Nitrogen trifluoride electrolytic bath with low power consumption

Abstract

The utility model discloses a low-power-consumption nitrogen trifluoride electrolytic cell which comprises a cell body. A sealing cover; the apron board divides the accommodating cavity into an anode gas collecting cavity and a cathode gas collecting cavity which are alternately arranged, the diameter of the anode gas collecting cavity is 130-140mm, and the diameter of the cathode gas collecting cavity is 150-160mm; the binding posts are arranged on the sealing cover in a penetrating manner and are in one-to-one correspondence with the anode gas collecting cavities; the anode plates are fixed on the binding posts in a one-to-one manner through fixing pieces, and corners of the anode plates are of arc-shaped structures; the plurality of cathode plates and the plurality of anode plates are alternately arranged in the accommodating cavity, the cathode plates and the cathode gas collecting cavities are arranged in a one-to-one manner, and the distance between each cathode plate and the adjacent anode plate is 135-145 mm. The anode plate with the arc-shaped corners is adopted, so that the phenomenon of electric field concentration is reduced, and the occurrence of partial discharge and invalid branch current is reduced. The distance between the cathode plate and the anode plate and the size parameters of the anode and cathode gas collecting cavities are comprehensively considered and optimized, the reaction rate is increased, and the energy consumption is further reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of electrolytic cell equipment, in particular to a low-power-consumption nitrogen trifluoride electrolytic cell. Background Art

[0002] Nitrogen trifluoride is widely used in the electronics industry in circuit board etching, LCD etching and cleaning, chip manufacturing, high-energy lasers and other fields. It is favored for its excellent etching rate, selectivity and no residual substances. As a key equipment for the preparation of nitrogen trifluoride, the performance of the nitrogen trifluoride electrolytic cell directly affects the product quality, yield and power consumption of the preparation process.

[0003] Traditional electrolyzers usually use rectangular nickel plates as anode plates, but this design has some problems. Electric field concentration often occurs at the corners of the rectangular nickel plates, which are called discharge heights. The electric field strength at these discharge heights is large, and when ions in the electrolyte approach these areas, local discharge is likely to occur. These discharges cause local ionization of the electrolyte, forming additional ions, which in turn generate ineffective branch currents. These branch currents do not participate in the expected electrochemical reactions, which can lead to a decrease in the electrical efficiency of the electrolyzer, an increase in energy loss, and may even affect the uniformity and stability of the electrolysis process.

[0004] In addition, the spacing between the cathode plate and the anode plate directly affects the electric field distribution and the efficiency of the electrolysis reaction. A smaller spacing can enhance the electric field strength and increase the reaction rate, but it also increases energy consumption and operational risks. A larger spacing can improve safety and equipment stability, but may reduce the electric field efficiency. The size of the gas collection chamber also has an important influence on the uniformity and resistance of gas flow. A larger cavity diameter can reduce resistance and improve collection efficiency, but requires more space and equipment costs. A smaller cavity diameter may cause uneven gas flow or increase resistance, affecting gas collection effects and electrolysis efficiency.

[0005] In order to achieve the goal of reducing costs and improving efficiency, it is necessary to comprehensively consider and optimize parameters such as the distance between the cathode plate and the anode plate, the size of the gas collection chamber, etc. The current electrolyzer design fails to effectively achieve these goals, especially in controlling the discharge height, optimizing the electric field distribution, and improving the gas collection efficiency. Utility Model Content

[0006] The utility model aims to provide a low-power consumption nitrogen trifluoride electrolytic cell to solve the problems in the prior art that the design of the nitrogen trifluoride electrolytic cell does not comprehensively consider and optimize the parameters such as the distance between the cathode plate and the anode plate, the size of the gas collection chamber, and the high discharge at the corners of the anode plate, which easily generates invalid branch current and leads to high power consumption.

