Constant-temperature water supply system for machine table

Abstract

The utility model provides a constant-temperature water supply system for a machine table, and relates to the technical field of semiconductors. The machine constant-temperature water supply system comprises a cooling water tank, a first heat exchange part, ice making equipment, a heating tank and a second heat exchange part. And the cooling water tank is configured to be accommodated. And the ice making equipment is arranged corresponding to the cooling water tank and is configured to make ice into the cooling water tank so as to form an ice-water mixture with water in the cooling water tank. The first heat exchange piece is arranged in the cooling water tank and can exchange heat with an ice-water mixture, the first heat exchange piece is provided with a first water inlet and a first water outlet, and the first water inlet is used for being connected with a water source. The heating tank is configured to contain a heat exchange medium and can heat the heat exchange medium to a preset temperature. The second heat exchange part is arranged in the heating tank and can exchange heat with the heat exchange medium in the heating tank, the second heat exchange part is provided with a second water inlet and a second water outlet, the second water inlet is communicated with the first water outlet, and the second water outlet is configured to supply water to the machine table. Constant-temperature cooling water can be provided for the machine table.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a constant temperature water supply system for a machine. Background Art

[0002] Semiconductor manufacturing equipment, such as photolithography machines, etc., will generate a lot of heat during operation. In order to ensure the normal operation of the equipment and maintain stable process conditions, an effective cooling system is required to reduce the temperature.

[0003] The existing system is directly connected to the water supply pipeline of the factory, using tap water for cooling. However, due to the restrictions of season and ambient temperature on the factory water supply, the temperature of the circulating water supplied to the machine for cooling varies greatly, which cannot meet the stable operation of the machine. Utility Model Content

[0004] The utility model aims to provide a machine constant temperature water supply system, which can provide water with constant temperature to the machine, thereby meeting the cooling demand of the machine equipment.

[0005] The embodiment of the utility model is achieved as follows:

[0006] The utility model provides a constant temperature water supply system for a machine, comprising a cooling water tank, a first heat exchanger, an ice making device, a heating tank and a second heat exchanger;

[0007] A cooling water tank configured to accommodate the replacement of heat medium;

[0008] The ice-making device is disposed corresponding to the cooling water tank and is configured to make ice in the cooling water tank to form an ice-water mixture with the water in the cooling water tank;

[0009] The first heat exchange element is arranged in the cooling water tank and can exchange heat with the ice-water mixture. The first heat exchange element has a first water inlet and a first water outlet. The first water inlet is used to connect to a water source.

[0010] The heating tank is configured to accommodate a heat exchange medium and heat the heat exchange medium to a preset temperature;

[0011] The second heat exchange component is arranged in the heating tank and can exchange heat with the heat exchange medium in the heating tank. The second heat exchange component has a second water inlet and a second water outlet. The second water inlet is connected to the first water outlet, and the second water outlet is configured to supply water to the machine.

[0012] In an optional embodiment, the cooling water tank is provided with a water outlet, which is arranged near the bottom of the cooling water tank, the water inlet of the ice-making device is connected to the water outlet, and the ice outlet of the ice-making device is located above the cooling water tank.

[0013] In an optional embodiment, the cooling water tank is provided with a water circulation component;

[0014] The water circulation component can pump water from the bottom of the cooling water tank to the top of the cooling water tank.

[0015] In an optional embodiment, the water circulation assembly includes a water pump and an internal water supply pipe;

[0016] The water pump is arranged at the bottom of the cooling water tank, the inner water supply pipe is communicated with the water pump, and the inner water supply pipe is arranged in the cooling water tank and extends along the height direction of the cooling water tank.

[0017] In an optional embodiment, there are multiple inner water supply pipes, and the multiple inner water supply pipes are evenly arranged in the cooling water tank and are all connected to the water pump, and the top ends of all the inner water supply pipes are located below the preset liquid level.

[0018] In an optional embodiment, the water circulation component also includes an external circulation pipe, which is connected to the water pump and extends to the outside of the cooling water tank and toward the top of the cooling water tank, and the outlet end of the external circulation pipe extends toward the cooling water tank.

