Spraying system for recycling low-concentration fluorine-containing sewage and wastewater in CVD (Chemical Vapor Deposition) production

Abstract

The utility model discloses a spraying system for recycling low-concentration fluorine-containing sewage and wastewater in CVD (Chemical Vapor Deposition) production. The spraying system comprises a spraying tower, a spraying water circulating unit and a purification treatment unit, the spraying water circulating unit is communicated with the spraying tower and the purification treatment unit, and a circulating loop for circulating spraying water is arranged between the spraying water circulating unit and the spraying tower; a one-way passage for one-way circulation of spraying wastewater is arranged between the spraying water circulation unit and the purification treatment unit; the spray water circulation unit is at least used for receiving spray water from the spray tower, monitoring the pH value of the spray water contained in the spray water circulation unit and selectively conveying the spray water contained in the spray water circulation unit to the spray tower or the purification treatment unit according to the pH value of the spray water. According to the utility model, the fluorine-containing wastewater generated by the spray tower is divided into high-concentration wastewater and low-concentration wastewater according to the concentration from the perspective of water saving, and the low-concentration wastewater can be recycled, so that the use amount of flushing water is greatly reduced.

Description

Technical Field

[0001] The utility model particularly relates to a spray system for recycling low-concentration fluorine-containing wastewater in CVD production, belonging to the technical field of CVD wastewater treatment. Background Art

[0002] In the photovoltaic industry and OLED new display field, Si3N4 thin film is often used to achieve efficient water-resistant and oxygen-resistant barrier effect to avoid the life problem of reduced photoelectric efficiency caused by easy aging of optoelectronic photovoltaic / light-emitting devices.

[0003] Taking photovoltaics as an example, in the growth of Si3N4 thin films, plasma enhanced chemical vapor deposition (PECVD) is a thin film growth technology that has been proven effective in experiments. It can introduce SiH4, NH3, Ar, H2 and other gases into the surface of the single crystal silicon wafer to be grown, and use radio frequency power to realize the plasma of the gas, so as to efficiently grow a dense Si3N4 film on the substrate. The remaining gas from the reaction will be introduced into the spray tower through the gas exhaust device and burned, thereby ensuring the safety and controllability of the remaining special gases inside and outside the experimental reaction chamber, and avoiding the dangers of explosion and toxic gas release.

[0004] The difficulty is that during the film growth, extra Si3N4 films will be deposited in the PECVD chamber. The presence of these films will affect the subsequent reactions and cause contamination in the chamber. Therefore, it is necessary to promptly remove the Si3N4 in the chamber except for the device surface. This removal method should be timely, convenient, and not introduce dangerous factors. Studies have shown that NF3 special gas can be used as the F source. After plasma, NF3 can react with the redundant Si3N4 film in the chamber to form SiF4 and NH3. Both of these are gases at room temperature and can be extracted from the system and efficiently dissolved in the water of the spray tower, which can achieve an efficient cleaning effect in the chamber.

[0005] As equipment for special gas treatment in the photovoltaic industry, the spray tower has gradually become an important technical means in the industry. It not only prevents special gases from polluting the air environment, but also technically burns and decomposes special gases such as silane, N2O, NFO and NH3, which can prevent the explosion and combustion of special gases and greatly improve the safety index. Therefore, the spray tower has become an indispensable preventive measure in the photovoltaic industry and the flexible display industry.

[0006] In daily use, the spray tower is usually not shut down because it is connected to the CVD chamber, vacuum pump body, and special gas pipeline. When the special gas in the above system leaks, the spray tower in the turned-on state will quickly burn and eliminate these special gases, so it is a safety protection for the special gas pipeline system of factories / research institutes. However, the spray tower that always keeps on standby requires a lot of flushing water and electricity support, which is expensive. Utility Model Content

[0007] The main purpose of the utility model is to provide a spray system for recycling low-concentration fluorine-containing wastewater in CVD production, thereby overcoming the shortcomings of the prior art.