[0007] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0008] A low power consumption nitrogen trifluoride electrolytic cell, comprising:

[0009] A tank body, used for containing electrolyte, comprising a containing cavity and a top opening;

[0010] A sealing cover, used for closing the top opening;

[0011] A skirt plate is arranged in the accommodating cavity, and is used to separate the accommodating cavity into an anode gas collecting cavity and a cathode gas collecting cavity which are arranged alternately, wherein the diameter D1 of the anode gas collecting cavity is 130 mm to 140 mm, and the diameter D2 of the cathode gas collecting cavity is 150 mm to 160 mm;

[0012] A plurality of terminals, used for electrically connecting to the positive electrode of an external power source, the terminals being arranged on the sealing cover and arranged one-to-one with the anode gas collecting chamber;

[0013] A plurality of anode plates are fixed one-to-one on the terminal posts through fixing members, and the corners of the anode plates are in an arc-shaped structure;

[0014] A plurality of cathode plates are alternately arranged with a plurality of anode plates in the accommodating cavity. The cathode plates are electrically connected to the negative pole of the external power source and are arranged one-to-one with the cathode gas collecting cavity. The spacing L1 between the cathode plates and adjacent anode plates is 135 mm to 145 mm.

[0015] In some embodiments, the anode plate includes a reaction portion and two mounting portions spaced apart at the top of the reaction portion, the mounting portions are provided with mounting holes for mounting the fixing members, and the mounting portions are located in the corresponding anode gas collecting chamber.

[0016] In some embodiments, in the depth direction of the tank body, at least a portion of the orthographic projection of the first diffusion region of the anode gas generated on the anode plate falls within the orthographic projection of the corresponding anode gas collecting chamber;

[0017] At least a portion of the orthographic projection of the second diffusion region of the cathode gas generated on the cathode plate falls within the orthographic projection of the corresponding cathode gas collecting cavity.

[0018] In some embodiments, a cooling coil is further included, and the cooling coil is longitudinally arranged in an S shape in the accommodating cavity.

[0019] In some embodiments, the cooling coil is located in the middle of the accommodating cavity, and a plurality of the anode plates and a plurality of the cathode plates are symmetrically arranged on both sides of the cooling coil.

[0020] In some embodiments, two cathode gas collecting chambers adjacent to the cooling coil, or two adjacent anode gas collecting chambers partially overlap and communicate with each other to form a cross gas collecting portion, and part of the cooling coil is located in the cross gas collecting portion.

[0021] In some embodiments, the diameter D3 of the cross gas collection portion is 215 mm.

[0022] In some embodiments, the outer surface of the cooling coil is covered with a neoprene layer.

[0023] In some embodiments, the diameter D1 of the anode gas collecting chamber is 135 mm, the diameter D2 of the cathode gas collecting chamber is 155 mm, and the spacing L1 between the cathode plate and the adjacent anode plate is 140 mm.

[0024] In some embodiments, the electrolyte is composed of hydrogen fluoride and ammonia in a weight ratio of 2.7 to 3.0:1.

[0025] Due to the application of the above technical solution, the beneficial effects of the present application compared with the prior art are:

[0026] The present application adopts an anode plate design with arc-shaped corners, which reduces the electric field concentration phenomenon, thereby reducing the occurrence of local discharge and invalid branch current. This design improvement helps to improve the electrical efficiency and energy utilization of the electrolytic cell and reduce energy loss.

[0027] At the same time, the spacing between the cathode plate and the anode plate, and the size parameters of the anode gas collection chamber and the cathode gas collection chamber are comprehensively considered and optimized. By precisely controlling the spacing between the anode plate and the cathode plate within the range of 135 to 145 mm, the efficiency and stability of the electric field distribution are balanced. While increasing the reaction rate, energy consumption and operational risks are minimized. By alternating the anode gas collection chamber and the cathode gas collection chamber, and setting the diameter D1 of the anode gas collection chamber to 130 to 140 mm, and the diameter D2 of the cathode gas collection chamber to 150 to 160 mm, the gas flow uniformity and collection efficiency are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1This is a schematic structural diagram of a low power consumption nitrogen trifluoride electrolytic cell in one embodiment of the utility model;

[0030] Figure 2 This is a schematic structural diagram of an anode plate in one embodiment of the utility model;

[0031] Figure 3 It is a schematic structural diagram of an anode plate in another embodiment of the present invention.

