Hydraulic positioning and clamping tumbling mill

Abstract

The utility model belongs to the technical field of silicon rod machining, and particularly relates to a hydraulic positioning and clamping tumbling mill which comprises two symmetrically-arranged clamping mechanisms, each clamping mechanism comprises a hydraulic chuck, a clamping jaw is arranged at the head of each hydraulic chuck, and each clamping jaw comprises a plurality of clamping jaw fingers annularly distributed around the axis of the corresponding hydraulic chuck. The tail portion of the hydraulic chuck is arranged on the head portion of the clamping hydraulic cylinder, the clamping hydraulic cylinder is arranged in a rotating mode, the rotating axis of the clamping hydraulic cylinder coincides with the axis of the hydraulic chuck, and an output shaft of the clamping hydraulic cylinder is arranged in a through hole of the hydraulic chuck in a penetrating mode and coincides with the axis of the hydraulic chuck. A polishing mechanism is arranged on one side of the clamping mechanism, and a polishing wheel of the polishing mechanism can move in the direction perpendicular to the length direction of the silicon rod. By means of the tumbling mill, silicon rods with different diameters and lengths can be polished, positioning and clamping of the silicon rods can be achieved, the axes of the silicon rods coincide with the rotating center of the clamping mechanism, and errors generated when the polishing wheel polishes the silicon rods are avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon rod processing, and in particular relates to a hydraulic positioning and clamping roller grinding machine. Background Art

[0002] As an important semiconductor material, single crystal silicon has good thermal stability. Since it was discovered and used by people, it quickly replaced other semiconductor materials and became one of the most common and widely used semiconductor materials. In the process of single crystal silicon processing, when the molten silicon solidifies, the silicon atoms are arranged into crystal nuclei in the form of diamond lattices, and the crystal nuclei grow into grains with the same crystal plane orientation to form single crystal silicon. When producing single crystal silicon products, the melted molten silicon needs to be pulled into single crystal silicon rods, and then the single crystal silicon rods are rolled, sliced, cleaned, chamfered, ground and cleaned again to make silicon wafers. Among them, a rolling device is needed for rolling. The purpose of rolling is to use a grinding wheel to grind the single crystal silicon rods with irregular cross-sections into single crystal silicon rods with circular cross-sections, so as to facilitate subsequent processing into high-quality silicon wafers.

[0003] The existing rolling grinding device is carried out on a machine tool, that is, first clamp one end of the single crystal silicon rod with a three-jaw chuck, then make a conical hole on the other end face of the single crystal silicon rod, and then insert the cone head at the tail of the machine tool into the conical hole, so as to realize the clamping of the single crystal silicon rod, rotate the three-jaw chuck, and the three-jaw chuck drives the single crystal silicon rod to rotate. At the same time, the worker uses the grinding wheel to lean against the outer surface of the single crystal silicon rod, so as to grind it into a cylindrical single crystal silicon rod. During the rolling grinding process, the worker needs to use the grinding wheel to move along the axis of the single crystal silicon rod to roll the entire single crystal silicon rod, which increases the labor intensity of the workers and further reduces the rolling grinding efficiency. In addition, after the single crystal silicon rod is clamped, the two ends of the single crystal silicon rod are respectively positioned and fixed by the three-jaw chuck and the cone head. When grinding the rotating single crystal silicon rod, the clamped end cannot be ground, and the end containing the conical hole cannot be processed into a complete silicon wafer. After grinding, the two ends of the silicon rod need to be cut off, resulting in material waste.

