Ultrasonic transducer and ultrasonic detector

Abstract

The utility model discloses an ultrasonic transducer and an ultrasonic detector. The ultrasonic transducer comprises excitation electrodes, a piezoelectric piece, a grounding electrode and a first packaging layer, the excitation electrodes extend in the first direction and are arranged at intervals in the second direction, each excitation electrode comprises an ultrasonic array element, a first conductive part and a first electrode contact, and the two ends of the first conductive part are connected with the ultrasonic array element and the first electrode contact respectively; the piezoelectric pieces are connected with the first electrode contacts in a one-to-one correspondence manner; the grounding electrode, the piezoelectric piece and the excitation electrode are stacked in the third direction, and the grounding electrode is electrically connected with the first electrode contacts through the piezoelectric piece; the two first packaging layers are located on the two sides of the excitation electrode and the grounding electrode in the third direction respectively so that the excitation electrode and the grounding electrode can be wrapped between the two first packaging layers, and the first packaging layers are made of flexible materials. The ultrasonic transducer can be attached to the surface of a human body, so that long-time monitoring on superficial organs and blood vessels is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of medical equipment, in particular to an ultrasonic transducer and an ultrasonic detector. Background Art

[0002] In recent years, cardiovascular and cerebrovascular diseases have attracted more and more attention from medical practitioners due to their high incidence, difficulty in treatment, high disability rate and high mortality rate. Studies have shown that chronic cardiovascular and cerebrovascular diseases such as hypertension, atherosclerosis, myocardial infarction, and cerebral infarction can be treated promptly and accurately through long-term real-time monitoring of the state of the human carotid aorta. Therefore, a device that can be attached to the skin and can achieve continuous measurement of changes in vascular status is of great significance.

[0003] In the prior art, ultrasound imaging technology is widely used in the field of vascular signal detection because it can achieve non-invasive detection. However, in the related art, since the ultrasound imaging probe is a rigid structure and has poor fit to the human body, the operator needs to hold the probe steadily and continuously to press it against the human body, which is not suitable for long-term monitoring. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes an ultrasonic transducer that can be attached to the surface of the human body by using a flexible packaging layer and a flexible electrode structure, thereby realizing long-term monitoring of superficial surface organs and blood vessels, with less restriction and impact on the patient.

[0005] The utility model also provides an ultrasonic detector with the ultrasonic transducer.

[0006] The ultrasonic transducer according to the first embodiment of the utility model comprises:

[0007] A plurality of excitation electrodes, each of which extends along a first direction, and each of which is arranged at intervals along a second direction, each of which comprises an ultrasonic array element, a first conductive portion, and a first electrode contact, and two ends of the first conductive portion are respectively connected to the ultrasonic array element and the first electrode contact;

[0008] A plurality of piezoelectric elements, each of the piezoelectric elements being connected to each of the first electrode contacts in a one-to-one correspondence;

[0009] A ground electrode, wherein the ground electrode, the piezoelectric element, and the excitation electrode are stacked along a third direction, and the ground electrode is electrically connected to each of the first electrode contacts through the piezoelectric element;

[0010] Two first packaging layers, the two first packaging layers are respectively located on both sides of the excitation electrode and the ground electrode along the third direction, so as to cover the excitation electrode and the ground electrode between the two first packaging layers, and the first packaging layers are made of flexible material.

[0011] The ultrasonic transducer according to the embodiment of the utility model has at least the following beneficial effects:

[0012] The present application adopts a flexible packaging layer and a flexible electrode structure to form a patch-type, flexible ultrasonic transducer, which can be attached to the surface of the human body to achieve long-term monitoring of superficial surface organs and blood vessels, with less constraints and impact on patients. In addition, since the ultrasonic transducer is attached to the human body, it will not compress the human blood vessels, thereby avoiding data distortion. In addition, by setting linearly arranged ultrasonic array elements, it can better adapt to the direction of blood vessels, so that the ultrasonic transducer can track a longer blood vessel length, so as to track the displacement and speed of the human blood vessel wall during pulsation, and can calculate parameters such as pulse transmission speed, thereby improving the accuracy and precision of blood vessel monitoring.

[0013] According to some embodiments of the present invention, the first conductive portion includes a first flexible structure, and the first flexible structure can be deformed along a first direction to increase or decrease the distance between the ultrasonic array element and the first electrode contact.

