Air cap and gas distribution plate of polycrystalline silicon hydrogenation reactor
By designing the polycrystalline hydrogenation reactor hood with cone cap head and float ball check valve structure, the blockage problems caused by silicon powder accumulation and inverting are solved, and the uniformity of gas distribution is improved.
Patent Information
- Application Number
- CN202421776075.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-25
- Publication Date
- 2025-04-25
- Estimated Expiration
- 2034-07-25
AI Technical Summary
In the polycrystalline silicon hydrogenation reactor, there is a dead zone on the top of the hood, which leads to accumulation of silicon powder, which in turn causes silicon powder inversion and blockage of the hood hole, affecting the uniformity of gas distribution.
A hood of a polycrystalline silicon hydrogenation reactor is designed, with a cone at the upper end of the cap head to reduce dead zones, and a floating ball is installed inside the hood to form a one-way valve structure to prevent silicon powder from inverting.
It effectively reduces the dead zone of silicon powder accumulation on the cap head, prevents silicon powder from being inverted and agglomerated, avoids clogging of the hood hole, and improves the uniformity of gas distribution.
Smart Images
Figure CN222789183U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a polysilicon hydrogenation reactor, in particular to a hood and a gas distribution plate of the polysilicon hydrogenation reactor. Background Art
[0002] The polysilicon hydrogenation reactor can simultaneously convert silicon tetrachloride, a byproduct produced during the production of polysilicon, into trichlorosilane, an intermediate raw material required for the production of polysilicon, thus realizing a closed-loop circulation of materials. Its working principle is to add silicon powder into the reactor at one time, distribute the silicon powder inside the reactor, and then introduce hydrogen from the hydrogen inlet. The hydrogen passes through the electrically heated U-shaped tube bundle and then reaches the gas distributor inlet. The hydrogen is distributed from the distributor plate to the hoods on the plate, flows out from each hood, and reacts with the falling silicon powder upward. Since there is a certain horizontal area on the top of the hood, the falling silicon powder is easy to accumulate at the hood head to form a dead zone, and cannot be blown to react. When the reaction is over, the supply of hydrogen will be stopped, resulting in a change in the pressure difference between the inside and outside of the hood, and the phenomenon of silicon powder back-absorption will occur. In addition, the temperature heated by the electrically heated U-shaped tube bundle still remains at the hood on the gas distribution plate, which is easy to form agglomerates in the hood, causing the hood holes to be blocked, affecting the uniformity of gas distribution. Summary of the invention
[0003] In view of the problems existing in the prior art, the utility model proposes a hood for a polysilicon hydrogenation reactor. The upper end of the hood is a cone, which can reduce the dead zone of silicon powder accumulation on the hood. At the same time, a float installed inside the hood forms a one-way valve structure, which allows only one-way flow, thereby preventing silicon powder from being sucked back into the hood to cause agglomeration and blockage.
[0004] The technical solution adopted by the utility model is: a hood of a polysilicon hydrogenation reactor, comprising:
[0005] The hood column has a central through hole, the central through hole at least includes a first section hole and a second section hole sequentially arranged in the up and down direction, the first section hole is located above the second section hole, and the inner diameter of the first section hole is greater than the inner diameter of the second section hole;
[0006] A float is located in the first hole, and the diameter of the float is larger than the diameter of the second hole and smaller than the diameter of the first hole;
[0007] The hat head has an open lower end and a closed upper end, and is sleeved on the hood column. The side wall of the hat head is provided with a plurality of air outlet holes, and there is a gap between the hat head and the hood column;
[0008] The flange is sleeved on the hood column and fixedly connected to the hood column, and is fixed and sealed with the lower end of the hood head;
[0009] The spring has one end fixedly connected to the float ball and the other end fixedly connected to the inner wall of the upper end of the cap head. The spring is in a compressed state to press the float ball to the upper opening of the second section hole to block the second section hole.
[0010] Based on the above solution, preferably, the upper end of the cap head is a cone.
[0011] Based on the above solution, preferably, the hood column has a protruding section, and the side wall of the protruding section is in contact with the inner wall of the hood.
[0012] Based on the above solution, preferably, the surface of the float is made of elastic material.
[0013] A gas distribution plate, comprising:
[0014] The shell is in an inverted cone shape, the angle between the shell generatrix and the axis is 45 degrees, and the shell has an air inlet;
[0015] The hood is fixed on the shell, and the lower end of the hood passes through the shell from above the shell.
[0016] On the basis of the above solution, as a preferred embodiment, 6 circles of wind hoods are installed on the shell, the number of wind hoods in each circle is 90, and the distance between two adjacent circles of wind hoods is 60 mm.
[0017] Compared with the prior art, the utility model has the following beneficial effects:
[0018] The upper end of the cap head is a cone, which can reduce the dead area where silicon powder accumulates on the cap head.
[0019] The float installed inside the hood forms a one-way valve structure, which allows only one-way flow, preventing silicon powder from being sucked into the hood and causing agglomeration, leading to blockage.
[0020] The side wall of the protruding section contacts the inner wall of the hood, ensuring the connection strength. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a schematic diagram of the structure of the hood;
[0022] Figure 2 yes Figure 1 sectional view of
[0023] Figure 3 It is a three-dimensional image of the hood;
[0024] Figure 4 It is a schematic diagram of the coordination between the hood and the gas distribution plate;
[0025] Figure 5 It is a partial schematic diagram of a polysilicon hydrogenation reactor. DETAILED DESCRIPTION
[0026] The present invention will be further described below by way of embodiments, but the scope of the present invention is not limited thereto.
[0027] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.