[0019] In an optional embodiment, there are multiple external circulation pipes, and the multiple external circulation pipes are correspondingly arranged outside the cooling water tank and are all connected to the water pump.

[0020] In an optional embodiment, the water outlet ends of some of the outer circulation pipes are tilted downward, and the water outlet ends of other parts of the outer circulation pipes extend horizontally into the cooling water tank.

[0021] In an optional embodiment, the first heat exchange element and the second heat exchange element are both heat exchange coils.

[0022] In an optional embodiment, the heating tank includes a tank body and a heater disposed in the tank body.

[0023] The beneficial effects of the constant temperature water supply system for a machine provided by the embodiment of the utility model include:

[0024] The present application arranges a first heat exchanger in the cooling water tank, and a second heat exchanger in the heating water tank, and an ice-making device is arranged corresponding to the cooling water tank. In this way, the ice-making device can make ice in the cooling water tank, so that an ice-water mixture is formed in the cooling water tank. In this way, the water used for cooling the machine can be heat-exchanged with the ice-water mixture after entering the first heat exchanger by means of a water bath, so that the water temperature in the first heat exchanger drops below a preset temperature, and then passes into the second heat exchanger and is heated to a preset temperature by means of a water bath in the heating tank, thereby ensuring that the temperature of the water passing into the machine is constant. Secondly, the purpose of using the ice-making device to form an ice-water mixture in the cooling tank is to strictly maintain the temperature of the ice-water mixture at around 0°C, with minimal temperature variation. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A schematic diagram of a constant temperature water supply system for a machine provided in an embodiment of the utility model;

[0027] Figure 2 A schematic diagram of the structure of a cooling water tank of a machine constant temperature water supply system provided by an embodiment of the utility model;

[0028] Figure 3 A schematic diagram of a constant temperature water supply system provided in another embodiment of the utility model.

[0029] Icons: 100-machine constant temperature water supply system; 110-cooling water tank; 130-first heat exchanger; 131-first water inlet; 133-first water outlet; 150-ice making equipment; 170-heating tank; 171-tank body; 173-heater; 190-second heat exchanger; 191-second water inlet; 193-second water outlet; 210-water circulation component; 211-water pump; 213-internal water supply pipe; 215-external circulation pipeline; 221-factory water supply pipeline; 223-valve; 225-temperature sensor. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0033] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0034] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0035] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] Example

[0037] The existing machine cooling is directly connected to the plant water supply pipeline, using tap water for cooling. However, since the plant water supply is limited by seasons and ambient temperature, the temperature of the circulating water supplied to the machine for cooling varies greatly and cannot meet the stable operation of the machine. For example, in the process design, the temperature of the cooling water is set to 22°C. For example, in winter, the temperature of the plant water supply may be a few degrees, while in summer, the temperature of the plant water supply may reach 30°. During the day, the temperature difference between morning and noon can also cause the temperature of the plant water supply to change by several degrees, thereby affecting the instability of the machine water supply temperature and affecting the process effect.

[0038] Please refer to Figure 1 This embodiment provides a machine constant water supply system, which can process factory water supply so that it reaches a constant water supply temperature to meet the needs of the machine.

[0039] Please refer to Figure 1 and Figure 2 In this embodiment, the machine constant temperature water supply system 100 includes a cooling water tank 110, a first heat exchanger 130, an ice-making device 150, a heating tank 170 and a second heat exchanger 190. The cooling water tank 110 is configured to accommodate a heat exchange medium. The ice-making device 150 is arranged corresponding to the cooling water tank 110, and is configured to make ice in the cooling water tank 110 to form an ice-water mixture with the water in the cooling water tank 110. The first heat exchanger 130 is arranged in the cooling water tank 110, and can exchange heat with the ice-water mixture. The first heat exchanger 130 has a first water inlet 131 and a first water outlet 133, and the first water inlet 131 is used to connect to a water source. The heating tank 170 is configured to accommodate a heat exchange medium and can heat the heat exchange medium to a preset temperature. The second heat exchange component 190 is disposed in the heating tank 170 and can exchange heat with the heat exchange medium in the heating tank 170. The second heat exchange component 190 has a second water inlet 191 and a second water outlet 193. The second water inlet 191 is connected to the first water outlet 133, and the second water outlet 193 is configured to supply water to the machine.

