Electric arc furnace capable of heating step by step

Abstract

The utility model relates to the technical field of metallurgical machinery, and discloses an electric arc furnace capable of heating step by step. The electric arc furnace capable of conducting stepped heating comprises a device assembly, a stepped heating assembly is connected and installed in the device assembly, a connecting rod is installed at the upper end of the stepped heating assembly, a graphite electrode is installed at the upper end of the connecting rod, a heating net is installed at the outer end of the graphite electrode, and an auxiliary heating ring is installed at the lower end of the heating net. The device comprises a device assembly, an exhaust forming assembly is installed at the lower end of the device assembly, a Roots vacuum unit is installed at the upper end of the exhaust forming assembly, an exhaust pipe is installed at the upper end of the Roots vacuum unit, and a forming area is installed at the front end of the exhaust pipe. When a traditional electric arc furnace melts raw materials of a guide cylinder, internal heating is not uniform, and the highest use temperature of the follow-up quartz guide cylinder is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of metallurgical machinery, in particular to an electric arc furnace capable of step-heating. Background Art

[0002] With the rapid development of electronic information technology, people's demand for electronic products has gradually increased, and the requirements are getting higher and higher, which has also driven the rapid development of the semiconductor industry. In the semiconductor industry, the purity of single crystal silicon is one of the most important factors affecting the quality of semiconductor products, and it is also one of the most important factors in measuring silicon ingots, and the preparation of single crystal silicon ingots at the front end is the top priority. Quartz guide tubes are one of the most front-end auxiliary products for the production of single crystal silicon ingots, and their product quality is also the most concerned issue for researchers. An electric arc furnace is required during the melting process of quartz guide tubes.

[0003] The existing referenceable Chinese utility model patent with announcement number: CN116592645A discloses an arc furnace cover and an arc furnace. The arc furnace cover is mainly used to isolate the metal smelting arc furnace from the external environment, including a cover body and an isolation layer arranged on the inner surface of the cover body. Water inlets, water outlets and cooling pipes connected to the water inlets and outlets are arranged on both sides of the cover body, and the cooling pipes are arranged in an S shape or a ring shape to achieve the effect of rapid cooling of the furnace cover; at least one feed port is provided on the side of the cover body, and the feed port is square or round in shape, so that slag can be added to the arc furnace at any time during the smelting process; at least 3 electrode rod installation positions are provided in the middle position of the cover body, and the electrode rod installation positions are arranged in a triangular shape, which is convenient for fixing the electrode rod and uniform temperature field in the smelting furnace; the isolation layer is made of silicate material, which isolates the cover body from the furnace, and solves the problem that the mud slag blocks formed by the water vapor formed above the furnace and the ash layer raised in the furnace fall into the furnace and destroy the smelting environment in the furnace.

[0004] Based on the search of the above patents and combined with the equipment in the prior art, it is found that in order to adapt to market demand and meet customers' various performance indicators of quartz guide tubes, the research intends to carry out research and development of high-temperature resistant and antioxidant guide tubes, and develop high-temperature resistant and antioxidant guide tube control technology. An electric arc furnace is required in the melting process of quartz guide tubes. The traditional electric arc furnace has uneven internal heating when melting the guide tube raw materials, which leads to a decrease in the subsequent maximum operating temperature of the quartz guide tube, affecting the subsequent use. The existence of these problems affects the use of the device. Utility Model Content

[0005] 1. Technical issues to be solved

[0006] In view of the shortcomings of the prior art, the utility model provides an electric arc furnace with step-heating, which can effectively prevent the need to use an electric arc furnace in the melting process of a quartz guide tube. The traditional electric arc furnace is unevenly heated when melting the guide tube raw material, resulting in a lower maximum operating temperature of the subsequent quartz guide tube.