[0008] In order to achieve the above-mentioned utility model purpose, the technical solution adopted by the utility model includes:

[0009] The utility model provides a spray system, comprising: a spray tower, a spray water circulation unit and a purification treatment unit, the spray water circulation unit is connected with the spray tower and the purification treatment unit, a circulation loop for circulating spray water is provided between the spray water circulation unit and the spray tower, a one-way passage for one-way flow of spray waste water is provided between the spray water circulation unit and the purification treatment unit, the spray water circulation unit is at least used for receiving spray water from the spray tower, monitoring the pH value of the spray water contained in itself, and selectively conveying the spray water contained in itself to the spray tower or the purification treatment unit according to the pH value of the spray water, the purification treatment unit is at least used for purifying the spray waste water, wherein the spray waste water is spray water with a pH value less than 7.

[0010] Compared with the prior art, the advantages of the utility model include: the utility model provides a spray system, which, from the perspective of water saving, divides the fluorine-containing wastewater generated by the spray tower into high-concentration wastewater and low-concentration wastewater (i.e., spray water / maintenance water) according to the concentration, and can realize the recycling and reuse of low-concentration wastewater, thereby greatly reducing the amount of flushing water, saving a lot of water fees for scientific research institutes and enterprises, and saving a lot of production consumption for products in the photovoltaic industry / OLED industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0012] Figure 1 It is a schematic diagram of the overall structure of a spray system provided by the utility model;

[0013] Figure 2 It is a structural schematic diagram of a spray system provided by the utility model;

[0014] Figure 3 It is a partial structural schematic diagram of a spray system provided by the utility model. DETAILED DESCRIPTION

[0015] In view of the deficiencies in the prior art, the inventor of this case has proposed the technical solution of the utility model after long-term research and extensive practice. The technical solution, its implementation process and principle will be further explained as follows.

[0016] The utility model provides a spray system, comprising: a spray tower, a spray water circulation unit and a purification treatment unit, the spray water circulation unit is connected with the spray tower and the purification treatment unit, a circulation loop for circulating spray water is provided between the spray water circulation unit and the spray tower, a one-way passage for one-way flow of spray waste water is provided between the spray water circulation unit and the purification treatment unit, the spray water circulation unit is at least used for receiving spray water from the spray tower, monitoring the pH value of the spray water contained in itself, and selectively conveying the spray water contained in itself to the spray tower or the purification treatment unit according to the pH value of the spray water, the purification treatment unit is at least used for purifying the spray waste water, wherein the spray waste water is spray water with a pH value less than 7.

[0017] Furthermore, the spray water circulation unit includes at least one first water storage tank, a circulating water inlet pipe group, a circulating water outlet pipe group, a first waste pipe group and a pH monitoring mechanism. The pH monitoring mechanism is arranged in the first water storage tank and is used to monitor the pH value of the spray water in the first water storage tank. The first water storage tank is connected to the spray tower via the circulating water inlet pipe group and the circulating water outlet pipe group to form the circulation loop. The first water storage tank is connected to the purification treatment unit via the first waste pipe group to form the one-way passage.

[0018] Furthermore, the circulating water inlet pipe group includes a circulating water inlet pipeline and a circulating water inlet valve, the circulating water inlet pipeline is respectively connected to the spray tower and the first water storage tank, and the circulating water inlet valve is arranged on the circulating water inlet pipeline and can open and close the circulating water inlet pipeline;

[0019] The circulating water outlet pipe group includes a circulating water outlet pipeline and a circulating water outlet valve, the circulating water outlet pipeline is respectively connected to the spray tower and the first water storage tank, and the circulating water outlet valve is arranged on the circulating water outlet pipeline and can open and close the circulating water outlet pipeline;

[0020] The first waste pipe group includes a first waste pipe and a first waste valve. The first waste pipe is connected to the first water storage tank and the purification unit respectively. The first waste valve is arranged on the first waste pipe and can open and close the first waste pipe.

[0021] Furthermore, the circulating water inlet pipe group also includes a circulating water inlet pump, which is arranged on the circulating water inlet pipeline and is at least used to pump the spray water in the first water storage tank into the spray tower.