[0040] In this embodiment, a first heat exchanger 130 is arranged in the cooling water tank 110, a second heat exchanger 190 is arranged in the heating water tank, and an ice-making device 150 is arranged corresponding to the cooling water tank 110. In this way, the ice-making device 150 can make ice in the cooling water tank 110, so that an ice-water mixture is formed in the cooling water tank 110. In this way, the water used for cooling the machine can be heat-exchanged with the ice-water mixture after entering the first heat exchanger 130 by means of a water bath, so that the temperature of the water in the first heat exchanger 130 drops below a preset temperature, and then passes into the second heat exchanger 190 and is heated to a preset temperature by means of a water bath in the heating tank 170, thereby ensuring that the temperature of the water passing into the machine is constant. Secondly, the purpose of using the ice-making device 150 to form an ice-water mixture in the cooling water tank 110 is to maintain the temperature of the ice-water mixture at about 0°C with little temperature change.

[0041] It should be noted that the ice-making device 150 provided in this embodiment produces ice in the form of small particles or fragments, which are added to the cooling water tank 110, and the ice-water mixture is formed by mixing with the original water in the cooling water tank 110. Generally, a crushing device is provided at the ice outlet of the ice-making device 150, and the crushing device can break the produced ice into pieces and then send them into the cooling water tank 110.

[0042] Please refer to Figure 1 and Figure 2 In this embodiment, the first heat exchange element 130 and the second heat exchange element 190 are both heat exchange coils. The first heat exchange element 130 and the second heat exchange element 190 are configured as heat exchange coils because the heat exchange coils have a sufficiently large heat exchange area.

[0043] Secondly, the water of the first heat exchanger 130 and the second heat exchanger 190 is first fed into the bottom, gradually flows upward from the bottom, and flows out from the top. This has a better heat exchange effect. Of course, in some other embodiments of the present application, the first heat exchanger 130 and the second heat exchanger 190 can also be replaced by other heat exchange equipment, such as a finned heat exchanger.

[0044] Furthermore, the cooling water tank 110 is provided with a water outlet, which is arranged near the bottom of the cooling water tank 110 . The water inlet of the ice-making device 150 is connected to the water outlet, and the ice outlet of the ice-making device 150 is located above the cooling water tank 110 .

[0045] Since ice has a low density and generally floats on the water surface, the present embodiment uses the cooling water tank 110 to supply water to the ice making device, thereby realizing the circulation of water in the water tank, and making the temperature distribution of the water in the cooling water tank 110 more uniform. The water outlet is arranged near the bottom of the cooling water tank 110, so that the water with a slightly higher temperature at the bottom of the cooling water tank 110 can be pumped out to make ice, and the water in the water tank can be circulated up and down to achieve a constant water temperature in the cooling water tank 110.

[0046] It should be noted that the number of ice making devices 150 can be determined according to the heat exchange requirements and the ice making amount of the ice making setting. The number of ice making devices 150 can be one, two or more. When there are multiple ice making devices 150, multiple ice making devices 150 can be evenly arranged on the outer periphery of the cooling water tank 110.

[0047] In this embodiment, the cooling water tank 110 is provided with a water circulation component 210 . The water circulation component 210 can pump water from the bottom of the cooling water tank 110 to the top of the cooling water tank 110 .

[0048] In this embodiment, the water circulation component 210 is provided to circulate the water in the cooling water tank 110 to avoid ice formation, and the water in the cooling water tank 110 can be circulated up and down to make the temperature distribution of the water in the cooling water tank 110 more uniform.

[0049] Please refer to Figure 1 and Figure 2 In this embodiment, the water circulation component 210 includes a water pump 211 and an inner water supply pipe 213. The water pump 211 is disposed at the bottom of the cooling water tank 110, and the inner water supply pipe 213 is connected to the water pump 211, and the inner water supply pipe 213 is disposed in the cooling water tank 110 and extends along the height direction of the cooling water tank 110.