[0007] Technical Solution

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an electric arc furnace capable of step-by-step heating, comprising a device assembly, wherein the internal connection of the device assembly is equipped with a graded heating assembly which is convenient for heating the guide tube raw material in a graded and uniform manner, and for subsequently melting the guide tube; the lower end of the device assembly is connected with an exhaust molding assembly which is convenient for pouring the molten guide tube raw material into the interior of a metal mold for molding, and for subsequently discharging the guide tube.

[0009] A connecting rod is installed at the upper end of the graded heating assembly, and a graphite electrode is installed at the upper end of the connecting rod, a heating net is installed at the outer end of the graphite electrode, and an auxiliary heating ring is installed at the lower end of the heating net, and the area surrounded by the auxiliary heating ring forms a forming area, which is convenient for forming a stepped heating area inside the furnace body later;

[0010] A Roots vacuum unit is installed at the upper end of the exhaust molding component, and an exhaust pipe is installed at the upper end of the Roots vacuum unit. A molding area is installed at the front end of the exhaust pipe. A rotating structure is installed inside the molding area, and a metal mold is installed at the upper end of the rotating structure. The size and height of the metal mold are produced according to needs, and the metal mold is convenient for subsequent molding and discharge of the guide tube.

[0011] As the preferred technical solution of the utility model, a furnace body is installed at the upper end of the device assembly, and a structural plate is installed inside the furnace body, a slag outlet is installed on the left side of the upper end of the furnace body, a furnace top is installed on the upper end of the furnace body, and a mounting plate is installed on the upper end of the furnace top, and the slag outlet is installed on the left side of the upper end of the furnace body to facilitate the subsequent discharge of the slag after refining inside the furnace body.

[0012] As the preferred technical solution of the utility model, a support frame is installed on the upper end of the graded heating assembly, and a lifting rod is installed on the upper end of the support frame. The lifting rod is installed on the upper end of the support frame and is connected with the connecting rod through the lifting rod, so as to facilitate the subsequent lifting and lowering of the graphite electrode.

[0013] As a preferred technical solution of the utility model, a discharge port is installed at the upper end of the exhaust forming assembly, and the discharge port is installed on the upper right side of the furnace body to facilitate the subsequent removal of the formed guide tube.

[0014] As a preferred technical solution of the utility model, the graded heating component is installed inside the furnace body in the device component, and the exhaust forming component is installed at the lower end of the furnace body in the device component.

[0015] As a preferred technical solution of the utility model, a valve is installed at the upper end of the structural plate, a feeding port is installed at the upper end of the slag outlet, and a connecting hole is installed at the upper end of the mounting plate.

[0016] As a preferred technical solution of the utility model, the support frame is installed at the rear end of the furnace body, the graphite electrode is inserted and connected to the mounting plate and the furnace top, and the heating net and the auxiliary heating ring are installed inside the furnace body.

[0017] As a preferred technical solution of the utility model, the diameter of the exhaust pipe is designed to be 50-60 mm, the molding area is installed at the lower end of the furnace body, and the metal mold is a disassembly structure.

[0018] Compared with the prior art, the utility model provides an electric arc furnace capable of step-by-step heating, which has the following advantages:

[0019] Beneficial effects:

[0020] 1. The utility model is designed to use the electricity of the electric arc furnace to provide energy for the graphite electrode by setting a graded heating component, so that a stepped heating area is formed in the mold of the electric arc furnace. The heating mechanism includes three graphite electrodes, a heating net and an auxiliary heating ring. The graphite electrodes, the heating net and the auxiliary heating ring are powered independently, so that from top to bottom in the mold, the area above the heating net forms a preheating area, the area covered by the heating net forms a melting area, and the area surrounded by the auxiliary heating ring forms a molding area. The length of the positioning rod tip of the molding rod is determined according to the material layer thickness of the quartz sand material required at the bottom, so that the length of the positioning rod tip passing downward through the rod body is adapted to the material layer thickness.

