Deep hole electroplating mass transfer stirring rotary scraper device

Abstract

The utility model relates to a deep hole electroplating mass transfer stirring rotary scraper device in the technical field of electroplating mass transfer stirring, which comprises a vertical shaft, a transverse shaft and blades, and is characterized in that the bottom of the vertical shaft is fixedly connected with the transverse shaft, the two ends of the transverse shaft are respectively and fixedly connected with one blade, and the blades at the two ends of the transverse shaft are arranged in opposite directions. A thick-wall end and a thin-wall end are arranged at the two ends of the blade respectively, and a pit is formed in the middle of the blade. According to the utility model, the two-way function of extracting and pushing liquid medicine is designed by utilizing the Bernoulli's law, so that the mass transfer stirring effect of horizontal sliding is promoted, the action of extracting and pushing is realized through high-speed rotation, the full stirring is realized, the mass transfer effect in holes is improved, and the uniformity of electroplating height distribution is improved. The design of the scraper is helpful for liquid medicine to enter the deep hole, great help is provided for the deep hole electroplating process, the mass transfer effect and the electroplating uniformity can be improved, the equipment purchase cost can be saved, and the device can be widely applied to various wafer wet processes.

Description

Technical Field

[0001] The utility model relates to the technical field of electroplating mass transfer and stirring, in particular to a deep hole electroplating mass transfer and stirring rotary scraper device. Background Art

[0002] In the wafer bumping electroplating process, whether it is a horizontal (CUP) or vertical (DIP) device, precise control of the flow field is crucial to achieving high-quality mass transfer effects. Mass transfer methods are mainly divided into two types: vertical spray and horizontal swipe. Traditionally, vertical spray is the mainstream mass transfer method, but with the development of technology, a new mass transfer method using a scraper for horizontal swipe has shown its advantages.

[0003] The core of electroplating quality lies in mass transfer efficiency, and the key to mass transfer lies in how to effectively reduce the thickness of the diffusion layer, the so-called resistance bottleneck. The thickness of the diffusion layer directly affects the efficiency of charge transfer. According to research, when the wafer is stationary, the thickness of the boundary diffusion layer is about 500 microns without stirring. However, once the wafer starts to rotate at a speed of 10 to 150 revolutions per minute (RPM), the thickness of the boundary diffusion layer can be reduced to 50 to 70 microns even without other stirring methods. If further combined with 6 to 10 Hz scraper stirring, the thickness of the diffusion layer can be further reduced to 10 to 15 microns. Therefore, how to use the Bernoulli principle in fluid mechanics to design a scraper with both liquid extraction and push-in bidirectional functions to promote the effect of horizontal stroke mass transfer stirring is very effective. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a deep hole electroplating mass transfer stirring rotary scraper device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a deep hole electroplating mass transfer stirring rotary scraper device, comprising a vertical axis, a horizontal axis and a blade, the bottom of the vertical axis is fixedly connected to the horizontal axis, a blade is fixedly connected to each of the two ends of the horizontal axis, the blades at both ends of the horizontal axis are arranged in reverse, the two ends of the blade are respectively provided with a thick wall end and a thin wall end, and a depression is provided in the middle of the blade.

[0006] As a further description of the above technical solution:

[0007] The thickest part of the blade is 2-3 mm.

[0008] As a further description of the above technical solution:

[0009] The length of the blade is 75-135 mm, the distance between the blades is 30-150 mm, and the width of the blade is 20-60 mm.

[0010] As a further description of the above technical solution:

[0011] The distance between the farthest end point of the blade from another blade and the corresponding end point of the other blade is 298-302 mm.

[0012] As a further description of the above technical solution:

[0013] The angle of the thick-walled end is 30-60 degrees, and the angle of the thin-walled end is 25-40 degrees.

[0014] As a further description of the above technical solution:

[0015] The angle of the recess is 130-160 degrees.

[0016] As a further description of the above technical solution:

[0017] The blade is made of corrosion-resistant engineering plastic material.

[0018] The utility model has the following beneficial effects:

[0019] 1. The scraper device of the utility model utilizes Bernoulli's principle in fluid mechanics and is designed with a bidirectional function that can both draw out and push in the liquid, thereby promoting the mass transfer stirring effect of horizontal paddling. The high-speed rotation realizes the action of drawing and pushing, which can fully stir, significantly improve the mass transfer effect in the hole, and improve the uniformity of the electroplating height distribution.

[0020] 2. The scraper design of the utility model helps the solution to enter deep holes, which is of great help for deep hole electroplating processes such as column bumps. Compared with the expensive horizontal sliding electroplating machines on the market, the utility model can not only greatly improve the mass transfer effect and electroplating uniformity, but also save a lot of equipment procurement costs.

[0021] 3. The scraper device of the utility model can be widely used in various wafer wet processes, such as electroplating and etching. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a structural schematic diagram of a deep-hole electroplating mass transfer stirring rotary scraper device proposed by the utility model;

[0023] Figure 2 It is a side view of a deep hole electroplating mass transfer stirring rotary scraper device proposed by the utility model;

[0024] Figure 3 for Figure 1 Front view of the A side.

[0025] Figure 4 for Figure 1Front view of the B side.