[0050] Specifically, there are multiple internal water supply pipes 213, and the multiple internal water supply pipes 213 are evenly arranged in the cooling water tank 110, and are all connected to the water pump 211, and the top ends of all the internal water supply pipes 213 are located below the preset liquid level.

[0051] By using multiple inner water supply pipes 213 to pump water from the bottom upward, ice cubes floating on the surface can be impacted to prevent them from agglomerating into large ice cubes. The temperature in the upper and lower directions can be balanced, and a 0° ice-water mixture layer of a certain thickness can be formed to increase the stability of the outlet water temperature.

[0052] In this embodiment, the water circulation component 210 also includes an external circulation pipe 215, which is connected to the water pump 211 and extends to the outside of the cooling water tank 110 and extends toward the top of the cooling water tank 110. The outlet end of the external circulation pipe 215 extends toward the cooling water tank 110.

[0053] Specifically, there are multiple external circulation pipes 215, which are correspondingly arranged outside the cooling water tank 110 and are all connected to the water pump 211. The water outlet ends of some external circulation pipes are arranged to be tilted downward, and the water outlet ends of other external circulation pipes extend horizontally into the cooling water tank 110.

[0054] A plurality of external circulation pipes 215 are provided, so that the water in the cooling water tank 110 can circulate and impact the flow channel in the up-down, left-right and front-back directions, thereby preventing ice from agglomerating, and making the temperature of the ice-water mixture in the cooling water tank 110 more uniform and stable.

[0055] Please refer to Figure 1 and Figure 2 In this embodiment, the cooling water tank 110 is rectangular in shape, and an external circulation pipe 215 is provided on all four sides. The heights of the external circulation pipes 215 may be the same or different. In one embodiment, two external circulation pipes 215 are provided on the left and right sides of the cooling water tank 110, one of which is high, while the other is low, the lower water outlet end is arranged horizontally, and the higher water outlet end extends obliquely downward. Two external circulation pipes 215 are provided on the front and rear sides of the cooling water tank 110, one of which is high, while the other is low, the lower water outlet end is arranged horizontally, and the higher water outlet end extends obliquely downward.

[0056] Generally, a water outlet main pipe is provided at the water outlet of the water pump 211, and both the internal water supply pipe 213 and the external circulation pipe 215 are connected to the water outlet main pipe.

[0057] In this embodiment, the heating tank 170 includes a tank body 171 and a heater 173 arranged in the tank body 171. The heater 173 is a constant power heater 173, which can control the water in the tank body 171 to maintain a preset temperature according to the temperature of the water in the tank body 171 detected by the temperature sensor 225.

[0058] Secondly, in some embodiments of the present application, the number of heating tanks 170 and second heat exchange elements 190 can be set according to the heating temperature, and can be one set or two sets to achieve segmented heating.

[0059] Please refer to Figure 1 , Figure 2 and Figure 3 In this embodiment, the machine constant temperature water supply system 100 also includes a factory water supply pipeline 221, which is respectively connected to the first inlet, the cooling water tank 110 and the heating water tank through pipelines, and each branch pipeline is provided with a valve 223.

[0060] In this embodiment, the plant water supply pipe 221 is provided with a temperature sensor 225, and the plant water supply pipe 221 is also connected to the second water inlet 191 through a pipe, and a valve 223 is provided on the pipe. When the temperature of the plant water supply pipe is higher than the preset temperature required by the machine, the plant water supply pipe 221 is connected to the first heat exchanger 130, and the temperature is first reduced and then heated, so as to deliver water of the preset temperature to the machine. When the water temperature in the plant water supply pipe 221 is lower than the required temperature of the machine, the plant water supply pipe 221 can be directly connected to the second heat exchanger 190 by controlling the valve 223, and the water can be supplied to the machine after being heated by the second heat exchanger 190.