[0022] Furthermore, the circulating water inlet pipeline includes a main water inlet pipeline and a first water inlet branch pipeline and a second water inlet branch pipeline. The first water inlet branch pipeline and the second water inlet branch pipeline are arranged in parallel. The first water inlet branch pipeline and the second water inlet branch pipeline are respectively connected to the first water storage tank and the spray tower via the main water inlet pipeline. The circulating water inlet pump is arranged on the main water inlet pipeline, the circulating water inlet valve is arranged on the first water inlet branch pipeline, and the circulating water inlet pipe group also includes a pressure relief valve, which is arranged on the second water inlet branch pipeline and can open and close the second water inlet branch pipeline.

[0023] Furthermore, the first waste pipe group also includes a waste pump, which is arranged on the first waste pipe, and the waste pump is at least used to pump the spray waste water in the first water storage tank into the purification treatment unit.

[0024] In a more specific embodiment, the spray system also includes: a second row of waste pipes, the spray tower is connected to the purification treatment unit via the second row of waste pipes, and the spray tower, the second row of waste pipes and the purification treatment unit form a one-way passage for one-way flow of spray waste water.

[0025] Furthermore, the second waste pipe group includes a second waste pipe and a second waste valve, the second waste pipe is connected to the spray tower and the purification treatment unit respectively, and the second waste valve is arranged on the second waste pipe and can open and close the second waste pipe.

[0026] Furthermore, the purification treatment unit includes at least one second water storage tank and a purification treatment mechanism, the first water storage tank is directly connected to the second water storage tank via the first waste pipe group, the spray tower is directly connected to the second water storage tank via the first waste pipe group, and the second water storage tank is connected to the purification treatment mechanism.

[0027] In a more specific implementation manner, the spray system further includes: a water replenishment unit, which is connected to a water supply mechanism, the spray tower, and the first water storage tank respectively.

[0028] Furthermore, the water replenishment unit includes a first water replenishment pipeline, a second water replenishment pipeline, a first water replenishment valve and a second water replenishment valve, the first water replenishment pipeline is respectively connected to the water supply mechanism and the spray tower, the first water replenishment valve is arranged on the first water replenishment pipeline, and can open and close the first water replenishment pipeline, the second water replenishment pipeline is respectively connected to the water supply mechanism and the first water storage tank, the second water replenishment valve is arranged on the second water replenishment pipeline, and can open and close the second water replenishment pipeline.

[0029] Furthermore, the water replenishment unit also includes a water level monitoring mechanism, which is arranged in the first water storage tank and is at least used to monitor the water level height in the first water storage tank.

[0030] In a more specific embodiment, the spray system also includes: a control unit, which is respectively connected to the spray water circulation unit, the water replenishment unit and the water level monitoring mechanism, and is at least used to adjust the working status of the spray water circulation unit and the water replenishment unit.

[0031] The technical solution, its implementation process and principle will be further explained and illustrated in conjunction with the accompanying drawings and specific implementation cases. It should be noted that the structural composition and working process of the spray system will be specifically explained and illustrated below. Unless otherwise specified, the spray tower, controller, monitor, pump, valve, etc. involved in the utility model are all known to those skilled in the art and can be purchased commercially. The specific product structure and model are not limited or explained here.

[0032] See also Figure 1A spray system includes a spray tower 100, a maintenance tank (i.e., the aforementioned first water storage tank, the same below) 200, a wastewater tank (i.e., the aforementioned second water storage tank, the same below) 300, a purification treatment mechanism 400, a pH monitoring mechanism and a controller, the spray tower 100, the maintenance tank 200, the wastewater tank 300 and the purification treatment mechanism 400, the spray tower 100 and the maintenance tank 200 are bidirectionally connected, and a circulation loop for spray water circulation is provided between the spray tower 100 and the maintenance tank 200, the spray tower 100 and the wastewater tank 300 are unidirectionally connected, and a unidirectional passage (i.e., a first sewage discharge passage) for unidirectional circulation of spray waste water is provided between the spray tower 100 and the wastewater tank 300, the maintenance tank 200 It is unidirectionally connected to the wastewater pool 300, and a unidirectional passage (i.e., a first sewage discharge passage) is provided between the spray tower 100 and the wastewater pool 300 for unidirectional flow of spray wastewater. The wastewater pool 300 is unidirectionally connected to the purification treatment mechanism 400. The pH monitoring mechanism is arranged in the maintenance pool 200 and is used to monitor the pH value of the spray water in the maintenance pool 200. The controller is connected to the pH monitoring mechanism and is used to selectively transport the spray water in the maintenance pool 200 to the spray tower 100 or the wastewater pool 300 according to the pH value of the spray water obtained by the pH monitoring mechanism. The purification treatment mechanism 400 is at least used to purify the spray wastewater, wherein the spray wastewater is spray water with a pH value less than 7.

