Air floating main shaft system with heat dissipation function

Abstract

The utility model provides an air floating main shaft system with a heat dissipation function, which comprises a shaft core, a shaft sleeve arranged outside the shaft core, a front thrust bearing and a rear thrust bearing which are oppositely arranged at two ends of a thrust surface of the shaft core, a shaft sleeve water cooling channel and a bearing water cooling channel, the shaft sleeve water cooling channel comprises an axial water inlet section and an axial water drainage section which are arranged in the axial direction of the shaft sleeve. The bearing water cooling channel comprises a rear bearing heat dissipation section, a front bearing heat dissipation section and a bearing water drainage section which are sequentially communicated. The axial water inlet section is communicated with the rear bearing heat dissipation section, and the bearing drainage section sequentially penetrates through the front thrust bearing and the rear thrust bearing and is communicated with the axial drainage section. The cooling device has the advantages of good cooling effect, capability of ensuring safe and stable operation of a main shaft system and the like.

Description

Technical Field

[0001] The utility model relates to the field of air-floating spindle heat dissipation, in particular to an air-floating spindle system with heat dissipation function. Background Art

[0002] In the chip manufacturing process, the dicing equipment (such as cutting machines) on the integrated circuit packaging process line is a precision processing equipment that divides wafers and other products into independent chips along the cutting path. It needs to have excellent rotation accuracy, low vibration, and high speed and low temperature rise characteristics. As the core component of the dicing equipment, the stability, rigidity and repeatability of the pneumatic spindle are key components to ensure that the dicing equipment has excellent performance. The spindle of the dicing equipment adopts pneumatic hydrostatic rotary support, and the speed can reach 60,000 rpm during operation, and the spindle can run continuously for a long time. Therefore, the long-term high-speed operation of the spindle will generate a lot of heat. If this heat is not dissipated in time, the metal parts will be deformed. Slight deformation may cause equipment performance degradation for parts with ultra-high precision shape and position tolerances.

[0003] To solve the above problems, the existing spindle adopts water cooling for heat dissipation, but the existing water cooling heat dissipation structure still has problems such as uneven heat dissipation, poor heat dissipation effect and low heat dissipation efficiency. It cannot ensure that the heat of the spindle system is fully dissipated. The components are still prone to temperature rise and deformation after long-term operation, resulting in reduced spindle accuracy and even jamming, and poor equipment reliability and safety stability. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide an air-floating spindle system which has good heat dissipation effect and ensures safe and stable operation of the spindle system.

[0005] In order to solve the above technical problems, the technical solution proposed by the utility model is:

[0006] An air-floating spindle system with a heat dissipation function comprises a shaft core, a shaft sleeve arranged outside the shaft core, a front thrust bearing and a rear thrust bearing arranged at two ends of a thrust surface of the shaft core, and a shaft sleeve water-cooling channel and a bearing water-cooling channel. The shaft sleeve water-cooling channel comprises an axial water inlet section and an axial water discharge section arranged along the axial direction of the shaft sleeve, and the bearing water-cooling channel comprises a rear bearing heat dissipation section, a front bearing heat dissipation section and a bearing water discharge section which are connected in sequence; the axial water inlet section is connected with the rear bearing heat dissipation section, and the bearing water discharge section passes through the front thrust bearing and the rear thrust bearing in sequence and is connected with the axial water discharge section.

[0007] As a further improvement of the above technical solution:

[0008] The rear bearing heat dissipation section includes a rear bearing water inlet hole, a rear bearing arc groove and a rear bearing water outlet hole which are connected in sequence. The rear bearing arc groove is arranged on an end surface of the rear thrust bearing close to the shaft sleeve. The rear bearing water inlet hole is connected to the axial water inlet section, and the rear bearing water outlet hole is connected to the front bearing heat dissipation section.

