Suction nozzle and defect detection device

Abstract

The utility model relates to a suction nozzle and a defect detection device, and the suction nozzle comprises a suction rod which is provided with a first end and a second end which are oppositely arranged, and the suction rod is provided with a first negative pressure channel; the suction head is arranged at the second end of the suction rod, the suction head is provided with a first accommodating cavity, one side, deviating from the suction rod, of the suction head is provided with a contact surface for adsorbing the to-be-detected piece, the suction head is provided with a second negative pressure channel, one end of the second negative pressure channel is communicated with the first negative pressure channel, the other end of the second negative pressure channel extends to the contact surface, and a gap is formed between the other end of the second negative pressure channel and the contact surface; the background plate is arranged in the first containing cavity of the suction head, and the background plate and the end, close to the contact face, of the second negative pressure channel are arranged in a staggered mode. Defect detection and assembly of the infrared cut-off filter can be realized at the same time, the reject ratio of the photosensitive chip assembly is greatly reduced, and the imaging quality of a product is improved.

Description

Technical Field

[0001] The present application relates to the technical field of detection devices, and in particular to a suction nozzle and a defect detection device. Background Art

[0002] Infrared cut filter, also known as infrared filter or heat absorption filter (IR-Cut Filter, IRCF), is a filter used to filter infrared band. IRCF can eliminate the influence of infrared light on imaging by cutting off the near-infrared light region, and is an essential component of high-performance camera modules.

[0003] During the module assembly process, the filter (IR-Cut Filter, IRCF) needs to be assembled onto the photosensitive chip assembly using a suction nozzle and a defect detection device. The current suction nozzle and defect detection device are not capable of detecting minute defects. When a defective IRCF is assembled onto the photosensitive chip assembly, it will cause poor imaging of the entire module, which may result in the scrapping of a single product or even customer complaints. Utility Model Content

[0004] The present application provides a suction nozzle and a defect detection device to solve the technical problem that the existing suction nozzle cannot detect surface defects when installing a filter, which easily leads to poor imaging of the photosensitive chip component.

[0005] In the first aspect, an embodiment of the present application provides a suction nozzle, comprising: a suction rod, having a first end and a second end arranged opposite to each other, the suction rod being provided with a first negative pressure channel; a suction head, arranged at the second end of the suction rod, the suction head being provided with a first accommodating cavity, a side of the suction head facing away from the suction rod being provided with a contact surface for adsorbing the part to be detected, the suction head being provided with a second negative pressure channel, one end of the second negative pressure channel being connected to the first negative pressure channel, and the other end extending toward the contact surface and having a gap between the second negative pressure channel and the contact surface; and a background plate, arranged in the first accommodating cavity of the suction head, the background plate and an end of the second negative pressure channel close to the contact surface being staggered.

[0006] In a possible implementation, the second negative pressure channel includes a main channel and a side channel connected to each other, an end of the main channel away from the side channel is connected to the first negative pressure channel, and an end of the side channel away from the main channel bends and extends toward the contact surface.

[0007] In a possible implementation, a plurality of side channels are provided, the plurality of side channels are distributed in a ring shape with the main channel as the center, and the plurality of side channels are provided around the background board.

[0008] In a possible implementation, the suction head is provided with a first groove on a side wall of the first accommodating chamber, and the first groove is communicated with an end of the second negative pressure channel close to the contact surface.

[0009] In a possible implementation manner, the minimum distance between the background plate and the contact surface is greater than the minimum distance between the first groove and the contact surface.

[0010] In a possible implementation, a connecting plate is provided at the second end of the suction rod, a second groove is provided on the connecting plate, and a connecting shaft embedded in the second groove is provided on a side of the suction head close to the suction rod.

[0011] In a possible implementation manner, a third groove is provided on a side of the connecting plate facing the connecting shaft, and a first protrusion connected to the third groove is provided on the connecting shaft.

