spraying device 30 can spray a two-fluid developer 31a onto the upper surface of the substrate 1 on the conveying plane. The average particle size of the two-fluid developer 31a is relatively small, generally 20-100μm, while the average particle size of the liquid sprayed by an ordinary nozzle is 140-600μm. Therefore, the two-fluid developer 31a can enter the mask opening of a small width, thereby better removing the mask at the bottom of the mask opening.

[0031] Specifically, along the conveying direction X, the two-fluid spraying device 30 is arranged in sequence and at intervals, so that the substrate 1 can be sprayed with the two-fluid developer 31a multiple times during the movement process to improve the development effect. The conveying device 20 includes a plurality of conveying rollers 21 arranged in sequence and at intervals, and the conveying rollers 21 are rotated to continuously convey the substrate 1.

[0032] Specifically, Figure 2As shown, along the conveying direction X, the two-fluid spraying device 30 is arranged in sequence in a plurality of intervals, and the spacing D between two adjacent two-fluid spraying devices 30 (called the spraying spacing) is 0.25-1.5 times the length L of the substrate 1 along the conveying direction. The distance between the spray outlet of the two-fluid spraying device 30 and the substrate 1 (called the spraying height) is 10mm-150mm. Preferably, it is 30mm-100mm, and more preferably, it is 50mm-80mm. Through the coordination between the two parameters of the spraying spacing and the spraying height, the upper surface of the substrate 1 can be completely covered by the sprayed two-fluid developer 31a during the movement, and is always in the process of being developed, which can improve the development efficiency.

[0033] In some embodiments, Figure 3 As shown, a two-fluid spraying device 30 is also provided directly below the conveying plane to synchronously perform development treatment on the upper and lower surfaces of the substrate 1, thereby improving the development efficiency. Specifically, along the conveying direction X, a plurality of two-fluid spraying devices 30 are sequentially arranged at intervals, and the conveying device 20 includes a plurality of conveying rollers 21 sequentially arranged at intervals, and the two-fluid spraying device 30 is located in the intervals between the conveying rollers 21, so that the sprayed two-fluid developer 31a can avoid the conveying rollers 21 and reach the lower surface of the substrate 1. Of course, the two-fluid spraying device 30 can also be provided only directly below the conveying plane, and only the lower surface of the substrate 1 can be developed.

[0034] In some embodiments, the two-fluid spraying device 30 and the liquid spraying device 40 may be used together to perform a development process on the substrate 1 .

[0035] Specifically, along the conveying direction X of the conveying device 20, a liquid spraying device 40 is also arranged upstream and / or downstream of the two-fluid spraying device 30. The liquid spraying device 40 is arranged directly above and / or directly below the conveying plane to spray the developing liquid 41a onto the upper surface and / or lower surface of the substrate 1 on the conveying plane accordingly during the development operation.

[0036] Preferably, along the conveying direction X of the conveying device 20, a liquid spraying device 40 is provided upstream of the two-fluid spraying device 30. The concentration of the active ingredient in the developer 41a is generally higher than that in the two-fluid developer 31a. The developer 41a sprayed by the upstream liquid spraying device 40 can quickly remove part of the mask on the surface of the substrate 1 to form a prototype mask opening. On the basis of the prototype mask opening, the two-fluid developer 31a sprayed by the downstream two-fluid spraying device 30 can further remove the residual mask at the bottom of the prototype mask opening to form a good mask opening. Compared with using the liquid spraying device 40 or the two-fluid spraying device 30 alone, this solution can obtain a good mask opening while ensuring the development efficiency.

[0037] Specifically, the two-fluid spraying device 30 includes a two-fluid nozzle 31, and the two-fluid nozzle 31 is provided with a first liquid inlet 311 and an air inlet 312. The first liquid inlet 311 is connected to a developer liquid supply device (not shown), and the air inlet 312 is connected to an air supply device (not shown). The developer liquid supply device supplies the developer liquid to the two-fluid nozzle 31, and the air supply device supplies gas, such as compressed air or compressed nitrogen, to the two-fluid nozzle 31. The spraying device 40 includes a nozzle 41, and the nozzle 41 includes a second liquid inlet 411.

[0038] Specifically, Figure 5 As shown, along the second direction Y, the two-fluid spraying device 30 includes a plurality of two-fluid nozzles 31 arranged in sequence and spaced apart, so that the spraying range of the two-fluid nozzles 31 covers the length of at least one substrate 1 along the second direction Y. It should be noted here that when the developing device is a single-track device, that is, only one substrate 1 is arranged in the second direction Y, the spraying range of the two-fluid spraying device 30 covers the length of the one substrate 1 along the second direction Y. When the developing device is a multi-track device, that is, multiple substrates 1 are arranged in the second direction Y, the spraying range of the two-fluid spraying device 30 covers the length of the multiple substrates 1 along the second direction Y.

[0039] It should be noted that the conveying direction X and the second direction Y are two intersecting directions; preferably, the conveying direction X and the second direction Y are two directions that are substantially perpendicular to each other, for example, the intersection angle between the two is 85-95 degrees.

[0040] Specifically, Figure 5-Figure 7 As shown in any of the figures in the figure, the first liquid inlets 311 of the plurality of two-fluid nozzles 31 arranged in sequence are all connected to the first liquid collecting pipe 32, and the first liquid collecting pipe 32 is connected to the developer liquid supply device; the air inlets 312 of the plurality of two-fluid nozzles 31 arranged in sequence are respectively connected to the air supply device through the first air supply pipe 33. The first liquid collecting pipe 32 is an isobaric chamber, which can ensure that the liquid pressure entering the plurality of two-fluid nozzles 31 connected thereto is the same.