[0021] 2. The utility model sets the exhaust molding component, combines the exhaust molding component with the graded heating component, designs the speed of the metal mold to be 55-85 revolutions per minute, and the exhaust rate of the Roots vacuum unit is 30-38m 3 / min, the diameter of the Roots vacuum unit exhaust pipe is designed to be 50-60mm, the exhaust hole spacing of the metal mold is adjusted to 22-24mm, and the temperature of the melting zone is controlled to be 1700-2550℃ by adjusting the output power of the graphite electrode and the heating net. The temperature of the molding zone is controlled to be 1700-2550℃ by adjusting the output power of the auxiliary heating ring. The temperature control of the molding zone can be adjusted according to the temperature of the melting zone to ensure that it is lower than the temperature of the melting zone to achieve effective cooling and molding, so that the temperature of the preheating zone is 1200-1850℃, the temperature of the melting zone is 1700-2550℃, and the temperature of the molding zone is 1650-2250℃. The quartz sand is fully melted in the heating area, and after the gas is discharged, it is formed by the former and output from the furnace mouth. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1It is a schematic diagram of the overall structure of the utility model;

[0023] Figure 2 This is a schematic diagram of the structural device components of the utility model;

[0024] Figure 3 This is a schematic diagram of the structural hierarchical heating assembly of the utility model;

[0025] Figure 4 This is a schematic diagram of the exhaust molding component of the utility model structure.

[0026] Among them: 1. Device assembly; 101. Furnace body; 102. Structural plate; 103. Slag outlet; 104. Furnace top; 105. Mounting plate; 2. Gradual heating assembly; 201. Support frame; 202. Lifting rod; 203. Connecting rod; 204. Graphite electrode; 205. Heating net; 206. Auxiliary heating ring; 3. Exhaust molding assembly; 301. Roots vacuum unit; 302. Exhaust pipe; 303. Molding area; 304. Rotating structure; 305. Metal mold; 306. Discharge outlet. DETAILED DESCRIPTION

[0027] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0028] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] See also Figure 1 - Figure 4In this embodiment, an electric arc furnace capable of step-heating includes: a device component 1, a graded heating component 2 is connected and installed inside the device component 1, a connecting rod 203 is installed at the upper end of the graded heating component 2, and a graphite electrode 204 is installed at the upper end of the connecting rod 203, a heating net 205 is installed at the outer end of the graphite electrode 204, and an auxiliary heating ring 206 is installed at the lower end of the heating net 205, an exhaust molding component 3 is installed at the lower end of the device component 1, a Roots vacuum unit 301 is installed at the upper end of the exhaust molding component 3, and an exhaust pipe 302 is installed at the upper end of the Roots vacuum unit 301, a molding area 303 is installed at the front end of the exhaust pipe 302, a rotating structure 304 is installed inside the molding area 303, and a metal mold 305 is installed at the upper end of the rotating structure 304, the graded heating component 2 is installed inside the furnace body 101 in the device component 1, and the exhaust molding component 3 is installed at the lower end of the furnace body 101 in the device component 1.

[0031] Through the above structure; the device component 1 installs the structure at the upper end, which is convenient for the subsequent melting of the guide tube raw material. The graded heating component 2 is convenient for graded and uniform heating of the guide tube raw material, which is convenient for the subsequent melting of the guide tube. The guide tube raw material inside the furnace body 101 is melted through the internal graphite electrode 204, the heating net 205 and the auxiliary heating ring 206. The exhaust molding component 3 is convenient for pouring the melted guide tube raw material into the inside of the metal mold 305 for molding, which is convenient for the subsequent discharge of the guide tube. The exhaust pipe 302 is connected to the internal Roots vacuum unit 301 for use, which is convenient for the subsequent discharge of the gas inside the molding area 303.

[0032] See also Figure 1 - Figure 4 A furnace body 101 is installed at the upper end of the device component 1, and a structural plate 102 is installed inside the furnace body 101, a slag outlet 103 is installed on the left side of the upper end of the furnace body 101, a furnace top 104 is installed at the upper end of the furnace body 101, and a mounting plate 105 is installed at the upper end of the furnace top 104, a valve is installed at the upper end of the structural plate 102, a feeding port is installed at the upper end of the slag outlet 103, and a connecting hole is installed at the upper end of the mounting plate 105.

