Adsorption structure of automatic regeneration device of low-temperature pump

Abstract

According to the adsorption structure of the automatic regeneration device of the low-temperature pump, air is rapidly compressed for refrigeration through the refrigerating machine, radiated heat is reflected through the second adsorption assembly, temperature rise is prevented, and the first adsorption assembly pumps out water vapor and impurities in the air; the temperature sensor is arranged to monitor the temperature of the adsorption assembly in real time, and when the low-temperature pump is not used, gas in the vacuum cavity is diluted through the nitrogen introduction seat to recover normal atmospheric pressure, so that regeneration of the low-temperature pump is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of cryogenic pumps, and more specifically to an adsorption structure of an automatic regeneration device for a cryogenic pump. Background Art

[0002] Cryopumps are vacuum pumps that exhaust gas by capturing gas molecules in a cryogenic plate cooled to ultra-low temperatures through condensation or adsorption. They are often used to achieve clean vacuum environments required by semiconductor circuit manufacturing processes. Cryopumps can obtain clean vacuums with the highest pumping rate and the lowest ultimate pressure. They are widely used in the research and production of semiconductors and integrated circuits, as well as molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, and space simulation devices.

[0003] The prior art closest to the present application, the invention patent with the announcement number CN 118407897 A, discloses a composite cryopump with a high ultimate vacuum degree, including: a refrigerator, a cryopump shell, a refrigeration unit, a first adsorption unit and a second adsorption unit, the cryopump shell is provided with an inner cavity, the cryopump shell is connected to the refrigerator, the refrigerator is provided with a refrigeration unit extending into the inner cavity, the first adsorption unit is connected to the refrigeration unit, the first adsorption unit can adsorb the gas condensed by the refrigeration unit, and the second adsorption unit is connected to the cryopump shell and can adsorb the active gas in the inner cavity. When the present invention is in use, the inner cavity is connected to the external container, the refrigerator is started, the refrigerator quickly cools and evacuates the air in the inner cavity and the container through the refrigeration unit, the first adsorption unit adsorbs, condenses and captures the gas, the second adsorption unit is started, and the second adsorption unit gradually adsorbs the residual non-condensable gas in the vacuum cavity after being started, so that the cryopump can continue to improve the vacuum degree in the inner cavity and the container.

[0004] The current cryopump needs to be regenerated after it has been saturated with a large amount of water molecules and other gases. During the regeneration process, the amount of water molecules condensed and captured is too large to be completely removed by conventional regeneration methods, which affects the regeneration time and reduces production efficiency. The first adsorption unit and the second adsorption unit are integral, which is not conducive to disassembly and replacement. The connection method between the baffle and the baffle is unclear. From the attached drawing, it can be judged that the baffle passes through the middle of the baffle, which is not conducive to installation. Utility Model Content

[0005] In view of this, in order to solve the above problems, the utility model proposes an adsorption structure of an automatic regeneration device for a cryopump, in which the air is quickly compressed by a refrigerator 1 for refrigeration, the radiated heat is reflected by the second adsorption component 25 to prevent the temperature from rising, and the first adsorption component 24 removes water vapor and impurities in the gas; a temperature sensor 3 is provided to monitor the temperature of the adsorption component in real time, and when not in use, the gas in the vacuum chamber is diluted by a nitrogen inlet seat 4 to restore it to normal atmospheric pressure, thereby realizing the regeneration of the cryopump 2.