[0028] like Figure 1-5 As shown, a hood of a polysilicon hydrogenation reactor comprises:
[0029] The hood column 1 has a central through hole 11, which is used as a gas flow channel. The central through hole at least includes a first section hole 111 and a second section hole 112 which are sequentially arranged in the up and down directions. The first section hole is located above the second section hole, and the inner diameter of the first section hole is greater than the inner diameter of the second section hole.
[0030] The float 2 is located in the first hole, and the diameter of the float is larger than the diameter of the second hole and smaller than the diameter of the first hole. The surface of the float is made of elastic material, which is easy to block the second hole.
[0031] The cap head 3 is open at the lower end and closed at the upper end, and is sleeved on the hood column. The side wall of the cap head is provided with a plurality of air outlet holes 31, and the number of the air outlet holes is 4, which are evenly distributed in the circumferential direction, and the hole diameter is 3mm, and the falling silicon powder is blown to the surroundings. There is a gap 32 between the cap head and the side wall and the upper end of the hood column, and the gap is for gas to flow out through the central through hole. The upper end of the cap head is a cone, which can reduce the accumulation of silicon powder on the cap head. The hood column is provided with a protruding section 113, and the side wall of the protruding section is in contact with the inner wall of the hood to ensure the connection strength;
[0032] Flange 4, which is sleeved on the hood column and fixedly connected to the hood column, preferably welded and fixed, and is fixed and sealed with the lower end of the hood head;
[0033] The spring 5 has one end fixedly connected to the float ball and the other end fixedly connected to the inner wall of the upper end of the cap head. The spring is in a compressed state to press the float ball to the upper opening of the second section hole to block the second section hole.
[0034] When in use, the airflow passes through the central through hole, and then flows out through the air outlet holes on the side of the cap head after passing through the interval. The gas is bent multiple times to make the airflow evenly distributed on the flow cross section. The upper end of the cap head is a cone, which can reduce the dead area of silicon powder accumulation on the cap head. At the same time, the float installed inside the hood forms a one-way valve structure, so that it can only flow in one direction, preventing silicon powder from being sucked into the hood to cause agglomeration and cause blockage.
[0035] A gas distribution plate 6, comprising:
[0036] The housing is in an inverted cone shape, the angle between the housing generatrix and the axis is 45 degrees, and the housing has an air inlet 61;
[0037] The hood 100 is fixed on the shell, and the lower end of the hood passes through the shell from the top of the shell.
[0038] Six circles of wind caps are installed on the shell, the number of wind caps in each circle is 90, and the distance between two adjacent circles of wind caps is 60 mm.
[0039] The polysilicon hydrogenation reactor comprises an outer shell 7, a gas distribution plate is fixedly installed in the outer shell, a silicon powder outlet 8 is provided at the bottom of the outer shell, the upper end of the silicon powder outlet is connected to the bottom of the gas distribution plate, a hydrogen pipeline 9 is located above the gas distribution plate, and the gas outlet of the hydrogen pipeline is connected to the gas inlet on the gas distribution plate.
[0040] When in use, hydrogen flows out from the hydrogen pipeline through the air inlet to the bottom of the shell, then flows in through the central through hole of the wind cap installed on the shell, and flows out through the partition and the air outlet.
[0041] It should be noted that the embodiments described above are only used to explain the utility model and do not constitute any limitation to the utility model. The utility model is described by reference to typical embodiments, but it should be understood that the words used therein are descriptive and explanatory words, rather than restrictive words. The utility model can be modified as specified within the scope of the claims of the utility model, and the utility model can be revised without departing from the scope and spirit of the utility model. Although the utility model described therein involves specific methods, materials and embodiments, it does not mean that the utility model is limited to the specific examples disclosed therein. On the contrary, the utility model can be extended to all other methods and applications with the same functions.
Claims
1. A hood for a polysilicon hydrogenation reactor, characterized in that: include: The hood column has a central through hole, the central through hole at least includes a first section hole and a second section hole sequentially arranged in the up and down direction, the first section hole is located above the second section hole, and the inner diameter of the first section hole is greater than the inner diameter of the second section hole; A float is located in the first hole, and the diameter of the float is larger than the diameter of the second hole and smaller than the diameter of the first hole; The hat head has an open lower end and a closed upper end, and is sleeved on the hood column. The side wall of the hat head is provided with a plurality of air outlet holes, and there is a gap between the hat head and the hood column; The flange is sleeved on the hood column and fixedly connected to the hood column, and is fixed and sealed with the lower end of the hood head; The spring has one end fixedly connected to the float ball and the other end fixedly connected to the inner wall of the upper end of the cap head. The spring is in a compressed state to press the float ball to the upper opening of the second section hole to block the second section hole.
2. The hood of the polysilicon hydrogenation reactor according to claim 1, characterized in that: The upper end of the hat is a cone.
3. The hood of the polysilicon hydrogenation reactor according to claim 1, characterized in that: The hood column is provided with a protruding section, and the side wall of the protruding section is in contact with the inner wall of the hood.
4. The hood of the polysilicon hydrogenation reactor according to claim 1, characterized in that: The surface of the float is made of elastic material.
5. A gas distribution plate, characterized in that: include: The shell is in an inverted cone shape, the angle between the shell generatrix and the axis is 45 degrees, and the shell has an air inlet; The hood according to any one of claims 1 to 4 is fixed to the shell, and the lower end of the hood passes through the shell from above the shell.
6. The gas distribution plate according to claim 5, characterized in that: Six circles of wind caps are installed on the shell, the number of wind caps in each circle is 90, and the distance between two adjacent circles of wind caps is 60 mm.