[0032] Description of reference numerals:

[0033] 1-tank body; 2-sealing cover; 3-skirt plate; 4-terminal; 5-anode plate; 51-reaction part; 52-installation part; 6-cathode plate; 7-anode gas collecting chamber; 8-cathode gas collecting chamber; 9-fixing part; 10-accommodating chamber; 20-arc structure; 30-first diffusion area; 40-second diffusion area; 50-cooling coil. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0035] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0036] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0037] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0038] In addition, the terms "installed", "set", "provided with", "connected", "connected", and "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0039] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0040] See also Figures 1 to 3 The low-power consumption nitrogen trifluoride electrolyzer of one embodiment of the present application includes a cell body 1 for accommodating electrolyte, a sealing cover 2 for closing the top opening of the cell body 1, a skirt plate 3 arranged in a receiving cavity 10 of the cell body 1, a plurality of terminals 4 for electrically connecting to the positive electrode of an external power source, a plurality of anode plates 5 and a plurality of cathode plates 6. The receiving cavity 10 is used to accommodate electrolyte. In some embodiments, the electrolyte is composed of hydrogen fluoride and ammonia in a weight ratio of 2.7 to 3.0:1.

[0041] In some embodiments, the inner wall of the cell body 1 and the inner surface of the sealing cover 2 are coated with a PFA (polytetrafluoroethylene copolymer) coating. The PFA coating can improve the corrosion resistance and wear resistance of the equipment, thereby extending the service life of the electrolytic cell, and reducing the adhesion of electrolytic residues, which helps to maintain the cleanliness and stability of the electrolyte.

[0042] The skirt plate 3 is used to separate the accommodating chamber 10 into an anode gas collecting chamber 7 and a cathode gas collecting chamber 8 which are arranged alternately. The diameter of the anode gas collecting chamber 7 is 130 mm to 140 mm, and the diameter of the cathode gas collecting chamber 8 is 150 mm to 160 mm.

[0043] The terminal 4 is inserted into the sealing cover 2 and arranged one-to-one with the anode gas collecting chamber 7. It is a conventional structure and will not be described in detail here.

[0044] A plurality of anode plates 5 are fixed one-to-one on the terminal 4 by means of a fixing member 9, and the corners of the anode plates 5 are arc-shaped structures 20. The corners of the anode plates 5 are arranged in an arc-shaped structure 20, which reduces the electric field concentration phenomenon, thereby reducing the occurrence of partial discharge and invalid branch current. The fixing member 9 is specifically a bolt.

[0045] In detail, the anode plate 5 includes a reaction portion 51, two mounting portions 52 spaced apart at the top of the reaction portion 51, the mounting portions 52 are provided with mounting holes for mounting the fixing member 9, and the mounting portions 52 are located in the corresponding anode gas collecting chamber 7. By setting the anode plate 5 in the above structure, the material usage of the anode plate 5 can be reduced, thereby reducing the cost.

[0046] In some embodiments, the shape of the anode plate 5 is as follows: Figure 2 shown.

[0047] In other embodiments, the shape of the anode plate 5 is as follows: Figure 3 shown.

[0048] It is worth noting that the anode plate 5 can be integrally cast by a mold, or the anode plate 5 can be formed by cutting a rectangular plate. The anode plate 5 is made of nickel.

[0049] A plurality of cathode plates 6 and a plurality of anode plates 5 are alternately arranged in the accommodating chamber 10. The cathode plates 6 are electrically connected to the negative pole of the external power source and are arranged one-to-one with the cathode gas collecting chamber 8. The spacing between the cathode plates 6 and the adjacent anode plates 5 is 135 mm to 145 mm.

[0050] The cathode plate 6 can be connected to the negative electrode of the external power supply through the terminal 4, and can also be connected to the negative electrode of the external power supply through the tank body 1. This is a conventional setting and the present application does not make any specific limitation on this.