[0014] According to some embodiments of the present invention, each of the ultrasonic array elements forms an array element group extending along the second direction, the excitation electrode also includes two second electrode contacts, the second electrode contacts are respectively arranged at both ends of the array element group along the second direction, the ultrasonic transducer also includes a flexible circuit board, and the ultrasonic array element and the second electrode contacts are electrically connected to the flexible circuit board.

[0015] According to some embodiments of the utility model, the ground electrode also includes a second conductive portion, two third electrode contacts and two extension portions, the second conductive portion extends along the second direction for being electrically connected to each of the first electrode contacts, the extension portions are respectively used to connect the second conductive portion and the third electrode contacts, and the third electrode contacts are electrically connected to the second electrode contacts.

[0016] According to some embodiments of the utility model, the second conductive portion includes a second flexible structure, which can be deformed along a second direction to lengthen or shorten the second conductive portion, and / or the extension portion includes a third flexible structure, which can be deformed to increase or decrease the distance between the second conductive portion and the third electrode contact.

[0017] According to some embodiments of the present invention, the extension portion is extended along the first direction, and along the projection of the third direction, the extension portion is arranged in parallel with each of the excitation electrodes, and two of the extension portions are respectively located on both sides of each of the excitation electrodes.

[0018] According to some embodiments of the utility model, the ultrasonic transducer also includes two shielding layers and two second packaging layers, the first packaging layer and the second packaging layer are respectively located on both sides of the shielding layer along the third direction to cover the shielding layer between the first packaging layer and the second packaging layer, and the shielding layer and the second packaging layer are made of flexible material.

[0019] According to some embodiments of the utility model, along the third direction, one of the shielding layers and the excitation electrode are respectively bonded to two side surfaces of any one of the first packaging layers, and the grounding electrode and another of the shielding layers are respectively bonded to two side surfaces of another of the first packaging layers;

[0020] The two first packaging layers are stacked along the third direction so that the ground electrode and the excitation electrode are electrically connected through the piezoelectric element.

[0021] According to some embodiments of the present invention, edges of the first encapsulation layer and the second encapsulation layer are connected into an integral structure.

[0022] The ultrasonic detector according to the second aspect of the present invention comprises the ultrasonic transducer described in any one of the above embodiments.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0025] Figure 1 This is a schematic diagram of the structure of the excitation electrode of an embodiment of the utility model;

[0026] Figure 2 A schematic diagram of the structure of a ground electrode according to an embodiment of the utility model;

[0027] Figure 3 This is a schematic diagram of the structure in which the ground electrode is stacked on the excitation electrode according to an embodiment of the utility model;

[0028] Figure 4 It is an exploded schematic diagram of the components of each layer of the ultrasonic transducer according to the embodiment of the utility model;

[0029] Figure 5 This is an actual exploded view of the ultrasonic transducer according to an embodiment of the present utility model.

[0030] Reference numerals:

[0031] Excitation electrode 100; ultrasonic array element 110; first conductive part 120; first flexible structure 121; first electrode contact 130;

[0032] Piezoelectric element 200;

[0033] Ground electrode 300; second conductive portion 310; second flexible structure 311; third electrode contact 320; extension portion 330; third flexible structure 312;

[0034] First encapsulation layer 400; second electrode contact 450;

[0035] Shielding layer 500;

[0036] The second encapsulation layer 600 . DETAILED DESCRIPTION

[0037] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0038] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0039] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0040] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0041] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0042] In the prior art, ultrasonic imaging technology is widely used in the field of vascular signal detection because it can achieve non-invasive detection. However, in the related art, since the ultrasonic imaging probe is a rigid structure and has poor fit to the human body, the operator needs to hold the probe steadily and continuously to press it against the human body. As a result, the pressing force applied by the probe to the human body will inevitably compress the local blood vessels, thereby affecting the natural pulsation of the human blood vessels during the circulation process, resulting in partial distortion of the information collected by medical staff. In addition, for some conditions, when patients need to undergo long-term and continuous monitoring, rigid ultrasonic probes are not conducive to patients wearing them.

[0043] To solve the above problems, this application miniaturizes, integrates and makes flexible the ultrasonic transducer, and proposes a flexible and portable ultrasonic transducer that can be used for long-term continuous superficial organ imaging and arterial pulsation waveform monitoring to meet the monitoring needs of cardiovascular status.