[0006] An adsorption structure of a cryopump automatic regeneration device, comprising a cryopump 2 and a refrigerator 1, wherein one side of the cryopump 2 is connected to the refrigerator 1, the cryopump 2 comprises an outer shell 21, an inner cover 22, and an inner cavity 23, an interlayer is left between the outer shell 21 and the inner cover 22, the inner cavity 23 is surrounded by the inner cover 22, the inner cover 22 opens upward, the upper part of the inner cover 22 is connected to the cavity to be evacuated, and is characterized in that a first adsorption component 24 and a second adsorption component 25 are provided inside the cryopump 2, one end of the first adsorption component 24 is connected to the refrigerator 1 The second adsorption component 25 is detachably connected to the inner circle of the top of the inner cavity 23, and the second adsorption component 25 does not contact the first adsorption component 24. The first adsorption component 24 includes a plurality of condensation plates 241 evenly spaced up and down, and the second adsorption component 25 includes a plurality of baffles evenly spaced laterally. The outer wall surface of the baffle is smooth and is used to reflect the heat radiated from the upper cavity to the inner wall of the inner cavity 23 or the outer wall of the condensation plate 241 to prevent the temperature from rising, and at the same time block the metal particles generated during sputtering coating, so that no particulate impurities enter the inner cavity 23.

[0007] In some embodiments, the baffle is in the shape of a ring-shaped topless umbrella to facilitate guiding the airflow downward. Multiple baffles are arranged in concentric circles. The baffles are clamped with multiple second connecting plates 253. The multiple second connecting plates 253 are symmetrically arranged with the center of the baffle as the center, and each of the second connecting plates 253 is clamped with all the baffles.

[0008] In some embodiments, the baffle includes an inner baffle 251 and an outer baffle 252, the inner baffle 251 is clamped with a section of the second connecting plate 253 close to the center of the circle, and the outer baffle 252 is clamped with a section of the second connecting plate 253 away from the center of the circle. The second connecting plate 253 is provided with a slot for inserting the baffle into the slot, and the arc of the slot is the same as the inclination angle of the baffle.

[0009] Furthermore, the inner ring baffle 251 is provided with a bending plate downwardly at the same level as the lower end of the outer ring baffle 252 , so as to guide the airflow downwardly to pass into the first adsorption assembly 24 .

[0010] In some embodiments, the condensation plate 241 is in the shape of an annular umbrella without a top, and the lower edge and upper edge of the upper and lower adjacent condensation plates 241 overlap in space, so that the airflow guidance is good and the internal cold air is not easy to overflow. A circle of annular folded edges 242 are provided inward on the upper edge of the condensation plate 241, and a first connecting plate 243 is provided between adjacent condensation plates 241. The upper and lower adjacent condensation plates 241 are connected by connecting the annular folded edges 242 to the connecting plate, which is convenient for disassembly and replacement.

[0011] In some embodiments, an activated carbon adsorption layer is disposed on the inner wall of the condensation plate 241 and the inner cavity 23 to adsorb impurities, dust, and moisture in the inner cavity 23, so as to achieve a cooling effect quickly.

[0012] In some embodiments, one end of the second connecting plate 253 close to the inner wall of the inner cover 22 is sleeved with the adapter 254, and is connected to the inner wall of the inner cover 22 through the adapter 254. The adapter 254 is arranged corresponding to the second connecting plate 253, and different numbers of second connecting plates 253, adapters 254 and baffles are arranged according to the size of the pump.

[0013] Furthermore, the condensation plate 241 and the baffle have the same inclination angle, which is 50-60°.

[0014] Furthermore, the intervals between adjacent condensation plates 241 and adjacent baffles are the same, both of which are 15-20 mm.

[0015] Furthermore, the temperature of the condensation plate 241 is 15K, and the temperature of the baffle is 80K.

[0016] In some embodiments, a temperature sensor 3 is provided outside the refrigerator 1, and the sensing ends of the temperature sensor 3 are respectively connected to the first adsorption component 24 and the second adsorption component 25 for respectively sensing whether the set temperature is reached on the first adsorption component 24 and the second adsorption component 25.

[0017] In some embodiments, a nitrogen inlet seat 4 is further provided outside the refrigerator 1 , and external nitrogen is connected through the nitrogen inlet seat 4 to fill into the cryopump 2 to restore the cryopump 2 to normal atmospheric pressure.