[0051] In some preferred embodiments, the diameter of the anode gas collecting chamber 7 is 135 mm, the diameter of the cathode gas collecting chamber 8 is 155 mm, and the spacing between the cathode plate 6 and the adjacent anode plate 5 is 140 mm.

[0052] In the depth direction of the tank body 1, at least part of the orthographic projection of the first diffusion region 30 of the anode gas generated on the anode plate 5 falls into the orthographic projection of the corresponding anode gas collection chamber 7; at least part of the orthographic projection of the second diffusion region 40 of the cathode gas generated on the cathode plate 6 falls into the orthographic projection of the corresponding cathode gas collection chamber 8. This avoids the loss and waste of gas and improves the efficiency and comprehensiveness of gas collection.

[0053] In some embodiments, a cooling coil 50 is further included, and the cooling coil 50 is longitudinally arranged in an S shape in the accommodating cavity 10. In detail, the cooling coil 50 is located in the middle of the accommodating cavity 10, and a plurality of anode plates 5 and a plurality of cathode plates 6 are symmetrically arranged on both sides of the cooling coil 50.

[0054] In some embodiments, two cathode gas collection chambers 8 or two adjacent anode gas collection chambers 7 adjacent to the cooling coil 50 partially overlap and communicate with each other to form a cross gas collection portion, and part of the cooling coil 50 is located in the cross gas collection portion. Specifically, the diameter D3 of the cross gas collection portion is 215 mm.

[0055] The design of partially overlapping and communicating two adjacent cathode gas collection chambers 8 or two adjacent anode gas collection chambers 7 to form a cross gas collection section can simplify the internal structure of the electrolytic cell. At the same time, compared with a single cathode gas collection chamber 8 or anode gas collection chamber 7, the cross gas collection section concentrates multiple gas flows, which usually generates more heat due to the increase in gas flow. By locating part of the cooling coil 50 in the cross gas collection section, the temperature of the cross gas collection section can be more effectively reduced.

[0056] In some embodiments, the outer surface of the cooling coil 50 is covered with a chloroprene rubber layer, which has good heat and corrosion resistance, thereby extending the safety and service life of the cooling coil 50. The effect of this application is further verified and explained in combination with specific experimental data.

[0057] The power consumption measurement data of the low power consumption nitrogen trifluoride electrolytic cell used in this application is shown in Table 1:

[0058]

[0059] Table 1 The quality measurement data of the products prepared by the low power consumption nitrogen trifluoride electrolytic cell of the present application are shown in Table 2:

[0060]

[0061]

[0062] Table 2

[0063] It should be noted that in Table 2, ppmv in the DID test items indicates the concentration of a certain compound or component detected in the gas phase, expressed in units of one millionth of a volume. ppbv indicates the concentration of a certain compound or component detected in the gas phase, expressed in units of one billionth of a volume. ND indicates that it was not detected or the test result was below the detection limit of the instrument.

[0064] It can be seen from the data in Table 1 and Table 2 that the low-power consumption nitrogen trifluoride electrolytic cell of the present application has a power consumption of approximately 25,000 degrees per ton for preparing nitrogen trifluoride, which has low power consumption and high energy efficiency. The purity of the prepared nitrogen trifluoride can reach 4.5N level, with high preparation efficiency and good quality.

[0065] Due to the application of the above technical solution, the beneficial effects of the present application compared with the prior art are:

[0066] The present application adopts an anode plate design with arc-shaped corners, which reduces the electric field concentration phenomenon, thereby reducing the occurrence of local discharge and invalid branch current. This design improvement helps to improve the electrical efficiency and energy utilization of the electrolytic cell and reduce energy loss.