[0009] The front bearing heat dissipation section includes a front bearing arc groove and a front bearing water inlet hole which are connected to each other. The front bearing arc groove is arranged on an end surface of the front thrust bearing away from the sleeve. The rear bearing arc groove is connected to the front bearing arc groove through the rear bearing water outlet hole and the front bearing water inlet hole.

[0010] The rear bearing water inlet hole and the rear bearing water outlet hole are respectively located at two ends of the rear bearing arc groove, and the front bearing water inlet hole and the bearing drainage section are respectively located at two ends of the front bearing arc groove.

[0011] A connecting sleeve in contact with the bearing end surface is provided between the front thrust bearing and the rear thrust bearing, the connecting sleeve is provided with a bearing connecting section connecting the rear bearing heat dissipation section and the front bearing heat dissipation section, and the bearing drainage section passes through the connecting sleeve.

[0012] The air-floating main shaft system also includes a mounting end cover, wherein the mounting end cover, the front thrust bearing, the connecting sleeve and the rear thrust bearing are sequentially compressed and fixed by a plurality of fastening bolts arranged along the circumference of the mounting end cover.

[0013] Sealing components are provided at the connections between the connecting sleeve and the rear thrust bearing, the connecting sleeve and the front thrust bearing, and the front thrust bearing and the mounting end cover to prevent cooling water from leaking out.

[0014] The axial water inlet section and the axial drainage section are both S-shaped heat dissipation channels, the horizontal section of the S-shaped heat dissipation channel is arranged along the axial direction of the sleeve, and the axial water inlet section and the axial drainage section are staggered along the circumferential direction of the sleeve.

[0015] The sleeve comprises a motor section sleeve and a core shaft section sleeve which are connected to each other; a core shaft locking component is provided at the core shaft section sleeve, and the S-shaped heat dissipation channel is located at the motor section sleeve in the middle section along the circumference of the sleeve to avoid the core shaft locking component.

[0016] The shaft sleeve is provided with a water inlet joint and a water discharge joint, the axial water inlet section is communicated with the water inlet joint, and the axial water discharge section is communicated with the water discharge joint.

[0017] Compared with the prior art, the advantages of the utility model are:

[0018] The utility model is provided with a shaft sleeve water cooling channel and a bearing water cooling channel. The shaft sleeve water cooling channel comprises an axial water inlet section and an axial water discharge section. The axial water inlet section and the axial water discharge section are arranged along the axial direction of the shaft sleeve to ensure that the motor section and the core shaft section at the shaft sleeve position can fully and effectively dissipate heat. The bearing water cooling channel includes a rear bearing heat dissipation section, a front bearing heat dissipation section and a bearing drainage section which are connected in sequence; the axial water inlet section is connected to the rear bearing heat dissipation section; the bearing drainage section passes through the front thrust bearing and the rear thrust bearing in sequence, and the bearing drainage section is connected to the axial drainage section, and its circulation passage layout is compact and does not need to occupy extra space; at the same time, the arrangement of the sleeve water cooling channel and the bearing water cooling channel enables the spindle system to form a cooling water circulation passage, and the cooling water passes through the rear thrust bearing and the front thrust bearing in sequence, which increases the coverage area of ​​the cooling path (including the rear thrust bearing and the front thrust bearing), ensuring that the temperature rise generated by the rear thrust bearing and the front thrust bearing can be evenly and effectively dissipated and discharged through the bearing drainage section, which effectively reduces the temperature rise effect caused by air friction when the rear thrust bearing and the front thrust bearing are running at high speed, achieves a constant temperature effect, effectively solves technical problems such as long-term operation of the spindle and loss of precision caused by spindle temperature rise, and ensures safe and stable operation of the spindle system. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be described in more detail below based on embodiments and with reference to the accompanying drawings.

[0020] Figure 1 It is a three-dimensional schematic diagram of the air-floating spindle system of the utility model.

[0021] Figure 2 It is a main sectional view of the air-floating spindle system of the utility model.