[0041] Specifically, Figure 5 or Figure 7As shown, along the conveying direction X, there are a plurality of two-fluid spraying devices 30 arranged in sequence at intervals; in each two-fluid spraying device 30, the air inlets 312 of a plurality of two-fluid nozzles 31 arranged in sequence at intervals are connected to the air collecting pipe 34 through the first air supply pipe 33, and the air collecting pipe 34 is connected to the air supply device. The air collecting pipe 34 is an isobaric chamber, which can ensure that the gas pressure entering the plurality of two-fluid nozzles 31 connected thereto is the same. The air collecting pipe 34 is connected to the air supply device through the second air supply pipe 35, and a flow regulating valve 36 and a gas filter 37 are provided on the second air supply pipe 35. The flow regulating valve 36 is used to adjust the gas flow entering the two-fluid spraying device 30, and the gas filter 37 is used to filter out impurities or dust in the gas.

[0042] Specifically, Figure 6 As shown, the second liquid inlets 411 of the plurality of nozzles 41 disposed sequentially and spaced apart are all connected to the second liquid collecting pipe 42, and the second liquid collecting pipe 42 is connected to the developer supply device.

[0043] In some embodiments, Figure 7 As shown, the two-fluid spraying device 30 includes a two-fluid nozzle 31 and a liquid nozzle 41, wherein the two-fluid nozzle 31 is used to spray the two-fluid developer 31a, and the liquid nozzle 41 is used to spray the developer 41a. For example, the lines on the substrate 1 that need to be developed have different line widths, and the two-fluid spraying device 30 is used to develop the lines with low line widths, and the liquid nozzle 41 is used to develop the lines with high line widths, so that the developing device in this solution can develop the substrate 1 with complex lines.

[0044] It should be noted that the numerical ranges involved in the embodiments of the present application all include endpoint values. For example, the distance between the nozzle of the two-fluid spraying device 30 and the substrate 1 is 10 mm-150 mm, which refers to a numerical range including the two endpoint values ​​of 10 mm and 150 mm.

[0045] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it. They cannot be used to limit the protection scope of the utility model. All equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A developing device, comprising a developing tank and a conveying device for conveying a substrate into the developing tank in a translational manner, wherein the conveying device has a conveying plane, and is characterized in that: A two-fluid spraying device is arranged directly above and / or directly below the conveying plane to spray the two-fluid developer to the upper surface and / or lower surface of the substrate on the conveying plane correspondingly during the development operation.

2. The developing device according to claim 1, characterized in that: Along the conveying direction of the conveying device, a liquid spraying device is also arranged upstream and / or downstream of the two-fluid spraying device. The liquid spraying device is arranged directly above and / or directly below the conveying plane to spray the developing liquid onto the upper surface and / or lower surface of the substrate on the conveying plane accordingly during the development operation.

3. The developing device according to claim 1, characterized in that: Along the conveying direction of the conveying device, the two-fluid spraying devices are arranged in sequence in a plurality of intervals, and the interval between two adjacent two-fluid spraying devices is 0.25-1.5 times the length of the substrate along the conveying direction; The distance between the spray outlet of the two-fluid spraying device and the substrate is 10mm-150mm.

4. The developing device according to claim 1, characterized in that: The two-fluid spraying device comprises a two-fluid nozzle, and the two-fluid nozzle is provided with a first liquid inlet and an air inlet, wherein the first liquid inlet is connected to a developer liquid supply device, and the air inlet is connected to an air supply device.

5. The developing device according to claim 4, characterized in that: Along the second direction, the two-fluid spraying device includes a plurality of two-fluid nozzles arranged in sequence and spaced apart, so that the spraying range of the two-fluid nozzles covers the length of at least one substrate along the second direction.

6. The developing device according to claim 5, characterized in that: The first liquid inlets of the plurality of two-fluid nozzles spaced apart in sequence are all connected to the first liquid collecting pipe, and the first liquid collecting pipe is connected to the developer liquid supply device; the air inlets of the plurality of two-fluid nozzles spaced apart in sequence are connected to the air supply device through the first air supply pipe.

7. The developing device according to claim 6, characterized in that: Along the conveying direction of the conveying device, the two-fluid spraying device is a plurality of devices arranged in sequence at intervals; in each of the two-fluid spraying devices, the air inlets of the plurality of two-fluid nozzles arranged in sequence at intervals are respectively connected to the air collecting pipe through the first air supply pipe, and the air collecting pipe is connected to the air supply device.

8. The developing device according to claim 7, characterized in that: The gas collecting pipe is communicated with the gas supply device through a second gas supply pipe, and a flow regulating valve and / or a gas filter is arranged on the second gas supply pipe.

9. The developing device according to claim 1, characterized in that: When a two-fluid spraying device is arranged directly below the conveying plane, along the conveying direction of the conveying device, the two-fluid spraying device is arranged in plurality at intervals in sequence, and the conveying device includes a plurality of conveying rollers arranged in sequence at intervals, and the two-fluid spraying device is located in the intervals between the conveying rollers so that the sprayed two-fluid developer can avoid the conveying rollers and reach the lower surface of the substrate.

10. The developing device according to claim 1, characterized in that: The two-fluid spraying device comprises a two-fluid nozzle and a liquid nozzle, wherein the two-fluid nozzle is used to spray the two-fluid developer, and the liquid nozzle is used to spray the developer.

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