[0044] Specifically, the ultrasonic transducer of the present application includes a plurality of excitation electrodes 100, a plurality of piezoelectric elements 200, a ground electrode 300, and two first packaging layers 400. Figures 1 to 5 As shown, each excitation electrode 100 extends along the first direction, and each excitation electrode 100 is arranged at intervals along the second direction. Figure 1 As shown, each excitation electrode 100 includes an ultrasonic array element 110, a first conductive portion 120 and a first electrode contact 130, and the two ends of the first conductive portion 120 are respectively connected to the ultrasonic array element 110 and the first electrode contact 130. The ultrasonic array element 110 of each excitation electrode 100 is located at the same end of the excitation electrode 100, so that each ultrasonic array element 110 is arranged at intervals along the second direction to form a strip-shaped array element group. Similarly, each first electrode contact 130 is also located at the same end of the excitation electrode 100, so that each first electrode contact 130 is arranged at intervals along the second direction to form a strip-shaped contact group.

[0045] like Figure 4 and Figure 5As shown, the piezoelectric element 200 is disposed between the excitation electrode 100 and the ground electrode 300, one side of each piezoelectric element 200 is electrically connected to each first electrode contact 130 in a one-to-one correspondence, and the other side of each piezoelectric element 200 is electrically connected to the ground electrode 300. The piezoelectric element 200 can be made of 1-3 type composite piezoelectric ceramics, or can be made of flexible piezoelectric materials (such as PVDF, etc.), and the material of the piezoelectric element 200 is not specifically limited here.

[0046] like Figure 2 As shown, the ground electrode 300 is linear, and the excitation electrode 100, the piezoelectric element 200, and the ground electrode 300 are sequentially stacked along the third direction, so that the ground electrode 300 abuts against each piezoelectric element 200 respectively, and is electrically connected to each first electrode contact 130 through the piezoelectric element 200. The excitation electrode 100, the piezoelectric element 200, and the ground electrode 300 constitute an ultrasonic drive circuit, which can drive the ultrasonic array element 110 to emit ultrasonic waves to detect the human body. It can be understood that the ground electrode 300 and the excitation electrode 100 have a flexible structure or are made of a flexible material, so that they can be applied to the situation where the ultrasonic transducer is deformed.

[0047] like Figure 4 and Figure 5 As shown, the two first packaging layers 400 are respectively located on both sides of the excitation electrode 100 and the ground electrode 300 along the third direction, that is, the two first packaging layers 400 are located on the relatively outer sides of the excitation electrode 100, the piezoelectric element 200, and the ground electrode 300, so that when the two first packaging layers 400 are stacked, the excitation electrode 100, the piezoelectric element 200 and the ground electrode 300 are wrapped between the two first packaging layers 400, and then the edges of the two first packaging layers 400 are connected by heat pressing or other connection treatments, so that the two first packaging layers 400 are connected into an integrated structure.

[0048] It should be noted that the first packaging layer 400 is made of a flexible material. For example, the first packaging layer 400 is mainly made of hot-melt high-elastic polymer monomer powder hydrogenated styrene-butadiene block copolymer (SEBS) and is made by a solution spin coating method. Alternatively, the first packaging layer 400 can also be polydimethylsiloxane (PDMS), polyurethane (PU) or other elastic polymers such as silicone rubber. No specific limitation is made on the material of the first packaging layer 400 herein.

[0049] It can be understood that since each excitation electrode 100 is arranged at intervals along the second direction and each excitation electrode 100 is laid on the flexible first packaging layer 400, the ultrasonic transducer is attached to the surface of the human body and bends or stretches with the movement of the human body. Since there are gaps between each excitation electrode 100, the distance between each excitation electrode 100 can be reduced or increased, thereby ensuring that the ultrasonic transducer can operate normally under various working conditions.

[0050] Compared with the rigid probe in the prior art, the present application adopts a flexible packaging layer and a flexible electrode structure to form a patch-type, flexible ultrasonic transducer, which can be attached to the surface of the human body, thereby realizing long-term monitoring of superficial surface organs and blood vessels, with less constraints and impact on the patient. In addition, since the ultrasonic transducer is attached to the human body, it will not compress the human blood vessels, thereby avoiding data distortion.