[0012] In a possible implementation, a second protrusion is provided on one side of the connection plate facing the suction head, a fourth groove communicating with the second negative pressure channel is provided on one side of the suction head facing the connection plate, and the second protrusion is embedded in the fourth groove.

[0013] In a possible implementation, a side of the background plate facing away from the suction rod is set to be a black surface.

[0014] In a second aspect, a defect detection device includes: a suction nozzle as described above, used to suck the part to be detected; a light source, the light source is directed toward the contact surface of the suction nozzle, and is used to provide detection light to the part to be detected; a prism, configured to be able to reflect the detection light passing through the part to be detected; and a camera, used to detect the reflected light of the part to be detected; wherein the prism is arranged between the light source and the camera.

[0015] The above technical solution provided by the embodiment of the present application has the following advantages compared with the prior art:

[0016] A suction nozzle and defect detection device provided by the embodiment of the present application, when it is necessary to adsorb the part to be detected, the part to be detected can be adsorbed on the contact surface by the suction force provided by the suction head. Before detecting surface defects, a light source (when the part to be detected is IRCF, the light source is preferably a red light source), a prism and a camera are sequentially arranged on the side of the part to be detected away from the suction head, and the red light source emits red light to form a detection light. The detection light passes through the part to be detected and is reflected by the part to be detected to form a first reflected light. The first reflected light is reflected by the prism to form a second reflected light, so that the camera can capture the second reflected light. If there are defects such as particles and scratches on the surface of the infrared cutoff filter (IR-Cut Filter, IRCF), the defect contour will be mapped to the background plate, showing a strong gray value, and then captured and detected by the camera. The background plate and the second negative pressure channel are staggered at one end close to the contact surface, which can prevent the background plate from affecting the adsorption performance of the suction nozzle, and at the same time, it can prevent the second negative pressure channel from blocking the IRCF, so that the defect contour of the IRCF can be completely mapped on the background plate, improving the comprehensiveness and accuracy of defect detection. Applying this nozzle to perform defect detection before assembly can significantly reduce the defect rate of photosensitive chip components and improve the imaging quality of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0019] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0020] Figure 1 A schematic diagram of the structure of the nozzle provided in the embodiment of the present application;

[0021] Figure 2 for Figure 1 A top view of the nozzle is shown;

[0022] Figure 3 For along Figure 1 Sectional view in the AA direction;

[0023] Figure 4 for Figure 1 A three-dimensional view of the suction head of the suction nozzle is shown Figure 1 ;

[0024] Figure 5 for Figure 4 A cross-sectional view of the suction tip is shown;

[0025] Figure 6 for Figure 1 A three-dimensional view of the suction head of the suction nozzle is shown Figure 2 ;

[0026] Figure 7 for Figure 1 A cross-sectional view of the suction rod of the suction nozzle shown;

[0027] Figure 8 This is a three-dimensional diagram of a defect detection device provided in an embodiment of the present application, wherein the suction nozzle is in working state and the dotted line shows the light transmission path.

[0028] Description of reference numerals:

[0029] 1. Suction nozzle; 11. Suction rod; 111. First end; 112. Second end; 113. First negative pressure channel; 114. Connecting plate; 1141. Second groove; 1142. Third groove; 1143. Second convex block; 12. Suction head; 121. First accommodating cavity; 122. Contact surface; 123. Second negative pressure channel; 1231. Main channel; 1232. Side channel; 124. First groove; 125. Connecting shaft; 1251. First convex block; 126. Fourth groove; 13. Background plate;

[0030] 2. Defect detection device; 21. Light source; 22. Prism; 23. Camera;

[0031] 3. Parts to be tested. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0033] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or letters in different examples. This repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0034] For ease of description, spatial relative terms may be used herein to describe the relative positional relationship or movement of one element or feature relative to another element or feature as shown in the figure, such as "inside", "outside", "inner side", "outer side", "below", "below", "above", "above", "front", "back", etc. Such spatial relative terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figure. For example, if the device in the figure undergoes a position flip or a posture change or a motion state change, then these directional indications also change accordingly, for example: an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented as "above other elements or features" or "above other elements or features". Therefore, the example term "below..." may include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions) and the spatial relative descriptors used herein are interpreted accordingly.