[0004] In the announcement number CN217096947U, the name is a single crystal silicon rod rounding device, a trapezoidal opening is opened in the middle of the table, two support rollers are rotatably connected inside the trapezoidal opening, the upper surfaces of the two support rollers are used to place the silicon rod, the top of the L-shaped support plate on the table is fixedly connected to two hydraulic cylinders, the telescopic ends of the bottom of the two hydraulic cylinders pass through the L-shaped support plate and are fixedly connected to a rolling mechanism, and the table is respectively fixed with an electric push-pull rod and a second motor on both sides of the trapezoidal opening, the telescopic end of the electric push-pull rod is fixedly connected to a first rubber head, and the driving end of the second motor is fixedly connected to a second rubber head. When the device is in use: the silicon rod is placed between the two support rollers, and then the electric push-pull rod is started to extend, so that the first rubber head and the second rubber head are respectively in close contact with the two sides of the silicon rod, thereby positioning the silicon rod, then the second motor is started to drive the silicon rod to rotate, and then the hydraulic cylinder is controlled to drive the rolling mechanism to descend, so that the grinding roller contacts the surface of the silicon rod, and then the first motor is started to drive the grinding roller to rotate, and the silicon rod is ground.

[0005] In the above-mentioned rounding device, the shapes and spacing of the two support rollers are fixed, and the silicon rod can be limited between the support rollers. At the same time, the telescopic end of the electric push-pull rod can move in the length direction of the silicon rod and abut against the end face of the silicon rod, so as to cooperate with the second motor to fix the silicon rod. The second motor rotates and drives the silicon rod to rotate, and the rotating silicon rod is polished by the grinding roller. When processing a silicon rod with a changed diameter, after the silicon rod is placed on the support roller, the axis of the silicon rod changes in the vertical direction. If the electric push-pull rod and the second motor clamp the silicon rod and drive the silicon rod to rotate, the center of rotation will not coincide with the center of the silicon rod. After the silicon rod is polished by the grinding roller, the cross section of the silicon rod will still be irregular. Therefore, the above-mentioned rounding device can only polish silicon rods of the same diameter. If the diameter of the silicon rod is changed, the device needs to be replaced. It is necessary to prepare multiple devices according to the model of the silicon rod, which takes up space and increases the cost. Or the positions of the support rollers, the electric push-pull rods, and the second motor are adjusted to adapt to the diameter of the silicon rod, which will make the silicon rod polishing process cumbersome and reduce work efficiency.

[0006] A patent with announcement number CN108406458B and titled "A single crystal silicon wafer production system and its production process" discloses a roller grinding machine, which includes a machine body, a horizontal hydraulic slide and a longitudinal hydraulic slide arranged on the top of the machine body, a power mechanism and a horizontal oil cylinder are respectively arranged on the top surface of the horizontal hydraulic slide and at its left and right ends, the output end of the power mechanism is connected to a rotating shaft, the end of the piston rod of the horizontal oil cylinder is rotatably mounted with a sleeve, a conical head is arranged on the left end surface of the sleeve, a sleeve is sleeved on the conical head, the sleeve is coaxially arranged with the rotating shaft, the silicon rod is clamped by the sleeve and the rotating shaft, but positioning still cannot be achieved. Utility Model Content

[0007] In order to solve the technical problem that the silicon rods cannot be positioned, the utility model provides a hydraulic positioning and clamping roller grinding machine.

[0008] The purpose of the utility model is to be achieved by adopting the following technical solutions. A hydraulic positioning and clamping roller mill proposed in the utility model includes two symmetrically arranged clamping mechanisms for clamping the two ends of the silicon rod, the clamping mechanisms can move along the length direction of the silicon rod, the clamping mechanisms include a hydraulic chuck, a clamping claw is arranged at the head of the hydraulic chuck, the clamping claw includes a plurality of clamping claw fingers distributed circumferentially around the axis of the hydraulic chuck, the tail of the hydraulic chuck is arranged at the head of the clamping hydraulic cylinder, the clamping hydraulic cylinder is rotatably arranged and the rotation axis coincides with the axis of the hydraulic chuck, the output shaft of the clamping hydraulic cylinder is passed through the through hole of the hydraulic chuck and coincides with the axis of the hydraulic chuck; a grinding mechanism is arranged on one side of the clamping mechanism, and the grinding wheel of the grinding mechanism can move in a direction perpendicular to the length direction of the silicon rod.