[0051] It should be noted that if Figure 2 As shown, in the embodiment of the present application, the ultrasonic array elements 110 of each excitation electrode 100 are arranged linearly along the second direction. In actual application scenarios, when the ultrasonic transducer is attached to the patient, the second direction of the ultrasonic transducer overlaps the direction of the blood vessel, that is, each ultrasonic array element 110 is arranged linearly along the direction of the blood vessel, and the spacing between adjacent ultrasonic array elements 110 is 0.1mm to 0.3mm. It can be understood that the linear arrangement of the ultrasonic array elements 110 can better adapt to the direction of the blood vessel, so that the ultrasonic transducer can track a longer blood vessel length, so as to facilitate tracking the displacement and speed of the human blood vessel wall during pulsation, and can calculate parameters such as pulse transmission speed, thereby improving the accuracy and precision of blood vessel monitoring.

[0052] In such Figure 1 In the embodiment shown, 8 ultrasonic array elements 110 are provided. In other embodiments, the number of ultrasonic array elements 110 may be 2, 3 or more. Ultrasonic transducers with different numbers of ultrasonic array elements 110 are selected according to the actual application scenario. For example, when monitoring areas with large areas and long blood vessels such as arms and legs, ultrasonic transducers with more ultrasonic array elements 110 may be used. The ultrasonic array elements 110 are connected to the drive circuit by an organic solution bonding method, so there is no need to use conductive silver glue for bonding, which improves the disadvantage of uneven bonding of conductive silver glue in the related art and further improves the performance of the ultrasonic transducer.

[0053] Based on the above, the ultrasonic transducer of the present application can quickly and accurately acquire a variety of physiological signals, the device has high resolution and stable signal amplitude, and provides huge application value in the fields of flexible biosensors, wearable devices and medical monitoring, and is of great significance to the development of future monitoring equipment.

[0054] In some embodiments, a flexible structure is disposed on the first conductive portion 120, so that the excitation electrode 100 can be deformed along the first direction. Figure 1 As shown, the first conductive part 120 includes a first flexible structure 121, and the first flexible structure 121 can be deformed along the first direction to increase or decrease the distance between the ultrasonic array element 110 and the first electrode contact 130. In the foregoing, a gap is provided between adjacent excitation electrodes 100, so that the ultrasonic transducer can be deformed along the second direction. In this embodiment, a flexible structure is further provided on the first conductive part 120, so that the ultrasonic transducer can be deformed along the first direction to adapt to the situation where the skin on the surface of the human body is stretched or bent.

[0055] The first flexible structure 121 is as follows Figure 1 As shown, it includes a plurality of bending structures, so that when the first flexible structure 121 is stretched, the curvature of the bending structure becomes smaller, the length of the first flexible structure 121 becomes longer, and the distance between the ultrasonic array element 110 and the first electrode contact 130 increases; when the first flexible structure 121 is compressed, the curvature of the bending structure becomes larger, the length of the first flexible structure 121 becomes smaller, and the distance between the ultrasonic array element 110 and the first electrode contact 130 decreases. It can be understood that, as Figure 1 The bending structure shown is semicircular, and multiple bending structures are connected end to end to form a serpentine first flexible structure 121. In other embodiments, the bending structure can also be conical, and multiple bending structures are connected end to end to form a folded line first flexible structure 121.

[0056] In some embodiments, Figure 1 As shown, each ultrasonic array element 110 forms an array element group extending along the second direction, and the ultrasonic transducer also includes two second electrode contacts 450, and the second electrode contacts 450 are respectively arranged at the two ends of the array element group along the second direction. It can be understood that the second electrode contacts 450 and each excitation electrode 100 are attached to the same first packaging layer 400. The ultrasonic transducer also includes a flexible circuit board (not shown in the figure), which is used to adjust various electrical parameters of the ultrasonic transducer and perform data processing. Since the second electrode contacts 450 and each ultrasonic array element 110 need to lead out wires and connect to the flexible circuit board, for this reason, the ultrasonic array element 110 and the second electrode contacts 450 are arranged on the same straight line, which is conducive to the arrangement of the wires. Therefore, when the flexible circuit board is arranged above the ultrasonic array element 110 and the second electrode contacts 450 along the third direction, the wires do not need to be too long to achieve electrical connection.