[0035] In order to solve the technical problem that the existing suction nozzle cannot detect surface defects when installing the filter, which easily leads to poor imaging of the photosensitive chip component, the present application provides a suction nozzle and a defect detection device, which can simultaneously realize defect detection and assembly of the infrared cutoff filter, thereby greatly reducing the defect rate of the photosensitive chip component and improving the imaging quality of the product.

[0036] Figures 1 to 3 A suction nozzle 1 provided in an embodiment of the present application includes a suction rod 11, a suction head 12 and a background plate 13, the suction rod 11 having a first end 111 and a second end 112 arranged opposite to each other, and the suction rod 11 is provided with a first negative pressure channel 113; the suction head 12 is arranged at the second end 112 of the suction rod 11, and the suction head 12 is provided with a first accommodating cavity 121, and a contact surface 122 for adsorbing a part to be detected 3 is arranged on the side of the suction head 12 away from the suction rod 11, and the suction head 12 is provided with a second negative pressure channel 123, one end of the second negative pressure channel 123 is connected to the first negative pressure channel 113, and the other end extends toward the contact surface 122; and the background plate 13 is arranged in the first accommodating cavity 121 of the suction head 12, and the background plate 13 and one end of the second negative pressure channel 123 close to the contact surface 122 are staggered.

[0037] It should be noted that the first end 111 of the suction rod 11 can be connected to an external negative pressure device, and the external negative pressure device can adopt a negative pressure device in the prior art (such as a negative pressure vacuum pump, etc.), and the second negative pressure channel 123 runs through the first end 111 and the second end 112 of the suction rod 11. It can be understood that when the negative pressure device is working, a vacuum negative pressure is formed between the first negative pressure channel 113 and the second negative pressure channel 123, and a relatively closed vacuum operation path is formed between the suction rod 11 and the suction head 12 to provide suction to the part to be detected 3. When it is necessary to adsorb the part to be detected 3, the suction provided by the suction head 12 can adsorb the part to be detected 3 onto the contact surface 122. Before detecting surface defects, such as Figure 8 As shown, a light source 21 (when the part to be detected 3 is IRCF, the light source 21 preferably uses a red light source 21), a prism 22 and a camera 23 are sequentially arranged on the side of the part to be detected 3 away from the suction head 12. The red light source 21 emits red light to form a detection light. The detection light passes through the part to be detected 3 and is reflected by the part to be detected 3 to form a first reflected light. The first reflected light is reflected by the prism 22 to form a second reflected light, so that the camera 23 can capture the second reflected light. If there are defects such as particles and scratches on the surface of the infrared cutoff filter (IR-Cut Filter, IRCF), the defect contour will be mapped to the background plate 13, showing a strong gray value, and then captured and detected by the camera 23. The background plate 13 and the end of the second negative pressure channel 123 close to the contact surface 122 are staggered to prevent the background plate 13 from affecting the adsorption performance of the suction nozzle 1, and at the same time, it can prevent the second negative pressure channel 123 from blocking the IRCF, so that the defect contour of the IRCF can be completely mapped on the background plate 13, thereby improving the comprehensiveness and accuracy of defect detection.

[0038] It should be emphasized that the first end 111 of the suction rod 11 can also be provided with a multi-axis mechanical arm, which can adjust the displacement, horizontal height and angle of the suction rod 11 relative to the photosensitive chip assembly on the horizontal plane, so as to achieve accurate installation of the to-be-detected component 3. The suction rod 11 can be set to a cylindrical shape or a square cylindrical shape, which is not specifically limited here. Applying the suction nozzle 1 for defect detection and then assembly can greatly reduce the defect rate of the photosensitive chip assembly and improve the imaging quality of the product.