[0009] Furthermore, the clamping hydraulic cylinder is rotatably arranged on the slide, the slide is slidably arranged on the first slide rail through a slider arranged at the bottom of the slide, the first slide rail is arranged on the base, and a thrust hydraulic cylinder for driving the slide is arranged on the base.

[0010] Furthermore, a motor is arranged on the slide, and a rotating shaft of the motor is connected to the tail of the clamping hydraulic cylinder, and the rotating shaft of the motor coincides with the axis of the clamping hydraulic cylinder.

[0011] Furthermore, a rubber head is provided at the end of the clamping hydraulic cylinder.

[0012] Furthermore, the grinding wheel is arranged on the rotating shaft of the fourth motor, the fourth motor is arranged on the fourth slide, the fourth slide is slidingly arranged on the third slide, the sliding direction is perpendicular to the length direction of the silicon rod, the third thrust hydraulic cylinder is arranged on the third slide, and the output shaft of the third thrust hydraulic cylinder is connected to the fourth slide.

[0013] Furthermore, a pump is arranged on the fourth slide, one end of the pump is connected to the cleaning liquid tank, and the other end of the pump is connected to the nozzle, and the nozzle is located above the grinding wheel.

[0014] Furthermore, the third slide is connected to the screw through a screw nut, the screw is rotated on the base and a third motor is arranged at the end of the screw, the third motor is arranged on the base, a sliding rod parallel to the screw is rotatably arranged on the base, and the sliding rod is slidably connected to the third slide.

[0015] Compared with the prior art, the utility model is advantageous in that: the roller grinder of the utility model can grind silicon rods of different diameters and lengths, and can realize the positioning and clamping of the silicon rods, so that the axis of the silicon rod coincides with the rotation center of the clamping mechanism, thereby avoiding errors caused by the grinding wheel 509 when grinding the silicon rods, and the grinding wheel 509 is adjusted according to the diameter of the silicon rod to realize the grinding of silicon rods of various diameters; the grinding wheel can move along the axial direction of the silicon rod during grinding, and can roll grind the silicon rod efficiently; the end face of the silicon rod is clamped by the rubber head to avoid clamping on the outer circumferential surface of the silicon rod, and the entire silicon rod can be grinded by the grinding wheel without causing waste of silicon rod material.

[0016] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the utility model more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of an embodiment of a hydraulic positioning and clamping roller grinding machine of the utility model;

[0018] Figure 2 for Figure 1 Another perspective of the stereogram.

[0019] [Reference Signs]

[0020] 1-first clamping mechanism, 101-first motor, 102-first thrust hydraulic cylinder, 103-first slide, 104-first hydraulic chuck, 105-first clamping jaw, 106-first clamping hydraulic cylinder, 107-first rubber head.

[0021] 2-second clamping mechanism, 201-second motor, 202-second thrust hydraulic cylinder, 203-second slide, 204-second hydraulic chuck, 205-second clamping jaw, 206-second clamping hydraulic cylinder, 207-second rubber head.

[0022] 3- Base.

[0023] 4- First slide rail.

[0024] 5-grinding mechanism, 501-screw, 502-third motor, 503-slide rod, 504-third slide table, 505-second slide rail, 506-third thrust hydraulic cylinder, 507-fourth slide table, 508-fourth motor, 509-grinding roller, 510-pump, 511-sprinkler, 512-receiving groove. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] The utility model is an embodiment of a hydraulic positioning and clamping roller grinding machine, as shown in Figure 1 , Figure 2 shown.

[0027] The roller grinder of this embodiment includes a grinding mechanism 5 and a clamping mechanism arranged on a base 3. The clamping mechanism includes two symmetrically arranged clamping mechanisms for clamping silicon rods. The two symmetrical clamping mechanisms are a first clamping mechanism 1 and a second clamping mechanism 2. The first clamping mechanism 1 and the second clamping mechanism 2 are symmetrically arranged and act together on the silicon rod, and can position the silicon rod so that the axis of the silicon rod coincides with the rotation center of the clamping mechanism. After positioning, the two end faces of the silicon rod are clamped by the clamping mechanism to fix the silicon rod, and then the silicon rod can be driven to rotate, and the grinding mechanism 5 is used to move along the axial direction of the silicon rod to grind the silicon rod at the same time.