[0033] Through the above structure: the internal structure is installed and connected by installing the furnace body 101, and it is convenient to melt the guide tube raw material later. The structural plate 102 is installed inside the furnace body 101, and a valve is installed on the upper end of the structural plate 102, which is convenient for conveying the melted raw material at the upper end to the forming area 303 for use later. The slag outlet 103 is installed on the left side of the upper end of the furnace body 101, which is convenient for discharging the slag after refining inside the furnace body 101 later. The furnace top 104 is installed at the upper end of the furnace body 101. Through the installation of the furnace top 104 and the mounting plate 105, it is convenient for the subsequent graphite electrode 204 to be inserted and connected to the interior of the furnace body 101.

[0034] See also Figure 1 - Figure 4 A support frame 201 is installed at the upper end of the graded heating component 2, and a lifting rod 202 is installed at the upper end of the support frame 201. The support frame 201 is installed at the rear end of the furnace body 101. The graphite electrode 204 is inserted and connected to the mounting plate 105 and the furnace top 104. The heating net 205 and the auxiliary heating ring 206 are installed inside the furnace body 101.

[0035] Through the above structure: the upper lifting rod 202 is connected and installed by installing the support frame 201, and it is convenient to install the upper device to the upper end of the furnace body 101 for use later. The lifting rod 202 is installed at the upper end of the support frame 201, and is connected with the connecting rod 203 through the lifting rod 202, so that the graphite electrode 204 can be driven to lift and lower the height later. The graphite electrode 204 is inserted and installed inside the furnace body 101, so that the raw materials inside the furnace body 101 can be melted later, and it is convenient to determine the length of the positioning rod tip of the graphite electrode 204 according to the material layer thickness of the quartz sand material required at the bottom later. The heating net 205 is installed at the upper end of the furnace body 101, so that the area above the heating net 205 can be used as a preheating zone later. The auxiliary heating ring 206 is installed at the lower end of the heating net 205, and the area surrounded by the auxiliary heating ring 206 forms a molding zone, which is convenient for forming a stepped heating area inside the furnace body 101 later.

[0036] See also Figure 1 - Figure 4 The upper end of the exhaust molding component 3 is equipped with an exhaust port 306, the pipe diameter of the exhaust pipe 302 is designed to be 50-60 mm, the molding area 303 is installed at the lower end of the furnace body 101, and the metal mold 305 is a disassembly structure.

[0037] Through the above structure: the gas inside the furnace body 101 is extracted by installing the Roots vacuum unit 301, the exhaust pipe 302 is installed at the upper end of the Roots vacuum unit 301, and the gas inside the furnace body 101 is extracted by installing the exhaust pipe 302 at the upper end of the furnace body 101, and the molding area 303 is installed at the lower end of the furnace body 101, which is convenient for subsequent cooling and molding of the guide tube, and the rotating structure 304 is installed at the lower end of the molding area 303, which is convenient for the subsequent driving of the upper end metal mold 305 to rotate, the size and height of the metal mold 305 are produced according to needs, and the metal mold 305 is convenient for the subsequent molding and discharge of the guide tube, and the discharge port 306 is installed on the right side of the upper end of the furnace body 101, which is convenient for the subsequent removal of the molded guide tube.