[0039] For ease of explanation and understanding, the first horizontal direction may be the X-axis shown in the figure, the second horizontal direction may be the Y-axis shown in the figure, and the vertical direction may be the Z-axis shown in the figure.

[0040] In some embodiments, Figure 4 and Figure 5As shown, the second negative pressure channel 123 includes a main channel 1231 and a side channel 1232 connected to each other, the end of the main channel 1231 away from the side channel 1232 is connected to the first negative pressure channel 113, and the end of the side channel 1232 away from the main channel 1231 is bent and extended toward the contact surface 122. Specifically, the main channel 1231 can be arranged along the axial direction of the suction rod 11, and the main channel 1231 can be configured to define the central axis of the suction head 12; the end of the side channel 1232 away from the main channel 1231 is bent and extended toward the contact surface 122, so that the end of the side channel 1232 away from the main channel 1231 avoids the background plate 13. The bending and extension can be specifically arranged as follows: one end of the side channel 1232 away from the main channel 1231 can first extend in the horizontal direction and then extend in the vertical direction, so that the side channel 1232 is "L" shaped; or one end of the side channel 1232 away from the main channel 1231 can extend obliquely toward the contact surface 122, so that the side channel 1232 is arc-shaped, which is not limited here.

[0041] There are multiple side channels 1232, which are distributed in a ring shape with the main channel 1231 as the center, and are arranged around the background plate 13. By setting up multiple side channels 1232, when the external negative pressure device vacuums the suction nozzle 1, the air flows into the main channel 1231 along the multiple side channels 1232 in sequence, and then flows to the external negative pressure device through the first negative pressure channel 113, so that a vacuum operation path is formed between the first negative pressure channel 113 and the second negative pressure channel 123, providing a stable suction force to the to-be-detected part 3. Setting up multiple side channels 1232 can enhance the suction force of the suction nozzle 1 on the to-be-detected part 3.

[0042] In some embodiments, the suction head 12 is provided with a first groove 124 on the side wall of the first accommodating cavity 121, and the first groove 124 is connected to one end of the second negative pressure channel 123 close to the contact surface 122. Optionally, the first groove 124 can be set to an arc, square, trapezoidal or other shapes, which are not limited here. In order to facilitate processing (adapting to the shape of the milling cutter of the machining center), it is preferred to set the first groove 124 to an arc. Correspondingly, the first groove 124 can also be provided with a plurality of side channels 1232 one by one, and the first groove 124 has a first length in the first horizontal direction or the second horizontal direction, and the side channel 1232 has a second length in the first horizontal direction or the second horizontal direction, and the first length is greater than the second length. By providing the first groove 124, the adsorption performance of the suction nozzle 1 can be improved, and the stability of the suction head 12 in adsorbing the detected part 3 can be improved.

[0043] The minimum distance between the background plate 13 and the contact surface 122 is greater than the minimum distance between the first groove 124 and the contact surface 122 , that is, the background plate 13 will not cover the first groove 124 in the vertical direction, thereby preventing the background plate 13 from affecting the vacuum degree of the suction nozzle 1 .

[0044] In some embodiments, Figure 6 and Figure 7 As shown, the second end 112 of the suction rod 11 is provided with a connecting plate 114, and a second groove 1141 is provided on the connecting plate 114. A connecting shaft 125 embedded in the second groove 1141 is provided on the side of the suction head 12 close to the suction rod 11. Through the snap connection between the connecting shaft 125 and the second groove 1141, the suction head 12 can be conveniently embedded and installed on the suction rod 11. The shape of the second groove 1141 can be set to a square, a circle, an ellipse, etc., which is not limited here.