[0022] Figure 3 It is a schematic diagram of the assembly of the front thrust bearing and the rear thrust bearing of the utility model.

[0023] Figure 4 yes Figure 3 main view.

[0024] Figure 5 yes Figure 4 Cross-sectional view of section AA.

[0025] Figure 6 yes Figure 4 Cross-sectional view of the BB section.

[0026] Figure 7 It is a front view of the front thrust bearing of the utility model.

[0027] Figure 8 yes Figure 7 Cross-sectional view of CC section.

[0028] Fig. 9It is a schematic diagram of water flow circulation in the axial water inlet section of the utility model.

[0029] Fig.10 It is a schematic diagram of water flow circulation in the axial drainage section of the utility model.

[0030] The symbols in the figure represent:

[0031] 1. Shaft core; 2. Bushing; 21. Motor section bushing; 22. Mandrel section bushing; 23. Mandrel locking component; 24. Water inlet joint; 25. Drain joint; 3. Front thrust bearing; 4. Rear thrust bearing; 5. Bushing water cooling channel; 51. Axial water inlet section; 52. Axial drainage section; 6. Bearing water cooling channel; 61. Rear bearing cooling section; 611. Rear bearing water inlet hole; 612. Rear bearing arc groove; 613. Rear bearing water outlet hole; 62. Front bearing cooling section; 621. Front bearing arc groove; 622. Front bearing water inlet hole; 63. Bearing drainage section; 7. Connecting sleeve; 71. Bearing connecting section; 8. Install end cover; 81. Fastening bolts; 9. Sealing component. DETAILED DESCRIPTION

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments of the specification, but the protection scope of the present invention is not limited thereby.

[0033] Figures 1 to 8 An embodiment of an air-floating spindle system with a heat dissipation function is shown, and the air-floating spindle system includes a shaft core 1, a shaft sleeve 2, a front thrust bearing 3, a rear thrust bearing 4, a shaft sleeve water cooling channel 5, and a bearing water cooling channel 6, wherein the shaft sleeve 2 is arranged outside the shaft core 1, and the front thrust bearing 3 and the rear thrust bearing 4 are relatively arranged at both ends of the thrust surface of the shaft core 1. In this embodiment, the shaft sleeve water cooling channel 5 includes an axial water inlet section 51 and an axial water discharge section 52, and the axial water inlet section 51 and the axial water discharge section 52 are both arranged along the axial direction of the shaft sleeve 2 to ensure that the motor and the spindle at the position of the shaft sleeve 2 can fully and effectively dissipate heat.

[0034] At the same time, the bearing water cooling channel 6 includes a rear bearing heat dissipation section 61, a front bearing heat dissipation section 62 and a bearing drainage section 63 which are connected in sequence. The axial water inlet section 51 is connected to the rear bearing heat dissipation section 61; the bearing drainage section 63 passes through the front thrust bearing 3 and the rear thrust bearing 4 in sequence, and the bearing drainage section 63 is connected to the axial drainage section 52, and its circulation path layout is compact and does not need to occupy extra space. At the same time, the main shaft system forms a cooling water circulation path, and the cooling water passes through the rear thrust bearing 4 and the front thrust bearing 3 in sequence, which increases the coverage area of ​​the cooling path (including the rear thrust bearing 4 and the front thrust bearing 3), ensures that the temperature rise generated by the rear thrust bearing 4 and the front thrust bearing 3 can be evenly and effectively dissipated, and effectively discharged through the bearing drainage section 63, which effectively reduces the temperature rise effect caused by air friction when the rear thrust bearing 4 and the front thrust bearing 3 are running at high speed, achieves a constant temperature effect, effectively solves the technical problems such as the loss of precision caused by the spindle temperature rise due to long-term operation of the spindle, and ensures the safe and stable operation of the spindle system.