[0018] The working principle of the utility model is as follows: a compressor is connected to the outside of the refrigerator, and the gaseous helium is compressed by the compressor. After entering the refrigerator, the gaseous helium expands, so that it can absorb external heat, cool down the low-temperature pump cavity and evacuate it, which is mainly used to condense water vapor. The radiated temperature is reflected by the second adsorption component to prevent the temperature from rising. The first adsorption component removes water vapor and impurities in the gas, so that after the pressure reaches 40Pa, the pressure-maintaining state is maintained for 5 minutes and the inner cavity pressure is always maintained below 65Pa. This is normal, indicating that the cryogenic pump is not leaking. If it is above 65Pa, it is leaking and needs to be pumped out again for inspection; after the pressure is maintained, the temperature is continued to be reduced and the vacuum is drawn, which is mainly used to condense the gas with high vapor pressure of the saturated vapor body. The second adsorption component and the first adsorption component condense and adsorb again, so that the pressure reaches below 10Pa and the temperature is below 20K, and the vacuuming time is 1.5-2h.

[0019] Beneficial effects of the utility model: The utility model proposes an adsorption structure of an automatic regeneration device for a cryopump, which rapidly compresses air for cooling through a refrigerator 1, reflects the radiated temperature through a second adsorption component 25 to prevent the temperature from rising, and removes water vapor and impurities from the gas through a first adsorption component 24; a temperature sensor 3 is provided to monitor the temperature of the adsorption component in real time, and when not in use, the gas in the vacuum chamber is diluted through a nitrogen inlet seat 4 to restore the normal atmospheric pressure, thereby realizing the regeneration of the cryopump 2. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is an overall structural diagram of the adsorption structure of the cryopump automatic regeneration device of the utility model.

[0021] Figure 2 The cross-sectional structure of the adsorption structure of the cryopump automatic regeneration device of the utility model Figure 1 .

[0022] Figure 3 The cross-sectional structure of the adsorption structure of the cryopump automatic regeneration device of the utility model Figure 1 .

[0023] Figure 4 The cross-sectional structure of the adsorption structure of the cryopump automatic regeneration device of the utility model Figure 2 .

[0024] Main component symbols

[0025] Refrigerator 1, cryogenic pump 2, outer shell 21, inner cover 22, inner cavity 23, first adsorption assembly 24, condensation plate 241, annular folding edge 242, first connecting plate 243, second adsorption assembly 25, inner ring baffle 251, outer ring baffle 252, second connecting plate 253, adapter 254, temperature sensor 3, nitrogen inlet seat 4.

[0026] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0027] like Figure 1 As shown, it is the overall structure diagram of the adsorption structure of the cryopump automatic regeneration device of the utility model; Figure 2 The figure shows the cross-sectional structure of the adsorption structure of the cryopump automatic regeneration device of the utility model. Figure 1 ;like Figure 3 The figure shows the cross-sectional structure of the adsorption structure of the cryopump automatic regeneration device of the utility model. Figure 1 ;like Figure 4 The figure shows the cross-sectional structure of the adsorption structure of the cryopump automatic regeneration device of the utility model. Figure 2 . Embodiment 1:

[0028] A cryopump automatic regeneration device adsorption structure, comprising a cryopump 2 and a refrigerator 1, wherein one side of the cryopump 2 is connected to the refrigerator 1, the cryopump 2 comprises an outer shell 21, an inner cover 22, and an inner cavity 23, an interlayer is left between the outer shell 21 and the inner cover 22, the inner cavity 23 is surrounded by the inner cover 22, the inner cover 22 opens upward, the upper part of the inner cover 22 is connected to the cavity to be evacuated, a first adsorption component 24 and a second adsorption component 25 are arranged inside the cryopump 2, one end of the first adsorption component 24 is connected to the refrigerator 1, and the inner cover 22 is connected to the inner cavity 23. The second adsorption component 25 is detachably connected to the inner circle of the top of the inner cavity 23, and the second adsorption component 25 does not contact the first adsorption component 24. The first adsorption component 24 includes a plurality of condensation plates 241 evenly spaced up and down, and the second adsorption component 25 includes a plurality of baffles evenly spaced laterally. The outer wall surface of the baffle is smooth and is used to reflect the heat radiated from the upper cavity to the inner wall of the inner cavity 23 or the outer wall of the condensation plate 241 to prevent the temperature from rising, and at the same time block the metal particles generated during sputtering coating, so that no particulate impurities enter the inner cavity 23.