[0033] Specifically, the maintenance pool 200 is connected to the spray tower 100 via the circulating water inlet pipe group 510 and the circulating water outlet pipe group 520 to form a circulation loop. The maintenance pool 200 is connected to the wastewater pool 300 via the first waste pipe group 530 to form a one-way passage for waste discharge. The spray tower 100 is also connected to the wastewater pool 300 via the second waste pipe group 540 to form a one-way passage for waste discharge. It can be understood that the spray water generated by the spray tower 100 can be directly transported to the maintenance pool 200. After being detected by the pH monitoring mechanism, the spray water with a pH value above 7 will be re-transported to the spray tower as spray water for continued use until the spray waste water with a pH value less than 7 is formed. The spray waste water It will be transported from the maintenance pool 200 to the wastewater pool 300, and then enter the purification treatment mechanism 400 for purification treatment; on the other hand, the spray water generated by the spray tower 100 can also be directly transported to the wastewater pool 300, and then enter the purification treatment mechanism 400 for purification treatment; it should be noted that a pH monitoring mechanism can also be set at the outlet section of the spray water in the spray tower 100, and it can be selected whether to directly transport the spray water to the wastewater pool according to the detection result of the pH monitoring mechanism in the spray tower 100, or, when the maintenance pool 200 and / or the circulating water inlet pipe group 510 and the circulating water outlet pipe group 520 fail, the spray water will also be directly transported to the wastewater pool.

[0034] For details, please refer to Figure 1 and Figure 2The circulating water inlet pipe group 510 includes a circulating water inlet pipeline, a circulating water inlet valve 515 and a circulating water inlet pump 516. The circulating water inlet pipeline is connected to the spray tower 100 and the maintenance pool 200 respectively. The circulating water inlet valve 515 and the circulating water inlet pump 516 are arranged on the circulating water inlet pipeline. The circulating water inlet valve 515 can open and close the circulating water inlet pipeline. The circulating water inlet pump 516 is at least used to pump the spray water in the maintenance pool 200 into the spray tower 100.

[0035] More specifically, the circulating water inlet pipe group also includes a pressure relief valve 514, and the circulating water inlet pipeline includes a water inlet main pipeline 511 and a first water inlet branch pipeline 512 and a second water inlet branch pipeline 513. The first water inlet branch pipeline 512 and the second water inlet branch pipeline 513 are arranged in parallel. The first water inlet branch pipeline 512 and the second water inlet branch pipeline 513 are respectively connected to the maintenance pool 200 and the spray tower 100 through the water inlet main pipeline 511. The circulating water inlet pump 516 is arranged on the water inlet main pipeline 511, the circulating water inlet 515 valve is arranged on the first water inlet branch pipeline 512, and the pressure relief valve 514 is arranged on the second water inlet branch pipeline 513, and can open and close the second water inlet branch pipeline 513.

[0036] It should be noted that the spray tower is often shut down due to adjustments made by the staff. When it is shut down, the water path inside the spray tower is blocked, which causes the circulation loop of the spray water between the spray tower 100 and the maintenance pool 200 to be blocked. Since the circulating water inlet pump from the maintenance pool to the spray tower will continue to be powered on and drain water, "pressure build-up" will be formed in the pipeline, causing problems such as shortened pump life and pipeline bursting. By introducing a second water inlet branch pipeline and a pressure relief valve, when the spray tower is shut down and the circulating water inlet pump is still working to form high pressure in the pipeline, the pressure relief valve can return the high-pressure water to the maintenance pool, thereby avoiding problems such as damaging the pump or bursting the pipeline.

[0037] Specifically, the circulating water outlet pipe group 520 includes a circulating water outlet pipeline 521 and a circulating water outlet valve 522. The circulating water outlet pipeline 521 is connected to the spray tower 100 and the maintenance pool 200 respectively. The circulating water outlet valve 522 is arranged on the circulating water outlet pipeline 521 and can open and close the circulating water outlet pipeline 521.