[0035] Furthermore, if Figures 3 to 5 As shown, the rear bearing heat dissipation section 61 includes a rear bearing water inlet hole 611, a rear bearing arc groove 612 and a rear bearing water outlet hole 613 which are connected in sequence. The rear bearing arc groove 612 is provided at one end surface of the rear thrust bearing 4 close to the shaft sleeve 2, the rear bearing water inlet hole 611 is connected with the axial water inlet section 51, and the rear bearing water outlet hole 613 is connected with the front bearing heat dissipation section 62. The rear bearing water inlet hole 611 and the rear bearing water outlet hole 613 are respectively provided at both ends of the rear thrust bearing 4 to form a cooling flow channel which flows through the rear thrust bearing 4 and connects the shaft sleeve water cooling channel 5 and the front bearing heat dissipation section 62, and the layout is compact and occupies a small space.

[0036] At the same time, the rear bearing arc groove 612 allows cooling water to flow through the circumferential area of ​​the rear thrust bearing 4, so that the cooling coverage area of ​​the rear thrust bearing 4 is large, which improves the cooling efficiency and ensures sufficient heat dissipation of the rear thrust bearing 4. In other embodiments, the setting shape of the rear bearing arc groove 612 can be set as long as it can ensure sufficient and effective heat dissipation of the rear thrust bearing 4. For example, the rear bearing arc groove 612 can also be set to a polygonal or wavy shape arranged along the circumference of the rear thrust bearing 4.

[0037] Furthermore, if Figures 6 to 8 As shown, the front bearing heat dissipation section 62 includes a front bearing arc groove 621 and a front bearing water inlet hole 622 that are interconnected. The front bearing arc groove 621 is arranged on an end surface of the front thrust bearing 3 away from the sleeve 2. The rear bearing arc groove 612 is connected to the front bearing arc groove 621 through the rear bearing water outlet hole 613 and the front bearing water inlet hole 622 to form a cooling flow channel for the rear thrust bearing 4 to enter the front thrust bearing 3. Its layout is compact and occupies little space.

[0038] At the same time, the front bearing arc groove 621 allows cooling water to flow through the circumferential area of ​​the front thrust bearing 3, so that the cooling coverage area of ​​the front thrust bearing 3 is large, the cooling efficiency is improved, and sufficient heat dissipation of the front thrust bearing 3 is ensured. In other embodiments, the setting shape of the front bearing arc groove 621 can be set as long as it can ensure sufficient and effective heat dissipation of the front thrust bearing 3. For example, the front bearing arc groove 621 can also be set to a polygonal or wavy groove shape arranged along the circumference of the front thrust bearing 3.

[0039] Preferably, if Figure 4 and Figure 7 As shown, the rear bearing water inlet hole 611 and the rear bearing water outlet hole 613 are respectively located at the two ends of the rear bearing arc groove 612, and the front bearing water inlet hole 622 and the bearing drainage section 63 are respectively located at the two ends of the front bearing arc groove 621, which further increases the coverage area of ​​the cooling water flowing through the front thrust bearing 3 and the rear thrust bearing 4, and better ensures the sufficient heat dissipation of the front thrust bearing 3 and the rear thrust bearing 4. In other embodiments, the connection positions of the rear bearing water inlet hole 611 and the rear bearing water outlet hole 613, and the front bearing water inlet hole 622 and the bearing drainage section 63 with the arc groove can be set according to actual conditions, such as being respectively set at the middle and ends of the arc groove.

[0040] like Figure 3 , Figure 5 and Figure 6 As shown, a connecting sleeve 7 is provided between the front thrust bearing 3 and the rear thrust bearing 4. The two end faces of the connecting sleeve 7 are in contact with the end faces of the front thrust bearing 3 and the rear thrust bearing 4 respectively; the connecting sleeve 7 is provided with a bearing connecting section 71, the bearing connecting section 71 connects the water outlet hole 613 of the rear bearing and the water inlet hole 622 of the front bearing, and the bearing drainage section 63 passes through the connecting sleeve 7. It simplifies the structure of the front thrust bearing 3 and the rear thrust bearing 4, and while ensuring that the cooling water is effectively connected between the front thrust bearing 3 and the rear thrust bearing 4, its structure is simple and easy to install. In other embodiments, the front thrust bearing 3 and the rear thrust bearing 4 can also be in direct contact, in which case the rear bearing heat dissipation section 61 and the front bearing heat dissipation section 62 are directly connected.