[0029] The baffle is in the shape of a ring-shaped umbrella without a top, which is convenient for guiding the airflow downward. Multiple baffles are arranged in concentric circles. The baffles are clamped with multiple second connecting plates 253. The multiple second connecting plates 253 are symmetrically arranged with the center of the baffle as the center, and each of the second connecting plates 253 is clamped with all the baffles.

[0030] The baffle plate includes an inner ring baffle plate 251 and an outer ring baffle plate 252. The inner ring baffle plate 251 is clamped with a section of the second connecting plate 253 close to the center of the circle, and the outer ring baffle plate 252 is clamped with a section of the second connecting plate 253 away from the center of the circle. A slot is provided on the second connecting plate 253 for inserting the baffle into the slot. The arc of the slot is the same as the inclination angle of the baffle. The inner ring baffle plate 251 is provided with a bending plate downwardly at the same level as the lower end of the outer ring baffle plate 252, for guiding the airflow downward into the first adsorption component 24.

[0031] The condensation plate 241 is in the shape of an annular umbrella without a top, and the lower edge and upper edge of the upper and lower adjacent condensation plates 241 overlap in space, so that the airflow guidance is good and the internal cold air is not easy to overflow. A circle of annular folded edges 242 are provided inwardly on the upper edge of the condensation plate 241, and a first connecting plate 243 is provided between adjacent condensation plates 241. The upper and lower adjacent condensation plates 241 are connected by connecting the annular folded edges 242 to the connecting plate, which is convenient for disassembly and replacement.

[0032] An activated carbon adsorption layer is disposed on the inner wall of the condensation plate 241 and in the inner cavity 23 to adsorb impurities, dust, and moisture in the inner cavity 23, so as to achieve a cooling effect quickly.

[0033] One end of the second connecting plate 253 close to the inner wall of the inner cover 22 is sleeved with the adapter 254, and is connected to the inner wall of the inner cover 22 through the adapter 254. The adapter 254 is arranged corresponding to the second connecting plate 253. Different numbers of second connecting plates 253, adapters 254 and baffles are arranged according to the size of the pump.

[0034] The inclination angles of the condensation plate 241 and the baffle are the same, both of which are 50-60°.

[0035] The intervals between adjacent condensation plates 241 and adjacent baffles are the same, both of which are 15-20 mm.

[0036] The temperature of the condensation plate 241 is 15K, and the temperature of the baffle is 80K.

[0037] A temperature sensor 3 is disposed outside the refrigerator 1 , and sensing ends of the temperature sensor 3 are connected to the first adsorption component 24 and the second adsorption component 25 , respectively, for sensing whether the first adsorption component 24 and the second adsorption component 25 have reached a set temperature.

[0038] A nitrogen inlet seat 4 is also provided outside the refrigerator 1 , and external nitrogen is connected through the nitrogen inlet seat 4 to fill the cryopump 2 to restore the cryopump 2 to normal atmospheric pressure.

[0039] Beneficial effects of the utility model: The utility model proposes an adsorption structure of an automatic regeneration device for a cryopump, which rapidly compresses air for cooling through a refrigerator 1, reflects the radiated temperature through a second adsorption component 25 to prevent the temperature from rising, and removes water vapor and impurities from the gas through a first adsorption component 24; a temperature sensor 3 is provided to monitor the temperature of the adsorption component in real time, and when not in use, the gas in the vacuum chamber is diluted through a nitrogen inlet seat 4 to restore the normal atmospheric pressure, thereby realizing the regeneration of the cryopump 2.