[0067] At the same time, the spacing between the cathode plate and the anode plate, and the size parameters of the anode gas collection chamber and the cathode gas collection chamber are comprehensively considered and optimized. By precisely controlling the spacing between the anode plate and the cathode plate within the range of 135 to 145 mm, the efficiency and stability of the electric field distribution are balanced. While increasing the reaction rate, energy consumption and operational risks are minimized. By alternating the anode gas collection chamber and the cathode gas collection chamber, and setting the diameter D1 of the anode gas collection chamber to 130 to 140 mm, and the diameter D2 of the cathode gas collection chamber to 150 to 160 mm, the gas flow uniformity and collection efficiency are improved.

[0068] Finally, it should be noted that the above are only preferred embodiments of the present application and are not intended to limit the present application. Although the present application has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A low power consumption nitrogen trifluoride electrolytic cell, characterized in that: include: A tank body, used for containing electrolyte, comprising a containing cavity and a top opening; A sealing cover, used for closing the top opening; A skirt plate is arranged in the accommodating cavity, and is used to separate the accommodating cavity into an anode gas collecting cavity and a cathode gas collecting cavity which are arranged alternately, wherein the diameter D1 of the anode gas collecting cavity is 130 mm to 140 mm, and the diameter D2 of the cathode gas collecting cavity is 150 mm to 160 mm; A plurality of terminals, used for electrically connecting to the positive electrode of an external power source, the terminals being arranged on the sealing cover and arranged one-to-one with the anode gas collecting chamber; A plurality of anode plates are fixed one-to-one on the terminal posts through fixing members, and the corners of the anode plates are in an arc-shaped structure; A plurality of cathode plates are alternately arranged with a plurality of anode plates in the accommodating cavity. The cathode plates are electrically connected to the negative pole of the external power source and are arranged one-to-one with the cathode gas collecting cavity. The spacing L1 between the cathode plates and adjacent anode plates is 135 mm to 145 mm.

2. The low power consumption nitrogen trifluoride electrolytic cell according to claim 1, characterized in that: The anode plate comprises a reaction part and two mounting parts spaced apart at the top of the reaction part, the mounting parts are provided with mounting holes for mounting the fixing parts, and the mounting parts are located in the corresponding anode gas collecting chamber.

3. The low power consumption nitrogen trifluoride electrolytic cell according to claim 1, characterized in that: In the depth direction of the tank body, at least a portion of the orthographic projection of the first diffusion region of the anode gas generated on the anode plate falls within the orthographic projection corresponding to the anode gas collecting chamber; At least a portion of the orthographic projection of the second diffusion region of the cathode gas generated on the cathode plate falls within the orthographic projection of the corresponding cathode gas collecting cavity.

4. The low power consumption nitrogen trifluoride electrolytic cell according to claim 3, characterized in that: It also includes a cooling coil, which is arranged longitudinally in the accommodating cavity in an S shape.

5. The low power consumption nitrogen trifluoride electrolytic cell according to claim 4, characterized in that: The cooling coil is located in the middle of the accommodating cavity, and a plurality of anode plates and a plurality of cathode plates are symmetrically arranged on both sides of the cooling coil.

6. The low power consumption nitrogen trifluoride electrolytic cell according to claim 5, characterized in that: The two cathode gas collecting chambers adjacent to the cooling coil, or the two adjacent anode gas collecting chambers partially overlap and communicate with each other to form a cross gas collecting portion, and part of the cooling coil is located in the cross gas collecting portion.

7. The low power consumption nitrogen trifluoride electrolytic cell according to claim 6, characterized in that: The diameter D3 of the cross gas collecting portion is 215 mm.

8. The low power consumption nitrogen trifluoride electrolytic cell according to claim 4, characterized in that: The outer surface of the cooling coil is covered with a chloroprene rubber layer.

9. The low power consumption nitrogen trifluoride electrolytic cell according to claim 1, characterized in that: The diameter D1 of the anode gas collecting chamber is 135 mm, the diameter D2 of the cathode gas collecting chamber is 155 mm, and the spacing L1 between the cathode plate and the adjacent anode plate is 140 mm.

10. The low power consumption nitrogen trifluoride electrolytic cell according to claim 1, characterized in that: The electrolyte is composed of hydrogen fluoride and ammonia in a weight ratio of 2.7 to 3.0:1.

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