[0041] Further, the bearing connecting section 71 is a linear connecting hole, the rear bearing water outlet hole 613 and the front bearing water inlet hole 622 are L-shaped connecting holes, and the rear bearing water inlet hole 611 is a U-shaped water inlet hole; the configuration shapes of the rear bearing water outlet hole 613 and the front bearing water inlet hole 622 can be adjusted according to the positions of the rear bearing arc groove 612 and the front bearing arc groove 621, such as being S-shaped, stepped, etc. In this embodiment, the bearing drainage section 63 is a linear drainage hole, and the configuration shape of the bearing drainage section 63 can be adjusted according to actual conditions, such as being S-shaped, etc.

[0042] Furthermore, if Figure 3As shown, the air-floating spindle system further includes an installation end cover 8, and the installation end cover 8, the front thrust bearing 3, the connecting sleeve 7 and the rear thrust bearing 4 are pressed and fixed in sequence by a plurality of fastening bolts 81, and the plurality of fastening bolts 81 are arranged along the circumference of the installation end cover 8. In this embodiment, after each component is pressed and fixed by the fastening bolts 81, the front bearing arc groove 621 and the rear bearing arc groove 612 are sealed by laser welding to prevent cooling water from leaking from the arc groove and ensure the cooling effect.

[0043] Preferably, if Figure 5 and Figure 6 As shown, a sealing component 9 is provided at the connection between the connecting sleeve 7 and the rear thrust bearing 4, the connecting sleeve 7 and the front thrust bearing 3, and the front thrust bearing 3 and the mounting end cover 8. The sealing component 9 is a sealing ring. Figure 3 As shown, the water inlet end of the rear bearing water inlet hole 611 and the water outlet end of the bearing drainage section 63 are both provided with sealing sleeves, which are sealed with the end face of the shaft sleeve 2. The setting of the sealing component 9 can effectively prevent the cooling water from leaking from the cooling water circulation passage, thereby ensuring the cooling effect.

[0044] like Fig. 9 and Fig.10 As shown, the axial water inlet section 51 and the axial drainage section 52 are both S-shaped heat dissipation channels. The horizontal section of the S-shaped heat dissipation channel is arranged along the axial direction of the sleeve 2, and the axial water inlet section 51 and the axial drainage section 52 are staggered along the circumference of the sleeve 2. The setting of the S-shaped heat dissipation channel further increases the area where the cooling water fully flows through the position of the sleeve 2, ensuring sufficient and effective heat dissipation of the motor and the core shaft at the position of the sleeve 2. In other embodiments, the setting shapes of the axial water inlet section 51 and the axial drainage section 52 can also be set according to actual heat dissipation requirements, such as being set to a straight line or a Z shape.

[0045] Furthermore, the sleeve 2 includes a motor section sleeve 21 and a mandrel section sleeve 22 connected to each other; a mandrel locking component 23 is provided at the mandrel section sleeve 22. The middle section of the S-shaped heat dissipation channel along the circumference of the sleeve 2 is located at the motor section sleeve 21, which ensures that the motor section that generates more heat is fully cooled, and can effectively avoid the mandrel locking component 23, and reduce costs according to the low heat dissipation requirements of the mandrel section.

[0046] like Figure 1 As shown, the shaft sleeve 2 is provided with a water inlet joint 24 and a water outlet joint 25, the axial water inlet section 51 is connected to the water inlet joint 24, and the axial water outlet section 52 is connected to the water outlet joint 25. The connection structure is simple and easy to assemble.