[0045] A third groove 1142 is provided on one side of the connecting plate 114 facing the connecting shaft 125, and a first protrusion 1251 connected to the third groove 1142 is provided on the connecting shaft 125. The rotation angle and orientation of the suction nozzle 1 are positioned by the snap connection between the third groove 1142 and the first protrusion 1251. Preferably, the third groove 1142 can be set to an ellipse.

[0046] A second protrusion 1143 is provided on one side of the connecting plate 114 facing the suction head 12, and a fourth groove 126 communicating with the second negative pressure channel 123 is provided on one side of the suction head 12 facing the connecting plate 114, and the second protrusion 1143 is embedded in the fourth groove 126. A plurality of second protrusions 1143 may be provided, and the plurality of second protrusions 1143 are distributed in a ring shape with the second groove 1141 as the center. Through the cooperation between the second protrusion 1143 and the fourth groove 126, the positioning accuracy of the suction head 12 can be further improved, and the connection tightness and sealing of the suction nozzle 1 can be improved.

[0047] The side of the background plate 13 facing away from the suction rod 11 is set to a black surface, specifically a black glossy surface. Setting it as a black glossy surface is conducive to the camera 23 capturing the surface defects of the IRCF, thereby improving the detection accuracy.

[0048] In order to illustrate the performance of the present nozzle 1, we tested the vacuum adsorption capacity of the present nozzle 1. The test results show that under the same conditions, after adsorbing the test piece 3, the vacuum degree of the present nozzle 1 is basically the same as that of other nozzles 1 in the industry, indicating that the vacuum adsorption capacity of the present nozzle 1 meets the standard. In addition, the recognition repeatability and assembly stability of the present nozzle 1 were tested. The test results show that the plane displacement fluctuation value of the IRCF adsorbed by the present nozzle 1 is within 0.005mm, and the angle fluctuation value is within 0.02°; after assembling the IRCF onto the photosensitive chip component, the assembly accuracy is within ±10μm, and the angle is within ±0.3°, meeting the high-precision assembly requirements. In addition, the detection capability of the present nozzle 1 was tested. The test results show that the present nozzle 1 can detect particles with a particle size of 7μm or more, with high detection accuracy.

[0049] like Figure 8 As shown, the embodiment of the present application also provides a defect detection device 2, including a light source 21, a prism 22, a camera 23 and the suction nozzle 1 as described above, the suction nozzle 1 is used to adsorb the part to be detected 3; the light source 21 is arranged on the side of the contact surface 122 of the suction nozzle 1 away from the suction head 12, and is used to provide detection light to the part to be detected 3; the prism 22 is configured to be able to reflect the detection light passing through the part to be detected 3; the camera 23 is used to detect the reflected light of the part to be detected 3; wherein the prism 22 is arranged between the light source 21 and the camera 23.

[0050] The embodiment of the defect detection device 2 includes all the technical solutions of all the embodiments of the above-mentioned suction nozzle 1, and its working principle and the technical effects achieved are exactly the same, which will not be repeated here.

[0051] It should be emphasized that the suction nozzle 1 provided in the embodiment of the present application has no specific size limitation and no specific shape limitation. Those skilled in the art may enlarge or reduce the size proportionally according to the specific needs of use, or may not enlarge or reduce one or several components proportionally; and may also make appropriate changes to the shape of one or several components on the premise of complying with the principle. The suction nozzle 1 provided in the embodiment of the present application is not limited to the detection and installation fields of IRCF, but can also be used in the assembly of other products that require vacuum adsorption, such as electronic and electrical production, automobile manufacturing, product packaging and other industries, which will not be elaborated.

[0052] It should be understood that the terms used herein are only for the purpose of describing specific example embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms "one", "an" and "said" as used herein may also be meant to include plural forms. The terms "include", "comprise", "contain", and "have" are inclusive, and therefore specify the existence of stated features, steps, operations, elements and / or parts, but do not exclude the existence or addition of one or more other features, steps, operations, elements, parts, and / or combinations thereof. The method steps, processes, and operations described herein are not interpreted as necessarily requiring them to be performed in the specific order described or illustrated, unless the execution order is clearly indicated. It should also be understood that additional or alternative steps may be used.