[0028] The clamping mechanism is described by taking the first clamping mechanism 1 as an example. The first clamping mechanism 1 includes a first motor 101 , a first thrust hydraulic cylinder 102 , a first slide 103 , a first hydraulic chuck 104 , a first clamping claw 105 , a first clamping hydraulic cylinder 106 , and a first rubber head 107 .

[0029] The first thrust hydraulic cylinder 102 is fixedly arranged on the base 3, and the first slide 103 is horizontally slidably arranged on the base 3. The output shaft end of the first thrust hydraulic cylinder 102 is connected to the first slide 103. Under the thrust of the first thrust hydraulic cylinder 102, the first slide 103 slides on the base 3. In this embodiment, the first slide rail 4 is arranged on the base 3, and a slider matching the first slide rail 4 is arranged at the bottom of the first slide 103. Under the action of the first thrust hydraulic cylinder 102, the first slide 103 can slide along the first slide rail 4.

[0030] The first motor 101 is fixedly arranged on the first slide 103, and the first clamping hydraulic cylinder 106 is rotatably arranged on the first slide 103. The rotating shaft of the first motor 101 is fixed to the tail of the first clamping hydraulic cylinder 106, and the rotating axis of the first motor 101 coincides with the axis of the first clamping hydraulic cylinder 106. The first motor 101 can drive the first clamping hydraulic cylinder 106 to rotate.

[0031] The head of the first clamping hydraulic cylinder 106 is fixedly provided with a first hydraulic chuck 104, which is cylindrical, with a through hole at the center, and the axis of the first clamping hydraulic cylinder 106 coincides with the axis of the first hydraulic chuck 104. The first hydraulic chuck 104 is provided with a first clamping jaw 105, which can drive the first clamping jaw 105 to open and close to loosen or clamp an object, which is a prior art and will not be described in detail here.

[0032] A plurality of clamping fingers are distributed circumferentially on the first clamping jaw 105. In the present embodiment, a total of three clamping fingers are provided, and the three clamping fingers are distributed around the central axis of the first hydraulic chuck 104. Driven by the first hydraulic chuck 104, the three clamping fingers move synchronously toward or away from the central axis, thereby clamping or loosening the silicon rod. When the first clamping jaw 105 is used to clamp the silicon rod, the concentricity of the axis of the silicon rod with the center of the first clamping jaw 105 is ensured, and then the concentricity with the axis of the first clamping hydraulic cylinder 106 and the rotation axis of the first motor 101 is ensured, so that the axis of the silicon rod coincides with the rotation axis when the silicon rod rotates. The extension direction of the clamping fingers is parallel to the central axis of the first clamping jaw 105 and faces the second clamping mechanism 2. The three clamping fingers are always located on the same circle, and the three-point circle is realized by the three clamping fingers on the first clamping jaw 105, and the first clamping jaw 105 can clamp silicon rods of different diameters.

[0033] The output shaft of the first clamping hydraulic cylinder 106 is inserted into the through hole of the first hydraulic chuck 104, and the output shaft of the first clamping hydraulic cylinder 106 coincides with the central axis of the first clamping jaw 105. The output shaft of the first clamping hydraulic cylinder 106 extends toward the second clamping mechanism 2, and a first rubber head 107 is provided at its end, and the first rubber head 107 is in the shape of a disc. The first rubber head 107 can clamp the silicon rod without damaging the silicon rod. After positioning is achieved by the first clamping jaw 105, the position where the first rubber head 107 clamps and contacts the silicon rod is located at the center of the circle where the three clamping jaws are located, and the axis of the silicon rod coincides with the output shaft of the first clamping hydraulic cylinder 106.