[0061] In summary, in this embodiment, the first heat exchanger 130 is arranged in the cooling water tank 110, the second heat exchanger 190 is arranged in the heating water tank, and the ice making device 150 is arranged corresponding to the cooling water tank 110. In this way, the ice making device 150 can make ice in the cooling water tank 110, so that an ice-water mixture is formed in the cooling water tank 110. In this way, the water used for cooling the machine can be heat-exchanged with the ice-water mixture after entering the first heat exchanger 130 by means of a water bath, so that the water temperature in the first heat exchanger 130 is reduced to below a preset temperature, and then passed into the second heat exchanger 190 and heated to a preset temperature by means of water bath heating in the heating tank 170, thereby ensuring that the temperature of the water passed into the machine is constant.

[0062] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A constant temperature water supply system for a machine, characterized in that: It comprises a cooling water tank (110), a first heat exchange element (130), an ice making device (150), a heating tank (170) and a second heat exchange element (190); The cooling water tank (110) is configured to contain water; The ice-making device (150) is disposed corresponding to the cooling water tank (110) and is configured to make ice in the cooling water tank (110) to form an ice-water mixture with the water in the cooling water tank (110); The first heat exchange element (130) is arranged in the cooling water tank (110) and is capable of exchanging heat with the ice-water mixture. The first heat exchange element (130) has a first water inlet (131) and a first water outlet (133). The first water inlet (131) is used to connect to a water source. The heating tank (170) is configured to accommodate a heat exchange medium and heat the heat exchange medium to a preset temperature; The second heat exchange component (190) is arranged in the heating tank (170) and can exchange heat with the heat exchange medium in the heating tank (170). The second heat exchange component (190) has a second water inlet (191) and a second water outlet (193). The second water inlet (191) is connected to the first water outlet (133), and the second water outlet (193) is configured to supply water to the machine.

2. The machine constant temperature water supply system according to claim 1, characterized in that: The cooling water tank (110) is provided with a water outlet, and the water outlet is arranged near the bottom of the cooling water tank (110). The water inlet of the ice-making device (150) is connected to the water outlet, and the ice outlet of the ice-making device (150) is located above the cooling water tank (110).

3. The machine constant temperature water supply system according to claim 2, characterized in that: The cooling water tank (110) is provided with a water circulation component (210); The water circulation component (210) can supply water from the bottom of the cooling water tank (110) to the top of the cooling water tank (110).

4. The constant temperature water supply system for a machine according to claim 3, characterized in that: The water circulation component (210) comprises a water pump (211) and an internal water supply pipe (213); The water pump (211) is arranged at the bottom of the cooling water tank (110), the inner water supply pipe (213) is connected to the water pump (211), and the inner water supply pipe (213) is arranged in the cooling water tank (110) and extends along the height direction of the cooling water tank (110).

5. The constant temperature water supply system for a machine according to claim 4, characterized in that: There are a plurality of inner water supply pipes (213), and the plurality of inner water supply pipes (213) are evenly arranged in the cooling water tank (110), and are all connected to the water pump (211), and the top ends of all the inner water supply pipes (213) are located below a preset liquid level of the cooling water tank (110).

6. The machine constant temperature water supply system according to claim 4, characterized in that: The water circulation component (210) further comprises an external circulation pipe (215), wherein the external circulation pipe (215) is connected to the water pump (211) and extends to the outside of the cooling water tank (110) and toward the top of the cooling water tank (110), and the outlet end of the external circulation pipe (215) extends toward the inside of the cooling water tank (110).

7. The machine constant temperature water supply system according to claim 6, characterized in that: There are a plurality of external circulation pipes (215), and the plurality of external circulation pipes (215) are correspondingly arranged outside the cooling water tank (110), and are all connected to the water pump (211).

8. The machine constant temperature water supply system according to claim 7, characterized in that: The water outlet ends of a portion of the external circulation pipes (215) are arranged to be tilted downward, and the water outlet ends of another portion of the external circulation pipes extend horizontally toward the cooling water tank (110).

9. The machine constant temperature water supply system according to any one of claims 1 to 8, characterized in that: The first heat exchange element (130) and the second heat exchange element (190) are both heat exchange coils.

10. The machine constant temperature water supply system according to any one of claims 1 to 8, characterized in that: The heating tank (170) comprises a tank body (171) and a heater (173) arranged in the tank body (171).

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