[0038] Specifically, the first waste pipe group 530 includes a first waste pipe 531, a first waste valve 532 and a waste pump 533. The first waste pipe 531 is connected to the maintenance tank 200 and the wastewater tank 300 respectively. The first waste valve 532 and the waste pump 533 are arranged on the first waste pipe 531. The first waste valve 532 can open and close the first waste pipe 531. The waste pump 533 is used to pump the spray wastewater in the maintenance tank 200 into the wastewater tank 300.

[0039] Specifically, the second waste pipe group 540 includes a second waste pipe 541 and a second waste valve 542. The second waste pipe 541 is connected to the spray tower 100 and the wastewater pool 300 respectively. The second waste valve 542 is arranged on the second waste pipe 541. The second waste valve 532 can open and close the second waste pipe 541.

[0040] Specifically, the valve groups and pumps included in the circulating water inlet pipe group 510, the circulating water outlet pipe group 520, the first waste pipe group 530, and the second waste pipe group 540 can all be automatic valves and electrically controlled pumps, and the valve groups and pumps can all be connected to the controller, and the controller can be used to control the working state / working parameters. It should be noted that the controller can be a PLC controller, and the circuit structure and numerical control program used by the controller are all known to those skilled in the art and are not limited here.

[0041] See also Figure 2 and Figure 3 The spray system also includes a water replenishment unit, which is connected to the water supply mechanism, the spray tower 100, and the maintenance pool 200 respectively, and is at least used to replenish spray water into the spray tower 100 and the maintenance pool 200, and a water level monitoring mechanism 700 is also provided in the maintenance pool 200. The water level monitoring mechanism 700 is provided in the maintenance pool 200 and is at least used to monitor the water level height in the maintenance pool 200. The water level monitoring mechanism 700 is also connected to the controller, and the controller can control the working state and working parameters of the water replenishment unit according to the water level height information fed back by the water level monitoring mechanism 700.

[0042] Specifically, the water replenishment unit includes a first water replenishment pipeline 551, a second water replenishment pipeline 552, a first water replenishment valve 553 and a second water replenishment valve 554. The first water replenishment pipeline 551 is respectively connected to the water supply mechanism and the spray tower 100. The first water replenishment valve 553 is arranged on the first water replenishment pipeline 551 and can open and close the first water replenishment pipeline 551. The second water replenishment pipeline 552 is respectively connected to the water supply mechanism and the maintenance pool 200. The second water replenishment valve 554 is arranged on the second water replenishment pipeline 552 and can open and close the second water replenishment pipeline 552. More specifically, the first water replenishment valve 553 and the second water replenishment valve 554 can be solenoid valves. The first water replenishment valve 553 and the second water replenishment valve 554 are connected to the controller. The controller adjusts whether to replenish spray water to the spray tower 100 and the maintenance pool 200 by adjusting the opening and closing of the first water replenishment valve 553 and the second water replenishment valve 554.

[0043] Specifically, the fluorine-containing wastewater flowing out of the spray tower 100 usually flows directly into the wastewater pool, and after reaching a certain capacity, it enters the purification treatment mechanism for purification treatment such as fluorine reduction physical and chemical treatment. More specifically, the spray water flowing out of the spray tower contains fluorine. The utility model can normally carry out fluorine reduction physical and chemical treatment on the high-concentration fluorine-containing wastewater according to the fluorine concentration of the spray water flowing out of the spray tower, and inject the low-concentration fluorine-containing wastewater into the maintenance pool, and inject it into the spray tower through a machine pump, so that these low-concentration fluorine-containing wastewaters flow out of the spray tower as spray water again, and are injected into the maintenance pool again, thereby forming a group of low-concentration fluorine-containing wastewater circulation loops, until the fluorine content of the low-concentration fluorine-containing wastewater increases, and then the closed-loop cycle is broken, and the fluorine-containing wastewater is discharged into the wastewater pool for subsequent fluorine reduction physical and chemical treatment.