[0053] Although the terms first, second, third, etc. can be used in the text to describe multiple elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can only be used to distinguish an element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates, terms such as "first", "second" and other numerical terms do not imply order or sequence when used in the text. Therefore, the first element, component, region, layer or section discussed below can be referred to as the second element, component, region, layer or section without departing from the teaching of the example embodiments.

[0054] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. A nozzle, characterized in that: include: A suction rod (11) having a first end (111) and a second end (112) arranged opposite to each other, wherein the suction rod (11) is provided with a first negative pressure channel (113); A suction head (12) arranged at the second end (112) of the suction rod (11), the suction head (12) being provided with a first accommodating cavity (121), a side of the suction head (12) facing away from the suction rod (11) being provided with a contact surface (122) for adsorbing the to-be-detected component (3), the suction head (12) being provided with a second negative pressure channel (123), one end of the second negative pressure channel (123) being in communication with the first negative pressure channel (113), and the other end extending toward the contact surface (122); and The background plate (13) is arranged in the first accommodating cavity (121) of the suction head (12), and the background plate (13) and an end of the second negative pressure channel (123) close to the contact surface (122) are staggered.

2. The nozzle according to claim 1, characterized in that: The second negative pressure channel (123) comprises a main channel (1231) and a side channel (1232) which are connected to each other; an end of the main channel (1231) away from the side channel (1232) is connected to the first negative pressure channel (113); an end of the side channel (1232) away from the main channel (1231) is bent and extends toward the contact surface (122).

3. The nozzle according to claim 2, characterized in that: A plurality of the side channels (1232) are provided, and the plurality of the side channels (1232) are distributed in a ring shape with the main channel (1231) as the center, and the plurality of the side channels (1232) are provided around the four sides of the background plate (13).

4. The nozzle according to claim 1, characterized in that: The suction head (12) is provided with a first groove (124) on the side wall of the first accommodating cavity (121), and the first groove (124) is connected to an end of the second negative pressure channel (123) close to the contact surface (122).

5. The nozzle according to claim 4, characterized in that: The minimum distance between the background plate (13) and the contact surface (122) is greater than the minimum distance between the first groove (124) and the contact surface (122).

6. The nozzle according to claim 1, characterized in that: The second end (112) of the suction rod (11) is provided with a connecting plate (114), and a second groove (1141) is provided on the connecting plate (114); and a connecting shaft (125) embedded in the second groove (1141) is provided on a side of the suction head (12) close to the suction rod (11).

7. The nozzle according to claim 6, characterized in that: A third groove (1142) is provided on one side of the connecting plate (114) facing the connecting shaft (125), and a first protrusion (1251) connected to the third groove (1142) is provided on the connecting shaft (125).

8. The nozzle according to claim 6, characterized in that: A second protrusion (1143) is provided on one side of the connecting plate (114) facing the suction head (12), and a fourth groove (126) communicating with the second negative pressure channel (123) is provided on one side of the suction head (12) facing the connecting plate (114), and the second protrusion (1143) is embedded in the fourth groove (126).

9. The nozzle according to any one of claims 1 to 8, characterized in that: The side of the background plate (13) facing away from the suction rod (11) is set as a black surface.

10. A defect detection device, characterized in that: include: The suction nozzle (1) according to any one of claims 1 to 9, used for sucking the part to be detected (3); A light source (21) is arranged on a side of the contact surface (122) of the suction nozzle (1) facing away from the suction head (12), and is used to provide detection light to the object to be detected (3); a prism (22) configured to reflect the detection light passing through the to-be-detected part (3); and A camera (23) for detecting reflected light from the object to be detected (3); Wherein, the prism (22) is arranged between the light source (21) and the camera (23).

Images