[0026] Legend:

[0027] 1. Vertical axis; 2. Horizontal axis; 3. Blade; 31. Thick-walled end; 32. Thin-walled end; 33. Depression. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] Reference Figures 1 to 4 The utility model provides an embodiment of a deep-hole electroplating mass transfer stirring rotary scraper device, which consists of a vertical axis 1, a horizontal axis 2 and a blade 3. The bottom of the vertical axis 1 is fixedly connected to the horizontal axis 2, and a blade 3 is fixedly connected to each of the two ends of the horizontal axis 2. The blade 3 is arranged in reverse at both ends of the horizontal axis 2 to achieve an efficient stirring effect. The two ends of each blade 3 are respectively designed with a thick-walled end 31 and a thin-walled end 32, and a recess 33 is provided in the middle of the blade 3 to optimize the fluid dynamics performance.

[0030] The design of blade 3 is carefully calculated to ensure its best performance during the electroplating process. The thickest part of blade 3 is 2-3mm, which ensures the strength and durability of blade 3. The length of blade 3 ranges from 75-135mm and the width is between 20-60mm. Such size design enables blade 3 to effectively stir in the electroplating tank. The distance between blades 3 is precisely controlled at 30-150mm to ensure uniform mass transfer effect throughout the electroplating process.

[0031] In particular, the distance between the farthest end point of the blade 3 from another blade 3 and the corresponding end point of another blade 3 is 298-302 mm.

[0032] The thick wall end 31 of the blade 3 is designed to have an angle of 30-60 degrees, the thin wall end 32 is designed to have an angle of 25 to 40 degrees, and the recess 33 is designed to have an angle of 130-160 degrees.

[0033] These precise angles are set to maximize fluid dynamics and thus improve mixing efficiency.

[0034] All blades 3 are made of corrosion-resistant engineering plastic material, which not only ensures the durability of the device, but also ensures stability and reliability during long-term use.

[0035] Working principle:

[0036] The working principle of this scraper device is based on Bernoulli's principle in fluid mechanics, which reveals the inverse relationship between flow rate and pressure. Specifically, areas with faster flow rates have lower pressures, while areas with slower flow rates have higher pressures. When there is a difference in flow rate, a pressure difference is generated, which in turn creates an attractive force between areas with different flow rates.

[0037] The design of the blade 3 of the device cleverly utilizes this principle. The blade 3 is divided into the A side and the B side, and the two sides are configured in opposite directions. When the blade 3 on the A side slides toward the wafer, the pressure decreases due to the increase in flow rate, thereby generating an attraction force to draw out the liquid in the photoresist window hole. On the contrary, when the blade 3 on the B side slides toward the wafer, the flow rate slows down, resulting in an increase in pressure, thereby generating an attraction force to push in.

[0038] Through this design, the blade 3 repeatedly performs a pulling and pushing action during high-speed rotation, thereby achieving sufficient stirring of the liquid medicine. This stirring method not only promotes the mass transfer stirring effect of horizontal sliding, but also significantly improves the mass transfer effect in the hole, thereby improving the uniformity of the electroplating solution and the quality of the electroplating layer.

[0039] In addition, the bidirectional function design of this device allows the solution to penetrate deep into deep holes, which is particularly important for deep hole electroplating processes such as pillar bumps. This design not only improves the performance of the electroplating process, but also provides a more cost-effective solution compared to traditional horizontal sliding electroplaters, achieving significant performance improvements without adding additional equipment costs.

[0040] Different from the prior art:

[0041] The scraper device of the utility model has a two-way function of both drawing out and pushing in the liquid medicine, thereby promoting the mass transfer stirring effect of horizontal stroking, realizing the action of drawing and pushing by high-speed rotation, which can fully stir, significantly improve the mass transfer effect in the hole, and improve the uniformity of the electroplating height distribution;

[0042] The design of the scraper helps the solution enter the deep hole, which is of great help to the deep hole electroplating process such as pillar bumps. Compared with the expensive horizontal sliding electroplating machine on the market, the utility model can not only greatly improve the mass transfer effect and electroplating uniformity, but also save a lot of equipment procurement costs;

[0043] The scraper device of the utility model can be widely used in various wafer wet processes, such as electroplating and etching and other application fields.

[0044] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A deep hole electroplating mass transfer stirring rotary scraper device, comprising a vertical axis (1), a horizontal axis (2) and a blade (3), characterized in that: The bottom of the vertical axis (1) is fixedly connected to the horizontal axis (2), and a blade (3) is fixedly connected to each of the two ends of the horizontal axis (2). The blades (3) at the two ends of the horizontal axis (2) are arranged in opposite directions, and the two ends of the blade (3) are respectively provided with a thick-walled end (31) and a thin-walled end (32), and a recess (33) is provided in the middle of the blade (3).

2. A deep hole electroplating mass transfer stirring rotary scraper device according to claim 1, characterized in that: The thickest part of the blade (3) is 2-3 mm.

3. A deep hole electroplating mass transfer stirring rotary scraper device according to claim 2, characterized in that: The length of the blade (3) is 75-135 mm, the distance between the blades (3) is 30-150 mm, and the width of the blade (3) is 20-60 mm.

4. A deep hole electroplating mass transfer stirring rotary scraper device according to claim 3, characterized in that: The distance between the farthest end point of the blade (3) from the other blade (3) and the corresponding end point of the other blade (3) is 298-302 mm.

5. A deep hole electroplating mass transfer stirring rotary scraper device according to claim 4, characterized in that: The angle of the thick-walled end (31) is 30-60 degrees, and the angle of the thin-walled end (32) is 25-40 degrees.

6. A deep hole electroplating mass transfer stirring rotary scraper device according to claim 5, characterized in that: The angle of the recess (33) is 130-160 degrees.

7. A deep hole electroplating mass transfer stirring rotary scraper device according to claim 6, characterized in that: The blade (3) is made of corrosion-resistant engineering plastic material.

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