[0044] It should be noted that the concentration of fluorine-containing wastewater can be defined according to the degree of development of the production process. In the CVD process, fluorine-containing wastewater can be defined as production wastewater. The production wastewater has a high fluorine content and is acidic, that is, the pH value is less than 7. After the CVD process is stopped, low-concentration fluorine-containing wastewater can be defined as maintenance water or spray water. The maintenance water or spray water has a low fluorine content and is neutral.

[0045] The utility model provides a spray system which maintains a spray tower by setting up a cycle of maintenance pool-valve group-spray tower-maintenance pool, thereby ensuring the safe use and maintenance of special gas equipment. After the water quality in the maintenance pool deteriorates, it can be directly discharged into the wastewater pool for subsequent treatment. Therefore, the introduction of the maintenance mode will not increase the cost of subsequent use of the equipment.

[0046] The utility model provides a spray system that can save water and electricity. The fluorine-containing sewage treatment system commonly used in the industry only includes a wastewater pool and a purification treatment mechanism, which is only for high-concentration fluorine sewage. When low-concentration fluorine sewage is produced, it is mostly treated as high-concentration fluorine sewage. This causes the fluorine reduction system to waste not only a large amount of treatment reagents, but also a large amount of water and electricity during operation.

[0047] The utility model provides a spray system with convenient automatic control. In the automatic control program, a working mode can be conveniently added: maintenance mode, because when low-concentration fluorine wastewater is produced, it is the time when the CVD process is not carried out; in work, according to the operator, after a period of time after stopping the CVD process, high-concentration fluorine wastewater will no longer be produced in the spray tower, and the control personnel can adjust the production mode in the control system accordingly, and switch to maintenance mode. After starting the maintenance mode, the maintenance pool and the valve group can automatically switch the state, so that when the low-concentration fluorine wastewater flows from the spray tower to the purification treatment mechanism, it switches to the circulation between the spray tower and the maintenance pool, and the tap water replenishment valve is closed at the same time, and the switching operation is very convenient.

[0048] The utility model provides a spray system that can prevent the circulating water pump from being damaged. The spray tower is often shut down due to adjustments by the staff. When it is shut down, the water path inside the spray tower is blocked, which causes the circulation loop of the spray water between the spray tower 100 and the maintenance pool 200 to be blocked. Since the circulating water inlet pump between the maintenance pool and the spray tower will continue to be powered on and drain, "pressure buildup" will be formed in the pipeline, causing problems such as shortening the life of the machine pump and bursting the pipeline. By introducing a second water inlet branch pipeline and a pressure relief valve, when the spray tower is shut down and the circulating water inlet pump is still working to form high pressure in the pipeline, the pressure relief valve can return the high-pressure water to the maintenance pool, thereby avoiding the problem of damaging the machine pump or bursting the pipeline.

[0049] The utility model provides a maintenance pool of a spray system that can be manually emptied. After the maintenance pool has worked for a period of time, the water quality of the maintenance water inside will deteriorate. The water in the maintenance pool can be drained into a sewage pool, and the maintenance pool can be cleaned, and then clean water can be injected into the maintenance pool to continue working.

[0050] It should be understood that the above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A spray system, characterized in that: include: A spray tower, a spray water circulation unit and a purification treatment unit, wherein the spray water circulation unit is connected with the spray tower and the purification treatment unit, a circulation loop for circulating spray water is provided between the spray water circulation unit and the spray tower, a one-way passage for one-way flow of spray waste water is provided between the spray water circulation unit and the purification treatment unit, the spray water circulation unit is at least used for receiving spray water from the spray tower, monitoring the pH value of the spray water contained in itself, and selectively transporting the spray water contained in itself to the spray tower or the purification treatment unit according to the pH value of the spray water, and the purification treatment unit is at least used for purifying the spray waste water, wherein the spray waste water is spray water with a pH value less than 7.

2. The spray system according to claim 1, characterized in that: The spray water circulation unit includes at least one first water storage tank, a circulating water inlet pipe group, a circulating water outlet pipe group, a first waste pipe group and a pH monitoring mechanism. The pH monitoring mechanism is arranged in the first water storage tank and is used to monitor the pH value of the spray water in the first water storage tank. The first water storage tank is connected to the spray tower through the circulating water inlet pipe group and the circulating water outlet pipe group to form the circulation loop. The first water storage tank is connected to the purification treatment unit through the first waste pipe group to form the one-way passage.