[0057] In such Figure 2 and Figure 3In the illustrated embodiment, the ground electrode 300 includes a second conductive portion 310, two extension portions 330 and two third electrode contacts 320. The second conductive portion 310 extends along the second direction and is used to be electrically connected to each first electrode contact 130. An extension portion 330 is provided at each end of the second conductive portion 310. One end of the extension portion 330 is connected to the second conductive portion 310, and the other end of the extension portion 330 is connected to the third electrode contact 320. The third electrode contact 320 is used to be electrically connected to the second electrode contact 450. It should be explained that the third electrode contact 320 is not connected to the piezoelectric element 200, but is directly connected to the second electrode contact 450. In the example shown in FIG. Figure 3 In the illustrated embodiment, the extension portion 330 extends along the first direction to enable the third electrode contact 320 to be connected to the second electrode contact 450 .

[0058] Furthermore, the second conductive portion 310 includes a second flexible structure 311, and the second flexible structure 311 can be deformed along the second direction so that the second conductive portion 310 can be extended or shortened. It can be understood that the second flexible structure 311 can have the same specific shape as the first flexible structure 121, for example, both are as follows: Figure 2 The semicircular bending structure shown may also be different. And / or, the extension portion 330 also includes a third flexible structure 312, and the third flexible structure 312 can be deformed to increase or decrease the distance between the second conductive portion 310 and the third electrode contact 320.

[0059] It is understandable that, since the third electrode contact 320 needs to be arranged corresponding to the second electrode contact 450, the arrangement position of the third electrode contact 320 will also change according to the different arrangement positions of the second electrode contact 450, and thus the extension direction of the extension portion 330 will also change accordingly. Figure 2 In the illustrated embodiment, the extension portion 330 extends along the first direction. In other embodiments, the extension portion 330 may also extend obliquely to the first direction. The third flexible structure 312 can deform along the extension direction of the extension portion 330 to lengthen or shorten the extension portion 330 .

[0060] In such Figure 3 In the illustrated embodiment, along the projection of the third direction, each extension portion 330 is arranged in parallel with the excitation electrode 100, and two extension portions 330 are respectively located on both sides of each excitation electrode 100. By providing such a ground electrode 300 surrounding the excitation electrode 100, when the excitation electrode 100 and the ground electrode 300 are stacked, it is possible to achieve that the second conductive portion 310 of the ground electrode 300 is conductive with each first electrode contact 130 of the excitation electrode 100, and the third electrode contact 320 is conductive with the second electrode contact 450, and avoids conductive connection between the extension portion 330 and the first conductive portion 120, so that the space planning is reasonable and the wiring arrangement is beautiful.

[0061] In some embodiments, the ultrasonic transducer further includes two shielding layers 500 and two second packaging layers 600, the first packaging layer 400 and the second packaging layer 600 are respectively located on both sides of the shielding layer 500 along the third direction, so that the shielding layer 500 is coated between the first packaging layer 400 and the second packaging layer 600, so that Figure 4 and Figure 5 As shown, the second packaging layer 600, the shielding layer 500, the first packaging layer 400, the ground electrode 300, the piezoelectric element 200, the excitation electrode 100, the first packaging layer 400, the shielding layer 500 and the second packaging layer 600 are sequentially arranged along the third direction, wherein the positions of the ground electrode 300 and the excitation electrode 100 can be interchanged. It can be understood that the shielding layer 500 and the second packaging layer 600 are both made of flexible materials, so they can also be bent or stretched.

[0062] In such Figure 4 and Figure 5 In the embodiment shown, the shielding layer 500 is made of silver nanowire solution as the main material and is made by solution spin coating. In other embodiments, it can be expanded to more types of conductive solution materials according to the application. The shielding layer 500 can shield the noise interference introduced by other instruments, is more suitable for real medical operation scenes, and improves the signal-to-noise ratio.

[0063] Furthermore, along the third direction, a shielding layer 500 and an excitation electrode 100 are respectively bonded to the two side surfaces of any first packaging layer 400, thereby forming an integrated structure similar to a double-sided board, and a grounding electrode 300 and another shielding layer 500 are respectively bonded to the two side surfaces of another first packaging layer 400, thereby also forming an integrated structure similar to a double-sided board. The two integrated structures are then stacked, and the side with the excitation electrode 100 adhered thereto is arranged opposite to the side with the ground electrode 300, so that the ground electrode 300 and the excitation electrode 100 can be electrically connected through the piezoelectric element 200.