[0040] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. An adsorption structure of a cryopump automatic regeneration device, comprising a cryopump (2) and a refrigerator (1), wherein one side of the cryopump (2) is connected to the refrigerator (1), the cryopump (2) comprises an outer shell (21), an inner cover (22), and an inner cavity (23), an interlayer is left between the outer shell (21) and the inner cover (22), the inner cavity (23) is surrounded by the inner cover (22), the inner cover (22) opens upward, and the upper part of the inner cover (22) is connected to a cavity to be evacuated, characterized in that: The cryopump (2) is provided with a first adsorption component (24) and a second adsorption component (25) inside, one end of the first adsorption component (24) is connected to the refrigerator (1), the second adsorption component (25) is detachably connected to the inner circle of the top of the inner cavity (23), and the second adsorption component (25) does not contact the first adsorption component (24), the first adsorption component (24) includes a plurality of condensation plates (241) evenly spaced up and down, the second adsorption component (25) includes a plurality of baffles evenly spaced laterally, the outer wall surface of the baffle is smooth, and is used to reflect the heat radiated from the upper cavity to the inner wall of the inner cavity (23) or the outer wall of the condensation plate (241), and at the same time block the metal particles generated during sputtering coating.

2. The adsorption structure of the cryopump automatic regeneration device according to claim 1, characterized in that: The baffle is in the shape of an annular umbrella without a top, which is convenient for guiding the airflow downwards. The multiple baffles are arranged in concentric circles. The baffles are clamped with multiple second connecting plates (253). The multiple second connecting plates (253) are symmetrically arranged with the center of the baffle as the center. Each second connecting plate (253) is clamped with all the baffles.

3. The adsorption structure of the cryopump automatic regeneration device according to claim 2, characterized in that: The baffle plate comprises an inner ring baffle plate (251) and an outer ring baffle plate (252); the inner ring baffle plate (251) is clamped with a section of the second connecting plate (253) close to the center of the circle, and the outer ring baffle plate (252) is clamped with a section of the second connecting plate (253) away from the center of the circle; a slot is provided on the second connecting plate (253) for inserting the baffle plate into the slot; the arc of the slot is the same as the inclination angle of the baffle plate.

4. The adsorption structure of the cryopump automatic regeneration device according to claim 3, characterized in that: The inner ring baffle (251) is provided with a bent plate downwardly at a position flush with the lower end of the outer ring baffle (252).

5. The adsorption structure of the cryopump automatic regeneration device according to claim 1, characterized in that: The condensation plate (241) is in the shape of an annular umbrella without a top, and the lower edge and upper edge of the upper and lower adjacent condensation plates (241) overlap in space. The upper edge of the condensation plate (241) is provided with a circle of annular folded edges (242) inwardly, and a first connecting plate (243) is provided between adjacent condensation plates (241). The upper and lower adjacent condensation plates (241) are connected to the connecting plate through the annular folded edges (242).

6. The adsorption structure of the cryopump automatic regeneration device according to claim 1, characterized in that: An activated carbon adsorption layer is provided on the inner wall of the condensation plate (241) and in the inner cavity (23).

7. The adsorption structure of the cryopump automatic regeneration device according to claim 2, characterized in that: One end of the second connecting plate (253) close to the inner wall of the inner cover (22) is sleeved with the adapter (254), and is connected to the inner wall of the inner cover (22) via the adapter (254). The adapter (254) and the second connecting plate (253) are arranged correspondingly. Different numbers of second connecting plates (253), adapters (254) and baffles are arranged according to the size of the pump.

8. The adsorption structure of the cryopump automatic regeneration device according to claim 1, characterized in that: A temperature sensor (3) is provided outside the refrigerator (1), and sensing ends of the temperature sensor (3) are respectively connected to the first adsorption component (24) and the second adsorption component (25).

9. The adsorption structure of the cryopump automatic regeneration device according to claim 1, characterized in that: The refrigerator (1) is also provided with a nitrogen inlet seat (4) outside, through which external nitrogen is connected to fill the cryopump (2) to restore the cryopump (2) to normal atmospheric pressure.

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