[0034] The second motor 201, the second thrust hydraulic cylinder 202, the second slide 203, the second hydraulic chuck 204, the second clamping jaw 205, the second clamping hydraulic cylinder 206 and the second rubber head 207 on the second clamping mechanism 2 are symmetrically positioned with the corresponding components on the first clamping mechanism 1. For easy distinction, the components in the first clamping mechanism 1 are prefixed with "first" and the corresponding components in the second clamping mechanism 2 are prefixed with "second", but the corresponding components on both sides are essentially the same and will not be repeated here.

[0035] According to the length of the silicon rod, the distance between the first slide 103 and the second slide 203 is adjusted, and then the distance between the first clamp 105 and the first clamp 205 is adjusted, so that the two ends of the silicon rod can be placed inside the first clamp 105 and the second clamp 205 at the same time. After the first clamp 105 and the second clamp 205 clamp the silicon rod, the axis of the silicon rod coincides with the rotation center of the clamping mechanism, and then the first clamping hydraulic cylinder 106 and the second clamping hydraulic cylinder 206 push their corresponding output shafts, so that the first rubber head 107 and the second rubber head 207 are against the end surface of the silicon rod and clamp the silicon rod. In order to avoid the situation that the clamping part of the clamping jaws cannot be polished when the polishing mechanism 5 is used to polish the silicon rod, the first clamping jaw 105 and the second clamping jaw 205 are made to loosen the silicon rod. At this time, the silicon rod is fixed by the first rubber head 107 and the second rubber head 207, and the first clamping hydraulic cylinder 106 and the second clamping hydraulic cylinder 206 continue to push their output shafts outward to push the end of the silicon rod out of the inner side of the clamping jaws. Since the first rubber head 107 and the second rubber head 207 relatively clamp the silicon rod, while the first clamping hydraulic cylinder 106 and the second clamping hydraulic cylinder 206 are moving, the output shafts of the corresponding first thrust hydraulic cylinder 102 and the second thrust hydraulic cylinder 202 are retracted backward, thereby retracting the corresponding clamping jaws to make the end of the silicon rod detach from the inner side of the clamping jaws. The contraction amount of the output shaft of the first thrust hydraulic cylinder 102 is the same as the extension amount of the first clamping hydraulic cylinder 106, and the contraction amount of the output shaft of the first thrust hydraulic cylinder 202 is the same as the extension amount of the first clamping hydraulic cylinder 206, thereby ensuring that the fixed position of the silicon rod remains unchanged. The first motor 101 and the second motor 201 rotate synchronously, driving the first clamping hydraulic cylinder 106 and the second clamping hydraulic cylinder 206 to rotate synchronously, thereby driving the silicon rod to rotate. In other embodiments, in order to save costs, the first motor 101 or the second motor 201 can be eliminated, and only one motor is used to drive the silicon rod to rotate. The rotation of the silicon rod facilitates the grinding mechanism 5 located on one side of the silicon rod to perform circumferential grinding on the silicon rod.

[0036] The grinding mechanism 5 is located on one side of the clamping mechanism and can be movably arranged on the base 3, and the moving direction is parallel to the extension direction of the first slide rail 4. In this embodiment, a lead screw 501 is rotatably arranged on the base 3, and a third motor 502 is fixedly arranged at one end of the lead screw 501, and the third motor 502 is fixedly arranged on the base 3. A slide bar 503 is also fixedly arranged on the base 3, and the lead screw 501, the slide bar 503, and the first slide rail 4 are arranged in parallel. A third slide 504 is movably arranged on the lead screw 501 and the slide bar 503, and a lead screw nut threadedly connected to the lead screw 501 is arranged on the third slide 504, and the third slide 504 is slidably connected to the slide bar 503, and the third motor 502 rotates to drive the third slide 503 to move in a direction parallel to the first slide rail 4, so that the grinding mechanism 5 moves in the axial direction of the silicon rod to grind the silicon rod as a whole.