3. The spray system according to claim 2, characterized in that: The circulating water inlet pipe group includes a circulating water inlet pipeline and a circulating water inlet valve, the circulating water inlet pipeline is connected to the spray tower and the first water storage tank respectively, and the circulating water inlet valve is arranged on the circulating water inlet pipeline and can open and close the circulating water inlet pipeline; The circulating water outlet pipe group includes a circulating water outlet pipeline and a circulating water outlet valve, the circulating water outlet pipeline is respectively connected to the spray tower and the first water storage tank, and the circulating water outlet valve is arranged on the circulating water outlet pipeline and can open and close the circulating water outlet pipeline; The first waste pipe group includes a first waste pipe and a first waste valve. The first waste pipe is connected to the first water storage tank and the purification unit respectively. The first waste valve is arranged on the first waste pipe and can open and close the first waste pipe.

4. The spray system according to claim 3, characterized in that: The circulating water inlet pipe group also includes a circulating water inlet pump, which is arranged on the circulating water inlet pipeline and is at least used to pump the spray water in the first water storage tank into the spray tower.

5. The spray system according to claim 4, characterized in that: The circulating water inlet pipeline includes a main water inlet pipeline and a first water inlet branch pipeline and a second water inlet branch pipeline. The first water inlet branch pipeline and the second water inlet branch pipeline are arranged in parallel. The first water inlet branch pipeline and the second water inlet branch pipeline are respectively connected to the first water storage tank and the spray tower through the main water inlet pipeline. The circulating water inlet pump is arranged on the main water inlet pipeline, the circulating water inlet valve is arranged on the first water inlet branch pipeline, and the circulating water inlet pipe group also includes a pressure relief valve, which is arranged on the second water inlet branch pipeline and can open and close the second water inlet branch pipeline.

6. The spray system according to claim 3, characterized in that: The first waste pipe group also includes a waste pump, which is arranged on the first waste pipe and is at least used to pump the spray waste water in the first water storage tank into the purification unit.

7. The spray system according to claim 3, characterized in that: Also includes: The second row of waste pipes, the spray tower is connected with the purification unit via the second row of waste pipes, and the spray tower, the second row of waste pipes and the purification unit form a one-way passage for one-way flow of spray waste water.

8. The spray system according to claim 7, characterized in that: The second waste pipe group includes a second waste pipe and a second waste valve. The second waste pipe is connected to the spray tower and the purification unit respectively. The second waste valve is arranged on the second waste pipe and can open and close the second waste pipe.

9. The spray system according to claim 7, characterized in that: The purification treatment unit includes at least one second water storage tank and a purification treatment mechanism. The first water storage tank is directly connected to the second water storage tank via the first waste pipe group. The spray tower is directly connected to the second water storage tank via the first waste pipe group. The second water storage tank is connected to the purification treatment mechanism.

10. The spray system according to claim 2, characterized in that: Also includes: A water replenishment unit is connected to the water supply mechanism, the spray tower and the first water storage tank respectively.

11. The spray system according to claim 10, characterized in that: The water replenishment unit includes a first water replenishment pipeline, a second water replenishment pipeline, a first water replenishment valve and a second water replenishment valve. The first water replenishment pipeline is respectively connected to the water supply mechanism and the spray tower. The first water replenishment valve is arranged on the first water replenishment pipeline and can open and close the first water replenishment pipeline. The second water replenishment pipeline is respectively connected to the water supply mechanism and the first water storage tank. The second water replenishment valve is arranged on the second water replenishment pipeline and can open and close the second water replenishment pipeline.

12. The spray system according to claim 11, characterized in that: The water replenishment unit further includes a water level monitoring mechanism, which is disposed in the first water storage tank and is at least used to monitor the water level in the first water storage tank.

13. The spray system according to claim 12, characterized in that: Also includes: A control unit, wherein the control unit is respectively connected to the spray water circulation unit, the water replenishment unit and the water level monitoring mechanism, and is at least used to adjust the working states of the spray water circulation unit and the water replenishment unit.

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