[0047] Although the present invention has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An air-floating spindle system with heat dissipation function, comprising a shaft core, a shaft sleeve arranged outside the shaft core, a front thrust bearing and a rear thrust bearing arranged at two ends of the thrust surface of the shaft core, characterized in that: It also includes a sleeve water cooling channel and a bearing water cooling channel, the sleeve water cooling channel includes an axial water inlet section and an axial drainage section arranged along the axial direction of the sleeve, and the bearing water cooling channel includes a rear bearing heat dissipation section, a front bearing heat dissipation section and a bearing drainage section which are connected in sequence; the axial water inlet section is connected with the rear bearing heat dissipation section, and the bearing drainage section passes through the front thrust bearing and the rear thrust bearing in sequence and is connected with the axial drainage section.

2. The air-floating spindle system with heat dissipation function according to claim 1, characterized in that: The rear bearing heat dissipation section includes a rear bearing water inlet hole, a rear bearing arc groove and a rear bearing water outlet hole which are connected in sequence. The rear bearing arc groove is arranged on an end surface of the rear thrust bearing close to the shaft sleeve. The rear bearing water inlet hole is connected to the axial water inlet section, and the rear bearing water outlet hole is connected to the front bearing heat dissipation section.

3. The air-floating spindle system with heat dissipation function according to claim 2, characterized in that: The front bearing heat dissipation section includes a front bearing arc groove and a front bearing water inlet hole which are connected to each other. The front bearing arc groove is arranged on an end surface of the front thrust bearing away from the sleeve. The rear bearing arc groove is connected to the front bearing arc groove through the rear bearing water outlet hole and the front bearing water inlet hole.

4. The air-floating spindle system with heat dissipation function according to claim 3, characterized in that: The rear bearing water inlet hole and the rear bearing water outlet hole are respectively located at two ends of the rear bearing arc groove, and the front bearing water inlet hole and the bearing drainage section are respectively located at two ends of the front bearing arc groove.

5. The air-floating spindle system with heat dissipation function according to any one of claims 1 to 4, characterized in that: A connecting sleeve in contact with the bearing end surface is provided between the front thrust bearing and the rear thrust bearing, the connecting sleeve is provided with a bearing connecting section connecting the rear bearing heat dissipation section and the front bearing heat dissipation section, and the bearing drainage section passes through the connecting sleeve.

6. The air-floating spindle system with heat dissipation function according to claim 5, characterized in that: It also includes an installation end cover, wherein the installation end cover, the front thrust bearing, the connecting sleeve and the rear thrust bearing are compressed and fixed in sequence by a plurality of fastening bolts arranged along the circumference of the installation end cover.

7. The air-floating spindle system with heat dissipation function according to claim 6, characterized in that: Sealing components are provided at the connections between the connecting sleeve and the rear thrust bearing, the connecting sleeve and the front thrust bearing, and the front thrust bearing and the mounting end cover to prevent cooling water from leaking out.

8. The air-floating spindle system with heat dissipation function according to any one of claims 1 to 4, characterized in that: The axial water inlet section and the axial drainage section are both S-shaped heat dissipation channels, the horizontal section of the S-shaped heat dissipation channel is arranged along the axial direction of the sleeve, and the axial water inlet section and the axial drainage section are staggered along the circumferential direction of the sleeve.

9. The air-floating spindle system with heat dissipation function according to claim 8, characterized in that: The sleeve comprises a motor section sleeve and a core shaft section sleeve which are connected to each other; a core shaft locking component is provided at the core shaft section sleeve, and the S-shaped heat dissipation channel is located at the motor section sleeve in the middle section along the circumference of the sleeve to avoid the core shaft locking component.

10. The air-floating spindle system with heat dissipation function according to claim 8, characterized in that: The shaft sleeve is provided with a water inlet joint and a water discharge joint, the axial water inlet section is communicated with the water inlet joint, and the axial water discharge section is communicated with the water discharge joint.

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