[0037] The third slide 504 is provided with a second slide rail 505 perpendicular to its moving direction, and the second slide rail 505 is slidably provided with a fourth slide 507 via a matching slider. The third slide 504 is also fixedly provided with a third thrust hydraulic cylinder 506, and the output shaft of the third thrust hydraulic cylinder 506 is fixedly connected with the fourth slide 507, and the third thrust hydraulic cylinder 506 can push the fourth slide 507 to move in a direction perpendicular to the axis of the silicon rod to adapt to the diameter of the silicon rod.

[0038] A fourth motor 508 is fixedly mounted on the fourth slide 504, and a grinding wheel 509 is mounted on the rotating shaft of the fourth motor 508 for grinding the silicon rod. According to the diameter of the silicon rod, the third thrust hydraulic cylinder 506 pushes the fourth slide 507, and then adjusts the relative position of the grinding wheel 509 and the silicon rod, so that the grinding wheel 509 contacts the silicon rod, thereby grinding the silicon rod.

[0039] A pump 510 is also provided on the fourth slide 504. One end of the pump 510 is connected to the cleaning liquid tank through a pipeline, and the other end is connected to the nozzle 511 through a pipeline. The nozzle 511 is located directly above the grinding wheel 509 and is rigidly connected to the fourth slide 504. It moves with the movement of the grinding wheel 509 to clean the dust generated after grinding. A receiving groove 512 is fixedly provided on the third slide 504. The bottom of the receiving groove 512 is slidably provided on the first slide rail 4 through a slider that is fixed by itself and slidably cooperates with the first slide rail 4. The receiving groove 512 is located below the grinding wheel and the silicon rod, and moves with the third slide 504. It can receive the cleaning liquid sprayed from the nozzle after cleaning the silicon rod and recycle it.

[0040] When the roller mill is used, the distance between the first clamping jaw 105 and the second clamping jaw 205 is adjusted according to the length of the silicon rod by the first thrust hydraulic cylinder 102 and the second thrust hydraulic cylinder 202, the silicon rod is placed between the first clamping jaw 105 and the second clamping jaw 205, and the end of the silicon rod is located inside the corresponding first clamping jaw 105 and the second clamping jaw 205, the first hydraulic chuck 104 and the second hydraulic chuck 105 are started, the corresponding first clamping jaw 105 and the second clamping jaw 205 are clamped to the end of the silicon rod, the axis of the silicon rod is coincident with the rotation center of the clamping mechanism, and then the first clamping hydraulic cylinder 106 and the second clamping hydraulic cylinder 206 are started, the first rubber head 107 and the second rubber head 207 are clamped to the silicon rod, and then the first clamping jaw 105 and the second clamping jaw 206 are started. 05 release the silicon rod, and then start the first clamping hydraulic cylinder 106, the second clamping hydraulic cylinder 206 and the first thrust hydraulic cylinder 102, the second thrust hydraulic cylinder 202 at the same time, so that the first clamping jaw 105, the second clamping jaw 205 retract, and the relative position of the first rubber head 107, the second rubber head 207 and the silicon rod remains unchanged, so that the end of the silicon rod is completely separated from the first clamping jaw 105, the second clamping jaw 205, and the first motor 101 and the second motor 201 are started to rotate the silicon rod, and then the grinding wheel 509 and the pump 510 are started, and the third thrust hydraulic cylinder 506 is started to make the grinding wheel 509 approach and contact the silicon rod to grind the silicon rod, and then the third motor 502 is started to move the grinding wheel 509 along the length direction of the silicon rod to grind the silicon rod as a whole.

[0041] The roller grinder of the utility model can grind silicon rods of different diameters and lengths, and can realize the positioning and clamping of the silicon rods, so that the axis of the silicon rod coincides with the rotation center of the clamping mechanism, thereby avoiding errors caused by the grinding wheel 509 when grinding the silicon rod, and the grinding wheel 509 is adjusted according to the diameter of the silicon rod to realize the grinding of silicon rods of various diameters; the grinding wheel can move along the axial direction of the silicon rod during grinding, and can roll grind the silicon rod efficiently; the end face of the silicon rod is clamped by the rubber head to avoid clamping on the outer circumferential surface of the silicon rod, and the entire silicon rod can be grinded by the grinding wheel without causing waste of silicon rod material.