[0038] When in use, first, the original interior of the electric arc furnace is changed, the electric arc furnace uses electricity to provide energy for the graphite electrode 204, so that a stepped heating area is formed in the mold of the electric arc furnace, and the heating mechanism includes three graphite electrodes 204, a heating net 205 and an auxiliary heating ring 206, and the graphite electrode 204, the heating net 205 and the auxiliary heating ring 206 are powered independently, so that from top to bottom in the mold, the area above the heating net 205 forms a preheating zone, and the temperature of the preheating zone is 1200-1850°C, the area covered by the heating net 205 forms a melting zone, and the temperature of the melting zone is 1700-2550°C, and the area surrounded by the auxiliary heating ring 206 forms a melting zone. The temperature of the molding zone is 1650-2250°C. The length of the positioning rod tip of the graphite electrode 204 is determined according to the thickness of the quartz sand material layer required at the bottom, so that the length of the tip of the graphite electrode 204 penetrating downward from the rod body is adapted to the thickness of the material layer. A lifting rod 202 is installed at the upper end, and the graphite electrode 204 is driven to move up and down by the lifting rod 202. A molding area 303 is set inside the furnace body 101, and a metal mold 305 is installed inside the molding area 303. The rotation speed of the metal mold 305 is 55-85 revolutions per minute. A Roots vacuum unit 301 is installed at the rear end of the furnace body 101, and the exhaust rate of the Roots vacuum unit 301 is 30-38m 3 / min, an exhaust pipe 302 is installed at the upper end of the Roots vacuum unit 301, and the diameter of the exhaust pipe 302 is designed to be 50-60mm. A metal mold 305 is installed inside the molding area 303. The quartz sand is fully melted through the upper end graphite electrode 204, the heating net 205 and the auxiliary heating ring 206, and the solution is transported to the inside of the metal mold 305 through the structural plate 102, and the molding area is cooled and molded.

[0039] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An electric arc furnace capable of stepwise heating, characterized in that: The invention comprises a device component (1), wherein a graded heating component (2) is connected and installed inside the device component (1), a connecting rod (203) is installed at the upper end of the graded heating component (2), and a graphite electrode (204) is installed at the upper end of the connecting rod (203), a heating net (205) is installed at the outer end of the graphite electrode (204), and an auxiliary heating ring (206) is installed at the lower end of the heating net (205), an exhaust molding component (3) is installed at the lower end of the device component (1), a Roots vacuum unit (301) is installed at the upper end of the exhaust molding component (3), and an exhaust pipe (302) is installed at the upper end of the Roots vacuum unit (301), a molding area (303) is installed at the front end of the exhaust pipe (302), a rotating structure (304) is installed inside the molding area (303), and a metal mold (305) is installed at the upper end of the rotating structure (304).

2. The step-heatable electric arc furnace according to claim 1, characterized in that: A furnace body (101) is installed at the upper end of the device assembly (1), and a structural plate (102) is installed inside the furnace body (101); a slag outlet (103) is installed on the left side of the upper end of the furnace body (101); a furnace top (104) is installed at the upper end of the furnace body (101), and a mounting plate (105) is installed at the upper end of the furnace top (104).

3. The step-heatable electric arc furnace according to claim 1, characterized in that: A support frame (201) is installed at the upper end of the graded heating component (2), and a lifting rod (202) is installed at the upper end of the support frame (201).

4. The step-heatable electric arc furnace according to claim 1, characterized in that: An exhaust port (306) is installed at the upper end of the exhaust molding component (3).

5. The step-heatable electric arc furnace according to claim 1, characterized in that: The graded heating component (2) is installed inside the furnace body (101) in the device component (1), and the exhaust shaping component (3) is installed at the lower end inside the furnace body (101) in the device component (1).

6. The step-heatable electric arc furnace according to claim 2, characterized in that: A valve is installed at the upper end of the structural plate (102), a feeding port is installed at the upper end of the slag outlet (103), and a connecting hole is installed at the upper end of the mounting plate (105).

7. The step-heatable electric arc furnace according to claim 3, characterized in that: The support frame (201) is installed at the rear end of the furnace body (101), the graphite electrode (204) is inserted and connected to the mounting plate (105) and the furnace top (104), and the heating net (205) and the auxiliary heating ring (206) are installed inside the furnace body (101).

8. The step-heatable electric arc furnace according to claim 4, characterized in that: The diameter of the exhaust pipe (302) is designed to be 50-60 mm, the molding area (303) is installed at the lower end of the furnace body (101), and the metal mold (305) is a disassembly structure.

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