[0064] It can be understood that the area of ​​the first packaging layer 400 and the second packaging layer 600 is larger than the area of ​​each shielding layer 500, the excitation electrode 100, the ground electrode 300, etc., so that after the various components of the ultrasonic transducer are stacked together, the edges of the first packaging layer 400 and the second packaging layer 600 are sequentially abutted, and the edges of the various first packaging layers 400 and the second packaging layers 600 are connected into an integrated structure through processes such as hot pressing, so that the various components in the ultrasonic transducer are packaged as a whole.

[0065] An embodiment of the second aspect of the present application provides an ultrasonic detector, which includes the ultrasonic transducer mentioned in any of the above embodiments.

[0066] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. An ultrasonic transducer, characterized in that: include: A plurality of excitation electrodes, each of which extends along a first direction, and each of which is arranged at intervals along a second direction, each of which comprises an ultrasonic array element, a first conductive portion, and a first electrode contact, and two ends of the first conductive portion are respectively connected to the ultrasonic array element and the first electrode contact; A plurality of piezoelectric elements, each of the piezoelectric elements being connected to each of the first electrode contacts in a one-to-one correspondence; A ground electrode, wherein the ground electrode, the piezoelectric element, and the excitation electrode are stacked along a third direction, and the ground electrode is electrically connected to each of the first electrode contacts through the piezoelectric element; Two first packaging layers, the two first packaging layers are respectively located on both sides of the excitation electrode and the ground electrode along the third direction, so as to cover the excitation electrode and the ground electrode between the two first packaging layers, and the first packaging layers are made of flexible material.

2. The ultrasonic transducer according to claim 1, characterized in that: The first conductive portion includes a first flexible structure, and the first flexible structure can be deformed along a first direction to increase or decrease the distance between the ultrasound array element and the first electrode contact.

3. The ultrasonic transducer according to claim 1, characterized in that: Each of the ultrasonic array elements forms an array element group extending along the second direction. The ultrasonic transducer also includes two second electrode contacts, which are respectively arranged at two ends of the array element group along the second direction. The ultrasonic transducer also includes a flexible circuit board, and the ultrasonic array elements and the second electrode contacts are electrically connected to the flexible circuit board.

4. The ultrasonic transducer according to claim 3, characterized in that: The ground electrode also includes a second conductive portion, two third electrode contacts and two extension portions, the second conductive portion extends along the second direction and is used to be electrically connected to each of the first electrode contacts, the extension portions are used to connect the second conductive portion and the third electrode contacts respectively, and the third electrode contacts are electrically connected to the second electrode contacts.

5. The ultrasonic transducer according to claim 4, characterized in that: The second conductive portion includes a second flexible structure, which can be deformed along a second direction to extend or shorten the second conductive portion, and / or the extension portion includes a third flexible structure, which can be deformed to increase or decrease the distance between the second conductive portion and the third electrode contact.

6. The ultrasonic transducer according to claim 4, characterized in that: The extension portion is extended along the first direction. In the projection along the third direction, the extension portion is arranged in parallel with each of the excitation electrodes, and two of the extension portions are respectively located on both sides of each of the excitation electrodes.

7. The ultrasonic transducer according to claim 1, characterized in that: The ultrasonic transducer also includes two shielding layers and two second packaging layers, the first packaging layer and the second packaging layer are respectively located on both sides of the shielding layer along the third direction so that the shielding layer is covered between the first packaging layer and the second packaging layer, and the shielding layer and the second packaging layer are made of flexible material.

8. The ultrasonic transducer according to claim 7, characterized in that: Along the third direction, one of the shielding layers and the excitation electrode are respectively bonded to two side surfaces of any one of the first packaging layers, and the grounding electrode and another of the shielding layers are respectively bonded to two side surfaces of another of the first packaging layers; The two first packaging layers are stacked along the third direction so that the ground electrode and the excitation electrode are electrically connected through the piezoelectric element.

9. The ultrasonic transducer according to claim 7, characterized in that: The edges of the first encapsulation layer and the second encapsulation layer are connected into an integral structure.

10. An ultrasonic detector, characterized in that: The ultrasonic transducer comprises the ultrasonic transducer according to any one of claims 1 to 9.

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