[0042] In other embodiments of the utility model, the first rubber head 107 and the second rubber head 207 can be removed and replaced with the sleeve of the rolling mill in the patent with announcement number CN108406458B and name of a single crystal silicon wafer production system and production process thereof, or the output shafts of the first clamping hydraulic cylinder and the second clamping hydraulic cylinder can be used directly to clamp the silicon rod.

[0043] In other embodiments of the present invention, a hydraulic motor may be used to rotate the clamping hydraulic cylinder.

[0044] In other embodiments of the present invention, the thrust hydraulic cylinder can be removed from the clamping mechanism, and the clamping mechanism can be pushed manually.

[0045] In other embodiments of the present invention, the lead screw and the corresponding motor may be removed from the grinding mechanism, and the grinding mechanism may be manually pushed to move along a track device such as a slide bar in the length direction of the silicon rod.

[0046] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A hydraulic positioning and clamping roller grinding machine, characterized in that: It includes two symmetrically arranged clamping mechanisms for clamping the two ends of the silicon rod, the clamping mechanism can move along the length direction of the silicon rod, the clamping mechanism includes a hydraulic chuck, a clamping claw is arranged at the head of the hydraulic chuck, the clamping claw includes a plurality of clamping claw fingers distributed circumferentially around the axis of the hydraulic chuck, the tail of the hydraulic chuck is arranged at the head of the clamping hydraulic cylinder, the clamping hydraulic cylinder is rotatably arranged and the rotation axis coincides with the axis of the hydraulic chuck, the output shaft of the clamping hydraulic cylinder is passed through the through hole of the hydraulic chuck and coincides with the axis of the hydraulic chuck; a grinding mechanism is arranged on one side of the clamping mechanism, and the grinding wheel of the grinding mechanism can move in a direction perpendicular to the length direction of the silicon rod.

2. A hydraulic positioning and clamping roller grinding machine according to claim 1, characterized in that: The clamping hydraulic cylinder is rotatably arranged on a slide, the slide is slidably arranged on a first slide rail through a slider arranged at the bottom of the slide, the first slide rail is arranged on a base, and a thrust hydraulic cylinder for driving the slide is arranged on the base.

3. A hydraulic positioning and clamping roller grinding machine according to claim 2, characterized in that: A motor is arranged on the slide, the rotating shaft of the motor is connected to the tail of the clamping hydraulic cylinder, and the rotating shaft of the motor coincides with the axis of the clamping hydraulic cylinder.

4. A hydraulic positioning and clamping roller grinding machine according to claim 1, characterized in that: A rubber head is arranged at the end of the clamping hydraulic cylinder.

5. The hydraulic positioning and clamping roller grinding machine according to claim 1, characterized in that: The grinding wheel is arranged on the rotating shaft of the fourth motor, the fourth motor is arranged on the fourth slide, the fourth slide is slidingly arranged on the third slide, the sliding direction is perpendicular to the length direction of the silicon rod, the third thrust hydraulic cylinder is arranged on the third slide, and the output shaft of the third thrust hydraulic cylinder is connected to the fourth slide.

6. A hydraulic positioning and clamping roller grinding machine according to claim 5, characterized in that: A pump is arranged on the fourth slide, one end of the pump is connected to the cleaning liquid tank, and the other end of the pump is connected to the nozzle, and the nozzle is located above the grinding wheel.

7. A hydraulic positioning and clamping roller grinding machine according to claim 5, characterized in that: The third slide is connected to the lead screw through a lead screw nut. The lead screw is rotated on the base and a third motor is arranged at the end of the lead screw. The third motor is arranged on the base. A slide rod parallel to the lead screw is rotatably arranged on the base. The slide rod is slidably connected to the third slide.

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